KR100901820B1 - Glass cutting system - Google Patents

Abstract

A substrate cutting system is disclosed. In the substrate cutting system of the present invention, a substrate transfer unit including a belt which forms a work line through which a cutting operation for cutting a substrate into a plurality of unit substrates is carried out to transfer the substrate, and the substrate is brought into contact with the substrate. ; A scribe unit provided in one region of the substrate transfer unit to form a scribe line on a base substrate; And a cleaning unit provided to contact at least one region of the belt and removing particles generated in a process of cutting the base substrate into a plurality of unit substrates. According to the present invention, not only particles such as small dummy substrates or glass fragments generated during the cutting of the base substrate can be cleaned cleanly from the belt of the substrate transfer unit, but also in other places, for example, the surface of the belt or the like. Attaching to one surface of the substrate, which is loaded and moved on the surface, can be prevented, thereby improving the reliability of the work.

Board, LCD, Cutting, Scribe, Brake, Cleaning, Cleaning Unit

Description

Substrate cutting system

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate cutting system, and more particularly, to a substrate cutting system capable of cleanly cleaning particles adhered to a belt by a cleaning unit.

Recently, the flat panel display (FPD) has begun to emerge as the electronic display industry is rapidly developing among the semiconductor industry.

A flat panel display is widely used as a display device of a TV, a computer monitor, or a device such as a mobile phone, a PDA, or a digital camera. Types of flat panel displays include liquid crystal display (LCD) substrates, plasma display panel (PDP) substrates, and organic light emitting diodes (OLED) substrates.

On the other hand, the LCD substrate as a typical flat panel display is a glass top plate (CF, Color Filter) and the bottom plate (TFT, Thin Film Transistor) and the upper and lower plates Each of the upper and lower polarizers is coupled to the exposed surface to impart optical characteristics at the corresponding position.

The upper plate forming the image of the color is formed smaller in area than the lower plate. Therefore, after the upper plate and the lower plate is bonded, the upper portion of the lower plate is provided with a pad portion that is a portion where the upper plate does not overlap. The pad portion is combined with an IC driver for controlling the unit board, and an FPC for connecting the IC driver to the printed circuit board.

LCD substrates currently on the market are in various sizes, such as 17, 21, and 50 inches, and such LCD substrates can be divided into several to tens of equal parts through a cutting process of a large-area base substrate bonded with a large area and a large plate. After cutting and fabricating the unit board, the IC driver is mounted on the pads of the unit boards in the module process, and each is released as a finished product.

At this time, the cutting process of cutting the original substrate into a plurality of unit substrates is performed through a separate cutting system, that is, a substrate cutting system also called a scriber device.

Conventional substrate cutting systems, which are already known, form a working line to transfer substrates, and have a substrate transfer unit having a plurality of belt conveyors, and a scribe line which is provided in the first half of the substrate transfer unit as a reference line for cutting on a base substrate. And a brake unit provided at the rear side of the scribe unit and substantially cutting the substrate along the scribe line. By this configuration, the base substrate moving along the work line may be cut into a plurality of unit substrates.

However, in the process of cutting the original substrate by the scribe unit and the brake unit, a dummy substrate is generated, and particles such as glass fragments are generated when the scribe line is formed, so that the dummy substrate or the particles may be attached to the belt conveyor forming the work line. And, this may cause an error during the process.

Therefore, the glass fragments separated from the belt conveyor while cleaning the surface of the belt conveyor cleanly in response to particles such as glass fragments or dummy substrates generated when the scribe line is formed or when the original substrate is finally cut into a plurality of unit substrates along the scribe line. Or a situation that requires a means for collecting particles such as a dummy substrate.

The object of the present invention is not only to clean particles, such as small dummy substrates or glass debris, generated during the cutting of the base substrate from the belt of the substrate transfer unit, but also to clean other particles, for example, the surface of the belt or To provide a substrate cutting system that can be prevented from adhering to one surface of the substrate to be loaded and moved on the surface, thereby improving the reliability of the operation.

The object is, according to the present invention, by forming a work line for the cutting operation for cutting the base substrate into a plurality of unit substrates to convey the base substrate, but the substrate is in contact with the transfer belt A substrate transfer unit; A scribe unit provided in one region of the substrate transfer unit to form a scribe line on the original substrate; And a cleaning unit provided to be in contact with at least one region of the belt, wherein the cleaning unit removes particles generated in the process of cutting the substrate into the plurality of unit substrates. Is achieved by

The cleaning unit may include: a main body frame disposed horizontally on the work line in a lower region of the substrate transfer unit; At least one cleaning roller rotatably coupled to the body frame to be in contact with an area of the belt; And a rotation driving unit for rotating the cleaning roller.

The cleaning roller may include a driving roller disposed along the work line on the main body frame and driven by the rotation driving unit; And a driven roller which is disposed in parallel with the driving roller and rotates in one direction by the driving roller, and forms a separation space in which the particles fall between the driving roller.

The driving roller and the driven roller may each be formed by a plurality of unit rollers connected by roller rotation shafts along the work line.

The plurality of unit rollers are preferably brush rollers.

The rotation drive unit may include a motor gear connected to a rotation shaft of a motor that is turned on / off by an applied power source; A drive gear connected to one end of the drive roller and teeth-engaged with the motor gear; And a driven gear connected to one end of the driven roller and in tooth engagement with the drive gear.

The drive roller and the driven roller can rotate in opposite directions by the drive gear and the driven gear being mutually toothed.

The cleaning unit may include: a collecting part provided in a lower region of the main body frame to collect the particles separated from the cleaning roller; And a moving tube provided between the main body frame and the collecting part to move the particles from the main body frame to the collecting part.

The cleaning unit may further include a suction driving part provided in one of the main body frame, the collecting part, and the moving tube to provide suction force to force suction of the particles to the collecting part side.

The main body frame further includes a pair of side wall portions arranged side by side with the cleaning roller, and the upper end of the pair of side wall portions is larger than the rotation axis of the cleaning roller so that the particles are prevented from being separated out of the main body frame. It is preferably provided higher and lower than the upper surface of the cleaning roller.

The pair of sidewall portions may be arranged in parallel with each other to prevent the particles from being separated from the outside of the pair of escape blocking walls; And an extension inclined wall provided to extend to a lower end of the separation blocking wall and inclined inward.

The substrate may be moved relative to the substrate transfer unit at a rear side of the scribing unit in a direction in which the substrate is transferred, and the substrate having the scribe line formed along the scribe line may be cut into the unit substrate. It may further include a break unit for heating the base plate on which the scribe line is formed.

According to the present invention, not only particles such as small dummy substrates or glass debris generated during the cutting of the base substrate can be cleaned cleanly from the belt of the substrate transfer unit, but also in other places such as the surface of the belt or the cleaning process. It can be prevented from being attached to one surface of the substrate to be loaded and moved on the surface, thereby improving the reliability of the work.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

For reference, the substrate to be described below refers to a flat panel display (FPD) including a liquid crystal display (LCD) substrate, a plasma display panel (PDP) substrate, an organic light emitting diodes (OLED) substrate, and the like. For the convenience of description, these will be referred to as substrates without being divided.

1 is a schematic perspective view of a substrate cutting system according to an embodiment of the present invention, FIG. 2 is a partially exploded perspective view of the substrate transfer unit, FIG. 3 is a side cross-sectional view of FIG. 2, and FIG. 4 is shown in FIG. 1. FIG. 5 is a schematic enlarged view of the clamp unit shown in FIG. 1, FIG. 6 is an enlarged perspective view of the brake unit region shown in FIG. 1, and FIG. 7 is FIG. 8 is an enlarged view illustrating main parts of FIG. 6, FIG. 9 is a perspective view of the cleaning unit shown in FIG. 3, FIG. 10 is a plan view of FIG. 9, and FIG. 11 is a driving method of a driving roller and a driven roller. 9 is a side view for explaining.

As shown in these drawings, the substrate cutting system 1 according to an embodiment of the present invention includes a loading unit 100 loaded with a base substrate G1 to be cut into a plurality of unit substrates, and a base substrate G1. The substrate transfer unit 200 and the scribe line formed in one region of the substrate transfer unit 200 to form a scribe line on the base substrate G1. The unit 300 (Scribe Unit), the clamp unit 400 (Clamp) for clamping the substrate (G1) toward the scribe unit 300, and the scribing unit (A) along the direction in which the substrate (G1) is transferred The brake unit 500, which is provided at the rear of the substrate 300 and is movable along the work line, heats the substrate G1 so that the substrate G1 may be cut into a plurality of unit substrates G2 along the scribe line. Break Unit) and the lower region of the substrate transfer unit 200 It comprises a plate feed unit cleaning unit 600 for cleaning a particle (particle) or a small dummy substrate or the like, such as glass particles adhered to the belt 211 (200).

Referring to FIG. 1, the loading unit 100 is a portion where the original substrate G1 to be cut is first placed. The substrate G1 may be loaded into the loading unit 100 by a separate robot (not shown, robot). Since the substrate G1 loaded in the loading unit 100 is transferred to the substrate transfer unit 200 by a separate robot and then a substantial cutting operation is performed, the structure of the loading unit 100 may be, for example, a simple roller conveyor type. conveyor type).

However, in this embodiment, the loading unit 100 is applied as a timing belt type in order to accurately transfer the original substrate G1 to the substrate transfer unit 200. That is, although not shown in detail, the loading unit 100 is provided with a plurality of belt conveyor (not shown) serves to transfer the substrate (G1) transmitted from the robot to the substrate transfer unit 200. However, when the base plate G1 is transmitted from the robot, a plurality of lift pins are further added to the loading unit 100 such that the base plate G1 does not directly contact the belt conveyor (not shown). It may be provided. That is, when the base plate G1 is transferred from the robot to the loading unit 100, the lift pins are raised to support the base plate G1, and when the robot is taken out, the lift pins are lowered while the base plate G1 is formed by a plurality of plates. To be able to be contacted and supported by the belt conveyor.

In addition, the loading unit 100 may be further provided with an alignment unit 110 for aligning the loaded substrate G1. The alignment unit 110 serves to align the base substrate G1 by supporting the corner regions of the base substrate G1 that are provided at both corner regions of the base substrate G1. For reference, since the base plate G1 is made of glass, the internal structure of the loading unit 100 should be partially seen through the base plate G1, but the internal structure of the loading unit 100 is omitted in FIG. 1. Doing.

As shown in Figs. 1 to 3, the substrate transfer unit 200 occupies most of the area in the substrate cutting system 1 as a portion for transferring the substrate G1. That is, except for the loading unit 100 in FIG. 1, all the parts in which the original substrate G1 is transferred in the X-axis direction of FIG. 1 or where the unit substrate G2 is finally placed are the substrate transfer unit 200. As the substrate G1 is transported by the substrate transfer unit 200 as described above, it is finally cut into a plurality of unit substrates G2, so in-line formation of the substrate G1 can be established. Tact time can be reduced, which can improve productivity.

In this embodiment, the substrate transfer unit 200 is applied to a belt conveyor type. As described above, when the belt conveyor type is applied as the substrate transfer unit 200 to the substrate cutting system 1, the tact time of cutting the original substrate G1 into a plurality of unit substrates G2. ) Can be shortened. However, in order for the belt conveyor type to be applied as the substrate transfer unit 200, the installation and dismantling of the belt 211, which is an element of the substrate transfer unit 200, should be facilitated, which can be easily implemented by the following simple structure. Can be.

The substrate transfer unit 200 may include a plurality of belt conveyor units 210 including a belt 211 and a lower structure of the substrate transfer unit 200, but the belt conveyor unit 210 may be detachably coupled to the substrate transfer unit 200. It is provided with a frame structure 220, a conveyor frame structure 220, and a power generating unit 230 for generating a power for rotating the belt 211 in one direction.

The belt conveyor unit 210 is provided in a structure that can be separated independently from each other from the conveyor frame structure. To this end, the belt conveyor unit 210 of the present embodiment, the unit central body 210a which is detachably coupled to the conveyor frame structure 220 in one region, and in both end regions of the unit central body 210a It includes a split unit body (210b) detachably coupled to the unit central body (210a).

In the belt conveyor unit 210, the split unit body 210b may be supported by a closed loop belt 211 and a belt 211 in a closed loop shape. A plurality of tension rollers 212 (Tension Roller) for rotatably supporting the belt 211 in the interior of the belt 211, and a roller support portion 213 for supporting the plurality of tension rollers (212).

As shown in FIG. 1, the belt conveyor unit 210 is arranged on the conveyor frame structure 220 with a plurality of spaced apart intervals along the X-axis direction and the Y-axis direction. In arranging the belt conveyor unit 210 along the X-axis and Y-axis directions on the conveyor frame structure 220, the coupling line formed along the Y-axis direction by the plurality of belt conveyor units 210 is a straight line shape. Has In particular, the coupling line formed along the Y-axis direction by the plurality of belt conveyor units 210 in the region where the scribe unit 300 is provided has a linear shape.

However, the belt conveyor units 210 positioned between the scribe unit 300 and the brake unit 500 are arranged in a zigzag shape so that coupling lines in the Y-axis direction are staggered with each other. That is, the belt conveyor unit 210 is to be continued in the X-axis direction when the length is long is divided and connected in the X-axis direction, this time the coupling line in the Y-axis direction is arranged in a zigzag pattern. This is a space between the belt conveyor units 210, despite the fact that the particles of glass fragments or dummy substrates cut out from the base plate (G1) must be collected and discharged to the discharge portion (not shown) of the post-process. This is to solve the disadvantages such as falling particles at intervals between them and generating particles or making cleaning work difficult.

The conveyor frame structure 220 is a part for supporting the belt conveyor units 210 and forms a lower structure of the substrate transfer unit 200.

As shown in FIG. 3, the power generator 230 is connected to a drive motor 231 for generating power for rotating the belt 211 and a motor shaft (not shown) of the drive motor 231. And a drive roller 232 substantially in contact with the belt 211 to rotate the belt 211.

On the other hand, in the structure of the power generating unit 230, the belt 211 and the drive roller 232 are circumscribed to each other in the lower region of the belt 211. That is, since the driving roller 232 is a part fixed to the region of the conveyor frame structure 220, when the belt conveyor unit 210 is to be installed on the conveyor frame structure 220, the outer surface of the lower region of the belt 211 is provided. It is in contact with the upper region of the drive roller 232. As such, the belt 211 and the driving roller 232 are externally circumscribed, so that the belt 211 can be easily installed or dismantled without disassembling or removing the relatively complicated drive motor 231 and the driving roller 232. have.

A pair of idle rollers 233 (Idle Roller) are further provided around the driving roller 232 to provide a pair of driving rollers 232 therebetween to rotatably support the belt 211. The driving roller 232 rotates independently by the driving motor 231, whereas the idle roller 233 rotates freely at the corresponding position to support the belt 211 rotatably.

On the other hand, the scribe unit 300 is a part which forms the scribe line used as the reference line of cutting | disconnection on the base substrate G1. As shown in FIG. 4, the scribe unit 300 is disposed on an upper region of the base substrate G1 with the base substrate G1 interposed therebetween on a top plate CF that forms an upper surface of the base substrate G1. An upper scribe head 310 for forming a scribe line, and a lower scribe head for forming a scribe line on a lower plate (TFT) formed in a lower region of the base substrate G1 to form a lower surface of the base substrate G1 ( 320).

As such, the upper and lower scribe lines may be formed on the upper and lower surfaces of the substrate G1 due to the upper and lower scribe heads 310 and 320 provided to face each other with the substrate G1 interposed therebetween. In this case, before the scribing operation on the surface of the base plate G1 starts, the upper scribe head 310 and the lower scribe head 320 move to the load cells 311 and 321 provided to correspond to each other. The downward (in the case of the upper scribe head 310) pressure and the rising (in the case of the lower scribe head 320) pressure are measured, and can be adjusted to a preset reference pressure by a separate control signal.

As such, forming the scribe lines on the upper and lower surfaces of the base substrate G1 using the upper and lower scribe heads 310 and 320 is performed by joining two substrates together, such as the LCD substrate, which is the substrate G1 of the present embodiment. It can be usefully applied in the case of a bonded substrate. That is, in the case of a bonded substrate, if one surface is scribed with one scribe head, the inverted substrate is inverted, and the other surface is scribed again with the same scribe head, the work process time is longer and an apparatus for inverting the bonded substrate is required. If the scribe lines are formed on the upper and lower surfaces of the base substrate G1 as the bonding substrate by the two upper and lower scribe heads 310 and 320, the work process time is reduced and a separate reversing device is unnecessary.

The upper and lower scribe heads 310 and 320 are movably coupled to the upper and lower horizontal axes 310a and 320a disposed in the Y-axis direction of FIG. 1, respectively. Thus, the upper and lower horizontal axis (310a, 320a) of the upper and lower scribe head (310, 320) is fixed to the substrate transfer unit 200 transfers the substrate (G1) the upper surface of the substrate (G1) and Upper and lower scribe lines in the X-axis direction may be formed on the lower surface, respectively. In addition, the upper and lower scribe heads 310 and 320 are moved along the upper and lower horizontal axes 310a and 320a in a state where the substrate transfer unit 200 is stopped, so that the Y and Y directions are respectively provided on the upper and lower surfaces of the substrate G1. Upper and lower scribe lines into the furnace may be formed.

Meanwhile, in forming the upper and lower scribe lines, it is necessary to determine the positions of the upper and lower scribe lines, which are performed by upper and lower cameras (not shown) provided close to the upper and lower scribe heads 310 and 320. I can be in charge. That is, the position of the upper scribe head 310 on the upper horizontal axis 310a and the position of the lower scribe head 320 on the lower horizontal axis 320a may be determined through control based on the images observed by the upper and lower cameras. .

The clamp unit 400 serves to clamp the substrate G1 directed to the scribe unit 300. When a scribe line is formed on the substrate G1 by the scribe unit 300 on the substrate transfer unit 200, if there is no means for clamping the substrate G1, the substrate G1 is provided on the substrate transfer unit 200. This can be shaken. If the base plate G1 is shaken, an accurate scribe line cannot be formed on the base plate G1. In order to prevent this phenomenon, the clamp unit 400 is provided.

As illustrated in FIG. 5, the clamp unit 400 is provided on the clamp unit body 410 and the clamp unit body 410 disposed in the Y-axis direction in the upper region of the substrate transfer unit 200, and is substantially provided with the clamp unit body 410. Thus, a clamp 420 for clamping a region of the base plate G1 and a clamp unit moving part 430 for moving the clamp unit main body 410 in the X-axis direction are provided.

The clamp unit main body 410 is a portion to which a plurality of clamps 420 that clamp a region of the base substrate G1 are detachably coupled. The clamp unit main body 410 is disposed long in the Y-axis direction of FIG. 1, and is connected to the clamp unit moving unit 430.

A plurality of clamps 420 are coupled to the clamp unit body 410 so as to be spaced apart from each other. The clamp 420 substantially clamps one region of the base substrate G1 by a pair of chucks 421 and 422 having a tong-shaped engagement structure. That is, as the rotation chuck 422 approaches and is spaced about the rotation shaft 422a with respect to the fixed chuck 421, the base plate G1 is clamped between the fixed chuck 421 and the rotation chuck 422. Can be. At this time, the rotation chuck 422 is driven by the driving force of the rotation chuck drive unit 423. In addition, the fixed chuck 421, the rotating chuck 422, and the like, including the rotation chuck driver 423, may be driven up and down by the clamp lift driver 424.

Accordingly, the clamp lift lowering driver 424 is operated by a separate control signal to lower the fixed chuck 421 and the rotation chuck 422 including the rotation chuck driver 423. The position where the fixed chuck 421 and the rotating chuck 422 are lowered becomes a position at which the fixed chuck 421 and the rotating chuck 422 can clamp a region of the base plate G1. When this position is reached, the operation of the clamp lowering drive unit 424 is stopped, and the rotation chuck drive unit 423 is operated to rotate the rotation chuck 422 around the rotation shaft 422a. As the rotation chuck 422 rotates as described above, an area of the base plate G1 may be clamped between the fixed chuck 421 and the rotation chuck 422.

On the other hand, since one region of the base plate G1 is clamped by a pair of chucks 421 and 422 having a tong-shaped engagement structure, the lower portion of the base plate G1 is lower than the surface of the belt conveyor unit 210 by at least the rotational chuck 421. It must be located in the area. Only then, when the rotating chuck 422 rotates, an area of the base plate G1 may be clamped together with the fixed chuck 421. Therefore, in the present embodiment, at least the fixed chuck 421 and the rotating chuck 422 are arranged at a spaced interval between the belt conveyor units 210 as shown in FIG. 1. In FIG. 1, seven belt conveyor units 210 are arranged in the lateral direction. In this case, a total of six clamps 420 are provided, and the fixed chuck 421 and the rotating chuck are provided in the six clamps 420, respectively. 422 is disposed one by one in the separation interval between the belt conveyor units 210.

The clamp unit moving part 430 serves to move the clamp 420 clamped on the base plate G1 in the X-axis direction. In this embodiment, the clamp unit moving unit 430 is implemented as a linear motor. However, the scope of the present invention is not limited thereto. The clamp unit moving part 430 is controlled in series with the speed of the substrate transfer unit 200 and the like.

In this way, the scribe line is formed on the base plate G1 while the base plate G1 is clamped by the clamp unit 400, thereby preventing the base plate G1 from being shaken and being placed on the base plate G1. Accurate scribe lines can be formed. In particular, in the present embodiment, the clamp unit 400 is provided in the upper region of the substrate transfer unit 200 and not only clamps the substrate G1 at the corresponding position, but also the clamp 420 is attached to or detached from the clamping unit body 410. Due to the structural feature that is possibly coupled there is an advantage that can facilitate the overall flatness maintenance work, or maintenance work and setting work for the clamp unit 400, and the like.

On the other hand, in order to cut the base plate G1 along the scribe line, press the scribe line region or heat the portion where the scribe line is formed so that vertical cracks are diffused in the thickness direction of the base plate G1. Unit 500 is provided. The brake unit 500 of the present embodiment serves to heat the portion where the scribe line is formed.

The brake unit 500 serves to substantially heat the base substrate G1 so that the base substrate G1 may be cut along the scribe line and formed into a plurality of unit substrates G2. In the case of a brake unit (not shown) of the type that injects a heating fluid to the scribe line of the base substrate G1, foreign matters such as moisture may remain on the unit substrate G2 where the cutting operation is completed, and in particular, heating The structure of the system is inevitably complicated because a complicated pipe structure for injecting the fluid is required. Therefore, in order to solve this problem, the substrate cutting system 1 of the present embodiment proposes a brake unit 500 having a simple structure as follows.

The brake unit 500 is coupled to the unit driving unit 510 and the unit driving unit 510, which are provided in parallel with the work line on both sides of the substrate transfer unit 200, as shown in FIGS. 6 to 8. The substrate heating unit 530 including a unit body 520 moving along the X-axis direction of FIG. 1 by the driving unit 510, a heater 531 that substantially heats the substrate G1, and a unit. It includes a plurality of connecting portion 540 for interconnecting the body portion 520 and the substrate heating portion 530.

The unit driver 510 may be applied as a linear motor similarly to the clamp unit mover 430 described above. That is, it is driven by a separate control signal to provide a driving force to move the unit body 520, the plurality of connecting portion 540 and the substrate heating portion 530 in the X-axis direction of FIG.

The unit body part 520 is a part for supporting the substrate heating part 530 through a plurality of connection parts 540, one side of which is coupled to a pair of unit driving parts 510. Referring to the drawings, the unit body 520 is illustrated in a substantially rectangular block state, but the scope of the present invention is not limited thereto.

The substrate heating unit 530 is disposed in parallel with the heater 531 and the plate surface of the substrate G1 described above, and is disposed in the lower region of the heater 531 to transfer heat from the heater 531 to the substrate ( And a lower plate 532 to be delivered to G1, and an upper plate 533 provided in an upper region of the heater 531 to be parallel to the lower plate 532 with the heater 531 therebetween.

The heater 531 is a portion that generates heat substantially by the applied power. The heater 531 of any structure, type, and shape may be applied. However, in the present embodiment, a mesh heater having a lattice structure that generates heat in a state in which the heater 531 is arranged in parallel with the plate surface of the substrate G1 is used.

The lower plate 532 is provided in the lower region of the heater 531, and serves to transfer heat from the heater 531 to the base substrate G1. Therefore, the lower plate 532 is preferably made of a relatively good thermal conductivity material, such as aluminum (Aluminium). On the other hand, in the present embodiment, the lower plate 532 is made thinner than the thickness of the upper plate 533. This may be a means for increasing the thermal conductivity, the thickness of the lower plate 532 and the upper plate 533 may be the same because the scope of the present invention is not limited thereto.

The upper plate 533 is a portion that forms the exterior of the substrate heating unit 530 together with the lower plate 532. Therefore, the area of the upper plate 533 and the lower plate 532 is provided substantially the same. Since the heat from the heater 531 does not need to be directed toward the upper plate 533, as described above, the upper plate 533 is made thicker than the lower plate 532. Reinforcing ribs 536 are further provided on the upper surface of the upper plate 533. The reinforcing rib 536 serves to prevent deformation of the entire substrate heating unit 530 including the upper plate 533 by providing rigidity to the upper plate 533.

The lower and upper plates 532 and 533 are coupled to each other to form the exterior of the substrate heating unit 530 while the lower and upper plates 532 and 533 fix and support the heater 531 therein. A coupling member 537 is further provided to couple the lower and upper plates 532 and 533 to each other. As the coupling member 537, a plurality of suspins 537 (SUS pins) are used in this embodiment. That is, by coupling a plurality of susps 537 in several places to couple the lower and upper plates 532 and 533 to each other, the heater 531 and the upper insulating member 534 between the lower and upper plates 532 and 533. And side insulation member 535 may be fixedly supported. A peak color 538 that is detachably coupled to the separation distance between the coupling member 537 and the upper plate 533 is further provided.

On the other hand, as described above, the heat from the heater 531 does not need to be directed toward the upper plate 533 or to the side of the lower and upper plates 532 and 533. If the heat from the heater 531 is directed equally to the upper side or the side side in addition to the lower plate 532 side, loss of heat used to heat the base plate G1 is expected. Therefore, the substrate heating unit 530 of the present embodiment is further provided with an upper heat insulating member 534 and a side heat insulating member 535 to prevent heat loss from occurring toward the upper and side parts of the heater 531.

In detail, the upper insulation member 534 is provided between the heater 531 and the upper plate 533, but is installed in parallel with the upper plate 533 so that heat from the heater 531 is directed toward the upper plate 533. It serves to prevent transmission to the network. And the side heat insulation member 535 is provided in the side part between the lower and upper plates 532 and 533. At this time, the side insulation member 535 may be coupled with the lower and upper plates 532, 533 by the coupling member 537.

The plurality of connection parts 540 serve to raise and lower the substrate heating part 530 to the unit body part 520 in addition to supporting and supporting the substrate heating part 530 with respect to the unit body part 520. . To this end, in the present embodiment, the actuator 540 that can move up and down as a plurality of connection parts 540 is applied. Since the lower plate 532 of the substrate heating unit 530 may be closer to the base substrate G1 by the actuator 540, the effect of heating the base substrate G1 may be doubled.

Meanwhile, in the process of cutting the original substrate G1 into a plurality of unit substrates G2 by the scribe unit 300 and the brake unit 500, particles such as glass fragments are generated to generate the substrate transfer unit 200. The quality of the unit substrate G2 cut by being buried in the belts 211 or the substrates G1 and G2 that are loaded and transported on the belt 211 may be reduced. The dummy substrate is attached to the surface of the belt 211 without being discharged to the discharge part (not shown), and the belt 211 is circulated in such a state that an error may occur in the transfer process or cutting process of the substrates G1 and G2. have.

Therefore, the substrate cutting system 1 of the present embodiment can remove particles such as glass fragments, dummy substrates, etc. from the belt 211 cleanly, and can also prevent the particles from escaping to the outside. ) Is further provided.

9 to 11, the cleaning unit 600 according to the present embodiment includes a main frame 610 and a belt 211 disposed in a horizontal direction on a work line in a lower region of the substrate transfer unit 200. The cleaning roller 620 is rotatably coupled to the body frame 610 to remove particles or small dummy substrates such as glass fragments, and the cleaning roller 620 is rotated with respect to the body frame 610. Rotational drive 630 is included.

First, the main body frame 610 is a structure for rotatably supporting the cleaning roller 620 while forming the exterior of the cleaning unit 600, and is disposed in parallel with the cleaning roller 620 as shown in FIG. 9. A moving tube, which will be described later, connecting a pair of side wall portions 611, a front wall portion 613 and a rear wall portion 615 connecting the two ends of the pair of side wall portions, and a lower end portion of the pair of side wall portions 611. A bottom wall portion 617 to which the 650 is communicatively coupled is provided.

Here, the pair of sidewalls 611 may have a cleaning roller (top) to prevent particles from coming out of the main frame 610 when the particles adhered to the belt 211 are removed by the cleaning roller 620. The separation blocking wall 311a which is higher than the rotation shafts 621s and 625s of the 620 and lower than the upper surface of the cleaning roller 620 is provided to extend to a lower end of the separation blocking wall 611a and is inclined inward to be cleaned. Particles removed by the roller 620 are provided with an elongated inclined wall 611b to facilitate movement to the collecting portion 640 which will be described later. Due to the configuration of the side wall portion 611, the particles can be collected and discarded without being separated out of the main body frame 610, thereby preventing contamination of the surrounding area by the particles, and furthermore, in-process error caused by the particles. Can be prevented from occurring.

The cleaning roller 620 is a portion that substantially removes particles or small dummy substrates, such as glass fragments, which are attached to the belt 211, and as shown in FIGS. 9 and 10, the main frame 610. The driving roller 621 is disposed along the X-axis direction and driven in one direction by the driving force of the rotation driving unit 630, and the driving roller 621 is disposed in parallel with the driving roller 621. And a driven roller 625, which rotates in the other direction opposite to the rotation direction, and forms a spaced space in which particles fall between the driving roller 621.

The driving roller 621 and the driven roller 625 are rotation shafts 621s and 625s rotatably coupled to the front wall portion 613 and the rear wall portion 615 of the body frame 610, and the rotation shafts 621s and 625s, respectively. It is provided with a plurality of unit rollers (621a, 625a) coupled to. However, in the present embodiment, it has been described that the plurality of unit rollers 621a and 625a are coupled to the rotation shafts 621s and 625s, but a single roller may be combined.

Here, it is preferable that a plurality of unit rollers 621a and 625a be applied with a brush roller that can remove particles deposited on the belt 211 well. However, the scope of the present invention is not limited thereto, and for example, a tacky rolling roller may be applied.

On the other hand, the rotation drive unit 630, as shown in detail in Figures 9 to 11, the motor gear 633 is connected to the rotary shaft of the motor 631 is turned on / off (on / off) by the applied power source. ), A driving gear 635 fixedly connected to one end of the driving roller 621 and tooth-engaged with the motor gear 633, and fixedly connected to one end of the driven roller 625, and And mutually toothed driven gears 637.

When the power is applied to the motor 631 and the motor gear 633 connected to the rotation shaft of the motor 631 is rotated by the configuration of the rotation driving unit 630, the driving gear 633 and the driven gear ( 635 rotates, and as a result, the drive roller 621 connected to the drive gear 635 and the driven roller 625 connected to the driven gear 637 can rotate. At this time, the drive roller 621 and the driven roller 625 is rotated in opposite directions to drop the particles buried in the belt 211 to the spaced space between the drive roller 621 and the driven roller 625, As shown by the arrow in FIG. 11, the driving roller 621 should rotate clockwise (based on the drawing) and the driven roller 625 should rotate counterclockwise (based on the drawing).

On the other hand, the cleaning unit 600 of the present embodiment, in addition to the above-described configuration, the collecting portion provided in the lower region of the main body frame 610 to collect the particles removed from the belt 211 by the cleaning roller 620 640 and a moving pipe 650 which connects the main body frame 610 and the collecting part 640 to act as a passage so that particles collected primarily in the main body frame 610 can be moved to the collecting part 640. In addition, the particle of the main body frame 610 further includes a suction driving unit (not shown) for providing a suction force to the moving tube 650 so that the moving portion 640 can be moved smoothly.

The collecting unit 640 is a place where particles gather, and when a certain amount of particles are collected, the collecting unit 640 discharges the particles to the outside through an outlet (not shown).

As illustrated in FIG. 11, the moving tube 650 is used as a passage connecting the bottom wall 617 of the main body frame 610 and the collecting unit 640, and particles are stacked on the moving tube 650. Since the moving tube may be blocked, the suction driving unit is connected to the moving tube 650. Although not shown, the suction driving unit of the present embodiment is provided in the collecting unit 640 and provides the suction force to the moving tube 650 from the main body frame 610 toward the collecting unit 640 to collect particles in the main body frame 610. The mobile tube 650 can be smoothly moved to the collecting portion 640 without being stagnant. However, in the present exemplary embodiment, although the suction driving unit is provided in the collecting unit 640, the suction driving unit may be provided in a place other than the collecting unit 640.

Hereinafter, the operation of the substrate cutting system 1 having such a configuration will be described.

First, the substrate G1 of the cutting target object is transferred onto the loading unit 100 by the robot. As such, when the substrate G1 is transferred to the loading unit 100 by the robot, lift pins are raised to support the substrate G1, and when the robot is taken out, lift pins are first lowered to the loading unit 100. The pre-align operation on the substrate G1 is performed by the provided alignment unit 110.

After the pre-alignment operation is completed, the substrate G1 is transferred onto the substrate transfer unit 200 by the rotation of the belt conveyor after the lift pins are secondly lowered and supported by the plurality of belt conveyors. The original substrate G1 supported by the belt 211 of the substrate transfer unit 200 moves in the X-axis direction of FIG. 1 according to the operation of the substrate transfer unit 200 to face the scribe unit 300. The upper substrate G1 reaching the scribe unit 300 region has upper and lower scribe lines formed on the upper and lower surfaces of the substrate G1 by the interaction of the substrate transfer unit 200 and the scribe unit 300, respectively. do.

In detail, before the scribing starts on the surface of the base plate G1, the upper scribe head 310 and the lower scribe head 320 move to the load cells 311 and 321 provided to correspond to each other, and then descend ( In the case of the upper scribe head 310) pressure and in the case of the lower scribe head 320 the pressure is measured and adjusted to a preset reference pressure by a separate control signal. Subsequently, when the upper and lower scribe heads 310 and 320 intend to form upper and lower scribe lines on the upper and lower surfaces of the substrate G1 in the X-axis direction, the upper and lower horizontal axes 310a and 320a may be used. The substrate transfer unit 200 transfers the substrate G1 while the scribe heads 310 and 320 are fixed to form upper and lower scribe lines in the X-axis direction on the upper and lower surfaces of the substrate G1, respectively. You can. In addition, when the upper and lower scribe lines in the Y-axis direction are to be formed on the upper and lower surfaces of the substrate G1, respectively, the upper and lower portions of the upper and lower horizontal axes 310a and 320a are stopped while the substrate transfer unit 200 is stopped. As the lower scribe heads 310 and 320 are moved, upper and lower scribe lines in the Y-axis direction may be formed on the upper and lower surfaces of the base substrate G1, respectively.

As such, when the upper and lower scribe lines are formed on the upper and lower surfaces of the base plate G1, the fixing chuck 421 and the rotating chuck 422 of the clamp unit 400 are prevented to prevent the base plate G1 from shaking. It proceeds in the state which clamped one area | region of the base board G1 by the tong method. As a result, the scribe line for the substrate G1 can be formed by the mutual organic mechanism of the substrate transfer unit 200, the scribe unit 300, and the clamp unit 400.

Next, the base plate G1 having both scribe lines formed on both surfaces continues to move in the X-axis direction along the operation of the substrate transfer unit 200 to reach the brake unit 500 region. When the substrate G1 reaches the area of the brake unit 500, the substrate heating unit 530 is lowered by the actuator 540 to approach the surface of the substrate G1.

Subsequently, the heater 531 is turned on by the control signal to generate heat. Heat from the heater 531 is transferred to the lower plate 532, and then heats the original substrate G1 through the lower plate 532. As such, when the substrate G1 is heated, vertical cracks are spread in the thickness direction of the substrate G1 by the brittleness of the glass, and thus the substrate G1 is cut and formed into a plurality of unit substrates G2. It becomes possible. Herein, the operation of the brake unit 500 may be performed while the substrate transfer unit 200 transfers the original substrate G1 along the X axis direction in a state where the brake unit 500 is fixed at a corresponding position of the brake unit 500, or the substrate transfer may be performed. In the state in which the operation of the unit 200 is stopped, the substrate heating unit 530 may be moved along the X-axis direction toward the substrate G1 by the unit driver 510.

Meanwhile, particles such as glass fragments may be generated in the process of forming the scribe line, and a small dummy substrate may be generated in the process of cutting the base substrate G1 into the plurality of unit substrates G2 by the brake unit 500. Can be. The particle or dummy substrate should be removed from the belt 211. For this purpose, as shown in FIG. 3, the cleaning unit 600 is provided in the lower region of the substrate transfer unit 200.

The belt 211 which transfers the unit substrate G2 on which the cutting operation is completed by the brake unit 500 is circulated to reach the cleaning unit 600, and the brush operation of the cleaning roller 620 of the cleaning unit 600 is performed. Particles and the like buried in the belt 211 are transferred to the main frame 610. At this time, the driving roller 621 and the driven roller 625 is rotated in the opposite direction by the operation of the rotary drive unit 630 to move the particles into the body frame 610.

Particles gathered on the main body frame 610 are discharged through the outlet when a predetermined amount is collected after moving to the collecting part 640. At this time, the particles of the main body frame 610 are collected into the collecting part 640. A predetermined suction force is provided to the moving tube 650, which is a moving passage, so that the particles can be smoothly moved to the collecting part 640.

As described above, according to the present exemplary embodiment, the cleaning roller 620 of the cleaning unit 600 may cleanly remove particles or small dummy substrates, such as glass shards, attached to the belt 211. The small dummy substrate may be prevented from being separated to another place, for example, the surface of the belt 211 or one surface of the substrates G1 and G2 loaded and mounted on the surface thereof, thereby improving the reliability of the work. It works.

In the above-described embodiment, the rotation gear of the rotary drive unit, the drive gear of the drive roller and the driven gear of the driven roller are tooth-engaged with each other, and the drive roller and the driven roller rotate in the relative direction by the driving force of the rotary drive, but such driving The driving roller and the driven roller may be rotated independently by the rotary drive unit which is not limited to the method and driven separately from each other.

In addition, although the description is omitted in the above embodiment, a heat diffusion member for diffusing heat from the heater may be further provided between the heater and the lower plate. When the heat spreading member is provided as described above, the heat from the heater can be directed to the lower plate, so that more heat can be transferred to the lower plate per unit time, thereby reducing the time required to finally heat the base plate. You can.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to belong to the claims of the present invention.

1 is a schematic perspective view of a substrate cutting system according to an embodiment of the present invention;

2 is a partially exploded perspective view of the substrate transfer unit.

3 is a side cross-sectional view of FIG. 2.

4 is a configuration diagram schematically showing the configuration of the scribe unit shown in FIG.

5 is an enlarged view illustrating main parts of the clamp unit illustrated in FIG. 1.

6 is an enlarged perspective view of the brake unit region illustrated in FIG. 1.

7 is a front view of FIG. 6.

8 is an enlarged view illustrating main parts of FIG. 6.

9 is a perspective view of the cleaning unit shown in FIG. 3.

10 is a plan view of FIG. 9.

It is a side view of FIG. 9 for demonstrating the drive method of a drive roller and a driven roller.

* Explanation of symbols for the main parts of the drawings

1: substrate cutting system

G1: Original board G2: Unit board

100: loading unit 200: substrate transfer unit

300: scribe unit 400: clamp unit

500: brake unit 510: unit driving unit

520: unit body 530: substrate heating unit

540: connection 600: cleaning unit

610: body frame 620: cleaning roller

621: driving roller 625: driven roller

630: rotation drive unit 640: collecting part

650: moving tube

Claims (12)

A substrate transfer unit which forms a work line through which a cutting operation of cutting the original substrate into a plurality of unit substrates is carried to transfer the original substrate, and has a belt to which the original substrate is brought into contact with the substrate; A scribe unit provided in one region of the substrate transfer unit to form a scribe line on the original substrate; And A cleaning unit provided to be in contact with at least one region of the belt and removing particles generated in the process of cutting the substrate into the plurality of unit substrates, The cleaning unit, A main body frame disposed horizontally on the work line in a lower region of the substrate transfer unit; At least one cleaning roller rotatably coupled to the body frame to be in contact with an area of the belt; And And a rotation drive unit for rotating the cleaning roller. delete The method of claim 1, The cleaning roller, A driving roller disposed along the work line on the main body frame and driven by the rotation driving unit; And And a driven roller disposed side by side with the driving roller to rotate in one direction by the driving roller, and forming a separation space in which the particles fall between the driving roller. The method of claim 3, And the drive roller and the driven roller are each formed by a plurality of unit rollers connected by a roller rotation axis along the work line. The method of claim 4, wherein The plurality of unit rollers are substrate cutting system, characterized in that the brush roller. The method of claim 3, The rotation drive unit, A motor gear connected to a rotating shaft of the motor that is turned on / off by an applied power source; A drive gear connected to one end of the drive roller and teeth-engaged with the motor gear; And And a driven gear connected to one end of the driven roller and in tooth engagement with the drive gear. The method of claim 6, And said driven roller and said driven roller are rotatable in opposite directions by said drive gear and said driven gear being mutually toothed. The method of claim 1, The cleaning unit, A collecting part provided in a lower area of the main body frame to collect the particles separated from the cleaning roller; And And a moving tube provided between the main body frame and the collecting part to move the particles from the main body frame to the collecting part. The method of claim 8, And the cleaning unit further includes a suction driving part provided in one of the main body frame, the collecting part, and the moving tube to provide suction to force suction of the particles to the collecting part side. The method of claim 1, The main body frame further includes a pair of side wall portions disposed in parallel with the cleaning roller, And an upper end of the pair of side wall portions is provided higher than a rotation axis of the cleaning roller and lower than an upper surface of the cleaning roller so that the particles are prevented from escaping to the outside of the main body frame. The method of claim 10, The pair of side walls, A pair of escape blocking walls disposed parallel to each other to prevent the particles from being separated from the outside; And  Substrate cutting system, characterized in that it comprises an extended inclined wall provided to extend to the lower end of the separation blocking wall inclined inward. The method of claim 1, The substrate may be moved relative to the substrate transfer unit at a rear side of the scribing unit in a direction in which the substrate is transferred, and the substrate having the scribe line formed along the scribe line may be cut into the unit substrate. And a break unit for heating the original substrate on which the scribe line is formed.

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