KR100922844B1 - Photosensitive resin composition for dielectrics - Google Patents
Photosensitive resin composition for dielectrics Download PDFInfo
- Publication number
- KR100922844B1 KR100922844B1 KR1020070130380A KR20070130380A KR100922844B1 KR 100922844 B1 KR100922844 B1 KR 100922844B1 KR 1020070130380 A KR1020070130380 A KR 1020070130380A KR 20070130380 A KR20070130380 A KR 20070130380A KR 100922844 B1 KR100922844 B1 KR 100922844B1
- Authority
- KR
- South Korea
- Prior art keywords
- photosensitive resin
- resin composition
- methyl
- acid
- insulating film
- Prior art date
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 57
- 239000003989 dielectric material Substances 0.000 title description 2
- 229920006243 acrylic copolymer Polymers 0.000 claims abstract description 40
- 239000000203 mixture Substances 0.000 claims abstract description 26
- 150000001875 compounds Chemical class 0.000 claims abstract description 24
- 239000002904 solvent Substances 0.000 claims abstract description 17
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 10
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims abstract description 9
- WNXJIVFYUVYPPR-UHFFFAOYSA-N 1,3-dioxolane Chemical compound C1COCO1 WNXJIVFYUVYPPR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 7
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical class [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 claims abstract description 5
- 150000001735 carboxylic acids Chemical class 0.000 claims abstract description 3
- -1 dioxolane compound Chemical class 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 20
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 12
- 239000003822 epoxy resin Substances 0.000 claims description 11
- 229920000647 polyepoxide Polymers 0.000 claims description 11
- 125000005395 methacrylic acid group Chemical group 0.000 claims description 10
- VWAQEEYHYXPMHK-UHFFFAOYSA-N (2-ethyl-2-methyl-1,3-dioxolan-4-yl)methyl prop-2-enoate Chemical compound CCC1(C)OCC(COC(=O)C=C)O1 VWAQEEYHYXPMHK-UHFFFAOYSA-N 0.000 claims description 9
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 6
- 239000004094 surface-active agent Substances 0.000 claims description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 5
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 claims description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims description 4
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 claims description 3
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 239000000654 additive Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 3
- XUSCPDAWOTWGBD-UHFFFAOYSA-N (2-ethyl-2-methyl-1,3-dioxolan-4-yl)methyl 2-methylprop-2-enoate Chemical compound CCC1(C)OCC(COC(=O)C(C)=C)O1 XUSCPDAWOTWGBD-UHFFFAOYSA-N 0.000 claims description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 claims description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 claims description 2
- AHFXFFYRHGOHSO-UHFFFAOYSA-N 3-(2,2-dimethyl-1,3-dioxolan-4-yl)-2-methylprop-2-enoic acid Chemical compound OC(=O)C(C)=CC1COC(C)(C)O1 AHFXFFYRHGOHSO-UHFFFAOYSA-N 0.000 claims description 2
- XJYJFXDFQQGOHQ-UHFFFAOYSA-N CC(=C)C(=O)OC1COC2(CCCCC2)O1 Chemical compound CC(=C)C(=O)OC1COC2(CCCCC2)O1 XJYJFXDFQQGOHQ-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 2
- KPPNYLNUTNTHER-UHFFFAOYSA-N [2-methyl-2-(2-methylpropyl)-1,3-dioxolan-4-yl]methyl 2-methylprop-2-enoate Chemical compound CC(C)CC1(C)OCC(COC(=O)C(C)=C)O1 KPPNYLNUTNTHER-UHFFFAOYSA-N 0.000 claims description 2
- BICNEUKUQARCEL-UHFFFAOYSA-N [2-methyl-2-(2-methylpropyl)-1,3-dioxolan-4-yl]methyl prop-2-enoate Chemical compound CC(C)CC1(C)OCC(COC(=O)C=C)O1 BICNEUKUQARCEL-UHFFFAOYSA-N 0.000 claims description 2
- 125000001931 aliphatic group Chemical group 0.000 claims description 2
- 150000008064 anhydrides Chemical class 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims description 2
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 claims description 2
- 229940018557 citraconic acid Drugs 0.000 claims description 2
- 239000001530 fumaric acid Substances 0.000 claims description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims description 2
- 239000011976 maleic acid Substances 0.000 claims description 2
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 claims description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 claims description 2
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 claims description 2
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 claims description 2
- 229920002554 vinyl polymer Polymers 0.000 claims description 2
- PBZQCLTYWHSQDF-UHFFFAOYSA-N 1,4-dioxaspiro[4.5]decan-3-ylmethyl prop-2-enoate Chemical compound O1C(COC(=O)C=C)COC11CCCCC1 PBZQCLTYWHSQDF-UHFFFAOYSA-N 0.000 claims 1
- QNYBOILAKBSWFG-UHFFFAOYSA-N 2-(phenylmethoxymethyl)oxirane Chemical compound C1OC1COCC1=CC=CC=C1 QNYBOILAKBSWFG-UHFFFAOYSA-N 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 21
- 238000003860 storage Methods 0.000 abstract description 14
- 239000000178 monomer Substances 0.000 abstract description 13
- 238000002834 transmittance Methods 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000000126 substance Substances 0.000 abstract description 10
- 238000009413 insulation Methods 0.000 abstract description 5
- 229920005989 resin Polymers 0.000 abstract description 3
- 239000011347 resin Substances 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 description 20
- 239000000243 solution Substances 0.000 description 15
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Natural products CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 10
- 229920001577 copolymer Polymers 0.000 description 10
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 239000003513 alkali Substances 0.000 description 7
- 238000006116 polymerization reaction Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- URBZEXMYYYABCQ-UHFFFAOYSA-N butyl 2-butoxyacetate Chemical compound CCCCOCC(=O)OCCCC URBZEXMYYYABCQ-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical class OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- JLEKJZUYWFJPMB-UHFFFAOYSA-N ethyl 2-methoxyacetate Chemical compound CCOC(=O)COC JLEKJZUYWFJPMB-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 2
- FNBHVKBYRFDOJK-UHFFFAOYSA-N 1-butoxypropan-2-yl propanoate Chemical compound CCCCOCC(C)OC(=O)CC FNBHVKBYRFDOJK-UHFFFAOYSA-N 0.000 description 2
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 description 2
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 2
- RVNBCIQRFGXLRD-UHFFFAOYSA-N 1-propoxypropan-2-yl propanoate Chemical compound CCCOCC(C)OC(=O)CC RVNBCIQRFGXLRD-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- BWLBGMIXKSTLSX-UHFFFAOYSA-N 2-hydroxyisobutyric acid Chemical compound CC(C)(O)C(O)=O BWLBGMIXKSTLSX-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- ICPWFHKNYYRBSZ-UHFFFAOYSA-M 2-methoxypropanoate Chemical compound COC(C)C([O-])=O ICPWFHKNYYRBSZ-UHFFFAOYSA-M 0.000 description 2
- VXKUOGVOWWPRNM-UHFFFAOYSA-N 3-ethoxypropyl acetate Chemical compound CCOCCCOC(C)=O VXKUOGVOWWPRNM-UHFFFAOYSA-N 0.000 description 2
- ALRHLSYJTWAHJZ-UHFFFAOYSA-N 3-hydroxypropionic acid Chemical compound OCCC(O)=O ALRHLSYJTWAHJZ-UHFFFAOYSA-N 0.000 description 2
- WXYSZTISEJBRHW-UHFFFAOYSA-N 4-[2-[4-[1,1-bis(4-hydroxyphenyl)ethyl]phenyl]propan-2-yl]phenol Chemical compound C=1C=C(C(C)(C=2C=CC(O)=CC=2)C=2C=CC(O)=CC=2)C=CC=1C(C)(C)C1=CC=C(O)C=C1 WXYSZTISEJBRHW-UHFFFAOYSA-N 0.000 description 2
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 2
- IKRARXXOLDCMCX-UHFFFAOYSA-N butyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCCC IKRARXXOLDCMCX-UHFFFAOYSA-N 0.000 description 2
- VUEYQLJAKGLDNR-UHFFFAOYSA-N butyl 2-ethoxyacetate Chemical compound CCCCOC(=O)COCC VUEYQLJAKGLDNR-UHFFFAOYSA-N 0.000 description 2
- BMOACRKLCOIODC-UHFFFAOYSA-N butyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCCCC BMOACRKLCOIODC-UHFFFAOYSA-N 0.000 description 2
- MVWVAXBILFBQIZ-UHFFFAOYSA-N butyl 3-ethoxypropanoate Chemical compound CCCCOC(=O)CCOCC MVWVAXBILFBQIZ-UHFFFAOYSA-N 0.000 description 2
- RRIRSNXZGJWTQM-UHFFFAOYSA-N butyl 3-methoxypropanoate Chemical compound CCCCOC(=O)CCOC RRIRSNXZGJWTQM-UHFFFAOYSA-N 0.000 description 2
- NPCIWFUNUUCNOM-UHFFFAOYSA-N butyl 3-propoxypropanoate Chemical compound CCCCOC(=O)CCOCCC NPCIWFUNUUCNOM-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007334 copolymerization reaction Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 150000001991 dicarboxylic acids Chemical class 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000032050 esterification Effects 0.000 description 2
- 238000005886 esterification reaction Methods 0.000 description 2
- WHRLOJCOIKOQGL-UHFFFAOYSA-N ethyl 2-methoxypropanoate Chemical compound CCOC(=O)C(C)OC WHRLOJCOIKOQGL-UHFFFAOYSA-N 0.000 description 2
- ZXONMBCEAFIRDT-UHFFFAOYSA-N ethyl 2-propoxyacetate Chemical compound CCCOCC(=O)OCC ZXONMBCEAFIRDT-UHFFFAOYSA-N 0.000 description 2
- GIRSHSVIZQASRJ-UHFFFAOYSA-N ethyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCC GIRSHSVIZQASRJ-UHFFFAOYSA-N 0.000 description 2
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 2
- LLACVNYOVGHAKH-UHFFFAOYSA-N ethyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OCC LLACVNYOVGHAKH-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- PPFNAOBWGRMDLL-UHFFFAOYSA-N methyl 2-ethoxyacetate Chemical compound CCOCC(=O)OC PPFNAOBWGRMDLL-UHFFFAOYSA-N 0.000 description 2
- VBCSBEIIIFLVQV-UHFFFAOYSA-N methyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OC VBCSBEIIIFLVQV-UHFFFAOYSA-N 0.000 description 2
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 2
- DMHHINXESLPPMV-UHFFFAOYSA-N methyl 3-propoxypropanoate Chemical compound CCCOCCC(=O)OC DMHHINXESLPPMV-UHFFFAOYSA-N 0.000 description 2
- 229940057867 methyl lactate Drugs 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 239000003505 polymerization initiator Substances 0.000 description 2
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- 230000007261 regionalization Effects 0.000 description 1
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Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/14—Polysiloxanes containing silicon bound to oxygen-containing groups
- C08G77/16—Polysiloxanes containing silicon bound to oxygen-containing groups to hydroxyl groups
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0395—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having a backbone with alicyclic moieties
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
Abstract
본 발명은 절연막 형성용 감광성 수지 조성물에 관한 것으로, 상기 조성물은 (A)ⅰ) 디옥솔란계 화합물, ⅱ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물 및 ⅲ) 에폭시기 함유 불포화 화합물을 불포화 단량체로 하는 아크릴계 공중합체; (B) 퀴논디아지드 화합물; 및 (C) 용매를 포함한다.The present invention relates to a photosensitive resin composition for forming an insulating film, wherein the composition comprises (A) i) dioxolane-based compounds, ii) unsaturated carboxylic acids, unsaturated carboxylic anhydrides or mixtures thereof, and iii) unsaturated monomers containing epoxy groups. Acrylic copolymer made into; (B) quinonediazide compounds; And (C) a solvent.
본 발명에 따른 감광성 수지 조성물은 투과율, 절연성, 평탄성, 내화학성, 고내열성 등의 성능이 우수하며, 특히 고감도, 잔막률, UV투과율, 현상성 및 저장안정성이 우수하여 액정 디스플레이 장치의 제조 공정에서 절연막으로 사용하기에 적합하다.The photosensitive resin composition according to the present invention has excellent performance in transmittance, insulation, flatness, chemical resistance, high heat resistance, and the like, and particularly, in the manufacturing process of the liquid crystal display device due to its high sensitivity, residual film rate, UV transmittance, developability and storage stability. Suitable for use as an insulating film.
절연막, 감광성 수지, 저장안정성, 감도, 내열성 Insulating film, photosensitive resin, storage stability, sensitivity, heat resistance
Description
본 발명은 절연막 형성용 감광성 수지 조성물에 관한 것으로서, 보다 상세하게는 투과율, 절연성, 평탄성, 내화학성 등의 성능이 우수하며, 특히 고감도, 잔막률, UV투과율, 현상성 및 저장안정성이 우수한 감광성 수지 조성물에 관한 것이다.The present invention relates to a photosensitive resin composition for forming an insulating film, and more particularly, excellent in transmittance, insulation, flatness, chemical resistance, and the like, and particularly, a photosensitive resin having high sensitivity, residual film rate, UV transmittance, developability, and storage stability. It relates to a composition.
TFT-LCD나 집적회로소자에는 층간에 배치되는 배선의 사이를 절연하기 위해서 층간 절연막(interlayer dielectrics)을 사용하고 있다. In TFT-LCDs and integrated circuit devices, interlayer dielectrics are used to insulate between wirings arranged between layers.
상기 층간 절연막을 제조하기 위해서 특정 감광성 재료가 사용되고 있으며 공정수가 적고 감도, 잔막률, 투과도 및 저장안정성이 우수한 재료에 대한 요구가 지속되고 있다. 종래 층간 절연막은 바인더, PAC, 첨가제, 용매 등의 성분으로 구성되어 있으며, 상기 바인더는 올레핀계 불포화 화합물로 내열성을 조절한다. 그러나 기존 올레핀계 불포화 화합물은 바인더의 감도, 잔막률 등의 문제점으로 LCD(liquid crystal display) 제조 공정을 개선할 수 없었다. 따라서, 기존 유기막 수준보다 높은 감도와 잔막률 등의 특성을 가질 수 있으면서도 쉽게 합성이 가능하 며 수급이 쉬운 바인더 개발 필요성에 대한 요구가 제기되고 있다. In order to manufacture the interlayer insulating film, a specific photosensitive material is used, and there is a continuous need for a material having few processes and excellent sensitivity, residual film ratio, transmittance and storage stability. Conventional interlayer insulating film is composed of a component such as a binder, PAC, additives, solvents, the binder is an olefin unsaturated compound to control the heat resistance. However, existing olefinically unsaturated compounds have not been able to improve the liquid crystal display (LCD) manufacturing process due to problems such as sensitivity and residual film ratio of the binder. Therefore, there is a demand for developing a binder that can be easily synthesized and easily supplied, while having characteristics such as sensitivity and residual film ratio higher than that of the existing organic film.
본 발명은 상기와 같은 종래기술의 문제점들을 해결하기 위한 것으로, 신규한 아크릴계 공중합체를 사용함으로써 사용하여 투과율, 절연성, 평탄성, 내화학성, 고내열성 등의 성능이 우수하고, 특히 고감도, 잔막률, UV투과율, 현상성 및 저장안정성이 우수하여 LCD(liquid crystal display) 제조공정에 있어서의 층간 절연막을 형성에 용이한 절연막 형성용 감광성 수지 조성물을 제공하고자 한다.The present invention is to solve the problems of the prior art as described above, by using a novel acrylic copolymer is excellent in performance, such as transmittance, insulation, flatness, chemical resistance, high heat resistance, in particular high sensitivity, residual film rate, The present invention provides a photosensitive resin composition for forming an insulating film that is excellent in UV transmittance, developability, and storage stability and is easy to form an interlayer insulating film in a liquid crystal display (LCD) manufacturing process.
본 발명은 또한 상기 감광성 수지 조성물을 사용하여 제조한 층간 절연막을 포함하는 액정 디스플레이 장치를 제공하고자 한다.The present invention also provides a liquid crystal display device comprising an interlayer insulating film prepared using the photosensitive resin composition.
다만, 본 발명이 이루고자 하는 기술적 과제들은 이상에서 언급한 과제들로 제한되지 않으며, 또 다른 기술적 과제들은 아래의 기재로부터 당업자에게 명확하게 이해될 수 있을 것이다.However, technical problems to be achieved by the present invention are not limited to the above-mentioned problems, and other technical problems will be clearly understood by those skilled in the art from the following description.
상기와 같은 목적을 달성하기 위하여, 본 발명의 일 구현예에 따르면 (A)ⅰ) 디옥솔란계 화합물, ⅱ) 불포화 카르본산, 불포화 카르본산 무수물, 또는 이들의 혼합물, 및 ⅲ) 에폭시기 함유 불포화 화합물을 불포화 단량체로 하는 아크릴계 공중합체; (B) 퀴논디아지드 화합물; 및 (C) 용매를 포함하는 절연막 형성용 감광성 수지 조성물을 제공한다.In order to achieve the above object, according to one embodiment of the present invention, (A) i) dioxolane-based compound, ii) unsaturated carboxylic acid, unsaturated carboxylic anhydride, or mixture thereof, and iii) epoxy group-containing unsaturated compound Acrylic copolymers having an unsaturated monomer; (B) quinonediazide compounds; And (C) It provides the photosensitive resin composition for insulating film formation containing a solvent.
본 발명의 다른 일 구현예에 따르면 상기 감광성 수지 조성물을 이용하여 제조된 절연막을 포함하는 액정 디스플레이 장치를 제공한다.According to another embodiment of the present invention provides a liquid crystal display device including an insulating film manufactured using the photosensitive resin composition.
기타 본 발명의 구현예들의 구체적인 사항은 이하의 상세한 설명에 포함되어 있다.Other specific details of embodiments of the present invention are included in the following detailed description.
본 발명에 따른 감광성 수지 조성물은 투과율, 절연성, 평탄성, 내화학성, 고내열성, 아웃개싱(outgassing) 등의 성능이 우수하며, 특히 고감도, 잔막률, UV투과율, 현상성 및 저장안정성이 우수하여 액정 디스플레이 장치의 제조 공정에서 절연막으로 사용함에 있어 신뢰도를 얻을 수 있을 뿐만 아니라 공정진행 시간 단축의 효과를 얻을 수 있다. The photosensitive resin composition according to the present invention has excellent performance in transmittance, insulation, flatness, chemical resistance, high heat resistance, outgassing, and the like, and in particular, it has high sensitivity, residual film ratio, UV transmittance, developability, and storage stability. In the manufacturing process of the display device, not only can the reliability be obtained, but also the effect of shortening the process progress time can be obtained.
이하, 본 발명의 구현예를 상세히 설명하기로 한다. 다만, 이는 예시로서 제시되는 것으로, 이에 의해 본 발명이 제한되지는 않으며 본 발명은 후술할 청구항의 범주에 의해 정의될 뿐이다. Hereinafter, embodiments of the present invention will be described in detail. However, this is presented as an example, by which the present invention is not limited and the present invention is defined only by the scope of the claims to be described later.
본 발명의 일 구현예에 따른 절연막 형성용 감광성 수지 조성물은 (A)ⅰ) 디옥솔란계 화합물, ⅱ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물, 및 ⅲ) 에폭시기 함유 불포화 화합물을 불포화 단량체로 하는 아크릴계 공중합체; (B) 퀴논디아지드 화합물; 및 (C) 용매를 포함한다.The photosensitive resin composition for forming an insulating film according to an embodiment of the present invention comprises (A) i) a dioxolane-based compound, ii) an unsaturated carboxylic acid, an unsaturated carboxylic anhydride or a mixture thereof, and iii) an epoxy group-containing unsaturated compound. Acrylic copolymer made into; (B) quinonediazide compounds; And (C) a solvent.
보다 바람직하게는 상기 조성물은 (A) 아크릴계 공중합체 100 중량부에 대하여(B) 퀴논디아지드 화합물 5 내지 50 중량부를 포함한다.More preferably, the composition contains 5 to 50 parts by weight of (B) quinonediazide compound based on 100 parts by weight of (A) acrylic copolymer.
이하 본 발명의 일 구현예에 따른 감광성 수지 조성물에 포함되는 각 성분에 대하여 구체적으로 살펴본다.Hereinafter, each component included in the photosensitive resin composition according to the exemplary embodiment of the present invention will be described in detail.
(A) 아크릴계 공중합체 (A) Acrylic Copolymer
상기 아크릴계 공중합체는 현상시 스컴이 발생하지 않는 소정의 패턴을 용이하게 형성할 수 있도록 하는 작용을 하는 것으로, i) 디옥솔란계 화합물, ⅱ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물, 및 ⅲ) 에폭시기 함유 불포화 화합물을 불포화 단량체로 하는 공중합체이다.The acrylic copolymer acts to easily form a predetermined pattern that does not occur scum during development, i) dioxolane compound, ii) unsaturated carboxylic acid, unsaturated carboxylic anhydride or mixtures thereof, And iii) a copolymer comprising an epoxy group-containing unsaturated compound as an unsaturated monomer.
ⅰ) 디옥솔란계 화합물Iii) dioxolane compounds
상기 디옥솔란계 화합물은 절연막의 감도, 잔막률, 내열성 및 공중합체의 저장안정성을 향상시키는 역할을 하는 것으로, 하기 화학식 1의 구조를 갖는 것이 바람직하다.The dioxolane-based compound serves to improve the sensitivity, residual film ratio, heat resistance, and storage stability of the copolymer of the insulating film, and preferably has a structure of Formula 1 below.
[화학식 1][Formula 1]
상기 식에서, Where
R1 및 R2는 각각 독립적으로 치환 또는 비치환된 알킬기, 치환 또는 비치환된 아릴기, 및 치환 또는 비치환된 지방족 고리 화합물기로 이루어진 군에서 선택되거나 또는 서로 연결되어 고리를 형성하고,R 1 and R 2 are each independently selected from the group consisting of a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, and a substituted or unsubstituted aliphatic ring compound group or are linked to each other to form a ring,
R3는 수소 원자 또는 메틸기이며,R 3 is a hydrogen atom or a methyl group,
R 및 R'는 수소 또는 치환 또는 비치환된 알킬기이고,R and R 'are hydrogen or a substituted or unsubstituted alkyl group,
n은 1 내지 5이다.n is 1-5.
구체적으로는 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트, 2-이소부틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트, 1,4-디옥사스피로-[4,5]-데-2일-메틸 아크릴레이트, 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 메타크릴레이트, 2-이소부틸-2-메틸-1,3-디옥솔란-4일-메틸 메타크릴레이트, 1,4-디옥사스피로-[4,5]-데-2일-메타크릴레이트, 2,2-디메틸-1,3-디옥솔란-4일-메타크릴레이트 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용할 수 있다.Specifically 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate, 2-isobutyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate, 1, 4-dioxaspiro- [4,5] -de-2yl-methyl acrylate, 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl methacrylate, 2-isobutyl-2 -Methyl-1,3-dioxolan-4yl-methyl methacrylate, 1,4-dioxaspiro- [4,5] -dec-2yl-methacrylate, 2,2-dimethyl-1,3 Dioxolane-4yl-methacrylate and mixtures thereof can be used.
본 발명의 아크릴계 공중합체는 상기 i) 디옥솔란계 화합물 로부터 유도되는 구성단위를 공중합체 중에 10 내지 80 중량%로 포함되는 것이 바람직하고, 보다 바람직하게는 30 내지 60 중량%로 포함될 수 있다. 그 함량이 10 중량% 미만일 경우에는 내열성이 저하될 우려가 있고, 80 중량%를 초과할 경우에는 알칼리 수용성에 대한 용해성 및 공중합체의 보존안정성이 저하될 우려가 있어 바람직하지 않다.The acrylic copolymer of the present invention preferably comprises 10 to 80% by weight of the structural unit derived from i) the dioxolane-based compound in the copolymer, and more preferably 30 to 60% by weight. If the content is less than 10% by weight, the heat resistance may be lowered. If the content is more than 80% by weight, the solubility to alkali water solubility and the storage stability of the copolymer may be lowered.
ⅱ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물 Ii) unsaturated carboxylic acids, unsaturated carboxylic anhydrides or mixtures thereof
상기 불포화 카르본산, 불포화 카르본산 무수물로는 아크릴산, 메타크릴산 등의 불포화 모노카르본산류; 말레인산, 푸마르산, 시트라콘산, 메사콘산, 이타콘산 등의 불포화 디카르본산류; 불포화 디카르본산의 무수물;로 이루어진 군으로부터 선택된 것을 사용할 수 있다. 이 중에서도 공중합 반응성과 알칼리 수용액에 대한 용해성이 보다 우수한 아크릴산, 메타크릴산, 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용하는 것이 보다 바람직하다.Examples of the unsaturated carboxylic acid and unsaturated carboxylic anhydride include unsaturated monocarboxylic acids such as acrylic acid and methacrylic acid; Unsaturated dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid and itaconic acid; Anhydrides of unsaturated dicarboxylic acids; may be selected from the group consisting of. Among these, it is more preferable to use those selected from the group consisting of acrylic acid, methacrylic acid, and mixtures thereof having better copolymerization reactivity and solubility in aqueous alkali solution.
본 발명의 아크릴계 공중합체는 상기 ⅱ) 불포화 카르본산, 불포화 카르본산 무수물 또는 이들의 혼합물로부터 유도되는 구성단위를 공중합체 중에 5 내지 40 중량%로 포함되는 것이 바람직하고, 10 내지 30 중량%로 사용되는 것이 보다 바람직하다. 5 중량% 미만인 경우에는 알칼리 수용액에 용해되기 어려운 문제점이 있어 바람직하지 못하고, 40 중량%를 초과하는 경우에는 알칼리 수용액에 대한 용해성이 지나치게 커지는 문제점이 있어 바람직하지 않다. In the acrylic copolymer of the present invention, the structural unit derived from the above ii) unsaturated carboxylic acid, unsaturated carboxylic anhydride or a mixture thereof is preferably contained in the copolymer at 5 to 40% by weight, and is used at 10 to 30% by weight. It is more preferable. If it is less than 5% by weight, there is a problem that it is difficult to dissolve in the aqueous alkali solution, and if not more than 40% by weight, there is a problem that the solubility in the aqueous alkali solution is too large, which is not preferable.
ⅲ) 에폭시기 함유 불포화 화합물Viii) epoxy group-containing unsaturated compounds
상기 ⅲ) 에폭시기 함유 불포화 화합물로는 아크릴산 글리시딜, 메타크릴산 글리시딜, α-에틸 아크릴산 글리시딜, α-n-프로필아크릴산 글리시딜, α-n-부틸 아크릴산 글리시딜, 아크릴산-β-메틸글리시딜, 메타크릴산-β-메틸글리시딜, 아크릴산-β-에틸글리시딜, 메타크릴산-β-에틸글리시딜 등의 아크릴산 글리시딜류; 아크릴산-3,4-에폭시부틸, 메타크릴산-3,4,-에폭시부틸, 아크릴산-6,7-에폭시헵틸, 메타크릴산-6,7-에폭시헵틸, α-에틸 아크릴산-6,7-에폭시헵틸 등의 아크릴산 에폭시 알킬류; o-비닐벤질 글리시딜 에테르, m-비닐벤질 글리시딜 에테르, p-비닐벤질 글리시딜 에테르 등의 비닐벤질 글리시딜 에테르류; 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용할 수 있다. 이중에서도 메타크릴산 글리시딜, 메타크릴산-β-메틸글리시딜, 메타크릴산-6,7-에폭시헵틸, o-비닐벤질 글리시딜 에테르, m-비닐벤질 글리시딜 에테르, p-비닐벤질 글리시딜 에테르, 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용하는 것이 공중합 반응성 및 얻어지는 패턴의 내열성을 높일 수 있어 바람직하다.(Iv) The epoxy group-containing unsaturated compound is glycidyl acrylate, glycidyl methacrylate, α-ethyl acrylate glycidyl, α-n-propyl acrylate glycidyl, α-n-butyl acrylate glycidyl, acrylic acid acrylic acid glycidyls such as-beta -methyl glycidyl, methacrylic acid-beta -methyl glycidyl, acrylic acid-beta -ethyl glycidyl, and methacrylic acid-beta -ethyl glycidyl; Acrylic acid-3,4-epoxybutyl, methacrylic acid-3,4, -epoxybutyl, acrylic acid-6,7-epoxyheptyl, methacrylic acid-6,7-epoxyheptyl, α-ethyl acrylic acid-6,7- Acrylic acid epoxy alkyls such as epoxyheptyl; vinyl benzyl glycidyl ethers such as o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, and p-vinyl benzyl glycidyl ether; And mixtures thereof. Of these, methacrylic acid glycidyl, methacrylic acid-β-methylglycidyl, methacrylic acid-6,7-epoxyheptyl, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p It is preferable to use those selected from the group consisting of -vinylbenzyl glycidyl ether, and mixtures thereof because it can improve the copolymerization reactivity and the heat resistance of the obtained pattern.
본 발명의 아크릴계 공중합체는 상기 ⅲ) 에폭시기 함유 불포화 화합물로부터 유도되는 구성단위를 공중합체 중에 5 내지 50 중량%로 포함되는 것이 바람직하며, 보다 바람직하게는 10 내지 40 중량%로 포함될 수 있다. 그 함량이 5 중량% 미만일 경우에는 얻어지는 패턴의 내열성이 저하될 우려가 있어 바람직하지 않고, 50 중량%를 초과할 경우에는 공중합체의 보존안정성이 저하될 우려가 있어 바람직하지 않다.The acrylic copolymer of the present invention preferably comprises 5 to 50% by weight of the structural unit derived from the above-mentioned i) epoxy group-containing unsaturated compound in the copolymer, and more preferably 10 to 40% by weight. If the content is less than 5% by weight, the heat resistance of the resulting pattern may be lowered, which is not preferable. If the content is higher than 50% by weight, the storage stability of the copolymer may be lowered, which is not preferable.
상기 아크릴계 공중합체는 상기 i) 내지 iii)의 불포화 단량체들을 용매 및 중합 개시제의 존재하에서 라디칼 중합하여 제조될 수 있다.The acrylic copolymer may be prepared by radical polymerization of the unsaturated monomers of i) to iii) in the presence of a solvent and a polymerization initiator.
이때 상기 공중합체의 제조에 사용되는 용매로는 상기 공중합체의 제조에 사용되는 용매로는, 메탄올, 테트라히드로퓨란, 에틸렌글리콜 모노메틸에테르, 에틸렌글리콜 모노에틸에테르, 프로필렌글리콜 모노메틸에테르 아세테이트, 메틸세로솔브아세테이트, 에틸세로솔브아세테이트, 디에틸렌글리콜 모노메틸에테르, 디에틸렌글리콜 모노에틸에테르,에틸렌글리콜 디메틸에테르, 에틸렌글리콜 디에틸에테르, 에틸렌글리콜 메틸에틸에테르, 프로필렌글리콜 모노에틸에테르, 프로필렌글리콜 프로필에테르, 프로필렌글리콜 부틸에테르, 프로필렌글리콜 메틸에틸아세테이트, 프로필렌 글리콜 에틸에테르아세테이트, 프로필렌글리콜 프로필에테르아세테이트, 프로필렌글리콜 부틸에테르아세테이트, 프로필렌글리콜 메틸에틸프로피오네이트, 프로필렌글리콜 에틸에테르프로피오네이트, 프로필렌글리콜 프로필에테르프로피오네이트, 프로필렌글리콜 부틸에테르프로피오네이트, 톨루엔, 크실렌, 메틸에틸케톤, 시클로헥사논, 4-히드록시 4-메틸 2-펜타논, 초산메틸,초산에틸, 초산프로필, 초산 부틸, 2-히드록시 프로피온산에틸, 2-히드록시 2-메틸프로피온산메틸,2-히드록시 2-메틸프로피온산에틸, 히드록시 초산메틸, 히드록시 초산에틸, 히드록시 초산부틸, 유산메틸, 유산에틸, 유산프로필, 유산부틸, 3-히드록시 프로피온산메틸, 3-히드록시 프로피온산에틸, 3-히드록시프로피온산 프로필, 3-히드록시 프로피온산 부틸, 2-히드록시 3-메틸부탄산메틸, 메톡시초산메틸, 메톡시초산에틸, 메톡시초산프로필, 메톡시초산부틸, 에톡시초산메틸, 메톡시초산에틸, 에톡시초산프로필, 에톡시초산부틸, 프로폭시초산메틸, 프로폭시초산에틸, 프로폭시초산프로필, 프로폭시초산부틸, 부톡시초산 메틸, 부톡시초산에틸, 부톡시초산 프로필, 부톡시초산 부틸, 2-메톡시프로피온산 메틸, 2-메톡시프로피온산에틸, 2-메톡시프로피온산 프로필, 2-메톡시프로피온산 부틸, 2-에톡시프로피온산 메틸, 2-에톡시프로피온산 에틸, 2-에톡시프로피온산 프로필, 2-에톡시프로피온산 부틸, 2-부톡시프로피온산 메틸, 2-부톡시프로피온산 에틸, 2-부톡시프로피온산프로필, 2-부톡시프로피온산 부틸, 3-메톡시프로피온산 메틸, 3-메톡시프로피온산 에틸, 3- 메톡시프로피온산 프로필, 3-메톡시프로피온산 부틸, 3-에톡시프로피온산 메틸, 3-에톡시프로피온산 에틸3-에톡시프로피온산 프로필, 3-에톡시프로피온산 부틸, 3-프로폭시프로피온산 메틸, 3-프로폭시프로피온산 에틸, 3-프로폭시프로피온산 프로필, 3-프로폭시프로피온산 부틸, 3-부톡시프로피온산메틸, 3-부톡시프로피온산 에틸, 3-부톡시프로피온산 프로필, 3-부톡시프로피온산 부틸 등의 에테르류, 또는 이들의 조합 등을 들 수 있다.At this time, as a solvent used for the production of the copolymer, a solvent used for the production of the copolymer, methanol, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monomethyl ether acetate, methyl Longitudinal solution acetate, ethyl vertical solution acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, propylene glycol monoethyl ether, propylene glycol propyl ether , Propylene glycol butyl ether, propylene glycol methyl ethyl acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, propylene glycol butyl ether acetate, propylene glycol methyl ethyl propionate, propylene Recall ethyl ether propionate, propylene glycol propyl ether propionate, propylene glycol butyl ether propionate, toluene, xylene, methyl ethyl ketone, cyclohexanone, 4-hydroxy 4-methyl 2-pentanone, methyl acetate, Ethyl acetate, propyl acetate, butyl acetate, 2-hydroxy ethyl propionate, 2-hydroxy methyl methyl propionate, 2-hydroxy ethyl 2-methyl propionate, hydroxy methyl acetate, hydroxy ethyl acetate, hydroxy butyl acetate , Methyl lactate, ethyl lactate, propyl lactate, butyl lactate, 3-hydroxy propionate methyl, 3-hydroxy ethyl propionate, 3-hydroxy propionic acid propyl, 3-hydroxy propionate butyl, 2-hydroxy 3-methylbutanoic acid Methyl, methyl methoxy acetate, ethyl methoxy acetate, methoxy methoxy acetate, methoxy methoxy acetate, methyl ethoxy acetate, ethyl methoxy acetate, ethoxy propyl acetate, butyl ethoxy acetate, propoxy Methyl, ethyl propoxy acetate, propyl propoxy acetate, butyl propoxy acetate, methyl butoxy acetate, butoxy acetate, butyl butoxy acetate, butyl butoxy acetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate , 2-methoxypropionic acid propyl, 2-methoxypropionic acid butyl, 2-ethoxypropionic acid methyl, 2-ethoxypropionic acid ethyl, 2-ethoxypropionic acid propyl, 2-ethoxypropionic acid butyl, 2-butoxypropionic acid methyl, Ethyl 2-butoxypropionate, propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, 3 Methyl ethoxypropionate, ethyl 3-ethoxypropionate propyl 3-ethoxypropionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, 3-propoxypropionate Ethers such as acid propyl, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, and butyl 3-butoxypropionate, or a combination thereof. have.
또한 상기 중합개시제로는 라디칼 중합 개시제를 사용할 수 있다. 상기 라 디칼중합개시제로 2,2'-아조비스이소부티로니트릴, 2,2'-아조비스(2,4-디메틸발레로니트릴), 2,2'-아조비스(4-메톡시 2,4-디메틸발레로니트릴), 1,1'-아조비스(시클로헥산-1-카르보니트릴)디메틸 2,2'-아조비스이소부틸레이트 등을 사용할 수 있다.In addition, a radical polymerization initiator may be used as the polymerization initiator. As the radical polymerization initiator, 2,2'-azobisisobutyronitrile, 2,2'-azobis (2,4-dimethylvaleronitrile), 2,2'-azobis (4-methoxy 2, 4-dimethylvaleronitrile), 1,1'-azobis (cyclohexane-1-carbonitrile) dimethyl 2,2'-azobisisobutylate, and the like can be used.
상기 A) 아크릴계 공중합체는 폴리스티렌 환산 중량평균분자량(Mw)이 3,000 내지 30,000인 것이 바람직하고, 5,000 내지 15,000인 것이 보다 바람직하다. 상기 중량평균분자량이 3,000 미만이면 현상성 및 잔막률이 저하되거나 패턴 형상, 내열성, 접착력 등이 저하될 우려가 있어 바람직하지 않고, 또한 30,000을 초과하는 경우에는 감도 저하, 패턴 형상 불량, 투과도 감소 등의 문제가 있어 바람직하지 않다.It is preferable that the weight average molecular weight (Mw) of polystyrene conversion of said A) acrylic copolymer is 3,000-30,000, and it is more preferable that it is 5,000-15,000. If the weight average molecular weight is less than 3,000, developability and residual film ratio may decrease, or pattern shape, heat resistance, adhesive strength, etc. may be deteriorated, and if the weight average molecular weight exceeds 30,000, sensitivity decreases, pattern shape defect, decrease in transmittance, etc. It is not preferable because there is a problem.
(B) 퀴논디아지드 화합물(B) quinonediazide compound
상기 퀴논디아지드 화합물은 감광성 화합물로서, 나프토퀴논디아지드 술폰산 할로겐 화합물과 페놀계 화합물을 약염기 하에 반응시켜 제조할 수 있다. The quinonediazide compound is a photosensitive compound, and may be prepared by reacting a naphthoquinone diazide sulfonic acid halogen compound and a phenolic compound under a weak base.
상기 퀴논디아지드 화합물의 합성시 에스테르화도는 45 내지 90%인 것이 바람직하다. 에스테르화도가 45% 미만인 경우에는 잔막률이 급격히 저하되고 감도 이상이 발생할 우려가 있어 바람직하지 않고, 90%를 초과하는 경우에는 보관 안정성이 저하될 우려가 있어 바람직하지 않다.In the synthesis of the quinonediazide compound, the degree of esterification is preferably 45 to 90%. If the degree of esterification is less than 45%, the residual film ratio may be drastically lowered and there may be a sensitivity abnormality.
상기 퀴논디아지드 화합물은 예를 들면, 1,2-퀴논디아지드 화합물, 1,4-퀴논디아지드 화합물 등이 있으나, 반드시 이에 한정되지는 않는다.The quinonediazide compound includes, for example, 1,2-quinonediazide compound, 1,4-quinonediazide compound, and the like, but is not necessarily limited thereto.
바람직하게는 1,2-퀴논디아지드 화합물을 사용하는 것이 좋고, 1,2-퀴논디아 지드 화합물중에서도 1,2-퀴논디아지드 4-술폰산 에스테르, 1,2-퀴논디아지드 5-술폰산 에스테르, 1,2-퀴논디아지드 6-술폰산 에스테르, 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용하는 것이 보다 바람직하다.Preferably, a 1,2-quinonediazide compound is used, and among the 1,2-quinonediazide compounds, 1,2-quinonediazide 4-sulfonic acid ester, 1,2-quinonediazide 5-sulfonic acid ester, More preferably, those selected from the group consisting of 1,2-quinonediazide 6-sulfonic acid esters, and mixtures thereof are used.
상기 퀴논디아지드 화합물은 상기 (A)의 아크릴계 공중합체 100 중량부에 대하여 5 내지 80 중량부로 포함되는 것이 바람직하고, 보다 바람직하게는 5 내지 50중량부, 보다 더 바람직하게는 10 내지 40 중량부로 포함될 수 있다. 그 함량이 5 중량부 미만인 경우에는 노광부와 비노광부의 용해도의 차가 작아져 패턴 형성이 곤란하고, 80 중량부를 초과하는 경우에는 단시간의 빛이 조사될 때 미반응의 1,2-퀴논디아지드 화합물이 다량 잔존하여 알칼리 수용액에의 용해도가 지나치게 낮아지기 때문에 현상이 어렵다는 문제점이 있다.The quinonediazide compound is preferably included in an amount of 5 to 80 parts by weight, more preferably 5 to 50 parts by weight, even more preferably 10 to 40 parts by weight, based on 100 parts by weight of the acrylic copolymer of (A). May be included. If the content is less than 5 parts by weight, the difference in solubility between the exposed and non-exposed parts is small, and pattern formation is difficult. If the content exceeds 80 parts by weight, unreacted 1,2-quinonediazide is applied when light is irradiated for a short time. There is a problem that development is difficult because a large amount of the compound remains and the solubility in the aqueous alkali solution is too low.
(C) 용매(C) solvent
상기 용매는 절연막의 평탄성과 코팅얼룩을 발생하지 않게 하여, 균일한 패턴 프로파일(pattern profile)을 형성하는 역할을 하는 것으로, 메탄올, 에탄올 등의 알코올류; 테트라히드로퓨란 등의 에테르류; 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르 등의 글리콜에테르류; 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트 등의 에틸렌글리콜알킬에테르 아세테이트류; 디에틸렌글리콜모노메틸에테르, 디에틸렌글리콜모노에틸에테르, 디에틸렌글리콜디메틸에테르 등의 디에틸렌글리콜류; 프로필렌글리콜메틸에테르, 프로필렌글리콜에틸에테르, 프로필렌글리콜프로필에테르, 프로필레글리콜부틸에테르 등의 프로필렌글리콜모노알킬에테르 류; 프로필렌글리콜메틸에테르아세테이트, 프로필렌글리콜에틸에테르아세테이트, 프로필렌글리콜프로필에테르아세테이트, 프로필렌글리콜부틸에테르아세테이트 등의 프로필렌글리콜알킬에테르아세테이트류 ; 프로필렌글리콜메틸에테르프로피오네이트, 프로필렌글리콜에틸에테르프로피오네이트, 프로필렌글리콜프로필에테르프로피오네이트, 프로필렌글리콜부틸에테르프로피오네이트 등의 프로필렌글리콜알킬에테르아세테이트류; 톨루엔, 크실렌 등의 방향족 탄화수소류; 메틸에틸케톤, 시클로헥사논, 4-히드록시 4-메틸 2-펜타논 등의 케톤류; 초산메틸, 초산에틸, 초산프로필, 초산부틸, 2-히드록시 프로피온산 에틸, 2-히드록시 2-메틸프로피온산 메틸, 2-히드록시 2-메틸프로피온산 에틸, 히드록시초산 메틸, 히드록시초산에틸, 히드록시초산부틸, 유산메틸, 유산에틸, 유산프로필, 유산부틸, 3-히드록시프로피온산 메틸, 3-히드록시프로피온산에틸, 3-히드록시프로피온산프로필, 3-히드록시프로피온산 부틸, 2-히드록시 3-메틸부탄산 메틸, 메톡시초산 메틸, 메톡시초산 에틸, 메톡시초산 프로필, 메녹시초산 부틸, 에톡시 초산 메틸, 에톡시 초산 에틸, 에톡시 초산 프로필, 에톡시 초산 부틸, 프로폭시초산 메틸. 프로폭시초산 에틸, 프로폭시초산 프로필, 프로폭시초산 부틸, 부톡시초산메틸, 부톡시초산 에틸, 부톡시초산 프로필, 부톡시초산 부틸, 2-메톡시프로피온산 메틸, 2-메톡시프로피온산 에틸, 2-메톡시프로피온산 프로필, 2-메톡시프로피온산 부틸, 2-에톡시프로피온산 메틸2-에톡시프로피온산 에틸, 2-에톡시프로피온산 프로필, 2-에톡시프로피온산 부틸, 2- 부톡시프로피온산 메틸, 2-부톡시프로피온산 에틸, 2-부톡시프로피온산 프로필, 2-부톡시프로피온산 부틸, 3-메톡시프로피온산 메틸, 3-메톡시프로피온산 에틸, 3-메톡시 프로피온산 프로필, 3-메톡시프로피온산 부틸, 3-에톡시프로피온산 메틸, 3-에톡시프로피온산 에틸, 3-에톡시프로피온산 프로필, 3-에톡시프로피온산 부틸, 3-프로폭시프로피온산 메틸, 3-프로폭시프로피온산 에틸, 3-프로폭시프로피온산 프로필, 3-프로폭시프로피온산 부틸, 3-부톡시프로피온산 메틸, 3-부톡시프로피온산 에틸, 3-부톡시프로피온산 프로필, 3-부톡시프로피온산 부틸 등의 에스테르류, 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용할 수 있다. 이중에서도 용해성, 각 성분과의 반응성, 및 도포막 형성이 용이한 글리콜에테르류, 에틸렌알킬에테르아세테이트류, 디에틸렌글리콜류 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용하는 것이 보다 바람직하다.The solvent serves to form a uniform pattern profile by preventing flatness of the insulating film and coating stains, and alcohols such as methanol and ethanol; Ethers such as tetrahydrofuran; Glycol ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; Ethylene glycol alkyl ether acetates such as methyl cellosolve acetate and ethyl cellosolve acetate; Diethylene glycols such as diethylene glycol monomethyl ether, diethylene glycol monoethyl ether and diethylene glycol dimethyl ether; Propylene glycol monoalkyl ethers such as propylene glycol methyl ether, propylene glycol ethyl ether, propylene glycol propyl ether, and propyl glycol glycol ether; Propylene glycol alkyl ether acetates such as propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, and propylene glycol butyl ether acetate; Propylene glycol alkyl ether acetates such as propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol propyl ether propionate and propylene glycol butyl ether propionate; Aromatic hydrocarbons such as toluene and xylene; Ketones such as methyl ethyl ketone, cyclohexanone, and 4-hydroxy 4-methyl 2-pentanone; Methyl acetate, ethyl acetate, propyl acetate, butyl acetate, 2-hydroxy propionate ethyl, 2-hydroxy 2-methylpropionate, 2-hydroxy 2-methylpropionate, methyl hydroxy acetate, ethyl hydroxyacetate, hydroxy Butyl oxyacetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, butyl hydroxypropionate, 2-hydroxy 3- Methyl methyl butyrate, methyl methoxy acetate, ethyl methoxy acetate, methoxy propyl acetate, butyl methoxy acetate, methyl ethoxy acetate, ethyl ethoxy acetate, ethoxy propyl acetate, butyl ethoxy acetate, methyl propoxy acetate. Ethyl propoxy acetate, propyl propoxy acetate, butyl propoxy acetate, methyl butoxy acetate, ethyl butoxy acetate, propyl butoxy acetate, butyl butoxy acetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, 2 Propyl methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate 2-ethyl ethoxypropionate, propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, 2-part Ethyl oxypropionate, propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, 3-ethoxy Methyl propionate, ethyl 3-ethoxypropionate, propyl 3-ethoxypropionate, butyl 3-ethoxypropionate, methyl 3-propoxypropionate, ethyl 3-propoxypropionate, 3-propoxypropy Esters such as acid propyl, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, butyl 3-butoxypropionate, and mixtures thereof You can use what is selected. Among them, it is more preferable to use those selected from the group consisting of solubility, reactivity with each component, and easy to form a coating film, glycol ethers, ethylene alkyl ether acetates, diethylene glycols, and mixtures thereof.
상기 용매는 감광성 수지 조성물내 잔부로 포함될 수 있는데, 바람직하게는 감광성 수지 조성물내 고형분 함량이 10 내지 60 중량%가 되도록 하는 양으로 포함될 수 있으며, 보다 바람직하게는 10 내지 50중량%, 보다 더 바람직하게는 15 내지 30 중량%가 되도록 포함될 수 있다. 감광성 수지 조성물내 고형분 함량이 10 중량% 미만일 경우에는 코팅 평탄성의 저하 및 코팅 두께가 얇아질 우려가 있고, 60 중량%를 초과하면 코팅장비에 무리를 줄 수 있다는 문제점이 있다. The solvent may be included as the remainder in the photosensitive resin composition, preferably may be included in an amount such that the solid content in the photosensitive resin composition is 10 to 60% by weight, more preferably 10 to 50% by weight, even more preferred Preferably from 15 to 30% by weight. When the solid content in the photosensitive resin composition is less than 10% by weight, there is a concern that the coating flatness may decrease and the thickness of the coating may become thin.
(D) 기타 첨가제(D) other additives
상기 감광성 수지 조성물은 (A) 내지 (C) 성분 외에, 필요에 따라 에폭시 수지, 접착제, 아크릴화합물, 또는 계면활성제를 더욱 포함할 수 있다. In addition to the components (A) to (C), the photosensitive resin composition may further include an epoxy resin, an adhesive, an acrylic compound, or a surfactant as necessary.
상기 에폭시 수지는 감광성 수지 조성물로부터 얻어지는 패턴의 내열성 및 감도 등을 향상시키기 위해 첨가될 수 있다. 상기 에폭시 수지로는 비스페놀 A형 에폭시 수지, 페놀 노볼락형 에폭시 수지, 크레졸 노볼락형 에폭시 수지, 환상지방족 에폭시 수지, 글리시딜에스테르형 에폭시 수지, 글리시딜아민형 에폭시 수지, 복소환식 에폭시 수지, (A) 아크릴계 공중합체와 다른 글리시딜 메타아크릴레이트의 공중합체 또는 중합체, 또는 이들의 혼합물 등을 사용할 수 있다.The epoxy resin may be added to improve the heat resistance and sensitivity of the pattern obtained from the photosensitive resin composition. Examples of the epoxy resins include bisphenol A type epoxy resins, phenol novolac type epoxy resins, cresol novolac type epoxy resins, cycloaliphatic epoxy resins, glycidyl ester type epoxy resins, glycidylamine type epoxy resins, and heterocyclic epoxy resins. And (A) copolymers or polymers of acrylic copolymers with other glycidyl methacrylates, or mixtures thereof.
상기 에폭시 수지는 (A) 아크릴계 공중합체 100 중량부에 대하여 0.1 내지 35 중량부로 사용되는 것이 바람직하다. 35 중량부를 초과하는 경우에는 알칼리 가용성 수지에 대한 상용성이 떨어져 충분한 도포성능을 얻을 수 없는 문제점이 있어 바람직하지 못하다.The epoxy resin is preferably used in 0.1 to 35 parts by weight based on 100 parts by weight of the (A) acrylic copolymer. When it exceeds 35 parts by weight, there is a problem in that compatibility with alkali-soluble resin is poor and sufficient coating performance cannot be obtained, which is not preferable.
상기 접착제는 기판과의 접착성을 향상시키기 위해 첨가될 수 있다. 상기 접착제로는 카르복실기, 메타크릴기, 이소시아네이트기, 에폭시기 등의 반응성 치환기를 갖는 실란커플링제 등을 들 수 있으며, 구체적 예로는 γ-메타아크릴옥시프로필트리메톡시실란, 비닐트리아세톡시실란, 비닐트리메톡시실란, γ-이소시아네이트프로필트리에톡시실란, γ-글리시독시프로필트리메톡시실란, β-3,4-에폭시 시클로 헥실 에틸트리메톡시실란 등을 사용할 수 있다. 상기 접착제는 아크릴계 공중합체 100 중량부에 대하여 0.1 내지 30 중량부로 사용되는 것이 바람직하다.The adhesive may be added to improve the adhesion with the substrate. Examples of the adhesive include silane coupling agents having reactive substituents such as carboxyl groups, methacryl groups, isocyanate groups, and epoxy groups, and specific examples include γ-methacryloxypropyltrimethoxysilane, vinyltriacetoxysilane, and vinyl. Trimethoxysilane, (gamma) -isocyanate propyl triethoxysilane, (gamma)-glycidoxy propyl trimethoxysilane, (beta) -3, 4- epoxy cyclohexyl ethyl trimethoxysilane, etc. can be used. The adhesive is preferably used in an amount of 0.1 to 30 parts by weight based on 100 parts by weight of the acrylic copolymer.
상기 아크릴화합물은 감광성 수지 조성물로부터 얻어지는 패턴의 투과율, 내열성, 감도 등을 향상시키기 위해 첨가될 수 있다. 상기 아크릴화합물로는 하기 화학식 2로 표현되는 화합물이 있으며, 이에 한정되는 것은 아니다.The acrylic compound may be added to improve the transmittance, heat resistance, sensitivity and the like of the pattern obtained from the photosensitive resin composition. The acrylic compound includes a compound represented by the following Chemical Formula 2, but is not limited thereto.
[화학식 2][Formula 2]
(상기 화학식 2에서, R은 수소, C1 내지 C5의 알킬기, 알콕시기, 및 알카노일기로 이루어진 군에서 선택되는 것이고, 1<a<6이고, a+b=6 이다.)(In Formula 2, R is selected from the group consisting of hydrogen, an alkyl group of C1 to C5, an alkoxy group, and an alkanoyl group, 1 <a <6, and a + b = 6.)
상기 아크릴화합물은 아크릴계 공중합체 100 중량부에 대하여, 0.1 내지 40 중량부로 사용될 수 있으며, 바람직하게는 0.1 내지 15 중량부로 사용될 수 있다. 상기 범위내에서는 감도, 내열성 UV 투과율을 향상시킬 수 있어 바람직하다.The acrylic compound may be used in an amount of 0.1 to 40 parts by weight, preferably 0.1 to 15 parts by weight, based on 100 parts by weight of the acrylic copolymer. Within this range, the sensitivity and heat resistance UV transmittance can be improved, which is preferable.
상기 계면활성제는 감광성 수지 조성물의 도포성 및 현상성을 향상시키기 위해 첨가될 수 있다. 상기 계면활성제로는 폴리옥시에틸렌옥틸페닐에테르, 폴리옥시에틸렌노닐페닐에테르, F171, F172, F173(대일본잉크사), FC430, FC431(스미또모트리엠사), KP341(신월화학공업사) 등을 사용할 수 있다. 상기 계면 활성제는 (A) 아크릴계 공중합체 100 중량부에 대하여 0.0001 내지 2 중량부로 사용되는 것이 바람직하다. 상기 범위에서는 감광성 수지 조성물의 도포성이나 공정 진행시의 얼룩특성에 대한 장점이 있어 바람직하다. The surfactant may be added to improve the applicability and developability of the photosensitive resin composition. As the surfactant, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, F171, F172, F173 (Tokyo Ink Corp.), FC430, FC431 (Sumitomo Trim Co., Ltd.), KP341 (Shinwol Chemical Co., Ltd.) and the like can be used. Can be. The surfactant is preferably used in 0.0001 to 2 parts by weight based on 100 parts by weight of the (A) acrylic copolymer. The said range is preferable because there exists an advantage about the coating property of the photosensitive resin composition, and the stain characteristic at the time of a process progress.
상기한 구성을 갖는 감광성 수지 조성물은 0.1 내지 0.2μm의 밀리포아필터 등으로 여과한 뒤 사용하는 것이 바람직하다.It is preferable to use, after filtering the photosensitive resin composition which has the above-mentioned structure with the Millipore filter of 0.1-0.2 micrometer.
상기와 같은 본 발명에 따른 감광성 수지 조성물은 투과율, 절연성, 평탄성, 내화학성 등의 성능이 우수하며, 특히 감도 대비 잔막률 면의 특성을 통한 절연막에서 발생할 수 있는 공정시간 지연 문제를 최소화시킴으로 LCD 제조공정의 절연막으로 사용하기에 적합하다.The photosensitive resin composition according to the present invention has excellent performances such as transmittance, insulation, flatness, chemical resistance, and the like, and in particular, LCD manufacturing by minimizing a process time delay problem that may occur in an insulating film through characteristics of a residual film ratio relative to sensitivity. It is suitable for use as the insulating film of the process.
이에 따라 본 발명의 또 다른 일 구현예에 따르면 상기 감광성 수지 조성물을 이용하여 제조된 절연막을 포함하는 액정 디스플레이 장치를 제공한다.Accordingly, according to another embodiment of the present invention provides a liquid crystal display device including an insulating film manufactured using the photosensitive resin composition.
상기 절연막은 하기와 같은 방법에 의해 제조될 수 있다.The insulating film may be manufactured by the following method.
상기 제조된 감광성 수지 조성물을 스프레이법, 롤코터법, 회전도포법 등으로 기판표면에 도포하고, 프리베이크에 의해 용매를 제거하여 도포막을 형성한다. 이때, 상기 프리베이크는 70 내지 110℃의 온도에서 1 내지 10분간 실시하는 것이 바람직하다. 이후, 미리 준비된 패턴에 따라 가시광선, 자외선, 원자외선, 전자선, 엑스선 등을 상기 형성된 도포막에 조사하고, 현상액으로 현상하여 불필요한 부분을 제거함으로써 소정의 패턴을 형성한다. 이때 상기 현상액으로는 알칼리 수용액이 사용될 수 있으며, 구체적으로 수산화나트륨, 수산화칼륨, 탄산나트륨 등의 무기 알칼리류; 에틸아민, n-프로필아민 등의 1급 아민류; 디에틸아민, n-프로필아민 등의 2급 아민류; 트리메틸아민, 메틸디에틸아민, 디메틸에틸아민, 트리에틸아민 등의 3급 아민류; 디메틸에탄올 아민, 메틸디에탄올아민, 트리에탄올아민 등의 알콜아민류; 또는 테트라메틸암모늄히드록시드, 테트라에틸암모늄히드록시드 등의 4급 암모늄염의 수용액; 및 이들의 혼합물로 이루어진 군에서 선택되는 것을 사용할 수 있다. 상기 현상액중의 알칼리성 화합물의 농도는 0.1 내지 10중량%인 것이 바람직하다. 또한 상기 알칼리 수용액중에 메탄올, 에탄올 등과 같은 수용성 유기 용 매 및 계면활성제를 적정량 첨가할 수도 있다. 또한, 상기와 같은 현상액으로 현상한 후 초순수로 30 내지 90 초간 세정하여 불필요한 부분을 제거하고 건조하여 패턴을 형성할 수 있으며, 형성된 패턴에 자외선 등의 빛을 조사한 후, 패턴을 오븐 등의 가열장치에 의해 150 내지 250 ℃의 온도에서 30 내지 90 분간 가열 처리하여 최종 패턴을 얻을 수 있다.The photosensitive resin composition prepared above is applied to the substrate surface by a spray method, a roll coater method, a rotary coating method, or the like, and the solvent is removed by prebaking to form a coating film. At this time, the prebaking is preferably performed for 1 to 10 minutes at a temperature of 70 to 110 ℃. Thereafter, visible light, ultraviolet light, far ultraviolet rays, electron beams, X-rays, and the like are irradiated onto the formed coating film according to a pre-prepared pattern, and developed with a developing solution to form a predetermined pattern by removing unnecessary portions. In this case, an aqueous alkali solution may be used as the developer, and specifically, inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate and the like; Primary amines such as ethylamine and n-propylamine; Secondary amines such as diethylamine and n-propylamine; Tertiary amines such as trimethylamine, methyldiethylamine, dimethylethylamine and triethylamine; Alcohol amines such as dimethyl ethanol amine, methyl diethanol amine and triethanol amine; Or aqueous solutions of quaternary ammonium salts such as tetramethylammonium hydroxide and tetraethylammonium hydroxide; And mixtures thereof. It is preferable that the density | concentration of the alkaline compound in the said developing solution is 0.1 to 10 weight%. In addition, an appropriate amount of a water-soluble organic solvent such as methanol and ethanol and a surfactant may be added to the aqueous alkali solution. In addition, after developing with the developer as described above, it is washed with ultrapure water for 30 to 90 seconds to remove unnecessary parts and dried to form a pattern, and after irradiating the formed pattern with light such as ultraviolet rays, the pattern is heated in an oven or the like. By heat treatment at a temperature of 150 to 250 ℃ for 30 to 90 minutes to obtain a final pattern.
이하 실시예를 들어 본 발명에 대해서 더욱 상세하게 설명할 것이나, 하기의 실시예는 본 발명의 바람직한 실시예일 뿐 본 발명이 하기 실시예에 한정되는 것은 아니다.Hereinafter, the present invention will be described in more detail with reference to the following examples.
제조예Production Example 1: 아크릴계 공중합체의 제조 1: Preparation of Acrylic Copolymer
냉각관과 교반기를 구비한 플라스크에, 2,2'-아조비스(2,4-디메틸발레로니트릴) 10 중량부, 프로필렌글리콜 모노메틸에테르아세테이트 200 중량부, 하기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트 45 중량부, 메타크릴산 15 중량부, 및 메타아크릴산 글리시딜 20 중량부를 넣고 질소 치환한 후, 완만히 교반을 시작하였다. 반응 용액을 60°C까지 상승시킨 후 이 온도에서 5시간 동안 유지하면서 아크릴계 공중합체를 포함하는 중합체 용액을 제조하였다. In a flask equipped with a cooling tube and a stirrer, 10 parts by weight of 2,2'-azobis (2,4-dimethylvaleronitrile), 200 parts by weight of propylene glycol monomethyl ether acetate, 2-ethyl-2 of the formula 45 parts by weight of -methyl-1,3-dioxolane-4yl-methyl acrylate, 15 parts by weight of methacrylic acid, and 20 parts by weight of glycidyl methacrylate were added thereto, followed by nitrogen substitution, followed by gentle stirring. After raising the reaction solution to 60 ° C. was maintained at this temperature for 5 hours to prepare a polymer solution comprising an acrylic copolymer.
상기 아크릴계 공중합체를 포함하는 중합체 용액중의 미반응 단량체를 제거하기 위하여 에테르 빈용매(poor solvent) 1,000 중량부에 상기 중합체 용액 100 중량부를 침전시키고, 메쉬(mesh)를 이용한 필터링(filtering) 공정을 통하여 미반응물이 용해된 빈용매를 제거하였다. 그 후, 30℃ 이하에서 진공건조하여 필터링 공정 이후에도 남아있는 미반응 단량체가 함유된 용매를 완전히 제거하여 중량 평균분자량이 8,000인 아크릴계 공중합체를 제조하였다. 이 때, 중량평균분자량은 GPC(gel permeation chromatography)를 사용하여 측정한 폴리스티렌 환산평균분자량이다. In order to remove the unreacted monomer in the polymer solution including the acrylic copolymer, 100 parts by weight of the polymer solution is precipitated in 1,000 parts by weight of an ether solvent, and a filtering process using a mesh is performed. The poor solvent in which the unreacted substance was dissolved was removed. Thereafter, vacuum drying at 30 ° C. or lower completely removes the solvent containing the unreacted monomer remaining after the filtering process, thereby preparing an acrylic copolymer having a weight average molecular weight of 8,000. At this time, the weight average molecular weight is the polystyrene reduced average molecular weight measured using gel permeation chromatography (GPC).
[화학식 3][Formula 3]
제조예Production Example 2: 1,2- 2: 1,2- 퀴논디아지드Quinonediazide 화합물의 제조 Preparation of the compound
4,4'-[1-[4-[1-[4-히드록시페닐]-1-메틸에틸]페닐]에틸리덴]비스페놀 1mol과 1,2-나프토퀴논디아지드 5-술폰산[클로라이드] 2mol을 축합반응시켜 [4,4'-[1-[4-[1-[4-히드록시페닐]-1-메틸에틸]페닐]에틸리덴]비스페놀 1,2-나프토퀴논디아지드-5-술폰산 에스테르]를 제조하였다. 1 mol of 4,4 '-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol and 1,2-naphthoquinonediazide 5-sulfonic acid [chloride] Condensation reaction of 2 mol [4,4 '-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] phenyl] ethylidene] bisphenol 1,2-naphthoquinonediazide-5 Sulfonic acid esters].
실시예Example 1: 감광성 수지 조성물의 제조 1: Preparation of Photosensitive Resin Composition
상기 제조예 1에서 얻어진 아크릴계 공중합체 100 중량부에 대하여, 상기 제조예 2에서 제조한 [4,4'-[1-[4-[1-[4-히드록시페닐]-1-메틸에틸]페닐]에틸리덴]비스페놀 1,2-나프토퀴논디아지드-5-술폰산 에스테르] 20 중량부를 혼합하고, 감광성 수지 조성물 내의 고형분 농도가 28 중량%가 되도록 첨가한 디에틸렌글리콜 디메틸에테르에 용해시킨 뒤 0.2μm의 밀리포아필터로 여과하여 감광성 수지 조성물을 제조하였다. [4,4 '-[1- [4- [1- [4-hydroxyphenyl] -1-methylethyl] prepared in Preparation Example 2 with respect to 100 parts by weight of the acrylic copolymer obtained in Preparation Example 1 above. Phenyl] ethylidene] bisphenol 1,2-naphthoquinone diazide-5-sulfonic acid ester] 20 parts by weight, and dissolved in diethylene glycol dimethyl ether added so that the solid content concentration in the photosensitive resin composition is 28% by weight. A photosensitive resin composition was prepared by filtration with a 0.2 μm Millipore filter.
실시예Example 2: 감광성 수지 조성물의 제조 2: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 하기 화학식 4의 2-이소부틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 사용하여 제조한 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. Substituted 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of the general formula (3) as a monomer during the polymerization of the acrylic copolymer in Preparation Example 1 2-isobutyl- A photosensitive resin composition was prepared in the same manner as in Example 1, except that an acrylic copolymer prepared using 2-methyl-1,3-dioxolane-4yl-methyl acrylate was used.
[화학식 4][Formula 4]
실시예Example 3: 감광성 수지 조성물의 제조 3: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 하기 화학식 5의 1,4-디옥사스피로-[4,5]-데-2일-메틸 아크릴레이트를 사용하여 제조한 아크릴계 공 중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. 1,4-di of formula (5) instead of 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of formula (3) as a monomer in the acrylic copolymer polymerization in Preparation Example 1 A photosensitive resin composition was prepared in the same manner as in Example 1, except that an acrylic copolymer prepared using oxaspiro- [4,5] -dec-2yl-methyl acrylate was used.
[화학식 5][Formula 5]
실시예Example 4: 감광성 수지 조성물의 제조 4: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 하기 화학식 6의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 메타크릴레이트를 사용하여 제조한 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. 2-ethyl-2 of Chemical Formula 6, replacing 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of Chemical Formula 3 as a monomer during the polymerization of the acrylic copolymer in Preparation Example 1 A photosensitive resin composition was prepared in the same manner as in Example 1, except that an acrylic copolymer prepared using -methyl-1,3-dioxolane-4yl-methyl methacrylate was used.
[화학식 6][Formula 6]
실시예Example 5: 감광성 수지 조성물의 제조 5: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 하기 화학식 7의 2-이소부틸-2-메틸-1,3-디옥솔란-4일-메틸 메타크릴레이트를 사용하여 제조한 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. Substituted 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of Chemical Formula 3 as a monomer during polymerization of the acrylic copolymer in Preparation Example 1, 2-isobutyl- A photosensitive resin composition was prepared in the same manner as in Example 1, except that an acrylic copolymer prepared using 2-methyl-1,3-dioxolane-4yl-methyl methacrylate was used.
[화학식 7][Formula 7]
실시예Example 6: 감광성 수지 조성물의 제조 6: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 하기 화학식 8의 1,4-디옥사스피로-[4,5]-데-2일-메타크릴레이트를 사용하여 제조한 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. 1,4-di of formula 8 in place of 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of formula 3 as a monomer in the polymerization of the acrylic copolymer in Preparation Example 1 A photosensitive resin composition was prepared in the same manner as in Example 1, except that an acrylic copolymer prepared using oxaspiro [[4,5] -dec-2yl-methacrylate was used.
[화학식 8][Formula 8]
실시예Example 7: 감광성 수지 조성물의 제조 7: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 하기 화학식 9의 2,2-디메틸-1,3-디옥솔란-4일-메타크릴레이트를 사용하여 제조한 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. 2,2-dimethyl of formula (9) instead of 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of formula (3) as a monomer during polymerization of the acrylic copolymer in Preparation Example 1 A photosensitive resin composition was prepared in the same manner as in Example 1, except that an acrylic copolymer prepared using -1,3-dioxolane-4yl-methacrylate was used.
[화학식 9][Formula 9]
비교예Comparative example 1: 감광성 수지 조성물의 제조 1: Preparation of Photosensitive Resin Composition
상기 제조예 1에서의 아크릴계 공중합체 중합시 단량체로서 상기 화학식 3의 2-에틸-2-메틸-1,3-디옥솔란-4일-메틸 아크릴레이트를 대신하여 디시클로로펜테닐 메타크릴레이트를 사용하여 제조한 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. Dicycloropentenyl methacrylate is used as a monomer in the polymerization of the acrylic copolymer in Preparation Example 1 in place of 2-ethyl-2-methyl-1,3-dioxolan-4yl-methyl acrylate of Formula 3 A photosensitive resin composition was prepared in the same manner as in Example 1, except that the acrylic copolymer prepared in the above was used.
비교예Comparative example 2: 감광성 수지 조성물의 제조 2: Preparation of Photosensitive Resin Composition
2,2'-아조비스 (2,4-디메틸발레로니트릴) 10 중량부, 프로필렌글리콜 모노메틸에테르아세테이트 200 중량부, 메타크릴산 25 중량부, 메타아크릴산 글리시딜 40 중량부, 및 디시클로펜테닐 메타크릴레이트 25 중량부를 사용하여 제조한 고형분의 농도가 40 중량%이고, 중량평균분자량이 9,300인 아크릴계 공중합체를 사용하는 것을 제외하고는 상기 실시예 1과 동일한 방법으로 실시하여 감광성 수지 조성물을 제조하였다. 10 parts by weight of 2,2'-azobis (2,4-dimethylvaleronitrile), 200 parts by weight of propylene glycol monomethyl ether acetate, 25 parts by weight of methacrylic acid, 40 parts by weight of glycidyl methacrylate, and dicyclo Photosensitive resin composition was carried out in the same manner as in Example 1, except that an acrylic copolymer having a concentration of 40 wt% and a weight average molecular weight of 9,300 prepared using 25 parts by weight of pentenyl methacrylate was used. Was prepared.
[물성평가][Property evaluation]
상기 실시예 1 내지 7 및 비교예 1 내지 2에서 제조된 감광성 수지 조성물에 대하여 감도, 잔막률, 내열성 및 저장안정성을 평가하기 위하여 하기와 같은 방법으로 패턴 막을 제조하였다.In order to evaluate the sensitivity, residual film ratio, heat resistance and storage stability of the photosensitive resin compositions prepared in Examples 1 to 7 and Comparative Examples 1 to 2, a pattern film was prepared as follows.
패턴막의Patterned 제조 Produce
스핀코터(spin coater)를 사용하여 감광성 수지 조성물 을 도포한 뒤, 90℃로 2 분간 핫플레이트(hot-plate)상에서 예비 열처리하여 막을 형성하였다. 상기 에서 얻어진 막에, 소정 패턴 마스크를 사용하여 365nm에서의 강도가 20.0mW/cm3 인 자외선을 15초간 조사하였다. 이후, 0.4% 테트라메틸 암모늄히드록시드 수용액으로 25℃로 130초 동안 현상한 후, 초순수로 90초간 세정하고 압축공기로 불어 건조하였다. 이후 상기 형성된 패턴에 강도가 365nm에서의 25.0 mW/cm3인 자외선을 32초간 조사한 뒤, 오븐 속에서 220°C로 60분간 가열하여 경화시켜 패턴막을 얻었다. 상기 제조된 패턴막에 대하여, 하기와 같은 방법으로 감도, 잔막률, 내열성 및 저장안정성을 측정하고, 그 결과를 하기 표 1에 나타내었다.After the photosensitive resin composition was applied using a spin coater, a film was formed by preliminary heat treatment on a hot plate at 90 ° C. for 2 minutes. The film obtained above was irradiated with the ultraviolet-ray whose intensity | strength at 365 nm is 20.0 mW / cm <3> for 15 second using the predetermined | prescribed pattern mask. Thereafter, the mixture was developed at 25 ° C. for 130 seconds with an aqueous 0.4% tetramethyl ammonium hydroxide solution, washed with ultrapure water for 90 seconds, and blown with compressed air. Thereafter, the formed pattern was irradiated with ultraviolet light having a strength of 25.0 mW / cm 3 at 365 nm for 32 seconds, and then heated to 220 ° C. for 60 minutes in an oven to obtain a pattern film. With respect to the prepared pattern film, sensitivity, residual film ratio, heat resistance and storage stability were measured by the following method, and the results are shown in Table 1 below.
1) 감도 : 감도는 패턴이 형성되는 최소 노광량으로 하였다.1) Sensitivity: The sensitivity was taken as the minimum exposure amount at which a pattern is formed.
2) 잔막률 : 글래스(glass) 기판상에 포토레지스트 조성물을 스핀 코터를 사용하여 도포하고, 프리 베이크(pre-bake)한 후의 막의 두께와 포스트 베이크(post-bake)를 통한 용매 제거 후 형성된 막의 두께를 측정하고, 예비 열처리 후의 막의 두께에 대한 용매 제거 후 막의 두께 비를 계산하여 잔막률(%)을 구하였다. 2) Residual film ratio: The photoresist composition is coated on a glass substrate using a spin coater, and the thickness of the film formed after pre-baking and the removal of solvent through post-bake of the film formed. The thickness was measured, and the residual film ratio (%) was calculated by calculating the thickness ratio of the film after solvent removal to the thickness of the film after preliminary heat treatment.
3) 내열성 : 상기 패턴 막에 대하여 패턴의 상, 하 및 좌, 우의 폭을 측정하여 하고, 경화 전 기준 각의 변화율로부터 하기와 같은 3점 기준법으로 내열성을 평가하였다.3) Heat resistance: The width of the upper, lower, left, and right sides of the pattern was measured for the pattern film, and the heat resistance was evaluated by the following three-point reference method from the rate of change of the reference angle before curing.
경화 전 기준 각의 변화율이 0 내지 20 %인 경우: 우수(○)When the change rate of the reference angle before curing is 0 to 20%: Excellent (○)
경화 전 기준 각의 변화율이 20 내지 40 %인 경우: 양호(△)When the change rate of the reference angle before curing is 20 to 40%: Good (△)
경화 전 기준 각의 변화율이 40 %를 넘는 경우: 나쁨(X)If the rate of change of the reference angle before curing exceeds 40%: poor (X)
4) 저장안정성 : 23℃, 및 40%의 습도를 유지하는 크린룸에 패턴막을 3주간 1일 단위로 방치 후, 감도(mJ/cm2) 변화를 체크하였다. 이때, 3주간의 변화율을 측정한 후 하기와 같은 3점 기준법으로 저장안정성을 평가하였다.4) Storage stability: After leaving the pattern film in a clean room maintained at 23 ° C. and 40% humidity for 3 weeks, the sensitivity (mJ / cm 2 ) was checked. At this time, after measuring the change rate for three weeks, the storage stability was evaluated by the following three-point reference method.
3주간의 변화율이 10% 미만인 경우: ○If change rate is less than 10% in 3 weeks: ○
3주간의 변화율이 10 내지 20%인 경우: △If change rate is 10-20% for 3 weeks: △
3주간의 변화율이 20%를 넘는 경우: ×If the rate of change over three weeks exceeds 20%: ×
[표 1]TABLE 1
상기 표 1에 나타난 바와 같이, 본 발명의 감광성 수지 조성물로부터 제조된 패턴은 내열성 및 저장안정성이 비교예 1 및 2에 비해 현저히 우수하였으며, 특히 감도면에서 특히 우수한 효과를 나타내었다. As shown in Table 1, the pattern prepared from the photosensitive resin composition of the present invention was significantly superior in heat resistance and storage stability compared to Comparative Examples 1 and 2, in particular exhibited an excellent effect in terms of sensitivity.
본 발명은 상기 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 제조될 수 있으며, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자는 본 발명의 기술적 사상이나 필수적인 특징을 변경하지 않고서 다른 구체적인 형태로 실시될 수 있다는 것을 이해할 수 있을 것이다. 그러므로 이상에서 기술한 실시예들 은 모든 면에서 예시적인 것이며 한정적이 아닌 것으로 이해해야만 한다. The present invention is not limited to the above embodiments, but may be manufactured in various forms, and a person skilled in the art to which the present invention pertains has another specific form without changing the technical spirit or essential features of the present invention. It will be appreciated that the present invention may be practiced as. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.
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KR101988931B1 (en) * | 2012-12-31 | 2019-09-30 | 동우 화인켐 주식회사 | Photosensitive resin composition and insulating layer prepared from the same |
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