KR101008843B1 - Method for preparing organic light-emitting device having light-emitting pattern and organic light emitting device prepared by the method - Google Patents

Abstract

The present invention provides a method of manufacturing an organic light emitting device, comprising the steps of preparing a first electrode, forming at least one organic layer on the first electrode, and forming a second electrode on the organic layer. A method of manufacturing an organic light emitting device comprising the steps of changing the function of a predetermined pattern region of one or more layers of an organic material layer or an electrode by using digital light processing (DLP), an organic light emitting device manufactured by the method, and the method It provides a device used for.

OLED, DLP

Description

FIELD OF THE INVENTION AND METHOD FOR PREPARING ORGANIC LIGHT-EMITTING DEVICE HAVING LIGHT-EMITTING PATTERN AND ORGANIC LIGHT EMITTING DEVICE PREPARED BY THE METHOD

The present invention relates to an organic light emitting device and a method of manufacturing the same. Specifically, the present invention relates to an organic light emitting device having a light emitting pattern, a method for manufacturing the same, and an apparatus used in the method.

The organic light emitting device typically includes two electrodes and an organic material layer interposed between the electrodes, and emits light by injecting electrons and holes into the organic material layers from the two electrodes, respectively, to convert current into visible light.

1 is a cross-sectional view showing a conventional organic light emitting device. Referring to the drawings, the organic light emitting device includes a light emitting layer 50 positioned between two electrodes, for example, an anode electrode 20 and a cathode electrode 70. One of the two electrodes, for example, the anode electrode 20, is positioned on the transparent substrate 10 and passes light emitted from the light emitting layer 50. The organic light emitting diode may further include one or more layers selected from the group consisting of an electron injection layer 65, an electron transport layer 60, a hole transport layer 45, and a hole injection layer 40 to improve performance.

The organic light emitting diode may include an insulating layer 30 formed in a predetermined pattern on an electrode on the transparent substrate 10 to distinguish the light emitting region A from the non-light emitting region B. FIG.

The present invention includes the step of changing the function of all or part of a predetermined pattern region of one or more layers of an organic material layer or an electrode by using digital light processing (DLP) in the manufacturing process of the organic light emitting device, the organic light emitting pattern An object of the present invention is to provide a method for easily manufacturing a light emitting device, an organic light emitting device manufactured by the method, and an apparatus for implementing the method.

In order to achieve the above technical problem, the present invention includes the steps of preparing a first electrode, forming at least one organic layer on the first electrode, and forming a second electrode on the organic layer A method of manufacturing a light emitting device, the method of manufacturing an organic light emitting device comprising the step of changing the function of a predetermined pattern region of one or more layers of the organic material layer or the electrode using a DLP.

In addition, the present invention is an organic light emitting device comprising a first electrode, one or more organic material layer disposed on the first electrode and a second electrode disposed on the organic material layer, a predetermined of one or more layers of the organic material layer or electrode. Provided is an organic light emitting device in which the function of the pattern region is changed using DLP.

In addition,

a) a system control unit for generating a patterned image and controlling the system,

b) UV supply,

c) a DLP system for generating a patterned UV image using the patterned image signal received from the system control unit and the UV received from the UV supply unit and then irradiating the patterned UV image;

d) a sample part in which a target sample to which the patterned UV image irradiated from the DLP system is irradiated is mounted;

It provides an apparatus for providing a light emitting pattern to an organic light emitting device comprising a.

The organic light emitting diode may include an organic material layer in which a function of a region corresponding to a predetermined pattern includes all or part of the organic material layer that is changed using DLP, thereby easily manufacturing an organic light emitting diode that emits light in a predetermined pattern. A separate device is not required to emit light with a pattern, and the manufacturing process can be simplified due to the simple process, and exhibits excellent characteristics in terms of cost. In particular, by using the DLP, gray scales can be easily expressed as compared with the case of fabricating an organic light emitting device that emits a predetermined pattern using a photomask, etc., and much finer and more accurate gray scale control is possible. .

Hereinafter, the present invention will be described in detail.

The present invention provides a method of manufacturing an organic light emitting device, comprising the steps of preparing a first electrode, forming at least one organic layer on the first electrode, and forming a second electrode on the organic layer. It provides a method of manufacturing an organic light emitting device comprising the step of changing the function of the predetermined pattern region of one or more layers of the organic material layer or the electrode using the DLP.

In the present invention, in order to fabricate an organic light emitting device having a predetermined light emitting pattern, an energy source is applied only to a predetermined pattern region of an organic material layer or an electrode so that a functional change occurs only in a corresponding region of the organic material layer or an electrode. It features. The principle of the DLP used in the function change is as follows.

DLP stands for Digital Light Processing and was developed by researchers at Texas Instruments in 1987. The DLP method processes an image through a DMD (Digital Micromirror Device). DMD generally can be composed of a collection of at least 750,000 fine reflectors, and has the advantage that the light efficiency and fine image quality can be represented because the image is displayed using the principle of the reflector.

Compared with the analog method, the digital method can accurately represent a desired image with high reliability and has the advantage of being compact and lightweight. The basic structure of a digital image is a number of zero and one signal combinations. The DMD module, which is the core of DLP technology, can be operated by the combination of the digital signals. In other words, the combination of the digital image signals transmitted from the video memory or the video processor is controlled by the operation of the micro reflector which is a component of the DMD. To express.

For example, the micromirrors of the DMD module may be square in the form of width x 16 microns, and the spacing between each reflector may be very densely configured to less than 1 micrometer. Each micromirror included in the DMD module for performing the DLP expresses the digital image signal by moving both edges of the mirror using digital signals of 0 and 1. Each micromirror may move in the left and right directions, for example, from about 0 ° to about 10 °, and the digital image signal stored in the video memory is transferred to and operated by the driving device of each micromirror. The movement of the mirror is represented by fine pixels, and the contrast of the pixels is expressed on the same principle. A micromirror constituting a DMD module for performing the DLP is illustrated in FIG. 3. However, the size and the moving angle of the micromirror are intended to illustrate the present invention and are not intended to limit the scope of the present invention.

The DLP scheme is similar in principle to the card section of the playing field. The card section expresses the whole image through the uniform movement of each plate. In DMD, each plate is composed of mirrors, and when the light source shines in a certain direction at a predetermined position, the light is reflected by the uniform movement of the mirrors, and the parts transmitted through the lens and the parts that are not transmitted are gathered. The video will be made.

When displaying black and white screens, gray and tone colors should be expressed in addition to black and white. In DMD, these color expressions are expressed in the form of card sections of 0 and 1, which are thousands of times per second. Display. For example, if the DMD reflector makes it possible to finely control the ratio of 0 and 1 at each reflector after 1000 operations in a unit time, the color tone of each pixel can be controlled very precisely. . DMD's micromirror can operate at over 500,000 times per second. This ratio can be felt as the contrast between black and white, and in this way the grayscale screen can be output in pure digital form.

In this principle, the DLP can selectively apply an energy source to the organic material layer or the electrode, thereby selectively changing the function of a predetermined pattern region of the organic material layer or the electrode.

Specifically, in the present invention, a layer for changing the function of the predetermined pattern region may be selected from an organic material layer or an electrode.

In the present invention, when the layer for changing the function of the predetermined pattern region is a charge transport layer, for example, a layer for injecting and / or transporting holes or a layer for injecting and / or transporting electrons in the organic material layer, these layers are formed by the above steps. As the function of the predetermined pattern region is changed, the charge transport efficiency between the predetermined pattern region and the remaining regions is different. Due to the difference in charge transport efficiency to the light emitting layer, light generated from the light emitting layer exhibits a light emission pattern corresponding to a predetermined pattern region of the charge transport layer.

In addition, when the layer in which the function of the predetermined pattern region is changed is a light emitting layer of the organic material layer, a region in which the function is changed and a region in which the function is not changed have different light emission efficiencies. Similar principles apply to the case where the layer in which the function of the predetermined pattern region is changed is an electrode.

In the prior art, in order to manufacture an organic light emitting element having a light emitting pattern, it was necessary to form additional layers other than the layers constituting the organic light emitting element, such as an insulating layer, to have a predetermined pattern. However, in the present invention, unlike the prior art, by including the above steps, a predetermined pattern for one or more layers of the layers constituting the organic light emitting device is not required, without going through the process of forming additional layers or patterning the layers. By changing only the function of the region using the DLP, an organic light emitting device having a light emitting pattern can be manufactured simply. As a result, the present invention can not only increase the process efficiency by greatly simplifying the process step, but also expect to reduce the material cost and the process cost.

The present invention, in addition to the above-described process advantages, the organic light emitting device manufactured by the method of manufacturing an organic light emitting device according to the present invention does not include other layers other than the layer constituting the organic light emitting device originally, as in the prior art By including layers other than the layers constituting the organic light emitting device, it is possible to prevent problems such as deterioration of interfacial characteristics and reduction in luminous efficiency that may occur.

In addition, in the prior art using a patterned insulating layer, the portions where the insulating layer is formed and the portions where the insulating layer is not formed have light emission of 0% and 100%, respectively. . However, according to the present invention, the degree of changing the function of a predetermined pattern region of one or more layers among the layers constituting the organic light emitting diode is finely adjusted using the DLP principle, so that the light emitting pattern of the high / light emitting part as well as A light emission pattern having a gray scale, that is, a rich gradation, in which the degree of light emission is gradually expressed from the middle light emitting part to the low light emitting part can also be realized.

A method of controlling the degree of functional change by DLP is illustrated in FIG. 2. The adjustment principle is as described above. In the present invention, for example, all of the functions of a predetermined pattern region may be changed to have a light emitting pattern in which the intensity of light emission in the region where the function is changed and the region where the function is not changed is expressed on or off. In addition, by adjusting the exposure amount according to the zone so that the degree of change in the function has several stages, it is possible to have a light emission pattern in which two or more different light emission intensities are expressed.

In addition, in the present invention, since the DLP is used as a method of changing the function of a predetermined pattern region of the layer, unlike the prior art in which a mask must be used to form a patterned insulating layer, an organic light emission having a light emitting pattern without a mask is required. The device can be manufactured.

As described above, the layer in which the function of the predetermined pattern region is changed may be one or more layers of the organic material layer. As described above, when the organic light emitting device according to the present invention has an organic material layer having a multilayer structure, the organic material layer in which the function of a predetermined pattern region is changed is selected from a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer. The layer may be a layer that performs at least two of the functions of the layers. It is also not a layer formed for these functions, but may be a layer formed separately for the purpose of the present invention mainly for forming the light emitting pattern. However, in terms of luminous efficiency, the organic material layer is more preferably a layer that performs a function of charge transport, for example, hole injection, hole transport, electron transport, or electron injection. In addition, in the present invention, the layer in which the function of the predetermined pattern region is changed may be an electrode, in which case the electrode may be applied to both the anode, the cathode, or both the anode and the cathode.

For example, the organic material layer whose function may be changed by the aforementioned method may be a layer including the following Chemical Formula 1. The compound of Formula 1 may play a role of hole injection and / or transport in the organic light emitting device, and the region treated by the aforementioned method may partially or completely lose its function. 7 is a graph showing the degree of deformation of the organic material layer containing a compound of formula 1 according to the UV irradiation amount.

[Formula 1]

In Formula 1, R ¹ to R ⁶ are each hydrogen, a halogen atom, nitrile (-CN), nitro (-NO ₂ ), sulfonyl (-SO ₂ R), sulfoxide (-SOR), sulfonamide ( -SO ₂ NR), sulfonate (-SO ₃ R), trifluoromethyl (-CF ₃ ), ester (-COOR), amide (-CONHR or -CONRR '), substituted or unsubstituted straight or branched chain C ₁ -C ₁₂ alkoxy, substituted or unsubstituted straight or branched chain C ₁ -C ₁₂ alkyl, substituted or unsubstituted aromatic or non-aromatic hetero ring, substituted or unsubstituted aryl, substituted or unsubstituted Mono- or di-arylamine, and substituted or unsubstituted aralkylamine, wherein R and R 'are each substituted or unsubstituted C ₁ -C ₆₀ alkyl, substituted or unsubstituted aryl , And substituted or unsubstituted 5-7 membered hetero ring.

The compound of Formula 1 may be selected from compounds represented by the following Formulas 1-1 to 1-6:

[Formula 1-1]

[Formula 1-2]

[Formula 1-3]

[Formula 1-4]

[Formula 1-5]

[Formula 1-6]

In the present invention, the step of changing the function of a predetermined pattern region of one or more layers of the organic material layer or the electrode is that after forming the layer to be deformed, another organic material layer after the formation or after the second electrode is formed It can also be done in stages. However, it is preferable to perform after forming the layer to change the function of the predetermined pattern region and before forming another organic material layer or the second electrode.

In addition, the present invention is an organic light emitting device comprising a first electrode, one or more organic material layer disposed on the first electrode and a second electrode disposed on the organic material layer, a predetermined of one or more layers of the organic material layer or electrode. Provided is an organic light emitting device in which the function of the pattern region is changed using DLP.

The organic light emitting diode of the present invention may have a light emitting pattern in which fine gradation is expressed which is impossible when a pattern is formed using an insulating layer or a pattern is formed by UV exposure using a photomask. The layer in which the function of the predetermined pattern region is changed may be a layer which is not provided with the original layer to correspond to the light emitting region of the organic light emitting device, or may be a layer whose function of the original layer is lost to correspond to the non-light emitting region.

The organic light emitting device according to the present invention may be a top emission type, a bottom emission type or a double-sided emission type according to the material used.

The organic light emitting device of the present invention may be manufactured by a conventional method and material for manufacturing an organic light emitting device, except that the organic light emitting device has a modified part of a function of a region along a predetermined pattern.

In one exemplary embodiment of the present invention, the organic light emitting diode may have a structure including a first electrode, a second electrode, and an organic material layer disposed therebetween. The organic material layer of the organic light emitting device of the present invention may be a single layer structure consisting of one layer, may be a multilayer structure of two or more layers including a light emitting layer. When the organic material layer of the organic light emitting device of the present invention has a multi-layer structure, for example, it may be a structure in which a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and the like are stacked. However, the structure of the organic light emitting device is not limited thereto and may include a smaller number of organic material layers. In the present invention, the layer in which the function of the predetermined pattern region is changed may be an electrode, in which case the electrode may be applied to both the anode, the cathode, or both the anode and the cathode. In addition, the organic light emitting device of the present invention may be an organic light emitting device having a forward structure or an organic light emitting device having a reverse structure.

For example, the organic light emitting device according to the present invention is a metal oxide or a metal oxide or alloy thereof having a conductivity on a substrate by using a physical vapor deposition (PVD) method such as sputtering or e-beam evaporation It can be prepared by depositing an anode to form an anode, an organic material layer including a hole injection layer, a hole transport layer, a light emitting layer and an electron transport layer thereon, and then depositing a material that can be used as a cathode thereon. In addition to the above method, in order to fabricate an organic light emitting device having a reverse structure as described above, an organic light emitting device may be manufactured by sequentially depositing a cathode material, an organic material layer, and an anode material on a substrate.

The organic layer may be formed into a smaller number of layers by using a variety of polymer materials, but not by a deposition process such as spin coating, dip coating, doctor blading, screen printing, inkjet printing or thermal transfer. It can manufacture.

In addition, the present invention,

a) a system control unit for generating a patterned image and controlling the system,

b) UV supply,

c) a DLP system for generating a patterned UV image using the patterned image signal received from the system control unit and the UV received from the UV supply unit and then irradiating the patterned UV image;

d) a sample part in which a target sample to which the patterned UV image irradiated from the DLP system is irradiated is mounted;

It provides an apparatus for providing a light emitting pattern to an organic light emitting device comprising a.

The a) system control unit may generate a image to be patterned and control a system of the entire apparatus, and may use a computer as illustrated in FIG. 4. The system control unit may serve to control the alignment system operation of the sample unit by receiving an alignment key signal from the sample unit in order to align the patterning pattern formed on the sample in the sample unit to be described later.

B) The UV supply unit is a part for irradiating UV to the DLP system. The UV supply unit may be composed of a UV lamp and a UV lamp power supply. In addition, the feedback of the UV intensity irradiated to the actual sample may serve to adjust the UV intensity to a constant intensity.

C) the DLP system receives an image signal to be patterned from the a) system control unit and b) generates unpatterned UV irradiated from the UV supply unit as UV in the form of a patterned image, which is mounted on the sample unit. Function to investigate. The DLP system may be configured with the above-described DMD.

The d) sample portion may be configured as a vacuum chamber where the sample is mounted. The sample unit may include an alignment system for aligning the patterning shape, a sensor for measuring the UV intensity, and the like.

An apparatus for imparting a light emission pattern to the organic light emitting element will be described with reference to FIG. 5. 5 is intended to illustrate the present invention, which is not intended to limit the scope of the present invention.

In the apparatus according to the present invention, b) the UV supply unit may be composed of a UV lamp power supply device and a UV lamp operated by receiving power from the UV lamp power supply device.

The cLP DLP system includes: a) an image processing driver for receiving a patterned image signal from the system controller and converting the patterned image signal into a digital image signal; A DMD module which receives the image signal from the image processing driver and patterns b) the UV supplied from the UV supply unit; A UV projection unit for irradiating UV to the sample unit in the form of a patterned image from the DMD module; B) a UV optical lens positioned between the UV supply unit and the DMD module; And an UV optical lens positioned between the DMD module and the UV projection unit.

The d) sample supporter provided therein; C) a vacuum chamber including a UV optical window provided in an area corresponding to a UV projection part of the DLP system; B) a UV intensity sensor connected with the UV lamp power supply of the UV supply; And it may include a sample alignment system connected to the sample support and the a) system control unit.

Specifically, the device for providing a light emission pattern to the organic light emitting device according to the present invention is driven in the following manner. The system controller receives an alignment key signal to align the patterning pattern formed on the sample, generates a patterned image, and transmits the patterned image to the image processing driver. The image processing driver converts the patterned image signal into a digital image signal and transmits it to the DMD module. The UV supply unit supplies the intensity of the unpatterned UV through the UV optical film to the DMD module. The DMD module receives the digital image signal and the unpatterned UV, converts the UV into a patterned UV image, and mounts it in a sample chamber composed of a vacuum chamber through a UV optical film, a UV projection unit, and a UV optical window. The prepared sample. The sample alignment system of the sample unit receives an alignment key signal to align the patterning pattern formed on the sample and transmits the alignment key signal to the system control unit, whereby the system control unit controls the align system driving. In addition, the UV intensity sensor of the sample unit measures the intensity of the UV, and transmits this signal to the UV power supply so that the UV intensity can be adjusted. 6 illustrates a driving principle of an apparatus for providing a light emitting pattern to the organic light emitting diode.

1 is a cross-sectional view showing an organic light emitting device including a conventional patterned insulating layer.

FIG. 2 is a cross-sectional view illustrating a process of transforming an organic material layer in the shape of a digital patterned image formed by adjusting exposure degree by zone using DLP.

Figure 3 is an enlarged view of the operation of the micro mirror constituting a digital micromirror device (DMD) for performing the DLP with a microscope.

4 is a schematic diagram of an apparatus using DLP.

5 is a detailed view of the apparatus using the DLP.

6 is a schematic diagram showing a driving principle of a device using a DLP.

7 is a graph of the degree of deformation of the organic material layer according to the UV irradiation amount.

[Description of reference numerals for the main parts of the drawings]

10; Board

20; First electrode

30; Insulation layer

50; Light emitting layer

40, 45, 60, 65; Organic layer other than the light emitting layer

70; Second electrode

Claims (15)

A method of manufacturing an organic light emitting device, comprising: preparing a first electrode, forming at least one organic layer on the first electrode, and forming a second electrode on the organic layer, Changing a function of a predetermined pattern region of one or more layers of the organic material layer or the electrode by using a DLP, Method for manufacturing an organic light emitting device, characterized in that the layer in which the function of the predetermined pattern region is changed to the compound of the formula (1): [Formula 1]

In Formula 1, R ¹ to R ⁶ are each hydrogen, a halogen atom, nitrile (-CN), nitro (-NO ₂ ), sulfonyl (-SO ₂ R), sulfoxide (-SOR), sulfonamide ( -SO ₂ NR), sulfonate (-SO ₃ R), trifluoromethyl (-CF ₃ ), ester (-COOR), amide (-CONHR or -CONRR '), substituted or unsubstituted straight or branched chain C ₁ -C ₁₂ alkoxy, substituted or unsubstituted straight or branched chain C ₁ -C ₁₂ alkyl, substituted or unsubstituted aromatic or non-aromatic hetero ring, substituted or unsubstituted aryl, substituted or unsubstituted Mono- or di-arylamine, and substituted or unsubstituted aralkylamine, wherein R and R 'are each substituted or unsubstituted C ₁ -C ₆₀ alkyl, substituted or unsubstituted aryl , And substituted or unsubstituted 5-7 membered hetero ring. The method of claim 1, wherein the changing of the function of a predetermined pattern region of one or more layers of the organic material layer or the electrode comprises assigning a function to the region or changing the function so that the region of which the function is changed corresponds to the light emitting region of the organic light emitting device. A method for manufacturing an organic light emitting device, characterized in that for changing the region to lose the function of the region corresponding to the non-emitting region. The method of claim 1, wherein the layer in which the function of the predetermined pattern region is changed is an organic light emitting device, characterized in that the organic material layer having at least one function selected from a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer. Way. delete The method of claim 1, wherein the layer in which the function of the predetermined pattern region is changed is an anode, a cathode, or both an anode and a cathode. The method according to claim 1, wherein the step of changing the function of a predetermined pattern region of one or more layers of the organic material layer or the electrode is performed after forming a layer in which the function of the predetermined pattern region is changed and before forming another layer thereon. Method of manufacturing phosphorescent organic light emitting device. An organic light emitting device comprising a first electrode, at least one organic layer disposed on the first electrode, and a second electrode disposed on the organic layer, wherein a function of a predetermined pattern region of at least one layer of the organic layer or the electrode is performed by DLP. To change, An organic light emitting device, characterized in that the layer in which the function of the predetermined pattern region is changed is an organic material layer comprising a compound of Formula 1 below: [Formula 1]

In Formula 1, R ¹ to R ⁶ are each hydrogen, a halogen atom, nitrile (-CN), nitro (-NO ₂ ), sulfonyl (-SO ₂ R), sulfoxide (-SOR), sulfonamide ( -SO ₂ NR), sulfonate (-SO ₃ R), trifluoromethyl (-CF ₃ ), ester (-COOR), amide (-CONHR or -CONRR '), substituted or unsubstituted straight or branched chain C ₁ -C ₁₂ alkoxy, substituted or unsubstituted straight or branched chain C ₁ -C ₁₂ alkyl, substituted or unsubstituted aromatic or non-aromatic hetero ring, substituted or unsubstituted aryl, substituted or unsubstituted Mono- or di-arylamine, and substituted or unsubstituted aralkylamine, wherein R and R 'are each substituted or unsubstituted C ₁ -C ₆₀ alkyl, substituted or unsubstituted aryl , And substituted or unsubstituted 5-7 membered hetero ring. The organic light emitting diode of claim 7, wherein the layer having the changed function of the predetermined pattern region is a layer which is provided with a function not existing in the original layer so as to correspond to the light emitting region of the organic light emitting diode, or whose function is lost to correspond to the non-light emitting region. . The organic light emitting device of claim 7, wherein the layer of which the function of the predetermined pattern region is changed is an organic material layer having at least one function selected from a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer. delete The organic light emitting device according to claim 7, wherein the layer in which the function of the predetermined pattern region is changed is an anode, a cathode, or both an anode and a cathode. a) a system control unit for generating a patterned image and controlling the system, b) UV supply, c) a DLP system for generating a patterned UV image using the patterned image signal received from the system control unit and the UV received from the UV supply unit and then irradiating the patterned UV image; d) a sample part in which a target sample to which the patterned UV image irradiated from the DLP system is irradiated is mounted; Apparatus for providing a light emitting pattern to the organic light emitting device comprising a. The apparatus of claim 12, wherein b) the UV supply unit comprises a UV lamp power supply device and a UV lamp. The method according to claim 12, wherein c) The DLP system comprises: a) an image processing driver for receiving a patterned image signal from the system control unit and converting it into a digital image signal; A DMD module which receives the image signal from the image processing driver and patterns b) the UV supplied from the UV supply unit; A UV projection unit for irradiating UV to the sample unit in the form of a patterned image from the DMD module; B) a UV optical lens positioned between the UV supply unit and the DMD module; And a UV optical lens positioned between the DMD module and the UV projection unit. The method according to claim 12, wherein d) the sample unit sample support provided therein; C) a vacuum chamber including a UV optical window provided in an area corresponding to a UV projection part of the DLP system; B) a UV intensity sensor connected with the UV lamp power supply of the UV supply; And a sample alignment system connected to the sample support and the a) system control unit.

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