KR101071639B1 - An automated system of sampling carrier - Google Patents

Abstract

The present invention relates to an automated system of a sampling carrier, the present invention provides a container body for storing the collected sample gas, an inlet port for introducing gas into the container body, and to discharge the gas in the container body to the outside. In the sampling carrier comprising a discharge port for opening, and a valve provided on the inlet port and the discharge port to open and close, the valve is an automatic valve that can be opened and closed through automatic control, the opening and closing time of the automatic valve inside the container body There is provided a controller that can be programmed to automatically control the change in pressure as a variable, provided with a power supply for supplying power to the controller, provided on the discharge port to detect the pressure change inside the container body controller Provides an automated system of sampling carriers with a pressure sensor that can provide signals to To have its features.

At this time, the inlet port and the discharge port is arranged in the same direction, the present invention is further provided with a sampling carrier further comprises a blowing pipe to guide the gas introduced into the inlet port into the interior of the container diffused ejection from the base of the container body Of course, it is applicable.

Sampling carrier, controller, automatic valve, automation, standardization, container body, cleaning work

Description

An automated system of sampling carrier

The present invention relates to an automated system for sampling carriers, and more specifically, by programming and automating the gas sampling and cleaning process through the sampling carriers, eliminating the difference in the degree of cleaning according to the user's skill level and standardizing the working process itself. Of course, the present invention relates to an automated system of sampling carriers that can eliminate inconveniences in use.

Generally, a process for manufacturing electronic devices such as semiconductors, liquid crystal panels, and solar cell panels requires various ultra high purity gases, and the ultra high purity gas used therein is limited to a very small amount of impurities.

Therefore, the ultra high purity gas is periodically inspected and analyzed for impurities to maintain purity, and the inspection of the ultra high purity gas is carried out by transporting the gas sample collected at the workplace to a separate inspection facility. The sampling carrier is used to carry it.

1 shows a sampling carrier according to the prior art.

As shown in FIG. 1, the conventional sampling carrier 10 includes a container body 11 having a cylinder shape to form a storage space, an inlet port 12 having one side of the container body 11, and the inlet port. And a pressure gauge 14 for indicating the internal pressure of the container body 11 and the discharge port 13 provided on the other side of the container 11.

The inflow port 12 and the discharge port 13 is a kind of pipe that communicates the inside of the container body 11 with the outside, and the inlet port 12 and the discharge port 13 open and close valves 121 and 131, respectively. Is provided.

As shown in the drawing, the pressure gauge 14 may be provided on the discharge port 13 or may be separately mounted to the container body 11.

According to this prior art, the inlet port 12 of the sampling carrier 10 is connected to a gas transfer line at a work site to collect a predetermined amount of sample gas, and the sampling carrier 10 in which the sample gas is collected is transported to an inspection facility. The inspection work will be performed.

Meanwhile, since the conventional sampling carrier 10 is repeatedly used for various kinds of ultra high purity gases, in order to maintain the reliability of the ultra high purity gas inspection, the residual gas and other impurities in the container body 11 before the inspection are maintained. The cleaning work to remove this will be a very important factor.

The cleaning operation is performed by injecting the cleaning gas through the inlet port 12 and simultaneously maintaining the discharge port 13 in an open state so that residual gas and impurities are mixed and discharged together with the cleaning gas. In the technology, since the inlet port 12 and the outlet port 13 are provided in directions corresponding to each other of the container body 11, the flow of the cleaning gas in the container body 11 is not diffused significantly, and the inlet port 12 Because it leads directly to the discharge port 13 side, the problem of the reliability and work efficiency of the cleaning operation is low.

That is, since the cleaning gas introduced through the inflow port 12 flows in one direction to the discharge port 13 side, the mixing phenomenon of the cleaning gas to sweep away the remaining gas is not strongly formed, and the inner surface of the container body 11 or the like. Since the impact of the cleaning gas on other impurities finely adhered to is also weak, there is a problem that it takes a long time for the cleaning operation to obtain a satisfactory level of cleaning reliability.

Accordingly, in order to improve the problems of the conventional sampling carrier 10 as described above, a new type of sampling carrier has been applied by the present applicant with the patent application No. 2008-135860 (Dec. 29, 2008).

That is, the patent application No. 2008-135860 describes a strong mixing of the cleaning gas and the remaining gas inside the container body during the cleaning operation, and minimizes the adhesion of impurities by the internal surface treatment of the collecting device. Characterized in that the efficiency is improved, it has a configuration as shown in Figs.

As shown in FIG. 2 and FIG. 3, the sampling carrier 20 filed by the present applicant is provided with a container main body 21 for storing the collected sample gas, and the container main body 21 is provided with a gas. 21, an inlet port 22 for introducing into the container, a discharge port 23 for discharging the gas in the container body 21 to the outside, disposed in the same direction as the inlet port 22, and the container body 21; Pressure gauge 24 for indicating the internal pressure of the) and the blowing pipe to guide the gas flowing through the inlet port 22 into the container body 21 to diffuse and eject from the base of the container body 21 (blowing pipe) 25 has a configuration including.

Here, the discharge port 23 is disposed in the container body 21 in the same direction as the inlet port 22, the opening and closing valves (221, 231) in each of the inlet port 22 and the discharge port 23, respectively. ) Is provided.

Therefore, the cleaning gas introduced into the container body 21 through the inlet port 22 is diffused and ejected by the blowing pipe 25 and hits the inner surface of the container body 21 while flowing back to the discharge port 23. At the same time, the mixture of the cleaning gas is effectively formed.

By the way, the sampling carrier 10 according to the prior art shown in FIG. 1 including the sampling carrier 20 filed by the present applicant has a gas cleaning and then undergoes a cleaning process using a cleaning gas. The valve is operated manually for the injection and discharge of gas.

For this reason, there was a difference in the degree of cleaning and inconvenience in use according to the skill level between users.

In particular, since the cleaning process is not standardized, such as the number of times of washing is arbitrarily determined by the user, there is a problem that the degree of cleaning varies depending on the user.

Thus, the present invention is to solve the problems caused by the manual operation as well as the cleaning operation of the conventional sampling carrier as described above, the object of the present invention is a gas sampling and cleaning process through the sampling carrier It is to provide an automated system of sampling carriers that eliminates the difference in the degree of cleaning according to the user's skill level, standardizes the work process itself, and eliminates inconvenience in use.

The present invention for achieving the above object, the container body for storing the collected sample gas, the inlet port provided in the container body for introducing gas into the container body, and provided in the container body in the container body In the sampling carrier comprising a discharge port for discharging the gas to the outside, and a valve provided on the inlet and outlet ports to open and close the inlet and outlet ports, the valve is an automatic valve that can be opened and closed through automatic control The controller is provided with a programming setting for automatically controlling the opening and closing time of the automatic valve by changing the internal pressure of the container body as a variable, and has a power supply unit for supplying power to the controller. The pressure sensor is provided in the pressure sensor that can detect a change in pressure inside the container body and provide a signal to the controller It is characterized by providing an automated system of the provided sampling carrier.

Here, the inlet port and the discharge port is disposed in the same direction, by further providing a blowing pipe (blowing pipe) to guide the gas flowing into the inlet port into the interior of the container body to be diffused and ejected from the base of the container body, The cleaning gas introduced into the container body through the inlet port is diffused and ejected by the blowing pipe, and flows back to the discharge port, hitting the inner surface of the container body, and at the same time, the mixing of the cleaning gas is effectively performed.

The pressure variable according to the pressure change inside the container body that determines the opening and closing time of the automatic valve set in the controller during the gas sampling process through the sampling carrier is preferably 0.2 bar / min.

In addition, the controller is programmed to repeatedly perform the injection and discharge of the cleaning gas into the container body at a predetermined number of times during the automatic cleaning of the sampling carrier, and is set in the controller according to the repetition of the injection and discharge of the cleaning gas. The pressure variable according to the pressure change inside the container body that determines the opening and closing time of the automatic valve is when the internal pressure of the container body reaches 80% when the cleaning gas is injected, and the internal pressure of the container body when the cleaning gas is discharged. It is preferable that when it reaches less than 3%.

In addition, it is preferable that the number of times the injection and discharge of the cleaning gas set in the controller is repeated eight times.

In particular, the inner surface of the container body, the inlet port, the outlet port, the blowing pipe, the automatic valve, and the pressure sensor, which are the components in contact with the remaining gas and foreign matter, are electropolished to have a centerline average roughness of 7 μm inch Ra among the surface roughnesses. .

According to the present invention, the controller is programmed to automate the gas sampling and cleaning process through the sampling carrier to automatically open and close the automatic valves provided at the inlet and outlet ports through automatic control using the pressure change in the container body as a variable in the controller. In addition, there is an advantage in that the work process itself can be standardized by eliminating the difference in the degree of cleaning according to the user's skill level.

In particular, since gas sampling and cleaning are performed through a sampling carrier equipped with an automated system according to the present invention, it is possible to solve the inconvenience in use relative to the sampling carrier that has been conventionally made by hand.

Hereinafter, specific details of the present invention will be described in detail with reference to the accompanying drawings.

4 is a view schematically showing a sampling carrier with an automation system according to the present invention.

As shown in FIG. 4, the sampling carrier 1 according to the present invention includes an electric signal type automatic valve 6 and 7, an electric signal type pressure sensor 8 and an automatic valve 6 and 7 and a pressure sensor 8. It is characterized by the fact that it has a controller 9 for programming and controlling it.

That is, the sampling carrier 1 according to the present invention improves the sampling carrier disclosed in the aforementioned 2008-135860 patent filed by the present applicant, and as in the prior art, a container body for storing the collected sample gas. (2), an inlet port (3) provided in the container body (2) for introducing gas into the container body (2), and provided in the container body (2) in the same direction as the inlet port (2) It is provided with a discharge port (4) for discharging the gas in the container body (2) to the outside in the disposed state, and guides the gas flowing through the inlet port (3) into the container body (2) inside the container body ( A blowing pipe 5 for diffusing and ejecting from the base of 2) is provided.

Here, the present invention is provided with a valve for opening and closing the inlet port (3) and the discharge port (4), the electric automatic valve (6, 7) on the inlet port (3) and the discharge port (4), respectively By arranging to implement the opening and closing according to the electrical signal.

The automatic valves 6 and 7 are valves that can be opened and closed through electrical signals, such as solenoid valves, and are automatic valves that are turned on and off in response to electrical signals. The description will be omitted.

At this time, the inner surface of the automatic valve (6,7) is preferably maintained in a very smooth state of the center line average roughness of the surface roughness (roughness, Roughness) of about 7㎛ inch Ra.

This is so that the impurities such as moisture adhere to the surface of the automatic valves 6 and 7 so as not to affect the inspection result of the gas sampling.

However, the automatic valve (6,7) is opened through a control signal programmed in the controller (9), the opening and closing conditions of the automatic valve according to the pressure state inside the container body detected by the pressure sensor Will be determined.

In this case, the controller 9 is a programmable logic controller (PLC) that controls whether the automatic valves 6 and 7 are opened or closed based on the pressure value sensed by the pressure sensor 8, and in the gas sampling process, the container body ( 2) It is set to determine whether the automatic valves 6 and 7 are opened or closed when the internal pressure change range is 0.2 bar / min, and the cleaning gas flows in and out repeatedly several times (preferred according to the present invention). In the case of the embodiment, when the cleaning gas is introduced in the set state to be repeated 8 times) and the pressure set in the container body 2 reaches about 80%, the automatic valve 6 of the inlet port 3 is closed. In addition, the automatic valve 7 of the discharge port 4 is set to open, and when the cleaning gas is discharged from the container body 2 and the set pressure inside the container body 2 reaches less than 3%, The automatic valve 6 of the inlet port 3 is opened and the outlet port ( It is set to close the automatic valve 7 of 4).

Here, the reason for setting the closing time of the automatic valve 6 of the inlet port 3 when the cleaning gas is injected into the container body 2 is when the pressure reaches about 80% of the internal pressure of the container body 2 is set. This is because safety against pressure is considered when the pressure inside the container body 2 is 80% or more.

In fact, even if the pressure inside the container body 2 of the sampling carrier 1 maintains the pressure value of 100% determined at the time of manufacture, the possibility of explosion by pressure is very low, but in practical use, the risk of explosion by pressure is maximized. This is because it is considered to be the most desirable to use at 80% level.

The closing pressure of the automatic valve 7 of the discharge port 4 in the process of discharging the cleaning gas from the container body 2 is set to less than 3% of the set pressure in the container body 2. When the pressure inside the container body 2 is less than 3% of the set pressure, since the cleaning gas discharge time is gradually delayed, it takes a long time. To maintain.

That is, in the process of injecting and discharging the cleaning gas before the final cleaning operation is completed, the cleaning gas is not completely discharged to 100%, and even if the cleaning gas is present in the container body 2 at a level of less than 3%, Since the influence on the cleaning efficiency is very small, the discharge port 4 when the set pressure of the inside of the container body 2 is less than 3% for repeated injection of the cleaning gas in consideration of the faster cleaning operation time is considered. Is to close the automatic valve (7).

In addition, as described above, in the automated cleaning operation according to the present invention, the cleaning operation is performed while the injection and discharge of the cleaning gas is repeated about eight times, which can be performed manually by a manual user. In this case, the number of washings is relatively standardized compared to the number of washings determined by a user's arbitrary choice. The reason for limiting the number of cleaning to eight times is a result of a state in which the washing efficiency required according to the regulations is excellent through many trials and errors. This is because the efficient use of the cleaning gas is considered at a level that can be obtained.

Since this is due to the standard condition of the sampling carrier 1 manufactured by the applicant, the number of repetitions of injection and discharge of the cleaning gas in the cleaning operation is limited to eight times, and the standard condition of the sampling carrier is different. In this case, the number of repetitions of the injection and discharge of the cleaning gas can be changed in the program.

The pressure sensor 8 senses by using a characteristic that the object is deformed or reacts to it when it is subjected to pressure, and the pressure sensor is many and variously disclosed. In this invention, the pressure sensor which converts the displacement by pressure into the electric quantity of 4-20 kV is used.

At this time, it is preferable that the inner surface of the pressure sensor 8 also maintains a very smooth state with a centerline average roughness of about 7 μm inch Ra among the surface roughness for the same reason as in the automatic valve.

On the other hand, the sampling carrier according to the present invention should be operated through a separate power supply rather than a manual operation of the user as the gas sampling and cleaning operation is automatically performed by the automation system.

Accordingly, it is obvious that a power supply unit (not shown) for supplying power must be provided in the controller 9.

In a preferred embodiment according to the present invention, the power supply is made by a battery supply method that is convenient to use regardless of the portable and surrounding conditions, but is not limited to this may be applied to a power cord method that can be connected to an external power source separately. Of course.

In particular, in the present invention, in addition to the pressure sensor and the automatic valve, the components that contact the remaining gas and foreign matter, that is, the inner surface of the container body 21 and the inlet port 22, the discharge port 23, the blowing pipe, etc. electrolytic polishing It is preferred to be treated.

That is, it is preferable that the inner surface of the container body 21 and the inlet port 22, the discharge port 23, the blowing pipe, etc., maintain a very smooth state of the centerline average roughness of the surface roughness of about 7 μm inch Ra.

Here, the electropolishing is a method of polishing the surface by using the anode dissolving phenomenon of the metal, and the surface of the metal product is fined by direct electrolysis in a polishing bath using the metal product to be polished as the anode and the insoluble metal electrode as the cathode. Polishing method to dissolve easily.

According to the electropolishing, a dense metal oxide film (floating state) is formed on the metal surface, and the corrosion resistance is improved due to the change of the composition of the main components (Cr, Ni, Fe components) of the metal surface, and the smooth metal surface is compared with the mechanical polishing. By forming, it is excellent in gloss and fine irregularities are not formed on the processed surface, thereby preventing the adsorption of fine impurities.

The gas sampling and cleaning operations of the sampling carrier 1 with the automation system according to the present invention will be briefly described as follows.

First, referring to a gas sampling process using the sampling carrier 1 according to the present invention, a sample gas pipe is connected to an inlet of the sampling carrier 1 to prepare a sample gas.

At this time, the automatic valve 6 of the inlet port 3 and the automatic valve 7 of the discharge port 4 are in a closed state.

In this state, when power is supplied through the power supply unit (not shown) in the controller 9, the PLC program according to the gas sampling process programmed in the controller is executed (on).

As a result, the automatic valve 6 of the inlet port 3 is opened, and the sample gas is introduced into the inlet port 3 from the sample gas pipe and injected into the container body 2.

As the sample gas is continuously injected into the container body 2 as described above, the pressure sensor 8 located in front of the automatic valve 7 of the discharge port 4 continuously changes the pressure inside the container body 2. When the pressure change range inside the container body 2 is 0.2 bar / min in the sensing state, the automatic valve 6 of the inlet port 3 is closed, thereby ending the gas sampling program of the controller 9. At the same time gas sampling is terminated.

On the other hand, looking at the cleaning operation process of the sampling carrier equipped with the automated system, first, the cleaning operation is a so-called injection step of injecting the cleaning gas into the container body (2), the cleaning gas injected into the container body (2), and remaining It consists of a discharge step of discharging gas and foreign matter.

The cleaning gas injection step may be performed in the container body 21 through the inlet port 22 in a state in which the on / off valve 221 of the inlet port 22 is opened and the on / off valve 231 of the outlet port 23 is blocked. Injecting the cleaning gas until the pressure reaches a certain level.

In the cleaning gas injection step, first, a cleaning gas supply pipe is connected to an inlet of the sampling carrier 1, not shown, to prepare the cleaning gas.

At this time, the automatic valve 6 of the inlet port 3 and the automatic valve 7 of the discharge port 4 are in a closed state.

In this state, when power is supplied through the power supply unit (not shown) in the controller 9, the PLC program according to the cleaning operation process programmed in the controller is executed (on).

Accordingly, the automatic valve 6 of the inlet port 3 is opened, and the cleaning gas is introduced into the inlet port 3 from the cleaning gas supply source and injected into the container body 2.

Thus, the cleaning gas injected through the inlet port (3) flows into the interior of the container body (2) by a predetermined period through the blowing pipe (5) and then ejected, the ejected cleaning gas is inside the container body (2) Strongly collides with the bottom surface of and then causes a great mixing, and flows in the reverse direction on the inner surface of the container body 2 according to the arrangement of the discharge port (4).

Therefore, the remaining gas and foreign matter accumulated in the inside of the container body 2 during the reverse flow of the cleaning gas are swept by the cleaning gas and are also resistant to the fine foreign matter adhering to the inner surface of the container body 2. The impact is applied to separate the adhered foreign matter from the inner surface of the container body (2).

As the cleaning gas is continuously injected into the container body 2 as described above, the container body 2 is formed by the pressure sensor 8 located in front of the automatic valve 7 of the discharge port 4 during the cleaning operation. When the pressure inside the container is continuously detected, and the pressure inside the container body 2 reaches 80% of the set pressure in this state, the automatic valve 6 of the inlet port 3 is closed and In addition, the automatic valve 7 of the discharge port 4 is opened.

When the automatic valve 7 of the discharge port 4 is opened in this way, the cleaning gas is discharged in a state in which the cleaning gas is mixed with the remaining gas and foreign substances in the container body, and the cleaning operation is performed. When the set pressure inside the container body 2 reaches less than 3% due to the discharge, the automatic valve 7 of the discharge port 4 closes and the automatic valve 6 of the inlet port 3 again. Is opened so that a new cleaning gas is injected into the container body.

As described above, the process of injecting and discharging the cleaning gas is repeated eight times to block the automatic valve 6 of the inflow port 3 and open the automatic valve 7 of the discharge port 4 to clean the gas and the remaining gas. Gas and foreign matter is discharged to the outside through the discharge port 4, and after the discharge is completed by closing the opening and closing valve 7 of the discharge port 4, the cleaning operation is finally completed.

When such a process of injecting and discharging the cleaning gas is repeatedly performed eight times by programming set in the controller 9, a very excellent state suitable for the cleaning efficiency requirement prescribed in relation to the cleaning operation of the sampling carrier 1 is performed. The cleaning efficiency result of can be obtained.

On the other hand, the reference numeral 5a shown in FIG. 4 and not described has a function of supporting the ejection of the cleaning gas at the end of the blowing pipe 5 as a support.

In particular, in the description of the preferred embodiment of the present invention, it is described that the improvement is made with the sampling carrier disclosed in the patent application No. 2008-135860 filed by the applicant in the background, but is not limited thereto.

That is, although the present invention has been described by way of limited embodiments and drawings, the present invention is not limited thereto, and the present invention is described below by the person skilled in the art to which the present invention pertains. It will be understood that various modifications and variations are possible within the scope of equivalent utility model registration claims.

1 is a cross-sectional view showing an example of a sampling carrier and a cleaning operation according to the prior art;

2 is a cross-sectional view showing the structure of a sampling carrier conventionally patented by the present applicant;

3 is a cross-sectional view illustrating a cleaning operation of a sampling carrier conventionally patented by the present applicant;

4 schematically shows a sampling carrier with an automation system according to the invention.

Explanation of symbols on the main parts of the drawings

1 Sampling Carrier 2 Container Body

3: inlet port 4: outlet port

5: Blowing pipe 6,7: Automatic valve

8: pressure sensor 9: controller

Claims (6)

A container body for storing the collected sample gas, an inlet port provided in the container body for introducing gas into the container body, a discharge port provided in the container body for discharging the gas in the container body to the outside, and In the sampling carrier comprising a valve for opening and closing the inlet and outlet ports respectively provided on the inlet port and outlet port, The valve is an automatic valve that can be opened and closed through automatic control, and is provided with a programmable controller for automatically controlling the opening and closing time of the automatic valve by changing the internal pressure of the container body as a variable, and supplying power to the controller. It is provided with a power supply that can be provided on the discharge port is provided with a pressure sensor that can provide a signal to the controller by detecting a pressure change inside the container body, the inlet port and the discharge port is disposed in the same direction, As a blowing pipe is further provided to guide the gas introduced into the inlet port into the container body to be diffused and ejected from the base of the container body, the cleaning gas introduced into the container body through the inlet port is blown. Diffuses and blows back toward the discharge port, hitting the inner surface of the container body And at the same time automation system of the sampling carrier, it characterized in that the mixed flow formed in the purge gas is made. delete The method of claim 1, Automated sampling carrier, characterized in that the pressure variable according to the pressure change in the container body to determine the opening and closing time of the automatic valve set in the controller during the gas sampling process through the sampling carrier is 0.2bar / min. The method of claim 1, The controller is programmed in the controller to be repeatedly performed to the injection and discharge of the cleaning gas into the container body during the automatic cleaning of the sampling carrier, and is set in the controller according to the repetition of the injection and discharge of the cleaning gas The pressure variable according to the pressure change inside the container body to determine the opening and closing time of the automatic valve is when the internal pressure of the container body reaches 80% when the cleaning gas is injected, and the internal pressure within the container body is 3 when the cleaning gas is discharged. An automation system for a sampling carrier, characterized in that when less than% is reached. 5. The method of claim 4, And the number of times the injection and discharge of the cleaning gas set in the controller is repeated eight times. The method of claim 1, The inner surface of the container body, the inlet port, the outlet port, the blowing pipe, the automatic valve, and the pressure sensor, which are the components in contact with the residual gas and foreign matter, are electropolished to have a centerline average roughness of 7 µm inch Ra among the surface roughness. Carrier automation system.

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