KR101010809B1 - Led manufacturing process circulating fluidal preheating cooling apparatus - Google Patents

Abstract

PURPOSE: An LED manufacturing process circulating fluidal preheating cooling apparatus is provided to reduce the size and weight of an apparatus while implementing stable transportation efficiency. CONSTITUTION: A thermo-module(140) electrically connects a plurality of peltier elements(141) in series. A third group(142c) is arranged to have different thermal polarity from a second group(142b). A temperature control unit(200) changes AC power from outside into DC power. A temperature sensor(150) detects the temperature of a circulation liquid in a preheated/cooled circulation line.

Description

LED manufacturing process circulating fluidal preheating cooling apparatus

The present invention relates to a circulating fluid preheating cooling device for an LED (LED) manufacturing process, and more particularly, to constitute a circulation line through which a circulating fluid required for cooling is circulated in the LED manufacturing process, and circulated in the circulation line. Comprising a circulating fluid storage tank for temporarily receiving a circulating fluid, and constitutes a circulating pump for supplying the circulating fluid temporarily accommodated in the circulating fluid storage tank to the circulation line, the circulation of the circulation line supplied by the circulating pump A thermal module for preheating / cooling the liquid to the Peltier element, a temperature sensor for sensing the temperature of the circulating fluid of the circulation line preheated / cooled by the summer module, and a heat radiation for cooling the heat generated from the summer module A heat exchanger configured to include a water line; And a temperature control unit for controlling the driving of the circulation pump of the heat exchange unit and controlling the summer module according to the temperature sensed by the temperature sensor, wherein the summer module electrically connects the plurality of Peltier elements to each other in series. The Peltier element is arranged to be in contact with the circulation line by dividing the first group, the second group and the third group, wherein the second group is arranged so that the thermal polarity is opposite to that of the first group, and the third group is the first group. The thermal polarity and the two groups are arranged opposite, the temperature control unit includes a main power unit for converting an AC power applied from the outside into a DC power, depressurizing, and constant voltage; A power switch unit configured to apply a DC power source that filters noise by receiving power from the main power unit; A microcomputer that detects a temperature value applied from the temperature sensor and controls the throttling control unit by a PID control algorithm using a temperature change and a temperature change amount by comparing with a set temperature value; The present invention relates to a circulating fluid preheating cooling device for an LED manufacturing process including an throttling control unit for selectively outputting +/- power applied from the power switch unit to a thermo module according to a control signal applied from the microcomputer. .

In general, a method of manufacturing a wafer for growing a compound semiconductor using an organometallic chemical vapor deposition apparatus on a wafer, which is a basic material, as an LED manufacturing process, and making an electrode on the wafer manufactured by the wafer manufacturing step and cutting it into individual chips Producing an LED chip, packaging the LED chip manufactured by the LED chip production step with a substrate electrode and sealing the phosphor together, and attaching the packaged LED to a predetermined frame to make an application product. In the process of manufacturing a wafer, LED photo track equipment is used in the process of manufacturing a wafer. At this time, a cool plate, which is a cooling element, is used to maintain a constant temperature in the equipment due to the nature of the process. ) Was performed to perform the cooling function.

The cool plate used PCM (latent heat storage, chemical heat storage, and heat of reaction by solid-phase conversion) and a frozen chiller, but the cool plate due to the miniaturization of equipment and an increase in production volume Due to the production delay and quality problem due to the load of (Cool Plate), there is a problem that the temperature of the Cool Plate cannot be stabilized, and the Cool Plate which requires accurate temperature control during the LED manufacturing process Circulate cooling water such as fresh water, pure water, and fluorinated solution, but due to its characteristics, very accurate temperature control was required, but precise temperature control was not possible.

As shown in FIG. 1, in the conventional PID algorithm, a value for proportion is first calculated, and then integral and derivative values are calculated based on the value, so that temperature hunting (hunting) phenomenon and overshoot occur to precise temperature control. There was a problem that was not.

In addition, in order to control the Peltier device, AC power is converted into DC power, and an integrated power supply (SMPS (Switched-mode power supply)) supplies power to each Peltier device according to the temperature difference of the temperature controller data. The design and implementation of the integrated power supply (SMPS) was difficult, and the input side noise was fed back when converting the electrode of the power supply, which shortened the lifespan of the power supply and caused by the temperature difference of the device. Condensation occurred in the integrated power supply (SMPS), causing frequent short-circuit safety problems.

Accordingly, the present invention has been made to solve the above problems, the object of which is to consume less power than the conventional cooling method using the refrigerant gas, there is no driving part (compressor), there is no driving sound and vibration, the life of the device This long, frequency-free DC magnetic pump is configured as a circulation pump to achieve uniform and safe water supply, and to significantly reduce the size and weight of the equipment.

Then, the plural Peltier elements are divided into the first group and the third group to throttle the thermal modules arranged thermally opposite to each other to precisely control the circulating fluid to 1/100 ° C. to circulate fresh water, pure water, and fluorinated solution It aims not only to quickly reach the target temperature set at the temperature, but also to keep the temperature constant (hunting) phenomenon and overshoot.

In addition, a PID control algorithm in which the summer module is integrated with proportional (P), integral (I), and derivative (D) at once is designed to significantly increase the response and controllability.

In order to achieve the above object, the present invention constitutes a circulation line for circulating the circulating fluid required for cooling in the LED manufacturing process, and constitutes a circulating fluid storage tank for temporarily receiving the circulating fluid circulated in the circulation line A circulating pump for supplying the circulating fluid temporarily accommodated in the circulating fluid storage tank to the circulation line, and a summer module for preheating / cooling the circulating fluid of the circulating line supplied by the circulating pump to the Peltier element. A heat exchanger configured to include a temperature sensor configured to sense a temperature of the circulating fluid of the circulation line preheated / cooled by the summer module, and a heat radiation water line to cool the heat generated from the summer module; And a temperature control unit for controlling the driving of the circulation pump of the heat exchanger and controlling the summer module according to the temperature detected by the temperature sensor.

In addition, the thermo module electrically connects a plurality of Peltier elements to each other in series and arranges the Peltier elements so as to contact the circulation line by dividing the first group, the second group, and the third group, wherein the second group is the first group. The thermal polarity is arranged opposite to each other, and the third group is characterized in that the thermal polarity is arranged opposite to the second group.

The temperature control unit may include: a main power unit converting an AC power applied from the outside into a DC power source, reducing the pressure, and performing a constant voltage; A power switch unit configured to apply a DC power source that filters noise by receiving power from the main power unit; A microcomputer that detects a temperature value applied from the temperature sensor and controls the throttling control unit by a PID control algorithm using a temperature change and a temperature change amount by comparing with a set temperature value; And a throttling controller for selectively outputting +/- power applied from the power switch unit to the thermo module according to the control signal applied from the microcomputer.

In addition, the throttling controller is composed of a pair of solid-state relay (SSR) receiving + power and-power applied from the power switch unit, respectively, the first output unit and the second output unit, respectively, By connecting the power output and the power output of the second output unit with each other, and connecting the -power output of the first output unit and the + power output of the second output unit to each other, selectively + /-power in accordance with the signal applied from the microcomputer It is characterized by being configured to apply to the summer module.

As described above, the present invention consumes lower power than the conventional cooling method using the refrigerant gas, and there is no starting part (compressor), there is no driving sound and vibration, the life of the device is long, and the frequency adjustment does not require a DC magnetic pump It is an invention having the effect of producing a uniform, safe water supply capacity by configuring a circulation pump, significantly reducing the size and weight of the equipment.

Then, the plural Peltier elements are divided into the first group and the third group to throttle the thermal modules arranged thermally opposite to each other to precisely control the circulating fluid to 1/100 ° C. to circulate fresh water, pure water, and fluorinated solution It is an invention having the effect of not only allowing the liquid to quickly reach the target temperature set in temperature, but also keeping the temperature constant (hunting) phenomenon and overshoot to keep it constant.

In addition, by constructing PID control algorithm that integrates proportional (P), integral (I), and derivative (D) at once in the summer module, temperature hunting (hunting) phenomenon and overshoot are suppressed, which significantly improves response and controllability. It is an invention with.

1 is a conventional PID control algorithm and the control temperature graph
Figure 2 is an exemplary view showing the configuration of the circulating fluid preheating cooling device for the LED manufacturing process according to the present invention
3 is a PID control algorithm and a control temperature graph according to the present invention.

In order to achieve the above object, the present invention will be described in detail with reference to the accompanying drawings.

In constructing the circulating fluid preheating cooling device for the LED manufacturing process,

In the LED manufacturing process constitutes a circulation line 110 for circulating fluid required for cooling, circulating fluid storage tank 120 for temporarily receiving the circulating fluid circulated in the circulation line 110, the circulation Circulating pump 130 for supplying the circulating fluid temporarily accommodated in the liquid storage tank 120 to the circulation line 110, and circulating fluid of the circulation line 110 supplied by the circulating pump 130 The thermoelectric module 140 preheats / cools the Peltier element 141, and the temperature sensor 150 senses the temperature of the circulating fluid 110 of the circulation line 110 preheated / cooled by the thermal module 140. And a heat exchange part 100 including a heat dissipation water line 160 for cooling the heat generated by the summer module 140;

And a temperature control unit 200 for controlling the driving of the circulation pump 130 of the heat exchanger unit 100 and controlling the summer module according to the temperature sensed by the temperature sensor 150.

The summer module 140 electrically connects the plurality of Peltier elements 141 to each other in series to divide the first module 142a, the second group 142b, and the third group 142c into a circulation line 110. The Peltier element 141 is arranged to be in contact with each other, wherein the second group 142b is arranged to have a thermal polarity opposite to that of the first group 142a, and the third group 142c is the second group 142b. ) And thermal polarity are arranged opposite.

In addition, the temperature control unit 200 includes a main power unit 210 for converting the AC power applied from the outside into DC power, depressurizing, and constant voltage;

A power switch unit 220 for filtering noise by receiving power from the main power unit 210 and applying a boosted DC power;

A microcomputer 230 which detects a temperature value applied from the temperature sensor 150 and controls the throttling controller 240 by a PID control algorithm by using a temperature change and a temperature change amount by comparing with a set temperature value;

And a throttling controller 240 for selectively outputting +/- power applied from the power switch unit 220 to the summer module 140 according to the control signal applied from the microcomputer 230.

In addition, the throttle control unit 240 is a pair of solid-state relay (SSR) for receiving + power and-power applied from the power switch unit, respectively, the first output unit 241 and the second output unit 242. ) Are configured in parallel, and the + power output of the first output unit 241 and the -power output of the second output unit 242 are connected to each other, and the -power output and the second output of the first output unit 241 are connected to each other. The + power outputs of the unit 242 are connected to each other to selectively apply +/- power to the summer module 140 according to a signal applied from the microcomputer 230.

Looking at the detailed configuration example and the embodiment of the present invention with reference to the drawings as follows.

First, as shown in FIG. 2, the present invention is a circulating liquid preheating cooling apparatus for LED manufacturing process can be largely divided into a heat exchange unit 100, a temperature control unit 200, the heat exchange unit 100 is a cool plate The circulating fluid is circulated to preheat / cool the circulating fluid to maintain a constant temperature with a Peltier element, and circulate and supply the circulating fluid with a circulating pump, wherein the temperature control unit 200 performs the heat exchange. It performs a function of controlling the summer module and the circulation pump to perform the function of preheating / cooling and supplying the circulating fluid which is a function of the unit 100.

Looking at the heat exchanger 100 in more detail with reference to the drawings, the circulation line 110, the circulating fluid storage tank 120, the circulation pump 130, the thermal module 140, the temperature sensor 150, heat dissipation It consists of a water line 160, the circulation line 110 is made of a metal pipeline to circulate the circulating fluid, such as fresh water, pure water, fluorinated solution required for cooling in the LED manufacturing process, the circulating fluid The storage tank 120 temporarily stores and receives the circulating fluid circulating in the circulation line 110, which prevents air from entering the circulation line 110 to maintain a uniform water pressure of the circulation line 110. Perform the function.

And the circulation pump 130 is composed of a DC magnetic pump, there is no need to adjust the frequency, the vibration does not occur so that the circulating fluid temporarily accommodated in the circulating fluid storage tank 120 to recycle to the circulation line 110 It is easy to perform the function of supply, the summer module 140 is to preheat / cool the circulating fluid of the circulation line 110 supplied by the circulation pump 130 to a plurality of Peltier element 141.

In this case, the summer module 140 electrically connects the plurality of Peltier elements 141 to each other in series to divide the first module 142a, the second group 142b, and the third group 142c into a circulation line 110. The Peltier element 141 is arranged to be in contact with the second group 142b, and the second group 142b is arranged to have a thermal polarity opposite to that of the first group 142a, and the third group 142c is the second group 142b. ) And thermal polarity are arranged opposite.

The temperature sensor 150 detects and detects the circulating fluid temperature of the circulation line 110 preheated / cooled by the summer module 140 and applies the value to the temperature control unit 200 which is in charge of controlling the device. .

In addition, the heat dissipation water line 160 is configured to abut on the opposite side of the Peltier element 141 in contact with the circulation line 110 so as to cool the heat generated by the thermal module 140, and generated in the Peltier element 141. Absorption of heat not only prevents the Peltier element 141 from overheating, but also doubles the cooling function of the Peltier element 141.

And the temperature control unit 200 controls the driving of the circulation pump 130 of the heat exchange unit 100, and controls the thermo module 140 according to the temperature detected by the temperature sensor 150.

At this time, the temperature control unit 200 is composed of a main power unit 210, a power switch unit 220, a microcomputer 230, a throttle control unit 240, the main power unit 210 is applied from the outside Convert AC power to DC power, depressurize and constant voltage.

The power switch unit 220 receives the power of the main power unit 210 to filter noise and outputs a boosted DC power.

In addition, the microcomputer 230 compares the temperature value and the set temperature value applied from the temperature sensor 150, and controls the throttle control unit 240 by the PID control algorithm using the temperature change and the temperature change amount. The PID control algorithm allows proportional (P), integral (I) and derivative (D) to be integrated in one operation.

The throttle control unit 240 selectively outputs +/- power applied from the power switch unit 220 to the summer module 140 according to the control signal applied from the microcomputer 230.

At this time, the throttle control unit 240 is a pair of solid-state relay (SSR) to receive + power and-power from the power switch unit 220, respectively, the first output unit 241 and the second output unit ( 242 is configured in parallel to drive the contactless relays of the first output unit 241 and the second output unit 242 using only the control signal of the microcomputer 230 to variably and stably supply power to the Peltier element. To be controlled.

Therefore, the + power output of the first output unit 241 and the -power output of the second output unit 242 are connected to each other, and the -power output of the first output unit 241 of the second output unit 242 The + power outputs are connected to each other to selectively apply +/- power to the summer module 140 in the first output unit 241 and the second output unit according to the signal applied from the microcomputer 230.

The throttle control unit 240 is easy to develop and implement, and the contactless relay is completely blocked by the noise of the input side to maximize the life of the Peltier element, the contactless relay is completely molded with a flame-retardant resin, moisture, dust gas, etc. It is not affected by the external environment, so it is excellent in operation reliability, safe, easy to maintain and reduce power consumption.

Looking at the embodiment of the present invention by the above configuration.

First, when the circulating fluid enters the heat exchange part 100 at the inlet of the circulation line 110 of the circulating fluid preheating cooling device, the circulating fluid is temporarily stored in the circulating fluid storage tank 120.

In addition, the circulating fluid temporarily stored in the circulating fluid storage tank 120 is recycled while being supplied to the summer module 140 of the heat exchange part 100 again along the circulation line 110 by the circulating pump 130.

At this time, the driving of the circulation pump 130 is controlled by the temperature control unit 200.

The circulating fluid supplied by the circulation pump 130 is discharged to the outlet of the circulation line 110 via the summer module 140, and circulated by the temperature sensor 150 configured at the outlet side of the circulation line 110. The temperature of the liquid is detected.

At this time, by comparing the temperature value detected by the temperature sensor 150 with the set temperature value in the microcomputer 230, if the detected temperature is higher than the set temperature value, the summer module 140 is driven to cool the circulating fluid. When the detected temperature is lower than the set temperature value, the summer module 140 is driven to preheat the circulating fluid.

The temperature control unit 200 compares the temperature value detected by the temperature sensor 150 with the set temperature value by the PID control algorithm in the microcomputer 230 to cool / preheat the circulating fluid to the thermal module 140. And outputs a control signal to the throttling control unit 240. The throttling control unit 240 including the first output unit 241 and the second output unit 242 using a pair of contactless relays (SSR), respectively, The power applied from the power switch unit 220 to cool / preheat by selectively applying +,-power or opposite-, + power to the summer module 140 according to the control signal of the microcomputer 230. When + power is applied from the first output unit 241, -power is applied to the second output unit 242, and when -power is applied to the first output unit 241, the second output unit 242 + Power is applied.

The summer module 140 is electrically connected to a plurality of Peltier elements by dividing the first group into the third group, each group being electrically connected in parallel, and the third group in the first group It is thermally arranged opposite to each other.

In other words, the plurality of Peltier elements 141 are electrically connected in series to each other to be divided into a first group 142a, a second group 142b, and a third group 142c so as to be in contact with the circulation line 110. 141 is arranged, wherein the second group 142b is arranged to have a thermal polarity opposite to that of the first group 142a, and the third group 142c is to be opposite to the second group 142b. For example, when the first group 142a performs the cooling function, in the second group 142b, the first polarity and the thermal polarity of the first group 142a are connected to each other to perform the preheating function. In the group 142c, the polarity of the second group 142b and the second group 142b are opposite to each other, so that the cooling function is performed again. When the cooling function is performed, the preheating function is performed in the second group 142b, and again in the third group 142c. Each function is performed, and when-, + power is applied from the power switch unit 220, when the first group 142a performs the preheating function, the second group 142b performs the cooling function, and the third group At 142c, the preheating function is performed again.

As shown in FIG. 3, the microcomputer 230 controls the control signal by the PID control algorithm by the PID control algorithm in which proportional (P), integral (I) and derivative (D) are integrated at once. The throttling controller 240 cools the circulating fluid to a temperature close to the set temperature value in the first group 142a of the summer module 140, and sets the set temperature value in the second group 142b. Preheating the circulating fluid cooled to a temperature approximating to the set temperature value and the peak temperature value again to heat the circulating fluid, and in the third group 142c, the circulating fluid heated to the intermediate temperature value is set again to the set temperature value. The temperature of the circulating fluid is adjusted quickly and precisely to the target temperature by suppressing the temperature hunting (hunting) phenomenon and overshoot.

At this time, the control signal by PID control algorithm can select overshoot suppression, external load suppression, normal condition as the operation condition for PID control operation to obtain precise value. It can be selected as medium or weak, and high-precision temperature control is performed on the output value calculated by careful operation condition selection.

Although the above has been illustrated and described with respect to the preferred embodiment of the present invention, the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the spirit of the invention as claimed in the claims of the present invention. Such changes are intended to fall within the scope of the claims.

♠ Explanation of major drawing codes ♠
100: heat exchanger 110: circulation line 120: circulating fluid storage tank
130: circulation pump 140: summer module 141: Peltier element
142a: first group 142b: second group 142c: third group
150: temperature sensor 160: heat dissipation water line 200: temperature control unit
210: main power unit 220: power switch unit 230: microcomputer
240: throttle control unit 241: first output unit 242: second output

Claims (4)

delete delete delete In the LED manufacturing process, a circulating line for circulating fluid required for cooling is circulated, a circulating fluid storage tank for temporarily receiving a circulating fluid circulating in the circulating line, and a circulating fluid temporarily accommodated in the circulating fluid storage tank A circulation pump configured to supply recirculation to the circulation line, a summer module for preheating / cooling the circulating fluid supplied by the circulation pump to the Peltier element, and a circulation line preheated / cooled by the summer module A heat exchanger configured to include a temperature sensor configured to detect a temperature of the circulating fluid, and including a heat dissipation water line for cooling the heat generated from the summer module; And a temperature control unit for controlling the driving of the circulation pump of the heat exchange unit and controlling the summer module according to the temperature sensed by the temperature sensor, wherein the summer module electrically connects the plurality of Peltier elements to each other in series. The Peltier element is arranged to be in contact with the circulation line by dividing the first group, the second group and the third group, wherein the second group is arranged so that the thermal polarity is opposite to that of the first group, and the third group is the first group. Two groups and a thermal polarity arranged oppositely; The temperature control unit may include: a main power unit converting an AC power applied from the outside into a DC power supply, reducing the pressure, and performing a constant voltage; A power switch unit configured to apply a DC power source that filters noise by receiving power from the main power unit; A microcomputer that detects a temperature value applied from the temperature sensor and controls the throttling control unit by a PID control algorithm using a temperature change and a temperature change amount by comparing with a set temperature value; In the configuration of the circulating fluid preheating cooling device for the LED manufacturing process comprising a throttling control unit for selectively outputting + /-power applied from the power switch unit to the thermo module according to the control signal applied from the microcomputer,
The throttling controller comprises a pair of solid-state relays (SSR) for receiving + power and-power applied from the power switch, respectively, to configure the first output unit and the second output unit in parallel, respectively. The + power output and the -power output of the second output unit are connected to each other, and the -power output of the first output unit and the + power output of the second output unit are connected to each other, so that +/- power can be selectively selected according to the signal applied from the microcomputer. Circulating fluid preheating cooling device for an LED manufacturing process, characterized in that it comprises a configuration to be applied to the summer module.

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