KR100937501B1 - Chemical and gas administrating system for manufacturing semiconductor - Google Patents

Chemical and gas administrating system for manufacturing semiconductor Download PDF

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KR100937501B1
KR100937501B1 KR1020080000147A KR20080000147A KR100937501B1 KR 100937501 B1 KR100937501 B1 KR 100937501B1 KR 1020080000147 A KR1020080000147 A KR 1020080000147A KR 20080000147 A KR20080000147 A KR 20080000147A KR 100937501 B1 KR100937501 B1 KR 100937501B1
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South Korea
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chemical
gas
semiconductor manufacturing
canister
host computer
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KR1020080000147A
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Korean (ko)
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KR20090074385A (en
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최건수
오상근
이순원
홍준의
김인호
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서일이앤엠 주식회사
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G06K19/07758—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for adhering the record carrier to further objects or living beings, functioning as an identification tag
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/0716—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips at least one of the integrated circuit chips comprising a sensor or an interface to a sensor
    • G06K19/0717—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips at least one of the integrated circuit chips comprising a sensor or an interface to a sensor the sensor being capable of sensing environmental conditions such as temperature history or pressure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q9/00—Arrangements in telecontrol or telemetry systems for selectively calling a substation from a main station, in which substation desired apparatus is selected for applying a control signal thereto or for obtaining measured values therefrom

Abstract

본 발명은 반도체 제조라인에 구성되는 케미컬 캐니스터 및 가스 저장탱크에 무선태그를 부착하여 각 캐니스터 및 가스탱크의 원정보를 총괄적으로 관리하고, 이들 캐니스터 및 가스탱크에 압력게이지 및 레벨센서를 각각 부착하여 실시간으로 현재의 케미컬 및 가스정보를 판단토록 함으로써 반도체 제조효율을 향상시킬 수 있도록 한 기술이다. The present invention attaches wireless tags to chemical canisters and gas storage tanks configured in a semiconductor manufacturing line, and manages raw information of each canister and gas tanks collectively, and attaches pressure gauges and level sensors to these canisters and gas tanks, respectively. It is a technology that improves semiconductor manufacturing efficiency by determining current chemical and gas information in real time.

반도체, 케미컬, 원격관리 Semiconductor, Chemical, Remote Management

Description

반도체 제조용 케미컬 및 가스 관리시스템{Chemical and gas administrating system for manufacturing semiconductor} Chemical and gas administrating system for manufacturing semiconductor

본 발명은 반도체 제조용 케미컬 및 가스 관리시스템에 관한 것으로써, 더욱 상세하게는 반도체 제조라인에 설치되는 케미컬 캐니스터 및 가스 저장탱크에 무선태그(RF ID)를 부착하여 각 캐니스터 및 가스탱크의 원정보를 총괄적으로 관리하고, 이들 캐니스터 및 가스탱크에 압력게이지 및 레벨센서를 각각 부착하여 실시간으로 현재의 케미컬 및 가스정보를 판단하여 그 판단결과에 따라 적절하게 조치토록 함으로써 반도체 제조효율을 향상시킬 수 있도록 한 기술이다. The present invention relates to a chemical and gas management system for semiconductor manufacturing, and more particularly, by attaching a radio tag (RF ID) to a chemical canister and a gas storage tank installed in a semiconductor manufacturing line, the raw information of each canister and gas tank can be obtained. In addition, pressure gauges and level sensors are attached to these canisters and gas tanks, respectively, to determine current chemical and gas information in real time, and to take appropriate action according to the judgment result to improve semiconductor manufacturing efficiency. Technology.

반도체 제조에 사용되는 케미컬 및 가스가 적정량, 적정온도, 적정 배출 등을 유지하고 있는지 총괄적으로 관리하는 것은 반도체 제조의 가장 기본적이 사항으로서 이러한 관리가 제대로 이루어지지 않으면 반도체 제조에 막대한 악영향을 끼칠 수밖에 없게 된다.Overall management of the chemicals and gases used in semiconductor manufacturing maintains the proper amount, temperature, and emissions, which is the most fundamental aspect of semiconductor manufacturing. If this management is not done properly, it will have a huge negative effect on semiconductor manufacturing. do.

그러나 종래 반도체 제조라인에서는 이러한 케미컬 및 가스에 대한 여러 가 지 관리가 치밀하게 시스템적으로 이루어지지 않고, 단지 육안으로만 확인하는 등 주먹구구식으로 이루어져서 반도체 제조효율 향상에 한계가 있었다. However, in the conventional semiconductor manufacturing line, various management of such chemicals and gases is not made systematically, but only by visual inspection, there is a limit in improving semiconductor manufacturing efficiency.

따라서 본 발명은 이와 같은 종래 반도체 제조공정에 사용되는 케미컬 및 가스 관리에 수반되는 문제점을 개선하기 위하여 이루어진 것으로써, 본 발명의 목적은 반도체 제조용 케미컬 및 가스 정보를 실시간으로 판단하여 적절한 후속조치가 이루어지도록 함으로써 반도체 제조효율을 향상시킬 수 있도록 한 반도체 제조용 케미컬 및 가스 관리시스템을 제공하는데 있다. Therefore, the present invention was made to improve the problems associated with the chemical and gas management used in the conventional semiconductor manufacturing process, the object of the present invention is to determine the chemical and gas information for semiconductor manufacturing in real time to make appropriate follow-up measures To provide a chemical and gas management system for semiconductor manufacturing to improve the semiconductor manufacturing efficiency.

상기 목적을 달성하기 위한 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템은, 반도체 제조공정에 투입되는 케미컬을 저장하는 케미컬 캐니스터; 반도체 제조공정에 투입되는 가스를 저장하는 가스탱크; 상기 케미컬 캐니스터 및 가스탱크에 저장되는 케미컬 및 가스에 대한 원정보를 총괄적으로 관리하고 현재 판단된 정보에 따라 조치하는 호스트컴퓨터(서버); 및 상기 케미컬 캐니스터 및 가스탱크의 원정보와 현재정보를 호스트컴퓨터로 전송하고 호스트컴퓨터로부터의 명령을 케미컬 캐니스터 및 가스탱크에 전송하는 무선 네트워크 시스템을 포함하여 이루어진 것을 특징으로 한다.The chemical manufacturing and gas management system for semiconductor manufacturing of the present invention for achieving the above object, the chemical canister for storing the chemical to be put into the semiconductor manufacturing process; A gas tank for storing gas introduced into the semiconductor manufacturing process; A host computer (server) that manages raw information on chemicals and gases stored in the chemical canisters and gas tanks collectively and acts on the currently determined information; And a wireless network system that transmits original and current information of the chemical canister and gas tank to a host computer and transmits commands from the host computer to the chemical canister and gas tank.

본 발명의 반도체 제조용 케미컬 및 가스 관리시스템은, 케미컬 캐니스터는 케미컬량 및 압력을 감지하는 레벨센서 및 압력게이지가 각각 연결 부착되고, 가스탱크는 가스압력을 감지하는 압력게이지가 연결 부착된 것을 특징으로 한다. In the chemical manufacturing and gas management system for semiconductor manufacturing of the present invention, the chemical canister is connected with a level sensor and a pressure gauge for detecting chemical amount and pressure, respectively, and the gas tank is connected with a pressure gauge for detecting gas pressure. do.

본 발명의 반도체 제조용 케미컬 및 가스 관리시스템은, 케미컬 캐니스터 및 가스탱크에 케미컬 정보 및 가스정보를 저장한 무선단말기가 각각 부착된 것을 특징으로 한다.The chemical manufacturing and gas management system for semiconductor manufacturing of the present invention is characterized in that the chemical canister and the gas tank are attached with radio terminals storing chemical information and gas information, respectively.

본 발명의 반도체 제조용 케미컬 및 가스 관리시스템은, 압력게이지 및 레벨센서의 감지값은 A/D 변환기에 의해 디지털신호로 변환되어 무선 네트워크 시스템으로부터 호스트컴퓨터에 전송되는 것을 특징으로 한다. In the chemical and gas management system for semiconductor manufacturing of the present invention, the sensed values of the pressure gauge and the level sensor are converted into digital signals by the A / D converter and transmitted from the wireless network system to the host computer.

상술한 바와 같이 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템에 따르면, 케미컬 및 가스 정보를 실시간으로 판단하여 적절한 후속조치가 이루어지도록 함으로써 반도체 제조효율을 향상시킬 수 있도록 하는 이점이 있다.According to the chemical and gas management system for semiconductor manufacturing according to the present invention as described above, there is an advantage to improve the semiconductor manufacturing efficiency by determining the chemical and gas information in real time so that appropriate follow-up actions are made.

본 발명은 또한 반도체 제조라인에서 발생할 수 있는 케미컬 캐니스터 및 가스탱크의 교체 사고 및 제조장비의 유지 관리를 원활히 함과 동시에 생산성 증대를 도모할 수 있는 것이다. The present invention also facilitates the replacement of chemical canisters and gas tanks and maintenance of manufacturing equipment that can occur in semiconductor manufacturing lines, and at the same time can increase productivity.

이하, 본 발명의 실시예를 첨부한 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 1은 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템의 전체적인 구성도, 도 2는 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템의 상세 구성도, 도 3은 본 발명의 반도체 제조용 케미컬 및 가스 관리 동작 흐름도이다.1 is an overall configuration diagram of a chemical and gas management system for semiconductor manufacturing according to the present invention, FIG. 2 is a detailed configuration diagram of a chemical and gas management system for semiconductor manufacturing according to the present invention, and FIG. 3 is a flowchart illustrating a chemical and gas management operation for semiconductor manufacturing according to the present invention. to be.

도 1 및 도 2에 도시한 바와 같이 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템은, 반도체 제조공정에 투입되는 케미컬을 저장하는 케미컬 캐니스터(10); 반도체 제조공정에 투입되는 가스를 저장하는 가스탱크(20); 상기 케미컬 캐니스터(10) 및 가스탱크(20)에 저장되는 케미컬 및 가스에 대한 원정보(캐니스터 및 탱크 규격, 사이즈, 케미컬 및 가스량, 케미컬 및 가스 종류 등등)를 총괄적으로 관리하여 현재 판단된 정보에 따라 후속 조치하는 호스트컴퓨터(서버)(40); 및 상기 케미컬 캐니스터(10) 및 가스탱크(20)의 원정보와 현재정보를 호스트컴퓨터(40)로 전송하고 호스트컴퓨터(40)로부터의 명령을 케미컬 캐니스터(10) 및 가스탱크(20)에 전송하는 무선 네트워크 시스템(30)을 포함하여 이루어진다.1 and 2, the chemical manufacturing and gas management system for semiconductor manufacturing of the present invention includes a chemical canister 10 for storing chemicals introduced into a semiconductor manufacturing process; A gas tank 20 for storing gas introduced into the semiconductor manufacturing process; Raw information on chemical and gas stored in the chemical canister 10 and the gas tank 20 (canister and tank size, size, chemical and gas amount, chemical and gas type, etc.) are collectively managed and applied to the currently determined information. A host computer (server) 40 to follow up accordingly; And transmit original and current information of the chemical canister 10 and the gas tank 20 to the host computer 40 and transmit a command from the host computer 40 to the chemical canister 10 and the gas tank 20. Wireless network system 30 is made.

상기 케미컬 캐니스터(10)에는 케미컬량 및 압력을 감지하는 레벨센서(12) 및 압력게이지(13)가 각각 연결되며, 가스탱크(20)에는 가스압력을 감지하는 압력게이지(22)가 연결된다.The chemical canister 10 is connected with a level sensor 12 and a pressure gauge 13 for sensing chemical amount and pressure, respectively, and a pressure gauge 22 for sensing gas pressure is connected to the gas tank 20.

또한 상기 케미컬 캐니스터(10) 및 가스탱크(20)는 케미컬 원정보 및 가스 원정보를 저장한 무선단말기(RF ID)(11)(21)가 각각 그 외부에 부착된다.In addition, the chemical canister 10 and the gas tank 20 are each attached to the radio terminal (RF ID) 11, 21 that stores the chemical raw information and the gas source information.

또한 본 발명은 상기 레벨센서(12) 및 압력게이지(13)(22)에 의한 케미컬량 및 케미컬 압력과 가스량 및 가스 압력 감지값을 디지털신호로 변환하는 A/D 변환기(60)를 추가 포함하여 케미컬 감지정보 및 가스 감지정보를 디지털신호로 변환하여 무선 네트워크 시스템(30)으로부터 호스트컴퓨터(40)에 전송한다. In addition, the present invention further includes an A / D converter 60 for converting the chemical amount, the chemical pressure and the gas amount, and the gas pressure detection value by the level sensor 12 and the pressure gauge 13 and 22 into digital signals. The chemical detection information and gas detection information are converted into digital signals and transmitted from the wireless network system 30 to the host computer 40.

상기 호스터컴퓨터(40)는 캐니스터(10)의 케미컬량 및 가스탱크(20)의 가스량을 월간, 라인별, 종류별 사용량 등으로 구분 파악하여 교체 주기 파악 및 적정 재고를 준비할 수 있도록 관리한다.The host computer 40 identifies the chemical amount of the canister 10 and the gas amount of the gas tank 20 by monthly, line, and type usage, and manages the replacement cycle and prepares proper inventory.

본 발명의 호스트컴퓨터(40)에서 관리하는 정보로는 케미컬 및 가스 종류, 재고량, 일일 사용량, 월 사용량, 교체주기, 케미컬 및 가스 라이프 타임 등을 들 수 있다.The information managed by the host computer 40 of the present invention includes chemical and gas types, inventory amount, daily usage amount, monthly usage amount, replacement cycle, chemical and gas life time, and the like.

상기 무선 네트워크 시스템(30)은 트랙킹 서버와 유선으로 연결된 적어도 하나 이상의 무선 또는 유선으로 연결되어 무선태그와 지그비 무선통신 시스템으로 통신하는 다수 개의 지그비 라우터를 포함한다.The wireless network system 30 includes a plurality of ZigBee routers that are connected by wire or at least one wireless or wired connection with a tracking server to communicate with a wireless tag and a ZigBee wireless communication system.

본 발명은 또한 예를 들어 캐니스터(10)의 케미컬량 혹은 가스 탱크(20)의 가스량이 부족하다고 판단될 경우 알람을 발생하여 외부에서 이를 인지하고 즉시 캐니스터(10) 혹은 가스탱크(20)를 교체토록 함으로써 반도체 제조공정에 지장을 주지 않도록 하는 경보부(70)를 포함한다.The present invention also generates an alarm, for example, when it is determined that the chemical amount of the canister 10 or the gas amount of the gas tank 20 is insufficient, and immediately replaces the canister 10 or the gas tank 20. It includes an alarm unit 70 so as not to interfere with the semiconductor manufacturing process.

이와 같이 구성된 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템의 동작흐름을 도 3을 참조하여 상세히 설명한다. The operation flow of the chemical and gas management system for semiconductor manufacturing of the present invention configured as described above will be described in detail with reference to FIG. 3.

먼저 각 캐니스터(10) 및 가스탱크(20)에는 각각 무선단말기(RF ID 태그)(11)(21)가 부착되어 있어 이곳에 케미컬 및 가스 종류, 재고량, 일일 사용량, 월 사용량, 교체주기, 케미컬 및 가스 라이프 타임 등의 원정보가 저장되어 있다.First, each canister 10 and gas tank 20 are each equipped with a radio terminal (RF ID tag) 11, 21, which is chemical and gas type, inventory, daily usage, monthly usage, replacement cycle, chemical And original information such as gas life time is stored.

이 같은 각 캐니스터(10) 및 가스탱크(20)에 대한 원정보는 무선 네트워크 시스템(30)을 통해 호스트컴퓨터(40)에서 전송받아 캐니스터 및 가스탱크의 교체시까지 관리하게 된다.(S1)The original information about each canister 10 and the gas tank 20 is transmitted from the host computer 40 through the wireless network system 30 and managed until the canister and the gas tank are replaced (S1).

이 같은 상황에서 케미컬 캐니스터(10) 및 가스탱크(20)로부터 각각 케미컬 및 가스가 반도체 제조공정 라인에 투입되어 반도체 제조가 행해진다.(S2)In such a situation, chemical and gas are introduced into the semiconductor manufacturing process line from the chemical canister 10 and the gas tank 20, respectively, and semiconductor production is performed (S2).

상기 스텝 S2에서 반도체 제조가 행해지는 가운데 호스터컴퓨터(40)에서는 무선 네트워크 시스템(30)을 통해 캐니스터(10)의 현재정보를 수신하는 바, 레벨센서(12)에 의한 캐니스터(10) 내 케미컬량 감지신호 및 압력게이지(13)에 의한 캐니스터(10) 내 케미컬 압력 감지신호와, 압력게이지(22)에 의한 가스탱크(20) 내 가스 압력 감지신호가 각각 A/D변환기(60)를 통해 디지털신호로 변환된 신호를 수신하게 된다.(S3)While the semiconductor manufacturing is performed in step S2, the host computer 40 receives the current information of the canister 10 through the wireless network system 30, and the chemical in the canister 10 by the level sensor 12 is received. The chemical pressure detection signal in the canister 10 by the amount detection signal and the pressure gauge 13 and the gas pressure detection signal in the gas tank 20 by the pressure gauge 22 are respectively through the A / D converter 60. A signal converted into a digital signal is received (S3).

따라서 호스트컴퓨터(40)에서는 이들 레벨센서(12) 및 압력 게이지(13)(22)로부터 수신된 캐니스터(10) 및 가스탱크(20)의 현재정보를 분석하여 원정보와 비교한 후 반도체 제조효율 저하에 원인이 될 요소 발생 여부를 판단하게 된다.(S4)Therefore, the host computer 40 analyzes the current information of the canister 10 and the gas tank 20 received from the level sensors 12 and the pressure gauges 13 and 22, compares the raw information with the original information, and then calculates semiconductor manufacturing efficiency. It is determined whether or not an element causing the degradation occurs (S4).

그 판단결과, 예를 들어 캐니스터(10)의 케미컬 량이 부족하다고 판단될 경우 경보부(70)를 통해 알람을 발생하여(S5) 외부에서 이를 인지하고 즉시 캐니스터(10)를 교체토록 함으로써 반도체 제조공정에 지장을 주지 않도록 한다.(S6) As a result of the determination, for example, when it is determined that the amount of chemicals in the canister 10 is insufficient, an alarm is generated through the alarm unit 70 (S5) to recognize this from the outside and promptly replace the canister 10 so that the semiconductor manufacturing process can be replaced. Do not disturb (S6)

본 발명은 특정한 실시예를 들어 설명하였으나, 이에 한정하는 것은 아니며 본 발명의 기술적사상을 벗어나지 않는 범위내에서는 얼마든지 수정 및 변형실시가 가능하다.Although the present invention has been described with reference to specific embodiments, the present invention is not limited thereto, and modifications and variations can be made without departing from the technical spirit of the present invention.

예를 들어, 케미컬 캐니스터(10) 및 가스탱크(20)에 대하여 무선단말기(11)(21)에 저장되는 원정보는 상기에서 기술된 정보뿐만 아니라 기타 반도체 제조에 필요한 모든 정보를 포함할 수 있음은 물론이다.For example, the raw information stored in the wireless terminals 11 and 21 for the chemical canister 10 and the gas tank 20 may include all the information necessary for manufacturing other semiconductors as well as the information described above. Of course.

도 1은 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템의 전체적인 구성도.1 is an overall configuration diagram of a chemical and gas management system for semiconductor manufacturing of the present invention.

도 2는 본 발명의 반도체 제조용 케미컬 및 가스 관리시스템의 상세 구성도.2 is a detailed configuration diagram of a chemical and gas management system for manufacturing a semiconductor of the present invention.

도 3은 본 발명의 반도체 제조용 케미컬 및 가스 관리 동작 흐름도.3 is a flowchart illustrating a chemical and gas management operation for semiconductor manufacturing according to the present invention;

* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

10 : 케미컬 캐니스터 11, 21 : 무선단말기(무선태그)10: chemical canister 11, 21: wireless terminal (wireless tag)

13, 22 : 압력게이지 20 : 가스탱크13, 22: pressure gauge 20: gas tank

30 : 무선 네트워크 시스템 40 : 호스트컴퓨터(서버)30: wireless network system 40: host computer (server)

50 : 각 공장/라인별 리더기 60 : A/D 변환기50: Reader for each factory / line 60: A / D converter

Claims (4)

반도체 제조공정에 투입되는 케미컬을 저장하는 케미컬 캐니스터(10); A chemical canister 10 storing chemicals introduced into a semiconductor manufacturing process; 반도체 제조공정에 투입되는 가스를 저장하는 가스탱크(20); A gas tank 20 for storing gas introduced into the semiconductor manufacturing process; 상기 케미컬 캐니스터(10) 및 가스탱크(20)에 저장되는 케미컬 및 가스에 대한 원정보를 총괄적으로 관리하여 현재 판단된 정보에 따라 조치하는 호스트컴퓨터(서버)(40); 및 A host computer (server) 40 which collectively manages original information on chemicals and gases stored in the chemical canister 10 and the gas tank 20 and acts according to the currently determined information; And 상기 케미컬 캐니스터(10) 및 가스탱크(20)의 원정보와 현재정보를 호스트컴퓨터(40)로 전송하고, 호스트컴퓨터(40)로부터의 명령을 케미컬 캐니스터(10) 및 가스탱크(20)에 전송하는 무선 네트워크 시스템(30)을 포함하여 이루어진 것을 특징으로 하는 반도체 제조용 케미컬 및 가스 관리시스템.The original and current information of the chemical canister 10 and the gas tank 20 are transmitted to the host computer 40, and the command from the host computer 40 is transmitted to the chemical canister 10 and the gas tank 20. Chemical and gas management system for semiconductor manufacturing, characterized in that comprises a wireless network system (30). 제1항에 있어서, 상기 케미컬 캐니스터(10)는 케미컬량 및 압력을 감지하여 무선네트워크시스템(30)을 통해 호스트컴퓨터(40)에 전송하도록 레벨센서(12) 및 압력게이지(13)가 각각 연결 부착되고, 상기 가스탱크(20)는 가스압력을 감지하여 무선네트워크시스템(30)을 통해 호스트컴퓨터(40)에 전송하도록 압력게이지(22)가 연결 부착되는 것을 특징으로 하는 반도체 제조용 케미컬 및 가스 관리시스템.According to claim 1, wherein the chemical canister 10 is connected to the level sensor 12 and the pressure gauge 13 so as to sense the chemical amount and pressure to transmit to the host computer 40 through the wireless network system 30 The gas tank 20 is a chemical manufacturing and gas management for semiconductor manufacturing, characterized in that the pressure gauge 22 is connected and attached to detect the gas pressure and transmit it to the host computer 40 through the wireless network system 30 system. 제1항에 있어서, 상기 케미컬 캐니스터(10) 및 가스탱크(20)는 케미컬 정보 및 가스정보를 저장한 무선단말기(11)(21)가 각각 부착된 것을 특징으로 하는 반도체 제조용 케미컬 및 가스 관리시스템.2. The chemical and gas management system for semiconductor manufacturing according to claim 1, wherein the chemical canister 10 and the gas tank 20 are respectively attached with radio terminals 11 and 21 storing chemical information and gas information. . 제2항에 있어서, 상기 레벨센서(12)와, 압력게이지(13)(22)의 감지값은 각각 A/D변환기(60)에 의해 디지털신호로 변환되어 무선 네트워크 시스템(30)으로부터 호스트컴퓨터(40)에 전송되는 것을 특징으로 하는 반도체 제조용 케미컬 및 가스 관리시스템. 3. The sensing values of the level sensor (12) and the pressure gauge (13) (22) are converted into digital signals by the A / D converter (60), respectively, and the host computer is connected to the host computer. Chemical and gas management system for semiconductor manufacturing, characterized in that transmitted to (40).
KR1020080000147A 2008-01-02 2008-01-02 Chemical and gas administrating system for manufacturing semiconductor KR100937501B1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10207554A (en) 1997-01-27 1998-08-07 Sony Corp Flow rate controller for fluid, and manufacture of semiconductor device
KR100207554B1 (en) 1996-09-06 1999-07-15 윤종용 Digital analog converter bias circuit for multi-channel
KR20080033907A (en) * 2005-05-20 2008-04-17 하드로넥스, 엘엘씨 A remote sensing and communication system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100207554B1 (en) 1996-09-06 1999-07-15 윤종용 Digital analog converter bias circuit for multi-channel
JPH10207554A (en) 1997-01-27 1998-08-07 Sony Corp Flow rate controller for fluid, and manufacture of semiconductor device
KR20080033907A (en) * 2005-05-20 2008-04-17 하드로넥스, 엘엘씨 A remote sensing and communication system

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