KR100982772B1 - Apparatus of supplying chemical liquid and apparatus for processing a substrate having the same - Google Patents

Abstract

A chemical liquid supply apparatus and a substrate processing apparatus having the same are disclosed. The chemical liquid supply apparatus includes a driving unit generating a rotational force, a first disk which is rotated by the rotational force of the driving unit, and includes a plurality of first magnetic members, and a plurality of first disks disposed to face the first disk and corresponding to the first magnetic members. A second disk having a second magnetic member to receive rotational force from the first disk in a non-contact state, a shaft connected to the second disk to rotate, a chemical liquid for injecting the chemical liquid to the substrate, extending in a direction perpendicular to the shaft And a worm gear unit that connects the injection tube, the shaft and the chemical injection tube, and transmits the rotational force of the shaft to the chemical injection tube so that the chemical injection tube can swing. Therefore, it is possible to reduce the occurrence of load in the process of transmitting the power for rocking the chemical injection pipe to improve the risk of damage to the device and the power loss.

Description

Apparatus of supplying chemical liquid and apparatus for processing a substrate having the same

The present invention relates to a chemical liquid supply apparatus and a substrate processing apparatus having the same, and more particularly, to a chemical liquid supply apparatus for treating a substrate by spraying the chemical liquid to the substrate and a substrate processing apparatus having the same.

Typical substrate processing apparatuses are used for processing silicon wafers used in the manufacture of chips with semiconductor integrated circuits or glass substrates used in the manufacture of flat panel displays. Among such substrate processing apparatuses, wet processing apparatuses use various chemical and organic solutions and chemical liquids containing deionized water on the substrate to process the substrate. For example, a wet cleaning apparatus used in the field of flat panel display manufacturing supplies a chemical liquid such as a cleaning liquid, an etching liquid, and the like on a glass substrate to remove foreign substances remaining on the surface of the substrate.

Such a wet processing apparatus includes a chemical liquid supply device for supplying a chemical liquid to a substrate. The chemical liquid supply apparatus includes a chemical liquid injection tube having a plurality of nozzles or injection holes for substantially injecting the chemical liquid. In recent years, in order to improve the treatment efficiency by chemical liquid injection, a method of injecting the chemical liquid while the chemical liquid injection tube is swung has been used.

As described above, the method for oscillating the chemical liquid injection tube is configured to oscillate the chemical liquid injection tube by changing the linear motion of the crank into the rotational motion of the rotating body by eccentrically connecting the crank linearly moved by the driving unit and the rotating body installed in the chemical liquid injection tube. Has

However, the method of rocking the chemical liquid injection tube using the crank and the rotating body has a problem of causing a power loss due to a load caused by the forced restraint of the crank and the rotating body. In addition, there is a problem that the crank and the rotor can be damaged by the load.

Therefore, one problem to be solved by embodiments of the present invention is to provide a chemical liquid supply device capable of rocking operation of the chemical liquid injection pipe while reducing the risk of damage and power loss of the device by reducing the load generated in the process of transmitting power will be.

In addition, another problem to be solved through embodiments of the present invention is to provide a substrate processing apparatus including the aforementioned chemical liquid supply device as a member.

In order to achieve the above object of the present invention, the chemical liquid supply apparatus includes a driving unit, a first disk, a second disk, a shaft, a chemical liquid injection tube, and a worm gear unit. The drive unit generates a rotational force. The first disk is rotated by the rotational force and includes a plurality of first magnetic members. The second disk is disposed to face the first disk and includes a plurality of second magnetic members corresponding to the first magnetic member to receive rotational force from the first disk in a non-contact state. The shaft rotates in connection with the second disk. The chemical liquid injection tube extends in a direction perpendicular to the shaft and injects the chemical liquid to the substrate. The worm gear unit connects the shaft and the chemical liquid injection tube and transmits the rotational force of the shaft to the chemical liquid injection tube so that the chemical liquid injection tube can swing.

According to one embodiment of the chemical liquid supply device the worm gear unit is

It may include a worm (rot) installed on the shaft and the worm gear installed in the chemical liquid injection tube and rotates in vertical rotation with the worm.

According to another embodiment, the rotational force generated by the driving unit is periodically reversed in rotation so that the chemical liquid injection tube oscillates.

According to another embodiment, the first magnetic member and the second magnetic member may be permanent magnets.

In order to achieve the above object of the present invention, a substrate processing apparatus according to the present invention includes a chamber for providing a processing space of a substrate, a transfer unit disposed inside the chamber to transfer the substrate in one direction, and transferred by the transfer unit. And a chemical liquid supply for injecting the chemical liquid to the substrate. The chemical liquid supply unit includes a driving unit, a first disk, a second disk, a shaft, a chemical liquid injection tube, and a worm gear unit. The driving unit generates a driving force. The first disk is rotated by the driving force, is disposed outside the chamber, and has a plurality of first magnetic members. The second disk has a plurality of second magnetic members disposed in the chamber facing the first disk and corresponding to the first magnetic member to receive rotational force from the first disk in a non-contact state. The shaft rotates in connection with the second disk. The chemical liquid injection tube extends in a direction perpendicular to the shaft and injects the chemical liquid to the substrate. The worm gear unit connects the shaft and the chemical liquid injection tube and transmits the rotational force of the shaft to the chemical liquid injection tube so that the chemical liquid injection tube can swing.

According to an embodiment of the substrate processing apparatus, the chemical liquid injection tube may extend in a direction in which the substrate is transferred and swing in a direction perpendicular to the direction in which the substrate is transferred.

According to another embodiment, the substrate processing apparatus may further include a chemical liquid supply pipe for supplying the chemical liquid to the chemical liquid injection tube, and a coupler connecting the chemical liquid injection tube and the chemical liquid supply tube to allow the chemical liquid injection tube to swing. .

The chemical liquid supplying device and the substrate processing apparatus having the same according to the present invention configured as described above have the first and second disks having a magnetic member and a worm gear unit having a rotational force generated by a driving unit to oscillate the chemical liquid injection tube for injecting the chemical liquid into the substrate. By providing to the chemical liquid injection pipe through it is possible to reduce the occurrence of load between each member. Therefore, it is possible to reduce the power loss by the load and to reduce the risk of breakage of the device.

Hereinafter, a chemical liquid supply apparatus and a substrate processing apparatus having the same will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structure is shown to be larger than the actual size for clarity of the invention, or to reduce the actual size to illustrate the schematic configuration. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

1 is a view schematically showing a chemical liquid supply apparatus according to an embodiment of the present invention, Figure 2 is a view schematically showing a side view of the first disk of FIG.

1 and 2, the chemical liquid supply apparatus 100 according to an embodiment of the present invention may include a driving unit 110, a first disk 120, a second disk 130, a shaft 140, and a chemical liquid powder. And a worm 150 and a worm gear unit 160. The chemical liquid supply apparatus 100 may be used to inject the chemical liquid for the process treatment to the substrate (G). Here, the substrate G may be a glass substrate used to manufacture a flat panel display device, or may be a semiconductor substrate such as a silicon wafer for manufacturing a semiconductor device.

The drive unit 110 generates a rotational force. For example, the driving unit 110 may be formed of a driving motor generating a rotational force. In this case, the driving unit 110 may include a servo motor capable of precisely controlling the rotational force among the driving motors.

The first disk 120 is connected to the driving unit 110, and rotates by the rotational force of the driving unit 110. For example, the first disk 120 is connected to one side of the rotation shaft 112 of the driving unit 110 to rotate. The first disk 120 is disposed outside the chamber 200 in which the process is performed on the substrate G, and one plane is disposed to face the sidewall of the chamber 200.

The first disk 120 serves to provide a rotational force for oscillating the chemical liquid injection tube 150 into the chamber 200 in a state disposed outside the chamber 200. To this end, the first disk 120 includes a plurality of first magnetic members 122. Here, the first magnetic members 122 may be, for example, permanent magnets. The first magnetic members 122 may be disposed along the circumferential direction of the first disk 120 as shown in FIG. 2. As such, all of the first magnetic members 122 disposed along the circumferential direction of the first disk 120 may have the same polarity. Alternatively, the first magnetic members 122 may have different polarities between adjacent first magnetic members 122 such that polarities are reversed along the circumferential direction of the first disk 122.

The second disk 130 is disposed to face the first disk 120. For example, the second disk 130 is disposed inside the chamber 200, and one plane is disposed to face the side wall of the chamber 200. Therefore, the first disk 120 and the second disk 130 are disposed to face each other with the side wall of the chamber 200 interposed therebetween.

The second disk 130 receives the rotational force from the first disk 120. To this end, the second disk 130 includes a plurality of second magnetic members 132 corresponding to the first magnetic members 122. Here, the second magnetic members 132 may be, for example, permanent magnets. The second magnetic members 132 are provided in a number corresponding to the first magnetic members 122, and the second magnetic members 132 are positioned to face each other in a one-to-one correspondence with the first magnetic members 122. That is, the second magnetic members 132 are disposed along the circumferential direction of the second disk 130. In addition, the first magnetic member 122 and the second magnetic member 132 positioned to face each other have different polarities so that an attractive force (for example, a pulling force) acts. As described above, the first disk 120 and the second disk 130 are bound in the non-contact state by the attraction force between the first magnetic member 122 and the second magnetic member 132. Therefore, as the first disk 120 rotates by the rotational power of the driving unit 110, the second disk 130 also rotates along the first disk 120, thereby transmitting rotational force in a non-contact state.

The shaft 140 is connected to the second disk 130. The shaft 140 extends in one direction and is rotatably supported by the plurality of bearings 142. The shaft 140 rotates together as the second disk 130 rotates by the rotational force transmitted from the first disk 120.

The chemical liquid injection tube 150 extends in a direction perpendicular to the extending direction of the shaft 140. The chemical liquid injection tube 150 is disposed on the substrate G and serves to inject the chemical liquid to the substrate G. To this end, the chemical liquid injection tube 150 is connected to an external chemical liquid supply source (not shown), and has a plurality of nozzles 152 formed to face the substrate G to directly inject the chemical liquid. Alternatively, the chemical liquid injection tube 150 may be provided with a slit-shaped injection hole (not shown) for directly injecting the chemical liquid. Such a chemical liquid injection tube 150 may be provided along the extending direction of the shaft 140 in some cases.

The worm gear unit 160 connects the shaft 140 and the chemical liquid injection tube 150. The worm gear unit 160 serves to transmit the rotational force of the shaft 140 to the chemical liquid injection tube 150. That is, the worm gear unit 160 transmits rotational force between the shaft 140 and the chemical injection tube 150 disposed perpendicular to each other to rotate the chemical injection tube 150.

The worm gear unit 160 includes a worm 162 installed in the shaft 140 and a wheel worm gear 164 installed in the chemical liquid injection tube 150 and engaged with the worm 162 to rotate. The worm 162 has one or several rows of threads. Worm gear 164 has a plurality of gear teeth on the outer circumferential surface, the gear teeth are engaged with the thread of the worm 162 to rotate.

As a result, when the rotational force generated by the driving unit 110 rotates the shaft 140 through the first disk 120 and the second disk 130, the worm 162 installed on the shaft 140 is rotated and the worm ( The 162 rotates the worm gear 164 to rotate the chemical liquid injection tube 150.

On the other hand, the driving unit 110 inverts the rotation direction of the rotational force generated to swing the chemical liquid injection tube 150 periodically.

Hereinafter, the rocking operation of the chemical liquid injection pipe 150 will be described schematically.

3A and 3B are schematic views for explaining the fluctuation of the chemical liquid injection tube of FIG. 1.

Referring to FIG. 3A, first, the driving unit 110 generates a rotational force in a clockwise direction. The clockwise rotational force generated by the driving unit 110 rotates the shaft 140 in the clockwise direction through the first disk 120 and the second disk 130. As the shaft 140 rotates clockwise, the worm 162 is rotated clockwise, and the worm gear 164 rotates along the thread of the worm 162 to rotate the chemical liquid injection tube 150 in one direction. . As a result, the injection direction of the nozzle 152 provided in the chemical liquid injection pipe 150 is gradually changed to the left direction.

Referring to FIG. 3B, the driving unit 110 reverses the direction of the rotational force after a predetermined period. That is, the driving unit 110 generates the rotational force in the counterclockwise direction. The counterclockwise rotational force generated by the driving unit 110 rotates the shaft 140 counterclockwise. Therefore, the worm 162 is rotated in the counterclockwise direction, the worm gear 164 is rotated along the thread of the worm 162 to rotate the chemical liquid injection tube 150 in the opposite direction to the one direction. As a result, the injection direction of the nozzle 152 provided in the chemical liquid injection pipe 150 is gradually changed to the right direction.

As such, the rotational direction of the chemical liquid injection tube 150 is determined according to the direction of the rotational force generated by the driving unit 110, and the chemical liquid injection tube 150 oscillates as the driving unit 110 periodically inverts the direction of the rotational force. Done.

At this time, the swing angle of the chemical liquid injection tube 150 may be controlled according to the reversal period of the rotational force generated by the driving unit 110. That is, when the driving unit 110 shortens the inversion period of the rotational force, the swing angle of the chemical liquid injection tube 150 is reduced. On the contrary, when the driving unit 110 prolongs the inversion period of the rotational force, the swing angle of the chemical liquid injection tube 150 becomes large. As a result, the chemical liquid supply apparatus 100 according to the present exemplary embodiment has an advantage of easily controlling the magnitude of the swing angle of the chemical liquid injection tube 150 by controlling the inversion period of the rotational force generated by the driving unit 110. .

Hereinafter, the substrate processing apparatus including the mentioned chemical liquid supply apparatus 100 as a member will be described.

4 is a schematic view of a substrate processing apparatus according to an embodiment of the present invention.

Here, since the chemical liquid supply unit illustrated in FIG. 4 is substantially the same as the chemical liquid supply apparatus described with reference to FIG. 1, the same reference numerals are used for the same members, and a detailed description thereof will be omitted.

The substrate processing apparatus 10 may include a chamber 200 that provides a process space, a transfer unit 300 that transfers the substrate G inside the chamber 200, and a chemical liquid that injects the chemical liquid into the transferred substrate G. And a supply unit 100.

The chamber 200 provides a space for process processing of the substrate G. The inside of the chamber 200 is treated with a substrate G using a chemical liquid, and examples of the chemical liquid for processing the substrate G may include a cleaning liquid and an etching liquid. As such, the transfer unit 300 for transferring the substrate G and the chemical solution supply unit 100 for injecting the chemical liquid to the substrate G are disposed in the chamber 200 for processing the substrate G. do.

The transfer unit 300 serves to transfer the substrate G in one direction in the chamber 100. The transfer unit 300 includes a plurality of transfer shafts 310 arranged along the transfer direction of the substrate G, for example. The transfer shafts 310 extend in a direction perpendicular to the direction in which the substrate G is transferred, and are disposed in parallel to each other. Each of the transfer shafts 310 includes a plurality of transfer rollers 320 partially surrounding the transfer shaft 310 and directly contacting a portion of the lower surface of the substrate G to transfer the substrate G. That is, as the feed shaft 310 rotates, the feed rollers 320 also rotate, and the transfer of the substrate G in contact with the feed roller 320 is performed by the rotation of the feed rollers 320. To this end, although not shown, the feed shaft 310 is provided with a rotational force from an external power source.

The chemical liquid supply part 100 injects the chemical liquid to the substrate G transferred by the transfer unit 300. In particular, the chemical liquid injection pipe 150 for injecting the chemical liquid is injected while the chemical liquid is injected to the substrate (G).

The chemical liquid supply unit 100 includes a driving unit 110, a first disk 120, a second disk 130, a shaft 140, a chemical liquid injection tube 150, and a worm gear unit 160. The description for is substantially the same as the description above.

In addition, the chemical liquid supply unit 100 is connected to the chemical liquid supply source 172 disposed outside the chamber 200 and the chemical liquid supply source 172 to supply the chemical liquid to the chemical liquid injection tube 150, the interior of the chamber 200 It further includes a chemical solution supply pipe 174 and a coupler 176 connecting the chemical liquid supply pipe 174 and the chemical liquid injection pipe 150. The chemical liquid supply pipe 172 extends in a direction perpendicular to the extending direction of the chemical liquid injection tube 150, and is connected to one side of the chemical liquid injection tube 150, for example. The coupler 176 connects the chemical liquid injection pipe 150 which is oscillated and the chemical liquid supply pipe 174 fixedly installed to supply the chemical liquid.

Meanwhile, the worm gear unit 160 connecting the shaft 140 and the chemical liquid injection tube 150 is positioned at the center of the chemical liquid injection tube 150 so that the rotational force is uniformly transmitted to the chemical liquid injection tube 150. Alternatively, the worm gear unit 160 may be located at one side of the chemical liquid injection tube 150.

As described above, the chemical liquid supply apparatus and the substrate processing apparatus having the same according to the preferred embodiment of the present invention transfer the rotational force of the driving unit to the chemical liquid injection tube through the first and second disks and the worm gear unit provided with the magnetic member. The chemical liquid injection tube is rotated, and the driving unit swings the chemical liquid injection tube by periodically inverting the rotational force. Therefore, the occurrence of load between each member is reduced to reduce power loss, and the risk of breakage of each member due to the load is reduced.

In addition, since the swing angle of the chemical liquid injection tube is controlled according to the reversal period of the rotational force generated by the driving unit, the swing angle of the chemical liquid injection tube can be changed, and the swing angle can be easily changed.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a view schematically showing a chemical liquid supply apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic side view of the first disk of FIG. 1. FIG.

3A and 3B are schematic views for explaining the fluctuation of the chemical liquid injection tube of FIG. 1.

4 is a schematic view of a substrate processing apparatus according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100: chemical supply device 110: drive unit

120: first disk 122: first magnetic member

130: second disk 132: second magnetic member

140: shaft 142: bearing

150: chemical liquid injection pipe 152: nozzle

160: worm gear unit 162: worm

164: worm gear 172: chemical supply source

174: chemical supply pipe 176: coupler

200: chamber 300: transfer part

310: feed shaft 320: feed roller

Claims (7)

A driving unit generating a rotational force; A first disk that is rotated by the rotational force and includes a plurality of first magnetic members; A second disk disposed to face the first disk and having a plurality of second magnetic members corresponding to the first magnetic member to receive rotational force from the first disk in a non-contact state; A shaft connected to the second disk and rotating; A chemical liquid injection tube extending in a direction perpendicular to the shaft and for injecting the chemical liquid to the substrate; And A worm gear unit which connects the shaft and the chemical liquid injection tube and transmits the rotational force of the shaft to the chemical liquid injection tube so that the chemical liquid injection tube can swing. The rotational force generated by the drive unit is a chemical liquid supply device, characterized in that the rotational direction is reversed periodically so that the chemical liquid injection pipe swings. The worm gear unit of claim 1, wherein A worm installed on the shaft and rotating; And And a worm gear installed in the chemical liquid injection tube and rotating in engagement with the worm. delete The chemical liquid supply apparatus according to claim 1, wherein the first magnetic member and the second magnetic member are permanent magnets. A chamber providing a processing space for the substrate; A transfer unit disposed in the chamber to transfer the substrate in one direction; And A chemical liquid supply unit for injecting the chemical liquid to the substrate conveyed by the transfer unit, The chemical liquid supply unit A driving unit generating a driving force; A first disk rotating in response to the driving force and disposed outside the chamber and having a plurality of first magnetic members; A second disk disposed in the chamber facing the first disk and having a plurality of second magnetic members corresponding to the first magnetic member to receive rotational force from the first disk in a non-contact state; A shaft connected to the second disk and rotating; A chemical liquid injection tube extending in a direction perpendicular to the shaft and for injecting the chemical liquid to the substrate; And A worm gear unit which connects the shaft and the chemical liquid injection tube and transmits the rotational force of the shaft to the chemical liquid injection tube so that the chemical liquid injection tube can swing. The rotational force generated by the drive unit is a substrate processing apparatus, characterized in that the rotational direction is reversed periodically so that the chemical liquid injection tube swings. The substrate processing apparatus of claim 5, wherein the chemical liquid injection tube extends in the direction in which the substrate is transferred, and swings in a direction perpendicular to the direction in which the substrate is transferred. According to claim 5, Chemical liquid supply pipe for supplying a chemical liquid to the chemical liquid injection pipe; And And a coupler connecting the chemical liquid injection tube and the chemical liquid supply tube to allow the chemical liquid injection tube to swing.

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