KR100962541B1 - Method of calibration of particle counter - Google Patents

Method of calibration of particle counter Download PDF

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Publication number
KR100962541B1
KR100962541B1 KR1020100036594A KR20100036594A KR100962541B1 KR 100962541 B1 KR100962541 B1 KR 100962541B1 KR 1020100036594 A KR1020100036594 A KR 1020100036594A KR 20100036594 A KR20100036594 A KR 20100036594A KR 100962541 B1 KR100962541 B1 KR 100962541B1
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South Korea
Prior art keywords
standard
measuring
particle
reference voltage
calibration
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KR1020100036594A
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Korean (ko)
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한은정
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한은정
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/272—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration for following a reaction, e.g. for determining photometrically a reaction rate (photometric cinetic analysis)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke

Abstract

PURPOSE: A correcting method of a measuring instrument of submerged particles is provided to minimize time and costs by accurately correcting errors generated in a measuring instrument without replacing a measuring instrument. CONSTITUTION: A correcting method of a measuring instrument of submerged particles is as follows. A measuring cell(110) which penetrates a part of light is formed. An irradiating unit(120) is formed in the measuring cell, and irradiates light. The inside of the measuring cell is washed. A standard capable of detecting submerged particles is connected to a particle measuring instrument in series. The measuring values of the standard and the measuring instrument are compared each other.

Description

Method of calibration of submerged particle counter {Method of calibration of particle counter}

The present invention relates to a method for calibrating in-water fine particles, and more particularly, to a method for calibrating in-water fine particles, which can increase the homogeneity and reliability of the device.

In the semiconductor manufacturing process, many processes such as washing a silicon wafer or performing various processes such as deposition and etching on a silicon wafer are repeated. Such a semiconductor manufacturing process requires a large amount of ultrapure water for cleaning or chemical liquids used in the semiconductor process.

Ultrapure water or chemical liquids used in semiconductor manufacturing processes are highly likely to cause defects in semiconductor chips if they contain foreign substances therein. Therefore, the number of foreign matter contained in ultrapure water or chemical liquid should be adjusted to below a certain value. In order to control the number of foreign matter contained in the ultrapure water or the chemical liquid, it is necessary to accurately detect the fine particles contained in the liquid.

To detect the number of foreign matter contained in the ultrapure water or chemical liquid, ultrapure water or chemical liquid is passed through the transparent measuring cell, and irradiated with light using a light source such as a laser or a light emitting device (LED), Alternatively, there is a method of calculating the size or number of foreign matters by measuring light scattered by foreign matters in ultrapure water or chemical liquid.

The particulate matter detector in water generally includes a transparent measuring cell, a light irradiation part and a light detection part. Such a microparticle measuring device is a very precise device, the error may occur with use. For example, the optical axis between the light irradiation unit or the light detection unit and the measurement cell is changed, or a variation occurs in the output of the light irradiation unit, so that a measurement error may be generated in the liquid fine particle measuring instrument. Therefore, the submerged particulate measuring device needs to be checked regularly or irregularly, and the measuring device needs to be replaced or calibrated according to the inspection result.

In general, the method of checking the submerged particle measuring device is to inject a liquid containing standard particles into the measuring cell, and connect the standard device in series with the submerged particle measuring device to compare the value measured by the standard measuring device with the submerged particle measuring device. By doing so, it is possible to determine whether or not there is an abnormality in the liquid particle measuring instrument.

However, the conventional inspection method using only the standard machine can detect only the presence or absence of the roughness of the fine particle measuring device in the liquid, and there is a problem that some of the internal modules of the fine particle measuring device need to be replaced.

Accordingly, there is a need for a method for more precisely detecting the presence or absence of an abnormality in the liquid particulate measuring instrument and a method capable of precisely calibrating the liquid particulate measuring instrument in accordance with the abnormality.

The technical problem to be achieved by the present invention is to provide a calibration method of the particulate matter measuring instrument that can accurately calibrate the particulate matter measuring instrument, which can increase the homogeneity and reliability of the device.

Technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

In the calibration method of the submerged particle measuring apparatus according to an embodiment of the present invention for achieving the above technical problem, a measuring cell that passes through the sample liquid therein and transmits at least a part of the light, the light irradiation unit for irradiating light to the measuring cell And preparing a fine particle measuring device including a light detector detecting the light, and cleaning the inside of the measuring cell.

Connecting a standard group capable of detecting particulates in the liquid in series with the particulate matter meter, and performing a first efficiency test comparing the measured values of the standard and the particulate matter analyzer with each other, and a plurality of first standard particles in the measurement cell Injecting a sample solution containing a, measuring each voltage value representing the shape and size of each of the first standard particles through the light detection unit, the cumulative value of the number of each of the first standard particles having each voltage value And calculating a reference point for setting a voltage value corresponding to the maximum value among the accumulated values as a reference voltage.

The calibration method of the submerged particle detector according to the present invention has the following effects in detecting and correcting the abnormality of the submerged particle detector.

First, it is possible to pinpoint the cause of the error that occurs in the liquid particle detector.

Second, depending on the situation, even if the module itself of the submerged particle detector can be corrected more precisely, it is possible to calibrate the submerged particle meter while minimizing time and cost.

1 is a schematic block diagram of an apparatus for measuring particulate matter in liquid.
2 is a flow chart for explaining a calibration method of the particulate matter measuring instrument according to an embodiment of the present invention.
3 to 5 are device configuration diagrams for explaining a calibration method of the liquid particulate matter measuring apparatus according to an embodiment of the present invention.
Figure 6 is a graph of the cumulative number with respect to the voltage value of the standard particles measured in the step of setting the calibration reference point in the method for measuring the fine particles in the liquid according to an embodiment of the present invention.
7 is a graph in which the graph of FIG. 6 is corrected.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, with reference to Figure 1 will be described in detail with respect to the particulate matter measuring instrument.

The submerged particle measuring device 100 is a device capable of measuring the size or number of microparticles contained in a liquid such as a chemical liquid used in ultrapure water or various processes. The submerged particle measuring device 100 includes a measuring cell 110 and a light irradiation part 120 for irradiating light to the measuring cell 110 and the measuring cell 110 through which the liquid flows therein. It includes a light detector 130 for detecting the light scattered by the fine particles.

The submerged particle measuring device 100 may be used in equipment that uses ultrapure water or various chemical liquids, such as semiconductor equipment, and allows some of various liquids used in the semiconductor equipment to pass through the measuring cell 110 of the submerged particle measuring device 100. This measures the size and number of particulates in the liquid.

The measuring cell 110 has a passage formed therein for the liquid to flow therein, and at least a portion of the measuring cell 110 is formed to be transparent so that light can pass through the liquid flowing inside the measuring cell 110. The measurement cell 110 may be formed in a transparent tube shape, one side is connected to the inlet pipe (P1) for the liquid inlet, the other side may be connected to the outlet pipe (P2) for the liquid outflow.

The measuring cell 110 may have a diameter or a width of a portion where light is transmitted is larger than a diameter or a width of the inlet pipe P1 and the outlet pipe P2. However, the diameter or width of the measurement cell 110 is not limited thereto, and the diameter of the light that is irradiated from the light irradiation unit 120 may sufficiently pass through the measurement cell 110 to reach the photodetector 130. It is necessary to have a width and a permeability.

The light irradiator 120 is a device for irradiating light to the measuring cell 110 and may be disposed on one side of the measuring cell 110. The light irradiator 120 irradiates light that may be scattered by the fine particles in the liquid inside the measurement cell 110. The light irradiator 120 may include, for example, a laser light source or an LED light source.

The photodetector 130 includes a light receiving element capable of detecting light, and thus may detect light scattered from the liquid inside the measurement cell 110. The light detector 130 may receive light energy and convert the light energy into an electrical signal. The light detector 130 may be connected to various display devices to visually obtain the intensity of light energy.

The light irradiator 120 and the photodetector 130 may be disposed, for example, with the measurement cell 110 interposed therebetween, and the light irradiator 120, the measurement cell 110, and the photodetector 130 may each be disposed. Differences can be generated in the values detected depending on the relative positions, so accurate placement is required.

Hereinafter, a method of calibrating a submerged particle detector according to an embodiment of the present invention will be described in detail with reference to FIGS. 2 to 5. 2 is a flow chart for explaining a calibration method of the particulate matter measuring instrument according to an embodiment of the present invention, Figures 3 to 5 is a device configuration for explaining a calibration method of the particulate matter measuring instrument according to an embodiment of the present invention It is degrees.

First, referring to FIGS. 2 and 3, the inside of the liquid particle detector is washed (S100). Residues of various chemical liquids remain in the particulate measuring device 100 in the liquid, so that the inside of the particulate measuring device 100 should be cleanly cleaned for corrosion of equipment or safety of an operator during calibration.

In order to clean the submerged particle detector 100, the pressurizer 200 is installed in the inlet pipe P1 of the submerged particle detector 100. The pressurizer 200 includes a washing liquid tank (not shown) therein, so that the washing liquid stored in the washing liquid tank flows out into the inlet pipe P1.

In this case, the cleaning liquid may be a liquid that can remove the harmful substances inside the liquid particle detector 100, for example, ultrapure water or alcohol may be used.

On the other hand, the flowmeter 300 is connected to the outflow pipe P2 of the submerged particle measuring device 100. The flow meter 300 measures the amount of the liquid passing through the inside of the liquid particle detector 100. Specifically, after connecting the pressurizer 200 and the flowmeter 300 to the liquid particulate measuring apparatus 100, respectively, the pressure of the pressurizer 200 is raised to pressurize the cleaning liquid inside the pressurizer 200 with the liquid particulate measuring instrument 100. Supply. The pressure of the pressurizer 200 may be pressurized, for example, at a pressure of 1.5 kg / cm 2.

The washing liquid that has passed through the fine particle detector 100 in the liquid is discharged through the outlet pipe P2. At this time, the flowmeter 300 measures the mass of the cleaning liquid that has passed through the fine particle detector 100 in the liquid.

Next, referring to FIGS. 2 and 4, the standard is connected in series to the liquid particulate measuring device and the measured values are compared (S200). A standard device 400 is installed in the inlet pipe P1 between the pressurizer 200 and the meter 100 so as to measure the particles included in the liquid passing through the particle meter 100 in the liquid.

Standard 400 is a device that can measure the size or number of particles in the liquid, it is possible to compare the performance of the liquid particulate measuring device 100 connected in series to the same inlet pipe (P1). That is, after the same liquid including the standard particles is flowed into the standard machine 400 and the submerged particle detector 100, the resultant values may be compared with each other to compare and measure the efficiency of the submerged particle detector 100. That is, the state of the device of the submerged particle measuring device 100 can be checked.

 Standard 400 can measure the size and number of particulates in a liquid in substantially the same manner as particulate in water meter 100. That is, the standard group 400 may be formed in the same structure as the fine particle detector 100 in the liquid.

The efficiency comparison using the standard 400 will be described in detail. The ultrapure water is filled in the pressurizer 200, and the pressure of the ultrapure water flowing into the standard 400 is 1.5 kg / cm 2. At this time, the standard machine 400 supplies ultrapure water so that the measured value at the time of setting to 0.2 micrometer becomes 100 or less. That is, if there are 100 or more measured values, the ultrapure water is continuously flowed to purge the measured values to 100 or less.

When the measured value of the standard device 400 for the ultrapure water is 100 or less, standard particles are injected into the ultrapure water. At this time, the size of the standard particle is injected a size slightly larger than the set value of the standard 400. For example, when the set value of the standard group 400 is 0.1 μm, the standard particles may use 0.294 μm, and when the set value of the standard group 400 is 0.2 μm, the standard particles may use 0.506 μm.

Standard particles are injected into the pressurizer 200 in a dilution state made by diluting with ultrapure water. For example, a diluent can be prepared by filling a bottle of ultrapure water with about one third of ultrapure water, injecting one drop of standard particles, and then filling the ultrapure water bottle with ultrapure water. Then, the pressurizer 200 flows out the diluent at a pressure of 1.5 kg / cm 2.

At this time, by using the flow meter 300 and the mass meter 500 to adjust the flow rate of the liquid flowing in the standard 400 and the liquid particulate measuring device 100 to match the rated flow rate of the liquid particulate measuring device 100. The flow rate of the liquid can be set, for example, to 10 ml / 60 ± 1 sec.

When the concentration of the dilution liquid is measured by the standard 400 based on 0.2 μm, the dilution concentration is set to be in the range of 5000 to 12000 pieces.

The counting efficiency of the submerged particle measuring device 100 can be calculated as follows.

Counting efficiency = (measured value of measuring instrument / measured value of standard instrument) Ⅹ 100%

If the counting efficiency is in the range of 70 to 110%, the particulate matter measuring device 100 in the liquid may be determined to be normal. That is, the submerged particle measuring apparatus 100 corresponds to a range that can be calibrated.

Next, the laser output and the voltage of the light irradiation unit 120 is measured (S300).

In order to verify the reliability of the light irradiation unit 120, the light source measures the output and the voltage. In this specification, the light irradiation part 120 using a laser beam is demonstrated to an example. However, the present invention is not limited thereto, and various light sources such as an LED light source may be used.

First, the initial input voltage and output voltage of the light irradiation unit 120 is measured. The lifetime of the laser light source can be determined by comparing the initial input voltage and the output voltage with each other. For example, when the output voltage is 20% or more different from the initial input voltage, the laser light source may be replaced by determining that the life of the laser light source is over.

Subsequently, a calibration reference point is set with reference to FIGS. 2, 5, and 6 (S400). Figure 6 is a graph of the cumulative number with respect to the voltage value of the standard particles measured in the step of setting the calibration reference point in the method for measuring the fine particles in the liquid according to an embodiment of the present invention.

The calibration reference point refers to first setting the reference voltage for the reference particle to set the reference voltage for each particle. Here, the calibration particles may be particles having a smallest diameter, but are not limited thereto.

On the other hand, the calibration reference point may be set after verifying the light source of the light irradiation unit 120 first, but is not necessarily limited thereto, and may first set the calibration reference point regardless of the order of verification of the light irradiation unit 120. That is, the calibration method of the submerged particle detector according to an embodiment of the present invention has described the most preferred embodiment, and the order of each step may be changed or some may be omitted if necessary.

For accurate calibration, first clean the inside of the submerged particle detector 100. As described above, the cleaning solution such as ultrapure water may be injected into the pressurizer 200 and pressurized to clean the foreign matter in the inside of the liquid particle detector 100.

When the inside of the liquid particle measuring device 100 is washed, ultrapure water and first standard particles are injected into the pressurizer 200 to prepare a sample liquid. For example, 0.117 μm or 0.254 μm may be used as the first standard particle.

When the pressurizer 200 is pressurized to a predetermined pressure, the sample liquid flows through the fine particle measuring device 100 in the liquid and flows to the flow meter 300 and the mass measuring device 500. The flow rate is adjusted to match the rated flow rate of the fine particle measuring apparatus 100 in the liquid through the flow meter 300, and precisely by adjusting the drain amount with a mass meter to adjust the precise flow rate of the fine particle measuring instrument 100 in the liquid.

After precisely adjusting the flow rate, the concentration of the sample liquid containing the first standard particles is adjusted by diluting the concentration so that 10000 to 12000 can be included in the sample liquid flowing for 1 minute.

The analysis device 600 may include a wave height analyzer 610 and an oscilloscope 620. Here, both the crest analyzer 610 and the oscilloscope 620 can visually analyze the light scattered from the liquid particle detector 100 to a voltage.

The analysis device 600 may include at least one of the crest analyzer 610 and the oscilloscope 620, but it is preferable to use both for more precise analysis.

The crest analyzer 610 may measure the voltage for each particle more precisely from a microscopic perspective, and the oscilloscope 620 may measure the voltage for each particle from a macroscopic perspective to a macroscopic perspective.

The analysis device 610 may measure the number of first standard particles included in the sample liquid passing through the measurement cell 110. The voltage value displayed on the analyzer 610 varies depending on the size or shape of the first standard particle. For example, particles having the same shape and the same size have the same voltage value, but when the shape or size of the particle is changed, the measured voltage value is different. Therefore, the calibration reference point can be set based on the voltage value for the first standard particle having the highest distribution.

Referring to FIG. 6, the analyzer 610 may support multi-channels to measure first standard particles having various voltage values. In detail, the X axis of the graph of FIG. 6 represents a voltage value, and the predetermined voltage section may be divided into a plurality of channels (for example, 256 channels). The Y axis of the graph of FIG. 6 represents the number of first standard particles corresponding to each channel, and corresponds to an accumulated value in which the number of first standard particles having a voltage value corresponding to each channel is counted.

If the submerged particle meter 100 is in the normal range, that is, if the submerged particle meter 100 can be used through calibration, the graph shown by the analysis device 610 shows the normal distribution around the reference voltage. Take form. That is, the voltage value corresponding to the maximum value among the cumulative values for each channel in the graph may be determined as the reference voltage. At this time, if the reference voltage is adjusted to fall within a predetermined range, the calibration reference point setting is completed. In order to adjust the reference voltage to fall within a predetermined range, there is a method of adjusting an input / output amount of a light source or an optical axis of a light source or a measuring cell.

On the other hand, as shown in Figure 6, if the cumulative value of the first standard particle for each channel is a complex graph to calculate the maximum value of the cumulative value for each channel is not easy to cut- It is possible to precisely determine a small section by setting the cut off section. For example, in the graph of FIG. 6, an arbitrary maximum peak point P1 is set, and the cumulative number of first standard particles for an arbitrary maximum peak point P1 is obtained, and having a value of 50% of the cumulative number. Set the channel to valid interval. Thereafter, the maximum peak point P1 in the effective section can be precisely found.

Also, the calibration reference point may be set by converting the graph of FIG. 6 into a graph in which a reference voltage can be easily set. For example, as in the graph of FIG. 7, the graph of FIG. 6 may be corrected and converted into a smooth graph connecting each peak point.

Thereafter, the calibration reference point can be precisely set by setting an effective section based on the points C1 and C2 corresponding to 50% of the maximum peak point P2.

In this way, the calibration reference point can be set. At this time, if the measured reference voltage falls within the range shown in Table 1 below, setting of the calibration reference point is completed.

Table 1 below shows the range of recommended reference voltage for each standard particle size.

Standard particle (μm) Reference voltage (mV) 0.117 90-110
1100 ± 50 0.254 100 ± 10 0.207 150 ± 10 0.791 300 ± 10 0.352 3100 ± 100 0.123 90-110

Next, the noise of the particulate matter measuring instrument in liquid is measured (S500).

After setting the reference value for each particle of the submerged particle measuring device 100, the inside of the submerged particle measuring device 100 is cleaned in order to measure the noise of the submerged particle measuring device 100.

In the cleaning method, as described above, the ultrafine water is injected into the pressurizer 200 and pressurized to clean the liquid fine particle detector 100. This process is repeated so that foreign matters are not contained in the liquid particle detector 100.

After the inside of the fine particle measuring device 100 in the liquid is sufficiently cleaned, the measurement value of the fine particle measuring device 100 in the liquid is checked while flowing ultrapure water. At this time, if the measured value is not within the range of the reference value, it is checked whether there is an abnormality of the measuring cell 110 (S550).

If an abnormality is found in the measuring cell 110, after checking or repairing the measuring cell 110, the calibration reference point should be reset.

If the measured value is within the range of the reference value, the calibration for each particle diameter is performed (S600).

The calibration reference point is set using a sample liquid containing first standard particles having a predetermined size, and when the calibration reference point is set, a calibration reference point using a sample liquid containing second standard particles having a different size from the first standard particles. The calibration value for the second standard particle can be set based on this. The calibration method may be performed substantially the same as the calibration reference point setting method.

This process may be repeated a plurality of times using standard particles having a different size from the first standard particles.

2 and 4, after the calibration for each particle diameter, the standard is connected in series to the particulate matter measuring instrument in series and the measured values are compared (S700). This efficiency comparison step may be performed in substantially the same manner as the above-described efficiency comparison step. That is, when finally compared to the efficiency range within the desired range, the calibration of the liquid particle detector 100 is completed.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. I can understand that. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

100: liquid particle measuring instrument 110: measuring cell
120: light irradiation unit 130: light detection unit
200: pressurizer 300: flow meter
400: standard 500: mass meter
600: analysis device 610: crest analyzer
620: oscilloscope

Claims (12)

Preparing a particulate measuring device including a measuring cell passing through the sample liquid therein and transmitting at least a part of light, a light irradiating unit for irradiating light to the measuring cell, and a light detecting unit for detecting the light;
Cleaning the inside of the measurement cell;
Connecting a standard group capable of detecting particulates in liquid in series with the particulate matter meter, and performing a first efficiency test comparing the measured values of the standard and the particulate matter analyzer with each other; And
Injecting a sample solution containing a plurality of first standard particles in the measuring cell,
Measuring each voltage value representing the shape and size of each of the first standard particles through the photodetector;
The cumulative value of the number of each said 1st standard particle which has each said voltage value is calculated | required,
And setting a calibration reference point for setting a voltage value corresponding to a maximum value among the cumulative values as a reference voltage. The method of claim 1,
And injecting ultrapure water into the measurement cell and measuring noise by measuring a detection value of the photodetector. The method of claim 2,
And checking the measurement cell when the noise value is greater than or equal to the reference value in the step of measuring the noise. The method of claim 1,
And injecting a sample liquid including second standard particles having a different size from the first standard particles and setting a calibration value for the second standard particles based on the calibration reference point. The method of claim 4, wherein
And setting a calibration value for the second standard particle, further comprising a second efficiency test step of connecting the standard group in series with the particulate matter meter and comparing the measured values of the standard and the particulate matter meter with each other. How to calibrate the meter. The method of claim 1,
And measuring the output change rate of the light irradiation part by measuring an initial input voltage and an output voltage of the light irradiation part after the first efficiency checking. The method of claim 1,
The reference voltage is a calibration method of a submerged particle measuring instrument having a reference voltage of 90 ~ 110mV or 1050 ~ 1115mV when the diameter of the first standard particle is 0.117㎛. The method of claim 1,
The reference voltage is a calibration method of the submerged particle measuring instrument having a reference voltage of 100 ~ 110mV, when the diameter of the first standard particle is 0.254㎛. The method of claim 1,
The reference voltage is a calibration method of a submerged particle measuring instrument having a reference voltage of 140 ~ 160mV, when the diameter of the first standard particle is 0.207㎛. The method of claim 1,
The reference voltage is a calibration method of the submerged particle measuring device having a reference voltage of 290 ~ 310mV, when the diameter of the first standard particle is 0.791㎛. The method of claim 1,
The reference voltage is a calibration method of the submerged particle measuring device having a reference voltage of 3000 ~ 3200mV, when the diameter of the first standard particle is 0.352㎛. The method of claim 1,
The reference voltage is a calibration method of the submerged particle measuring instrument having a reference voltage of 90 ~ 110mV, when the diameter of the first standard particle is 0.123㎛.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200099588A (en) * 2018-02-27 2020-08-24 파나소닉 아이피 매니지먼트 가부시키가이샤 Particle detection sensor
KR102390910B1 (en) * 2021-11-11 2022-04-26 류준호 Method and apparatus for calibration of light scattering sensor for measuring fine dust concentration

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Publication number Priority date Publication date Assignee Title
JPS56168532A (en) 1980-05-30 1981-12-24 Rion Co Ltd Automatic calibration device for light scattering fine grain meter
KR960018574A (en) * 1994-11-10 1996-06-17 요코야마 아키라 Method and apparatus for measuring the concentration of insoluble substances in oil
KR20040080607A (en) * 2003-03-12 2004-09-20 김병기 Tubidity measuring device and its measuring method

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS56168532A (en) 1980-05-30 1981-12-24 Rion Co Ltd Automatic calibration device for light scattering fine grain meter
KR960018574A (en) * 1994-11-10 1996-06-17 요코야마 아키라 Method and apparatus for measuring the concentration of insoluble substances in oil
KR20040080607A (en) * 2003-03-12 2004-09-20 김병기 Tubidity measuring device and its measuring method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200099588A (en) * 2018-02-27 2020-08-24 파나소닉 아이피 매니지먼트 가부시키가이샤 Particle detection sensor
KR102321560B1 (en) 2018-02-27 2021-11-03 파나소닉 아이피 매니지먼트 가부시키가이샤 particle detection sensor
KR102390910B1 (en) * 2021-11-11 2022-04-26 류준호 Method and apparatus for calibration of light scattering sensor for measuring fine dust concentration
KR102470182B1 (en) * 2021-11-11 2022-11-25 (주)랩코 Operation method of air particle detector

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