KR101030118B1 - Apparatus and method of recycling coating solution - Google Patents

Abstract

The present invention is connected to the coating equipment, the recovery tank for recovering the coating waste in the coating equipment; A recycling tank connected to the recovery tank and transporting the coating waste liquid to manufacture a recycling coating liquid; A solvent tank connected to the recycling tank and configured to supply a diluting solvent to the recycling tank to adjust the viscosity of the coating waste liquid; A new liquid tank connected to the recycling tank and configured to supply a coating new liquid to the recycling tank so that the coating waste liquid and the coating new liquid are mixed to produce a recycling coating liquid; And a supply tank connected to the recycling tank and the coating equipment, the supply tank for supplying the recycling coating liquid manufactured in the recycling tank to the coating equipment. As for

According to the present invention, it is possible to obtain a recycled coating solution in which the initial coating new liquid and the characteristic difference are minimized.

Coating solution, recycling

Description

Apparatus and method of recycling coating solution

The present invention relates to an apparatus and a method for recycling a coating liquid, and more particularly, to recycling a coating waste liquid flowing out of a substrate during a coating process to an external production process and recycling the coating liquid in-line. By recycling using an apparatus, the method relates to minimizing the difference in properties between the obtained recycled coating liquid and the original coating fresh liquid.

In order to manufacture a semiconductor device or a display device such as an LCD, a process of stacking various materials on a substrate is indispensable. As one of the processes of stacking such materials, a coating liquid is discharged using a nozzle on a substrate. There is a coating process for laminating predetermined layers.

The coating process includes a spin coating process in which a coating liquid is discharged onto a rotating substrate so that the coating liquid is diffused to the entire surface of the substrate, and a predetermined layer is laminated, and the nozzle or substrate is moved without rotating the substrate. There is a spinless coating or slit coating process in which a predetermined layer is laminated on the entire surface of the substrate.

In performing such a coating process, in order to deposit a uniform layer on the entire surface of the substrate, a sufficient amount of coating liquid is generally discharged through the nozzle. As a result, the coating liquid that flows out of the substrate and is wasted without being laminated on the front surface of the substrate is produced. In particular, in the spin coating process, since the coating process is performed while rotating the substrate, the amount of coating liquid that is wasted is considerable.

In order to secure economic feasibility in mass production, it is important to reduce the material cost. However, if the waste coating liquid is disposed of as it is, the material cost increases as much as it was designed to recycle the waste coating liquid. In particular, one of the materials laminated through the coating process is a photoresist (PR) that acts as a mask when forming a microcircuit pattern. Such a photoresist is very expensive, and a recycling method is urgently needed.

As a method of recycling a conventionally designed coating liquid, the coating liquid spilled out of the substrate (hereinafter referred to as a 'coating waste liquid') is recovered, and then the recovered coating waste liquid is transferred to an external production plant for recycling. There was a way. However, this method has a problem that the quality of the coating waste liquid is changed because the coating waste liquid has to be transferred to an external production plant, and thus the waiting time of the coating waste liquid is long before recycling.

Therefore, in order to solve this problem, a method of installing recycling equipment connected to the coating equipment and in-line (In-line) without transferring the coating waste liquid to the external production process has been devised. Thus, by installing the recycling equipment connected in-line with the coating equipment, the waiting time of the coating waste liquid is reduced, the problem of changing the quality characteristics of the coating waste liquid compared to the conventional method of recycling to the outside production plant has been solved.

However, even though the recycling equipment was connected in-line with the conventional coating equipment, the characteristics of the recycled coating liquid obtained by recycling the coating waste liquid were still different from those of the original coating liquid. Therefore, the coating process can be performed using the recycled coating liquid. In this case, various problems occurred such as a reverse tapered pattern or a CD deviation.

The present invention has been devised to solve the above-mentioned problems, and an object of the present invention is to provide an apparatus and a method capable of producing a recycled coating solution to minimize the difference in properties from the original coating new solution.

In order to achieve the above object, the present invention provides a recycling apparatus for coating liquid, which has a recycling tank for adjusting the viscosity of the coating waste liquid recovered from the coating equipment and mixing the coating liquid with the coating waste liquid.

The present invention is also connected to the coating equipment, the recovery tank for recovering the coating waste in the coating equipment; A recycling tank connected to the recovery tank and transporting the coating waste liquid to manufacture a recycling coating liquid; A solvent tank connected to the recycling tank and configured to supply a diluting solvent to the recycling tank to adjust the viscosity of the coating waste liquid; A new liquid tank connected to the recycling tank and configured to supply a coating new liquid to the recycling tank so that the coating waste liquid and the coating new liquid are mixed to produce a recycling coating liquid; And a supply tank connected to the recycling tank and the coating equipment, the supply tank for supplying the recycling coating liquid manufactured in the recycling tank to the coating equipment.

Here, the coating equipment and the recovery tank is connected by a first pipe, the second pipe is branched in a predetermined portion of the first pipe, the second pipe is connected to the drain tank, the present in the coating equipment The cleaning solvent may be configured to be drained to the drain tank via the first pipe and the second pipe without being recovered to the recovery tank.

Temperature recovery sensors are provided in the recovery tank and the recycling tank, respectively, and a constant temperature control device may be formed in the recovery tank, the recycling tank, and the new liquid tank.

The recovery tank and the recycling tank may be provided with a viscosity measuring mechanism, respectively.

The recycling tank may be provided with a pressure measuring device and a pressure regulating device.

The coating equipment and the recovery tank are connected by a first pipe, the recovery tank and the recycling tank are connected by a third pipe, and the recycling tank and the solvent tank are connected by a fourth pipe. The recycling tank and the new liquid tank are connected by a fifth pipe, wherein the first pipe is connected to a lower portion of the recovery tank, and the third pipe, the fourth pipe, and the fifth pipe are connected to each other. Can be connected to the bottom of the recycling tank.

The invention also provides a process for recovering the coating waste in the coating equipment; Adding a diluent solvent to the coating waste liquid to adjust the viscosity of the coating waste liquid to mix the coating fresh liquid with the coating waste liquid to produce a recycled coating liquid; And discharging the recycled coating liquid onto a substrate loaded in the coating equipment.

The process of recovering the coating waste liquid may prevent the cleaning solvent present in the coating equipment from being recovered together with the coating waste liquid so that the difference in viscosity between the recovered coating waste liquid and the coating fresh liquid may be 0.5 mPa · s or less. have.

The process of adjusting the viscosity of the coating waste liquid may include a process of adding the dilution solvent to 20 parts by weight or less based on 100 parts by weight of the total amount of the coating waste liquid and the coating new liquid.

The process of mixing the coating liquid with the coating waste liquid may include a process of mixing 10 parts by weight to 200 parts by weight of the coating liquid with respect to 100 parts by weight of the coating waste liquid.

In the process of preparing the recycled coating liquid, the coating waste liquid and the coating new liquid are mixed in a state where the temperature difference between the coating waste liquid and the coating new liquid is 1 ° C. or less, or after confirming the temperature difference between the coating waste liquid and the coating new liquid and then the temperature difference. It may be made of a process of setting the viscosity difference corresponding to the correction value.

According to this invention of the said structure, it has the following effects.

First, the present invention has the advantage of minimizing the characteristic difference between the recycled coating liquid and the first coating new liquid because the coating coating liquid is mixed with the coating waste liquid to produce a recycled coating liquid.

Specifically, the coating new liquid is prepared by mixing a solid component, a photoinitiator, a solvent, and the like, and the solid component and the photoinitiator are scattered during the coating process, and thus may be separated from the coating new liquid. Silver has a large difference in properties from the original coating solution.

In the conventional case, such characteristics were not considered. As a result, since the recycled coating liquid was manufactured using only the coating waste liquid, the difference in characteristics between the recycled coating liquid and the original coating new liquid was increased. There was a problem getting bigger. On the contrary, the present invention is to prepare a recycled coating solution by mixing a predetermined amount of the coating fresh solution in the coating waste liquid in consideration that the solid component and photoinitiator, etc. contained in the coating liquid may be scattered from the coating liquid during the coating process, Accordingly, even if the characteristic difference between the recycled coating solution and the new coating liquid is minimized and the number of times of recycling increases, the characteristic difference between the recycled coating solution and the new coating liquid is not increased.

Second, the present invention minimizes the amount of dilution solvent added to adjust the viscosity of the coating waste liquid, specifically, the process to add a dilution solvent to 20 parts by weight or less based on 100 parts by weight of the total of the coating waste liquid and the coating fresh solution. By controlling, there is an advantage of minimizing the characteristic difference between the recycled coating liquid and the original coating new liquid.

More specifically, the solvent to be mixed in the first coating fresh solution is Propylene Glycol Monomethyl Eter Acetate (PGMEA), Propylene Glycol Monomethyl Eter (PGME), Ethyl-3-Ethoxy Propionate (EPE), Propylene Glycol Methyl Ether Propionate (PMP). Since there are so many varieties, such as ANON and various components and ratios among manufacturers, it is practically impossible to match the diluent added to adjust the viscosity of the coating waste liquid with the solvent mixed in the original coating fresh solution. . Therefore, the present invention minimizes the amount of diluent added to adjust the viscosity of the coating waste liquid to minimize the difference in characteristics between the recycled coating liquid and the original coating fresh liquid.

In addition, in order to minimize the amount of the dilution solvent as described above, the present invention is set so that the difference in viscosity between the recovered coating waste liquid and the coating fresh liquid is 0.5 mPa · s or less.

Third, the present invention prevents the cleaning solvent present in the coating equipment from being recovered together with the coating waste liquid by draining the cleaning solvent generated during the cleaning process out of the coating equipment and then recovering the coating waste liquid. There is an advantage to minimize the characteristic difference.

In more detail, since the cleaning solvent is mixed with the first coating fresh solution, the components and the component ratios are different from each other. Since the problem occurs, the present invention is to minimize the characteristic difference between the recycled coating solution and the coating coating liquid by preventing the cleaning solvent is recovered with the coating waste solution.

Fourth, the present invention is configured to connect the tank and the pipe connected to the lower portion of the tank and has an advantage that can minimize the generation of bubbles in the tank by having an ultrasonic treatment device or a vacuum treatment device for removing the generated bubbles.

Fifth, the present invention forms a temperature sensing sensor in each of the recovery tank and the recycling tank, and by forming a constant temperature control device in the recovery tank, the recycling tank, and the new liquid tank, thereby uniformly maintaining the temperature of the coating waste liquid, the coating new liquid, and the recycling coating liquid. It can be controlled, and accordingly, there is an advantage that the recycling coating liquid produced in the recycling tank can minimize the problem that the viscosity changes with temperature change.

Sixth, the present invention by forming a viscosity measuring mechanism in each of the recovery tank and the recycling tank, it is possible to calculate the amount of the dilution solvent supplied from the solvent tank to the recycling tank by using the viscosity difference, accordingly produced in the recycling tank There is an advantage that it is possible to more easily control the viscosity of the recycled coating liquid.

Seventh, the present invention has the advantage of minimizing the change in viscosity of the recycled coating liquid produced by uniformly adjusting the pressure in the recycling tank by forming a pressure measuring mechanism and a pressure regulating device in the recycling tank.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic layout of a recycling apparatus for coating liquid according to an embodiment of the present invention.

<Recycling device for coating liquid>

As can be seen in Figure 1, the recycling apparatus 10 of the coating liquid according to an embodiment of the present invention, the recovery tank 100, the recycling tank 200, the solvent tank 300, the new liquid tank 400, and supply It comprises a tank 500.

The recovery tank 100 serves to recover the coating waste liquid in the coating equipment 1, and the recovery tank 100 is connected to the coating equipment 1 by the first pipe 110. The coating waste liquid is recovered from the coating equipment 1 to the recovery tank 100 through the first pipe 110. The recovery tank 100 may be further configured with a stirrer.

The coating equipment 1 may be a spin coater or a slit coater. Although the drawing shows a case in which one recovery tank 100 is formed, a plurality of recovery tanks 100 may be formed in some cases.

In a predetermined portion of the first pipe 110, the second pipe 120 is branched, and the second pipe 120 is connected to the drain tank 600. The drainage tank 600 is a tank in which the cleaning solvent existing in the coating equipment 1 is drained. When the cleaning solvent existing in the coating equipment 1 is recovered to the recovery tank 100, the quality characteristics of the recycled coating liquid As this deteriorates, the cleaning solvent is drained to the drain tank 600 via the first pipe 110 and the second pipe 120. To this end, an automatic valve 115 is formed in a region branched from the first pipe 110 to the second pipe 120, and when the cleaning process is performed in the coating equipment 1, the automatic valve ( By the operation of 115, the cleaning solvent is adjusted to drain only to the drain tank 600 via the second pipe 120 in the first pipe 110, the coating process in the coating equipment (1) In this case, by the operation of the automatic valve 115, the coating waste liquid is adjusted to be recovered to the recovery tank 100 via the first pipe 110.

The recycling tank 200 serves to adjust the viscosity of the coating waste liquid and to mix the coating liquid with the coating waste liquid to produce a recycling coating liquid, for this purpose, the recycling tank 200, the third pipe 130 It is connected to the recovery tank 100 by the) is received the coating waste liquid recovered to the recovery tank 100 through the third pipe 130, the solvent tank 300 by the fourth pipe 140 The dilution solvent is supplied from the solvent tank 300 through the fourth pipe 140, and is connected to the new liquid tank 400 by the fifth pipe 150. The coating fluid is supplied from the fluid tank 400 through 150. In addition, the recycling tank 200 is provided with a mixing member 220 therein, so that the coating waste liquid, diluent solvent, and coating fresh liquid can be uniformly mixed.

The solvent tank 300 serves to adjust the viscosity of the coating waste liquid transported to the recycling tank 200 by supplying a diluting solvent to the recycling tank 200, the solvent tank 300 is a fourth pipe ( The dilution solvent is supplied to the recycling tank 200 through the 140.

The new liquid tank 400 serves to supply the coating new liquid to the recycling tank 200 so that the coating waste liquid and the coating new liquid are mixed in the recycling tank 200 so that the recycling coating liquid can be manufactured. The coating liquid is supplied to the recycling tank 200 through the 150. In addition, in order to be able to perform the first coating process in the coating equipment (1) before recycling the coating liquid, the coating liquid in the new liquid tank 400 is first to the recycling tank 200 through the fifth pipe 150. After supplying the first viscosity is measured, it is moved to the supply tank 500 by the sixth pipe 160 and is supplied to the coating equipment 1 through the seventh pipe 170 again.

The supply tank 500 serves to supply the recycling coating liquid manufactured in the recycling tank 200 to the coating equipment 1, and the supply tank 500 is recycled by the sixth pipe 160. It is connected to the tank 200 and is connected to the coating equipment (1) by the seventh pipe (170), the recycling coating liquid is supplied from the recycling tank 200 through the sixth pipe (160) the seventh The recycling coating solution is supplied to the coating equipment 1 through a pipe 170.

Such additional structural features of the recycling apparatus 10 of the coating liquid according to the present invention will be described as follows.

First, the first pipe 110 is connected to the lower portion of the recovery tank 100, the third pipe 130, the fourth pipe 140, and the fifth pipe 150 is the recycling tank 200 By connecting to the lower portion of the), it is possible to minimize the generation of bubbles in the recovery tank 100 and the recycling tank (200).

That is, when the coating waste liquid is recovered to the recovery tank 100 through the first pipe 110, when the first pipe 110 is connected to the upper portion of the recovery tank 100, the coating waste liquid is recovered. Since the generation of bubbles in the recovery tank 100 may be increased while being supplied into the 100, bubbles are generated in the recovery tank 100 by connecting the first pipe 110 to the lower portion of the recovery tank 100. To minimize. Similarly, by connecting the third pipe 130, the fourth pipe 140 and the fifth pipe 150 with the lower portion of the recycling tank 200, it is possible to minimize the generation of bubbles in the recycling tank 200. Here, the lower portion of the recovery tank 100 means a lower portion of the recovery tank 100 based on the central height of the recovery tank 100, and the lower portion of the recycling tank 200 refers to the recycling tank 200. It means the lower part based on the center height of.

In addition, the sixth pipe 160 connecting the supply tank 500 and the recycling tank 200 may be configured to be connected to the lower portion of the supply tank 500 and the recycling tank 200.

In addition, the ultrasonic treatment apparatus or vacuum treatment apparatus for removing the generated bubbles in the recovery tank 100 and the recycling tank 200 may be further configured.

Second, the recovery tank 100 and the recycling tank 200 is provided with a temperature sensor 700, respectively, the recovery tank 100, the recycling tank 200, and the new liquid tank 400 constant temperature control device By forming the, it is possible to uniformly control the temperature of the coating waste liquid, coating new liquid, and recycle coating liquid. The thermostat may be formed using a water-cooled or air-cooled method.

That is, since the coating waste liquid is continuously recovered from the coating equipment 1 in the recovery tank 100, the temperature of the coating waste liquid in the recovery tank 100 may be continuously changed, and the temperature sensing in the recovery tank 100 is performed. When the sensor 700 is attached and the thermostat is formed, the temperature of the coating waste liquid in the recovery tank 100 can be maintained uniformly. In addition, since the coating waste liquid is transported from the recovery tank 100 and the coating liquid is supplied from the new liquid tank 400, the temperature of the recycling coating liquid in the recycling tank 100 may also continuously change. When the temperature sensing sensor 700 is attached to the recycling tank 200 and a constant temperature control device is formed, the temperature of the recycling coating liquid manufactured in the recycling tank 200 can be maintained uniformly. In addition, by forming a thermostat device in the new liquid tank 400, it is possible to uniformly maintain the temperature of the coating new liquid supplied to the recycling tank 200.

As such, a temperature sensor 700 is formed in the recovery tank 100 and the recycling tank 200, and a thermostat is installed in the recovery tank 100, the recycling tank 200, and the new liquid tank 400. By forming in, the temperature of the coating waste liquid, the coating new liquid, and the recycling coating liquid can be uniformly controlled, and thus the problem of changing the viscosity of the recycling coating liquid produced in the recycling tank 200 due to the temperature change is eliminated. Can be.

Third, since the viscosity measuring mechanism 800 is formed in the recovery tank 100 and the recycling tank 200, respectively, the viscosity of the recycle coating liquid can be easily controlled.

That is, by forming the viscosity measuring mechanism 800 in the recovery tank 100 and the recycling tank 200, the amount of diluting solvent supplied from the solvent tank 300 to the recycling tank 200 by using the viscosity difference It can be calculated, and thus it is possible to more easily perform the viscosity control of the recycled coating liquid produced in the recycling tank 200.

In addition, to verify the accuracy of the viscosity measuring mechanism 800 formed in the recovery tank 100 and the recycling tank 200 to increase the reliability of the viscosity measurement, the first pipe 110 or the third pipe 130 to Collecting a small amount of the moving coating waste liquid to measure the viscosity, and collecting a small amount of the coating new liquid to move to the fifth pipe 150 may be configured separately to measure a viscosity measuring mechanism, such a separate The viscosity measuring mechanism may be configured in line or offline with the first pipe, the third pipe, and the fifth pipe 150.

Fourth, the pressure measuring mechanism 910 and the pressure adjusting device 920 is formed in the recycling tank 200, it is possible to minimize the change in viscosity of the recycle coating liquid produced by uniformly adjusting the pressure in the recycling tank 200. . The pressure regulator 920 may use an air injection and air discharge method.

In other words, in the recycling tank 200, the mixing member 220 mixes the coating waste liquid and the coating new liquid. The pressure in the recycling tank 200 may be changed, and thus the recycling tank 200 may be changed. Since the viscosity of the recycled coating liquid can be easily changed when the pressure in the) is changed, the pressure measuring mechanism 910 and the pressure regulator 920 is formed in the recycling tank 200 to form the inside of the recycling tank 200. By minimizing the pressure fluctuation, it is possible to minimize the change in viscosity of the recycled coating liquid that is eventually produced.

<Recycling method of coating liquid>

Hereinafter, a recycling method of the coating liquid according to an embodiment of the present invention will be described with reference to FIG. 1.

First, the coating waste liquid in the coating equipment is recovered.

The coating equipment 1 may be a spin coater or a slit coater.

The recovery process of the coating waste liquid consists of a process of recovering the coating waste liquid in the coating equipment 1 to the recovery tank 100 through the first pipe 110. The coating waste liquid may be generated after performing the coating process using the first coating new liquid, or may be generated after performing the coating process using the recycled coating liquid. That is, the coating waste liquid, after coating the new liquid in the new liquid tank 400 is first supplied to the recycling tank 200 through the fifth pipe 150 to measure the initial viscosity (in this case, the recycling tank 200 is coated Only the new liquid is present), the sixth pipe 160 is moved to the supply tank 500 (in this case, the supply tank 500 is coated coating fresh liquid only) and the seventh pipe 170 through the coating equipment ( 1) It may be generated and supplied, or the recycling coating liquid in the supply tank 500 may be generated by being supplied to the coating equipment (1) through the seventh pipe (170).

The coating waste liquid recovery process prevents the cleaning solvent existing in the coating equipment 1 from being recovered together with the coating waste liquid, that is, drains the cleaning solvent generated during the cleaning process out of the coating equipment 1 and then discharges the coating waste liquid. Preferably, the cleaning solvent is drained to the drain tank 600 through the first pipe 110 and the second pipe 120 by the automatic valve 115 during the cleaning process. In the coating process, the coating waste liquid is recovered to the recovery tank 100 via the first pipe 110 by the automatic valve 115. At this time, it is preferable to control the process so that the difference in viscosity between the recovered coating waste liquid and the coating fresh liquid may be 0.5 mPa · s or less by blocking the cleaning solvent from being recovered to the recovery tank 100. If the difference in viscosity between the coating waste liquid and the coating fresh liquid exceeds 0.5 mPa.s, the viscosity correction value of the coating waste liquid in the post-process may be increased, thereby increasing the quality characteristic difference between the coating liquid and the recycled coating liquid. .

Next, by adding a diluting solvent to the coating waste liquid to adjust the viscosity of the coating waste liquid mixed with the coating waste liquid to prepare a recycled coating liquid.

In the process of manufacturing the recycled coating liquid, after transporting the coating waste liquid recovered in the recovery tank 100 to the recycling tank 200 through the third pipe 130, the solvent tank 300 while rotating the mixing member 220 ) Is supplied to the recycling tank 200 through the fourth pipe 140 to the dilution solvent and supplying the coating fresh liquid in the new liquid tank 400 to the recycling tank 200 through the fifth pipe 150. .

In the step of adjusting the viscosity of the coating waste liquid, it is preferable to add the dilution solvent to 20 parts by weight or less based on 100 parts by weight of the total of the coating waste liquid and the coating new liquid. If the addition amount of the dilution solvent exceeds 20 parts by weight, the difference in quality characteristics between the coating fresh solution and the recycled coating solution may increase.

In the process of mixing the coating liquid with the coating waste liquid, it is preferable to mix 10 parts by weight to 200 parts by weight of the coating liquid with respect to 100 parts by weight of the coating waste liquid. If the coating fresh liquid is mixed at less than 10 parts by weight, the difference in quality characteristics between the coating waste liquid and the recycled coating liquid may increase, and when the coating fresh liquid exceeds 200 parts by weight, the recycling degree of the coating waste liquid may be reduced.

When preparing the recycled coating liquid, it is preferable to mix the coating waste liquid and the coating fresh liquid in a state where the temperature difference between the coating waste liquid and the coating fresh liquid is 1 ° C. or less. That is, by using the temperature sensor 700 formed in the recovery tank 100 and the constant temperature control device formed in the recovery tank 100 and the new liquid tank 400, the temperature difference between the coating waste liquid and the coating new liquid is controlled to be 1 ° C. or less. It is desirable to. If the temperature difference between the coating waste liquid and the coating new liquid exceeds 1 ° C., the viscosity of the recycled coating liquid is not easily controlled.

In addition, after confirming the temperature difference between the coating waste liquid and the coating new liquid, the viscosity difference corresponding to the temperature difference may be set as a correction value. That is, when there is a temperature difference between the coating waste liquid and the coating new liquid, a viscosity difference is generated in response to the temperature difference. With respect to the viscosity difference according to the temperature difference can be obtained in advance through the statistical data through the experiment, by using the statistical data, by checking the temperature difference generated between the coating waste liquid and the coating fresh liquid can determine the viscosity difference according to the temperature difference. Will be. Therefore, the determined viscosity difference can be set as a correction value, and the viscosity correction process can be performed in view of such a correction value.

Next, the recycled coating liquid is discharged onto the substrate loaded in the coating equipment.

In the discharging process of the recycling coating liquid, the recycling coating liquid manufactured in the recycling tank 200 is transported to the supply tank 500 connected to the recycling tank 200 through the sixth pipe 160, and then the supply tank 500. The recycled coating liquid transported to the supply tank 500 is connected to the coating equipment 1 through the seventh pipe 170 to be carried out.

The recycling method of the coating liquid according to an embodiment of the present invention has been described above with reference to FIG. 1, but the recycling method of the coating liquid according to the present invention is not necessarily limited to the case of using the apparatus according to FIG. 1.

1 is a schematic layout of a recycling apparatus for coating liquid according to an embodiment of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS OF THE DRAWINGS FIG.

1: coating equipment 10: recycling unit

100: recovery tank 200: recycling tank

300: solvent tank 400: new liquid tank

500: supply tank 600: drain tank

Claims (14)

delete A recovery tank connected to the coating equipment and recovering the coating waste liquid in the coating equipment; A recycling tank connected to the recovery tank and transporting the coating waste liquid to manufacture a recycling coating liquid; A solvent tank connected to the recycling tank and configured to supply a diluting solvent to the recycling tank to adjust the viscosity of the coating waste liquid; A new liquid tank connected to the recycling tank and configured to supply a coating new liquid to the recycling tank so that the coating waste liquid and the coating new liquid are mixed to produce a recycling coating liquid; And It is connected to the recycling tank and the coating equipment, and comprises a supply tank for supplying the recycling coating liquid produced in the recycling tank to the coating equipment, The recycling coating liquid is prepared by mixing the coating waste liquid of the recovery tank, the diluting solvent of the solvent tank and the coating liquid of the new liquid tank in the recycling tank. Temperature recovery sensors are provided in the recovery tank and the recycling tank, respectively, and a constant temperature control device is formed in the recovery tank, the recycling tank, and the new liquid tank. The coating equipment and the recovery tank are connected by a first pipe, the recovery tank and the recycling tank are connected by a third pipe, and the recycling tank and the solvent tank are connected by a fourth pipe. The recycling tank and the new liquid tank are connected by a fifth pipe, wherein the first pipe is connected to a lower portion of the recovery tank, and the third pipe, the fourth pipe, and the fifth pipe are connected to each other. Recycling apparatus for the coating liquid, characterized in that connected to the lower part of the recycling tank. The method of claim 2, The coating equipment and the recovery tank is connected by a first pipe, the second pipe is branched from a predetermined portion of the first pipe, the second pipe is connected to the drain tank, The cleaning solvent present in the coating equipment is configured to be drained to the drain tank via the first pipe and the second pipe without being recovered to the recovery tank, the coating liquid recycling apparatus. delete The method of claim 2, The recovery tank and the recycling tank are each provided with a viscosity measuring mechanism, In order to verify the accuracy of the viscosity measuring mechanism formed in the recovery tank and the recycling tank to increase the reliability of the viscosity measurement, a small amount of coating waste liquid is collected from the pipe connected to the recovery tank and the viscosity thereof is measured. The apparatus for recycling the coating liquid, characterized by further comprising a separate viscosity measuring mechanism for collecting a small amount of coating new liquid from the liquid and measuring the viscosity thereof. The method of claim 2, The recycling tank is characterized in that the pressure measuring device and a pressure regulating device, characterized in that the coating liquid recycling apparatus. delete Recovering the coating waste liquid in the coating equipment; Adding a diluent solvent to the coating waste liquid to adjust the viscosity of the coating waste liquid to mix the coating fresh liquid with the coating waste liquid to produce a recycled coating liquid; And And discharging the recycled coating liquid onto a substrate loaded in the coating equipment. The manufacturing process of the recycling coating liquid includes a process of mixing the coating waste liquid of the recovery tank, the diluting solvent of the solvent tank and the coating fresh liquid of the new liquid tank in a recycling tank, and each of the recovery tank and the recycling tank has a temperature sensing sensor. Is provided, the recovery tank, the recycling tank, and the new liquid tank is formed with a constant temperature control device, The coating equipment and the recovery tank are connected by a first pipe, the recovery tank and the recycling tank are connected by a third pipe, and the recycling tank and the solvent tank are connected by a fourth pipe. The recycling tank and the new liquid tank are connected by a fifth pipe, wherein the first pipe is connected to a lower portion of the recovery tank, and the third pipe, the fourth pipe, and the fifth pipe are connected to each other. Recycling method of the coating liquid, characterized in that connected to the lower part of the recycling tank. The method of claim 8, The process of recovering the coating waste liquid prevents the cleaning solvent present in the coating equipment from being recovered together with the coating waste liquid so that the difference in viscosity between the recovered coating waste liquid and the coating fresh liquid is 0.5 mPa · s or less. Characterized in that the coating liquid recycling method. 10. The method of claim 9, The process of preventing the cleaning solvent present in the coating equipment from being recovered together with the coating waste liquid comprises draining the cleaning solvent generated during the cleaning process out of the coating equipment and then recovering the coating waste liquid. , Recycling method of coating liquid. The method of claim 8, The step of adjusting the viscosity of the coating waste liquid, characterized in that the dilution solvent is added to 20 parts by weight or less with respect to 100 parts by weight of the total of the coating waste liquid and the coating new liquid, recycling method of the coating liquid. The method of claim 8, The step of mixing the coating new liquid to the coating waste liquid, characterized in that consisting of a process of mixing 10 parts to 200 parts by weight of the coating new liquid with respect to 100 parts by weight of the coating waste liquid, recycling method of the coating liquid. The method of claim 8, In the process of preparing the recycled coating liquid, the temperature difference between the coating waste liquid and the coating new liquid is mixed with the coating waste liquid and the coating new liquid while the temperature difference between the coating waste liquid and the coating new liquid is 1 ° C. or lower, and the temperature difference between the coating waste liquid and the coating new liquid is confirmed. A method for recycling a coating liquid, comprising the step of setting a viscosity difference corresponding to a correction value. The method of claim 8, The process of recovering the coating waste liquid consists of recovering the coating waste liquid to a recovery tank connected to the coating equipment. The manufacturing process of the recycling coating liquid, the transport of the coating waste liquid recovered in the recovery tank to the recycling tank connected to the recovery tank, the process of adding a diluting solvent to the coating waste liquid conveyed to the recycling tank and mixing the coating new liquid Made of The process of discharging the recycled coating liquid is carried out by transporting the recycled coating liquid produced in the recycling tank to a supply tank connected to the recycling tank, and then supplying the recycled coating liquid transported to the supply tank to a coating equipment connected to the supply tank. Recycling method of the coating liquid, characterized in that.

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