KR100898924B1 - 초소형 렌즈의 비구면 가공방법 및 그를 이용한 초소형렌즈의제조방법 - Google Patents
초소형 렌즈의 비구면 가공방법 및 그를 이용한 초소형렌즈의제조방법 Download PDFInfo
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- KR100898924B1 KR100898924B1 KR1020020065334A KR20020065334A KR100898924B1 KR 100898924 B1 KR100898924 B1 KR 100898924B1 KR 1020020065334 A KR1020020065334 A KR 1020020065334A KR 20020065334 A KR20020065334 A KR 20020065334A KR 100898924 B1 KR100898924 B1 KR 100898924B1
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- South Korea
- Prior art keywords
- aspherical
- lens
- shape
- microlens
- ion beam
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000012545 processing Methods 0.000 title claims description 17
- 238000003801 milling Methods 0.000 claims abstract description 29
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 22
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 238000013461 design Methods 0.000 claims abstract description 12
- 238000003672 processing method Methods 0.000 claims abstract description 9
- 239000000523 sample Substances 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 description 7
- 238000004891 communication Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Optical Head (AREA)
Abstract
Description
Claims (4)
- 광학설계를 통하여 초소형 렌즈의 비구면형상을 설계하는 단계와,상기 비구면형상과 구면형상과의 비교에 따른 형상 차이에 대하여 이온 빔의 입사각 및 밀링시간을 설계하는 단계와,상기 이온빔 밀링방법으로 구면렌즈를 비구면렌즈로 가공하는 단계와,상기 가공된 비구면렌즈의 비구면 형상을 설계치와 비교하는 단계를 순차적으로 실시하여 제조하는 것을 특징으로 하는 초소형 렌즈의 비구면 가공방법.
- 제 1항에 있어서, 상기 가공된 비구면 렌즈를 설계치와 비교하는 것은 광학 간섭계를 이용하는 것을 특징으로 하는 초소형 렌즈의 비구면 가공방법.
- 제 1항에 있어서, 상기 가공된 비구면 렌즈를 설계치와 비교하는 것은 탐침 형상 측정 방법을 이용하는 것을 특징으로 하는 초소형 렌즈의 비구면 가공방법.
- 광학설계를 통하여 초소형 렌즈의 비구면형상을 설계하는 단계와,상기 비구면형상과 구면형상과의 비교에 따른 형상 차이에 대하여 이온 빔의 입사각 및 밀링시간을 설계하는 단계와,상기 이온빔 밀링방법으로 구면렌즈를 비구면렌즈로 가공하는 단계와,상기 가공된 비구면렌즈의 비구면 형상을 설계치와 비교하는 단계를 순차적 으로 실시하는 초소형 렌즈의 비구면 가공방법을 이용하여 제조되는 초소형 렌즈 제조방법.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020065334A KR100898924B1 (ko) | 2002-10-24 | 2002-10-24 | 초소형 렌즈의 비구면 가공방법 및 그를 이용한 초소형렌즈의제조방법 |
JP2003359240A JP2004160548A (ja) | 2002-10-24 | 2003-10-20 | 外形加工方法及びそれを利用した非球面レンズ製造方法 |
US10/689,673 US7003372B2 (en) | 2002-10-24 | 2003-10-22 | Appearance processing method and aspheric lens fabricating method using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020065334A KR100898924B1 (ko) | 2002-10-24 | 2002-10-24 | 초소형 렌즈의 비구면 가공방법 및 그를 이용한 초소형렌즈의제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040036356A KR20040036356A (ko) | 2004-04-30 |
KR100898924B1 true KR100898924B1 (ko) | 2009-05-26 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020020065334A KR100898924B1 (ko) | 2002-10-24 | 2002-10-24 | 초소형 렌즈의 비구면 가공방법 및 그를 이용한 초소형렌즈의제조방법 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7003372B2 (ko) |
JP (1) | JP2004160548A (ko) |
KR (1) | KR100898924B1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100805524B1 (ko) * | 2006-06-23 | 2008-02-20 | 에이엠테크놀로지 주식회사 | 비구면 연삭/연마 가공 기구에 대한 비구면 가공 경로를 생성하는 방법 |
CN110109203B (zh) * | 2019-05-13 | 2020-10-27 | 南京大学 | 一种全纸基微透镜阵列 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05325807A (ja) * | 1992-05-20 | 1993-12-10 | Nissin Electric Co Ltd | イオンビームミリングによる光学レンズ基体の加工方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5541411A (en) * | 1995-07-06 | 1996-07-30 | Fei Company | Image-to-image registration focused ion beam system |
US6138503A (en) * | 1997-10-16 | 2000-10-31 | Raymax Technology, Inc. | Scanning probe microscope system including removable probe sensor assembly |
JP3648384B2 (ja) * | 1998-07-03 | 2005-05-18 | 株式会社日立製作所 | 集束イオンビーム加工方法及び加工装置 |
US6238582B1 (en) * | 1999-03-30 | 2001-05-29 | Veeco Instruments, Inc. | Reactive ion beam etching method and a thin film head fabricated using the method |
US6423240B1 (en) * | 2000-01-07 | 2002-07-23 | International Business Machines Corporation | Process to tune the slider trailing edge profile |
US6565720B1 (en) * | 2000-05-31 | 2003-05-20 | Advanced Micro Devices, Inc. | Substrate removal as a function of sputtered ions |
EP1337890A1 (en) * | 2000-09-28 | 2003-08-27 | Novartis Pharma GmbH | Fenestrated lens for increased tear flow and method for making the same |
EP1209737B2 (en) * | 2000-11-06 | 2014-04-30 | Hitachi, Ltd. | Method for specimen fabrication |
US7150811B2 (en) * | 2002-11-26 | 2006-12-19 | Pei Company | Ion beam for target recovery |
-
2002
- 2002-10-24 KR KR1020020065334A patent/KR100898924B1/ko not_active IP Right Cessation
-
2003
- 2003-10-20 JP JP2003359240A patent/JP2004160548A/ja active Pending
- 2003-10-22 US US10/689,673 patent/US7003372B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05325807A (ja) * | 1992-05-20 | 1993-12-10 | Nissin Electric Co Ltd | イオンビームミリングによる光学レンズ基体の加工方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2004160548A (ja) | 2004-06-10 |
KR20040036356A (ko) | 2004-04-30 |
US7003372B2 (en) | 2006-02-21 |
US20040088067A1 (en) | 2004-05-06 |
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