KR100927527B1 - 정전 드라이브 및 정전 구동 컴퓨터 저장 장치 - Google Patents

정전 드라이브 및 정전 구동 컴퓨터 저장 장치 Download PDF

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Publication number
KR100927527B1
KR100927527B1 KR1020030001599A KR20030001599A KR100927527B1 KR 100927527 B1 KR100927527 B1 KR 100927527B1 KR 1020030001599 A KR1020030001599 A KR 1020030001599A KR 20030001599 A KR20030001599 A KR 20030001599A KR 100927527 B1 KR100927527 B1 KR 100927527B1
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South Korea
Prior art keywords
voltage
stator
electrodes
mover
electrode
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KR1020030001599A
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English (en)
Korean (ko)
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KR20030061348A (ko
Inventor
페이슨도날드제이
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타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path

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  • Micromachines (AREA)
  • Linear Motors (AREA)
KR1020030001599A 2002-01-11 2003-01-10 정전 드라이브 및 정전 구동 컴퓨터 저장 장치 Expired - Lifetime KR100927527B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/043,971 US6747863B2 (en) 2002-01-11 2002-01-11 Electrostatic drive
US10/043,971 2002-01-11

Publications (2)

Publication Number Publication Date
KR20030061348A KR20030061348A (ko) 2003-07-18
KR100927527B1 true KR100927527B1 (ko) 2009-11-17

Family

ID=21929861

Family Applications (1)

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KR1020030001599A Expired - Lifetime KR100927527B1 (ko) 2002-01-11 2003-01-10 정전 드라이브 및 정전 구동 컴퓨터 저장 장치

Country Status (7)

Country Link
US (1) US6747863B2 (https=)
EP (1) EP1330017A3 (https=)
JP (1) JP2003260698A (https=)
KR (1) KR100927527B1 (https=)
CN (1) CN100380800C (https=)
SG (1) SG106111A1 (https=)
TW (1) TWI278175B (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US20080074792A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Control scheme for a memory device
DE102008043836A1 (de) * 2008-11-19 2010-05-20 Robert Bosch Gmbh Verfahren zum Betreiben eines elektrostatischen Antriebs und elektrostatische Antriebe
US8368490B2 (en) 2008-12-18 2013-02-05 Analog Devices, Inc. Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
US8294539B2 (en) * 2008-12-18 2012-10-23 Analog Devices, Inc. Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
US8102637B2 (en) * 2009-07-22 2012-01-24 Analog Devices, Inc. Control techniques for electrostatic microelectromechanical (MEM) structure
US8587328B2 (en) * 2009-08-25 2013-11-19 Analog Devices, Inc. Automatic characterization of an actuator based on capacitance measurement
US10591318B2 (en) 2017-08-31 2020-03-17 Invensense, Inc. Half-bridge circuit for a sensor
CN111508535B (zh) 2020-03-13 2021-08-13 华为技术有限公司 一种数据写入读取方法、装置及系统
CN111313740B (zh) * 2020-04-03 2021-09-07 南京航空航天大学 一种三相直线型静电电机及控制方法
CN113541437A (zh) * 2021-06-01 2021-10-22 南方科技大学 一种静电型步进电机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490664A (en) 1981-10-20 1984-12-25 Fuji Xerox Co., Ltd. Step motor exciting apparatus
EP0865151A2 (en) * 1997-03-14 1998-09-16 Hewlett-Packard Company Electrostatic actuator
EP1330017A2 (en) * 2002-01-11 2003-07-23 Hewlett-Packard Company Electrostatic drive

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Publication number Priority date Publication date Assignee Title
US3968416A (en) * 1974-07-01 1976-07-06 The Superior Electric Company Motor control for a stepping motor
US4121145A (en) * 1977-02-25 1978-10-17 The Perkin-Elmer Corporation High resolution stepping motor drive
US5557596A (en) 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
CA2349842C (en) 1998-11-06 2005-09-06 Honeywell Inc. Driving method for electrostatic actuators
JP2000317898A (ja) * 1999-03-05 2000-11-21 Ngk Insulators Ltd 圧電／電歪デバイス
US6215222B1 (en) * 1999-03-30 2001-04-10 Agilent Technologies, Inc. Optical cross-connect switch using electrostatic surface actuators
US6373682B1 (en) * 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6496351B2 (en) * 1999-12-15 2002-12-17 Jds Uniphase Inc. MEMS device members having portions that contact a substrate and associated methods of operating
KR100398856B1 (ko) 2000-03-30 2003-09-19 가부시끼가이샤 도시바 정전 액튜에이터 기구, 그 구동 방법, 및 그것을 이용한카메라 모듈
US6437965B1 (en) * 2000-11-28 2002-08-20 Harris Corporation Electronic device including multiple capacitance value MEMS capacitor and associated methods
US6625004B1 (en) * 2001-08-31 2003-09-23 Superconductor Technologies, Inc. Electrostatic actuators with intrinsic stress gradient
US6549394B1 (en) * 2002-03-22 2003-04-15 Agilent Technologies, Inc. Micromachined parallel-plate variable capacitor with plate suspension
US6600644B1 (en) * 2002-09-03 2003-07-29 Industrial Technology Research Institute Microelectronic tunable capacitor and method for fabrication
JP3822596B2 (ja) * 2003-12-08 2006-09-20 株式会社東芝 静電アクチュエータ及びその駆動方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490664A (en) 1981-10-20 1984-12-25 Fuji Xerox Co., Ltd. Step motor exciting apparatus
EP0865151A2 (en) * 1997-03-14 1998-09-16 Hewlett-Packard Company Electrostatic actuator
EP1330017A2 (en) * 2002-01-11 2003-07-23 Hewlett-Packard Company Electrostatic drive
EP1330017A3 (en) 2002-01-11 2003-12-10 Hewlett-Packard Company Electrostatic drive

Also Published As

Publication number Publication date
EP1330017A2 (en) 2003-07-23
US20030133252A1 (en) 2003-07-17
CN1433133A (zh) 2003-07-30
TWI278175B (en) 2007-04-01
TW200301991A (en) 2003-07-16
KR20030061348A (ko) 2003-07-18
JP2003260698A (ja) 2003-09-16
US6747863B2 (en) 2004-06-08
CN100380800C (zh) 2008-04-09
EP1330017A3 (en) 2003-12-10
SG106111A1 (en) 2004-09-30

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