KR100962635B1 - Illumination unit and test apparatus having the same - Google Patents

Abstract

The illumination unit has a through-hole, and can be inclined from the inner wall of the cylindrical structure to the through-hole of the cylindrical structure with a part fixed to the inner wall of the cylindrical structure in which the inspection object is placed in the through-hole. And a light source installed in the inner frame to irradiate light to the test object positioned in the through-hole of the cylindrical structure and the cylindrical structure, and irradiated from the light source when the test object is inspected according to the inclination of the inner frame. It is a feature that it is possible to vary the irradiation angle of light. Therefore, the present invention can be applied to inspection of inspection objects of various sizes.

Description

Lighting unit and test apparatus having the same {Illumination unit and test apparatus having the same}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, and more particularly, to a lighting unit used for inspecting the appearance of a semiconductor device and an inspection apparatus including the same.

As the degree of integration of semiconductor integrated circuit devices increases, more input / output pins and more efficient heat dissipation are required. Therefore, BGA (Ball Grid Array) type semiconductor packages have been put into practical use.

During the manufacturing of the BGA type semiconductor package, a die attach process of stacking dies on a wiring board and a wire bonding process of wire bonding to electrically connect the wiring board and the dies are performed. In this case, a defect in which the semiconductor chip is not mounted on the wiring substrate (hereinafter referred to as 'no-die defect') may occur due to a defective wiring board, a die attach process defect, or a wire bonding process defect.

An inspection apparatus is used to detect a defect of the semiconductor package such as the nodie defect. The inspection apparatus includes an illumination unit for irradiating light to the inspection object, and an imaging unit for imaging the inspection object by using light emitted from the illumination unit.

On the other hand, as various kinds of semiconductor packages have been recently developed, the size of semiconductor packages has also changed in various ways.

However, in general, since the illumination unit is manufactured so that the area to which light is irradiated is fixed, there is a problem in that the angle optimized for the inspection object needs to be measured and manufactured again when the size and volume of the semiconductor package change.

In view of the above-mentioned problems, one problem to be solved through embodiments of the present invention is to provide an illumination unit that is capable of varying an irradiation angle of light irradiated to an inspection object.

Another problem to be solved through embodiments of the present invention is to provide an inspection apparatus including the aforementioned lighting unit as a member.

In order to achieve the above object of the present invention, the lighting unit according to the present invention includes an outer frame, an inner frame and a light source. The outer frame has a through hole and has a cylindrical structure in which a test object is placed in the through hole. The inner frame may be inclined from the inner wall of the cylindrical structure to the through hole of the cylindrical structure in a state where a portion of the inner frame is fixed to the inner wall of the cylindrical structure. The light source is installed in the inner frame to irradiate light to a test object located in the through hole of the cylindrical structure. Here, according to the inclination of the inner frame, it is possible to vary the irradiation angle of the light irradiated from the light source when inspecting the inspection object.

According to an embodiment of the present invention, a plurality of light sources may be installed on one surface of the inner frame and include a light emitting diode as the light source.

According to another embodiment of the present invention, a plurality of the inner frame may be connected along the circumference of the through hole provided in the outer frame.

According to another embodiment of the present invention, a sub-light source is provided below the outer frame, and has a cylindrical structure having a through hole, and a sub light source installed on the inner wall of the sub-frame so that light can be irradiated to the inspection object. It may further include.

In order to achieve the above object of the present invention, the inspection apparatus according to the present invention may include a stage, an illumination unit, an imaging unit, and a display unit. The stage supports the test object. The wing lighting unit has a through hole, and is formed from an outer frame of the cylindrical structure in which the test object supported by the stage is placed in the through hole, and from an inner wall of the cylindrical structure with a part fixed to the inner wall of the cylindrical structure. An inner frame capable of being tilted into the through-hole of the cylindrical structure, and a light source installed in the inner frame to irradiate light to a test object located in the through-hole of the cylindrical structure, the inclination of the inner frame It is possible to vary the irradiation angle of the light irradiated from the light source when inspecting the inspection object according to the load. The imaging unit generates an image signal by using the light reflected from the test object supported by the stage. The display unit implements an image using the image signal generated by the imaging unit.

The illumination unit and the inspection apparatus including the same according to the present invention configured as described above may be used for inspecting an inspection object of various sizes by changing an irradiation region of light to be irradiated to the inspection object, thereby changing a region to which light is irradiated.

Hereinafter, a lighting unit and an inspection apparatus including the same according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the invention, and are actually shown in a smaller scale than the actual dimensions in order to explain the schematic configuration.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Lighting unit

1 is a perspective view illustrating a lighting unit according to an exemplary embodiment of the present invention, and FIGS. 2 and 3 are cross-sectional views taken along the line II ′ of FIG. 1.

The illumination unit 100 according to an embodiment of the present invention may be used to irradiate light to an inspection object in performing vision inspection.

1 to 3, the lighting unit 100 according to an embodiment of the present invention includes an outer frame 110, an inner frame 120 and an inner frame located inside the outer frame 110. It is installed on the 120 includes a light source 130 for generating light to enable irradiation of light to the test object (P).

The outer frame 110 may have a cylindrical structure having a through hole. An inspection object may be placed in the through hole of the outer frame 110. For example, the outer frame 110 forms an accommodation space in which the test object P is placed. The outer frame 110 may have another shape having a through hole in addition to the cylindrical structure.

Here, the test object (P) is a wiring board (PCB) used to individualize an individual integrated circuit chip (bare chip) made on a silicon wafer through a fab process (fab) or the integrated circuit using the wiring board It may be a semiconductor package in which chips are individualized. In particular, it may be a ball grid array (BGA) type semiconductor package using solder balls or a wiring board used therein.

The inner frame 120 is installed inside the outer frame 110. The inner frame 120 is installed at a position higher than the position where the test object P is placed on the outer frame 110.

The inner frame 120 is installed to be inclined from the inner wall of the cylindrical structure to the through-hole of the outer frame while a portion (for example, one side) is fixed to the inner wall of the cylindrical structure of the outer frame 110. . For example, the inner frame 120 has one side connected to an inner wall of the outer frame 110, and the other side facing one side connected to the inner wall of the outer frame 110 has an inner portion of the outer frame 110. Inclination is possible from the side wall to the through hole. That is, the inclination allows the inner frame 120 to vary the angle formed with the inner wall of the outer frame 110.

The inner frame 120 according to an embodiment may have a bar shape of a square or trapezoidal shape. The length of the inner frame 120 may have a length shorter than the radius of the outer frame 110. In contrast, the inner frame 120 may have various shapes. The inner frame 120 is connected such that one end of the bar shape is connected to the inner wall of the outer frame 110, and the other end facing the inner frame 120 is directed toward the center point of the outer frame 110. In addition, a plurality of the inner frame 120 is connected along the circumference of the through hole of the outer frame 110. That is, a plurality of inner frames 120 may be installed on the inner wall of the outer frame 110 to form a conical shape as a whole.

The light source 130 is installed in the inner frame 120 to irradiate light to the inspection object P located in the through hole of the outer frame 110. For example, the light source 130 may be installed on the lower surface of the inner frame 120. The light source 130 irradiates light to the test object P when performing the test of the test object P positioned in the through-hole of the outer frame 110.

A plurality of light sources 130 may be installed on the lower surface of the inner frame 120. When a plurality of light sources 130 are installed in the inner frame 120, the light sources 130 may be arranged along the radial direction of the outer frame 110. One example of the light source 130 includes a luminescent diode (LED).

Here, it is possible to vary the angle at which light is irradiated from the light source 130 to the inspection object P according to the inclination of the inner frame 120 in which the light source 130 is installed. This means that the area where the light is irradiated from the light source 130 can be changed. Through this, the light can be irradiated to be suitable for the inspection object P having various sizes (or volumes) without replacing the unit.

For example, when the size (or volume) of the test object P is relatively large, the degree of inclination of the inner frame 120 from the inner wall of the outer frame 110 is increased as shown in FIG. 2. Change it. As a result, the direction in which the light is irradiated from the light source 130 is changed closer to the normal direction of the inspection object P, thereby increasing the area to which the light is irradiated.

On the other hand, when the size (or volume) of the inspection object P is relatively small, as shown in the drawing of FIG. 3, the degree of inclination of the inner frame 120 from the inner wall of the outer frame 110 is changed small. do. As a result, the direction in which the light is irradiated from the light source 130 is changed to be close to the direction horizontal to the inspection object P, whereby the area irradiated with the light is reduced by concentrating the light emitted from the light source 130. Done.

As a result, by implementing a tilt angle of the inner frame 120 by the irradiation angle of the light most suitable for the size (or volume) of the inspection object (P) and the corresponding irradiation area of the light, the inspection object (P) of various sizes The light can be irradiated to suit the inspection.

Although not shown, the lighting unit 100 may include an inclination controller that may change the degree of inclination of the inner frame 120 from the inner wall of the outer frame 110. According to an embodiment, the inclination adjustment unit may include an adjustment wheel installed in the outer frame 110. That is, the inclination of the inner frame 120 may be variable as the control wheel is rotated.

Here, since a variety of methods are known for changing the inclination through the adjusting wheel, a detailed description thereof will be omitted.

On the other hand, the lighting unit 100 according to an embodiment of the present invention further includes a sub-frame 150 positioned below the outer frame 110 and a sub-light source 160 installed in the sub-frame 160. It may include.

The subframe 150 may have a cylindrical structure having a through hole. That is, the subframe 150 may have a shape similar to that of the outer frame 110. The subframe 150 is installed below the outer frame 110, and is positioned such that the through hole of the sub frame 150 coincides with the through hole of the outer frame 110. In addition, the diameter of the sub-frame 150 may be the same as the diameter of the outer frame (110). The subframe 150 may be integrally formed with the outer frame 110 or may be separately formed and combined.

The sub light source 160 is installed in the sub frame 150 to enable irradiation of light to the inspection object. That is, it is installed on the inner wall of the sub frame 150. The sub light source 160 serves to irradiate the test object P with the light source 130 installed in the inner frame 120 when the test object P is inspected.

Here, when the light source 130 installed in the inner frame 120 irradiates light from an oblique direction of the inspection object (P), the sub light source 160 serves to irradiate light from a more horizontal direction than that. do. A plurality of sub light sources 160 may be installed along the circumference of the sub frame 150, and the sub light sources 160 may be formed of the same member as the light source 130.

As mentioned, the illumination unit 100 according to the present invention may irradiate light to be suitable for the inspection object P of various sizes by varying an irradiation angle at which light is irradiated.

Inspection device

Hereinafter, an inspection apparatus including the aforementioned lighting unit as a member will be described.

4 is a schematic view showing an inspection apparatus according to an embodiment of the present invention.

Here, since the lighting unit illustrated in FIG. 4 is similar to the lighting unit described with reference to FIG. 1, the same reference numerals are used for the same members, and a detailed description thereof will be omitted.

Referring to FIG. 4, an inspection apparatus according to an exemplary embodiment may include a stage 200, an illumination unit 100, an imaging unit 300, and a display unit 400.

The stage 200 supports the test object P. When the test object P is, for example, a ball grid array (BGA) type semiconductor package, an accommodation groove (not shown) may be formed in the stage 200 to accommodate the BGA type semiconductor package. In addition, the stage 200 may support the exposed solder balls formed in the BGA type semiconductor package.

The illumination unit 100 serves to irradiate light to the inspection object P when inspecting the inspection object P supported by the stage 200. In particular, the illumination unit 100 may vary the irradiation angle of the light irradiated to the inspection object (P).

Therefore, when the size of the inspection object P is changed, the irradiation angle (or irradiation area) of the light may be changed to correspond to the new inspection object P without changing the unit. For example, when the test object P is, for example, a BGA type semiconductor package, the irradiation angle of light may be changed so that the inspection object P may be easily inspected according to the arrangement and size of the solder balls formed on the package.

Meanwhile, the lighting unit 100 functions as metering illumination when irradiating light to the inspection object P when the inspection object P is inspected. On the other hand, in some cases, it may be necessary to irradiate coaxial light, for example, light corresponding to the normal direction of the inspection object P together with the metering.

To this end, the lighting unit 100 may further include an illumination member (not shown) for irradiating coaxial light to the test object (P). In the case of the said coaxial light-emitting member, it has a spherical tube shape normally.

The imaging unit 300 generates an image signal for the inspection object P by using light reflected from the inspection object P by being irradiated to the inspection object P from the illumination unit 100. The imaging unit 300 may be disposed above the lighting unit 100 in the normal direction of the inspection object P. For example, the imaging unit 300 may include a lens unit 310 and an image sensor unit 320. The lens unit 310 may include a plurality of optical lenses. The image sensor 320 substantially generates an image signal in the form of a digital signal for the test object P. An example of the image sensor unit 320 may include a charge coupled device (CCD) device.

The display unit 400 implements an image by using the image signal generated by the imaging unit 300. The display unit 400 may include, for example, a liquid crystal display (LCD) or a monitor.

While the present invention has been described in connection with what is presently considered to be practical and exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

As described above, the lighting unit according to the preferred embodiment of the present invention and the inspection apparatus including the same is that the light is irradiated by varying the angle of irradiation of the light irradiated to the inspection object by varying the angle of the internal frame in which the light source is installed The area can be variable. Thus, it can be used for inspection of inspection objects of various sizes without replacing the unit.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a perspective view showing a lighting unit according to an embodiment of the present invention.

2 and 3 are cross-sectional views taken along the line II ′ of FIG. 1.

4 is a schematic view showing an inspection apparatus according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100: lighting unit 110: outer frame

120: internal frame 130: light source

150: sub-frame 160: sub light source

200: stage 300: imaging unit

310: lens unit 320: image sensor unit

400: display unit P: test object

Claims (5)

An outer frame having a through hole and having a cylindrical structure in which the test object is placed in the through hole; An inner frame which is installed to be inclined from the inner wall of the cylindrical structure to the through-hole of the cylindrical structure in a state where a portion of the cylindrical structure is fixed to the inner wall of the cylindrical structure; A light source installed in the inner frame to irradiate light to a test object positioned in the through hole of the cylindrical structure; A sub-frame having a cylindrical structure disposed below the outer frame and having a through hole; And A sub light source installed on an inner wall of the sub frame to enable irradiation of light to the inspection object; And an irradiation angle of the light irradiated from the light source when the inspection object is inspected according to the inclination of the inner frame. The illumination unit of claim 1, wherein a plurality of light sources are installed on one surface of the inner frame, and include a light emitting diode as the light source. The illumination unit of claim 1, wherein a plurality of the inner frames are connected along a circumference of a through hole provided in the outer frame. delete A stage for supporting the test object; An outer frame of the cylindrical structure having a through-hole, in which the test object supported by the stage is placed in the through-hole, and the cylindrical structure from the inner wall of the cylindrical structure in a state where a portion of the cylindrical structure is fixed to the inner wall of the cylindrical structure; An inner frame which is installed to be inclined to a through hole of the light source, a light source that is installed on the inner frame so that light can be irradiated to a test object positioned in the through hole of the cylindrical structure, and is installed below the outer frame A sub-frame having a cylindrical structure, and a sub-light source installed on an inner wall of the sub-frame to enable irradiation of light to the test object, wherein the light source is inspected when the test object is inspected according to the inclination of the inner frame. An illumination unit capable of varying an irradiation angle of light emitted from the light; An imaging unit which generates an image signal by using light reflected from an inspection object supported by the stage; And And a display unit configured to implement an image using the image signal generated by the image pickup unit.

Images