KR100883967B1 - Calibration device with buil-in camera - Google Patents

Abstract

The present invention relates to a calibration device capable of automatically performing a calibration operation in an actual workplace, comprising: a light source unit for generating light, a scan unit for reflecting light generated from the light source unit, and a stage unit for light reflected from the scan unit And a control unit for adjusting the light trajectory by adjusting the light source unit, the scan unit, and the stage unit to form a desired pattern by an electric signal transmitted from the light transmitting unit and the pattern information unit to scan the light, and a camera unit for capturing the trajectory of the light. The camera unit may be mounted on the stage unit to move along a path of light corresponding to a standard image stored in the pattern information unit. The camera unit may be configured to enable correction of the optical path during actual field work. Foot that improves convenience People.

Calibration, Etching Equipment

Description

Calibration device with built-in camera {Calibration device with buil-in camera}

1 is a perspective view showing the transmission state of the lens unit during general laser etching;

2 (a) is a perspective view showing an ideal etching state,

2B is a perspective view showing an etching state in general laser etching;

3 is a schematic configuration diagram of a calibration apparatus according to the prior art,

4 is a calibration device using a built-in camera according to the present invention

Schematic diagram,

5 is a calibration device using a built-in camera according to the present invention

Perspective view showing an embodiment,

6 is a calibration device using a built-in camera according to the present invention

Perspective view showing another embodiment.

<Description of the symbols for the main parts of the drawings>

10: stage portion 20: light source portion

30: scanning unit 40: light transmitting unit

50: light receiver 60: controller

70: pattern information unit 180: camera unit

181: photographing unit 182: support

183: filter section

The present invention relates to a calibration device using a built-in camera used in the laser etching operation, the camera is mounted on the stage portion so that the coordinates can be changed in accordance with the standard pattern of the laser etching device, and the preliminary image captured by the camera and stored in advance It is an invention that has the effect of improving the workability and convenience of the product by providing a comparator to measure the deviation from the standard pattern in the control unit to automatically perform the correction of the optical path during the field work.

Recently, with the development of laser technology, the demand of industrial equipment using laser is increasing, and various laser equipments are used in a wide range of fields such as marking and pattern processing of semiconductors and LCDs. In particular, in the case of the pattern process, in the past, the wet etching method of removing the resist film exposed by the mask pattern is mainly used, but in recent years, the dry etching method using a laser has become the mainstream.

The laser etching apparatus includes a light source for generating light, a scanner and a reflecting lens for projecting the light at a desired position by adjusting a path of light generated by the light source by a control unit. Compared to the method, the working process is simple and there is an advantage of forming the desired precise pattern on the stage.

However, despite this advantage, the laser etching apparatus has a path length for reaching the target coordinate according to the refractive angle of the laser (see d1 and d in FIG. 1). There was a disadvantage of forming a distorted pattern (Fig. 2 (b)) different from 2 (a).

Many methods have been proposed to compensate for the above disadvantages. For example, a rule of the tested light is measured to determine the actual position of the scanned light, and the difference between the planned standard image and the actual measured image is used as a correction factor. Calibration devices using the method have been disclosed.

Hereinafter, a calibration apparatus according to the related art will be described in detail with reference to the accompanying drawings.

FIG. 3 is a schematic configuration diagram of a calibration apparatus according to the prior art. As shown in the drawing, a conventional calibration apparatus includes a light source 20 for generating light and a light reflected from the light source 20. The light source unit to form a desired pattern by an electric signal transmitted from the light transmitting unit 40 and the pattern information unit 70 for scanning the light reflected from the scanning unit 30 and the scanning unit 30 to the stage unit 10. 20, a control unit 60 for adjusting the trajectory of the light to adjust the scan unit 30 and the stage unit 10 to form a desired pattern, and a vision camera 80 for capturing the trajectory of the scanned light. do.

The controller 60 sequentially controls the light source unit 20, the scan unit 30, the stage unit 10, and the vision camera 80. First, an LCD panel, a stage unit, and the like are placed on the stage unit 10. After loading the work object and transferring the pattern information previously input from the pattern information unit 70 to the control unit 60 together with a predetermined algorithm, the control unit 60 transmits the light source unit 20, the scan unit 30, and the light projecting unit 40. ) In order to perform the pattern work of the test step.

When the patterning step of the test step is completed, the pattern on the stage is photographed using the vision camera 80, and the pattern information is measured by comparing the photographed pattern image with the ideal pattern image and reflecting the measured amount of deviation. The correction work was performed by correcting the wealth.

The calibration device as described above has the advantage of enabling a relatively accurate pattern work, but can be corrected only in the workplace or laboratory equipped with a vision camera and the measurement equipment of the deviation, and only after the step of modifying the pattern information unit separately When the work is completed, when a new deviation occurs during the work due to the change in the workplace or the work environment where the vision camera is not provided, there is a problem in that the corrective work cannot be performed quickly.

The present invention is to solve the above problems, the camera is mounted on the stage to enable the coordinate change according to the standard pattern of the laser etching apparatus, and the deviation between the optical path taken by the camera and the pre-stored standard pattern It is an object of the present invention to provide a calibration device using a built-in camera to improve the workability and convenience by providing a comparison unit on the control unit on the control unit to enable the correction of the optical path while working in the field to enable efficient work.

In order to solve the above problems, the present invention provides a light source unit for generating light, a scan unit for reflecting the light generated by the light source unit, and a light transmitting unit for scanning the light reflected from the scan unit to the stage unit and an electrical signal transmitted from the pattern information unit. A calibration device formed by including a control unit for adjusting the light trajectory of the light source, the scan unit and the stage unit to form a desired pattern by a signal and a camera unit for photographing the trajectory of the light, wherein the camera unit is stored in the pattern information unit. And mounted on the stage to move the coordinates along a path of light corresponding to the standard image.

Hereinafter, the configuration of the present invention according to the accompanying drawings.

4 is a schematic configuration diagram of a calibration apparatus using a built-in camera according to the present invention, Figure 5 is a perspective view showing an embodiment of a calibration apparatus using a built-in camera according to the present invention, Figure 6 is a built-in according to the present invention A perspective view showing another embodiment of a calibration device using a camera.

As shown in FIG. 4 to FIG. 6, the present invention includes a light source unit 20 that generates light, a scan unit 30 that reflects light generated by the light source unit 20, and the light reflected from the scan unit 30. The light source unit 20, the scan unit 30, and the stage unit 10 to form a desired pattern by an electric signal transmitted from the light transmitting unit 40 and the pattern information unit 70 that scans the light to the stage unit 10. And a control unit 60 for adjusting the trajectory of the light and a camera unit for capturing the trajectory of the light, wherein the camera unit 180 includes a light corresponding to a standard image stored in the pattern information unit 70. It is characterized in that mounted on the stage 10 to move the coordinates along the path.

The light source unit 20 for generating the light may be implemented using a laser diode that emits laser light of point light, and in the case of the scan unit 30 that adjusts the optical path by changing the refractive angle of the light, A conventional galvanometer scanner composed of a mirror unit rotatably mounted to reflect and a drive unit for rotating the mirror unit can be implemented. In this case, the two galvanos scanners may be configured such that each mirror unit is orthogonal to adjust the X coordinate and the Y coordinate of the optical path. (See Figure 5)

As another example of the scanning unit 30, as shown in FIG. 6, when the polygon scanner 31 and the galvanometer scanner 32 are coupled to each other, the polygon scanner 31 has six reflective surfaces, and the like. It is reasonable to implement by rotatable by a spindle motor (not shown) disposed at intervals and coupled to the support frame, and equipped with a conventional galvanometer scanner 32.

In this case, the light generator 21 of the light source unit 20 uses a laser diode that emits laser light of point light, but the collimating lens 22 is used in the optical path between the light generator 21 and the scan unit 30. ) And a focus lens 232 are installed to linearly image the light emitted from the light generator 21.

The light reflected by the scanning unit 30 is incident on the stage unit 10 through the light transmitting unit 40. When using the galvanometer scanner 30 as shown in FIG. 40 uses an F-theta lens to constantly adjust the focal length of the light reflected from the galvanometer scanner 30 to image the scanned light to the stage unit 10.

 In addition, as shown in FIG. 6, when the scan unit 30 is used in combination with the polygon scanner 31 and the galvanometer scanner 32, the light transmitting unit 40 receives light scanned in the main scanning direction. The imaging lens 41 and the reflecting mirror 42 reflects the light formed in the imaging lens 41 in a predetermined path, and the image is reflected by the scanning unit 30. The optical path recognition units 51 and 52 may be provided to receive the effective optical path of the light to be transmitted to the control unit 60. At this time, it is reasonable that the optical path recognition unit 51, 52 is implemented using a conventional photodiode.

The stage unit 10 is adjusted by the control unit 60 so that the loaded work is moved in the main scanning direction (Y) to the sub-scanning direction (X) as a work load such as an LCD panel, a substrate, etc. The pattern information unit 70 for providing pattern information to be formed on the workpiece may use a general computer for programming preset data into pattern information and supplying it to the controller 60 with a predetermined algorithm.

On the stage unit 10 is provided with a camera unit 180 for photographing the trajectory of the light formed in the stage unit 10 through the light-transmitting unit 40, the camera unit 180 is to shoot the image of the rule of light The support part 182 which mounts the part 181 and the said imaging part 181 to the stage part 10 is comprised.

As an example of the photographing unit 181, a CCD camera may be used. In particular, a field of view of 5 to 70 mm and a resolution of 1024 x 768 or more may be appropriate to use a CCD camera.

For reference, a charge coupled device (CCD) is a photoelectric conversion sensor that converts light into an electrical signal. When light emitted from the light source unit 20 enters the imaging unit 181 in front of the camera unit 180, the intensity of the incident light is Images recorded and photographed on the CCD are separated into different colors by RGB color filters attached to the CCD. At this time, the separated color is converted into an electrical signal by the hundreds of thousands of optical sensors (corresponding to the pixel) constituting the CCD. The analog signal from the CCD is converted into a digital signal of 0 and 1 to output an image signal. By the above process, the photographing unit 181 receives the incident light to form an electrical image signal.

When the support part 182 is performed using a conventional bracket and fixing means, the photographing part 181 is fixedly installed on the stage part 10 by the support part 182, and in this case, the camera part 180 is provided. The coordinates can be changed by the movement of the stage unit 10. The X coordinate of the stage unit 10 is supported by the support driver 63 controlled by the controller 60 according to the standard image provided by the pattern information unit 70. And moving the Y coordinate so that the camera unit 180 mounted on the stage unit 10 is positioned at the incident coordinate of the light.

In addition, as another embodiment of the support unit 182, the camera unit 180 may be mounted on the stage unit 10 in a planar manner in addition to the movement of the stage unit 10. In this case, the support unit The driving unit 182 may use a driving means composed of a conventional linear motor and a sliding wheel, and install a lattice rail on the stage unit 10 and configure the sliding unit to slide on the rail. It can be carried out by setting to move the coordinates on the stage unit 10 along the path of the light corresponding to the standard image stored in the pattern information unit 70.

In particular, the front end of the camera unit 180, that is, the front end of the lens constituting the photographing unit 181 to which light is incident is mounted a filter unit 183 composed of a conventional optical lens or optical filter so that the light It is reasonable to construct the filter 183 so as to enter the photographing unit 181.

The control unit 60 may include a light source driver 61 for driving the light source unit 20, a scan driver 62 for driving the scan unit 30, and a support driver for driving the stage unit 10 ( 63), in particular, in the present embodiment, between the transmitted image and the stored standard image by receiving the trajectory of light captured by the camera unit 180 together with the camera driver 164 for driving the camera unit 180. It can be implemented including a comparison unit 165 for measuring the deviation of.

The operation of the present invention will be described below.

When the data set in the pattern information unit 70 is programmed as pattern information and supplied to the controller 60 for a desired pattern operation, the controller 60 is based on the pattern information provided from the pattern information unit 70. The on / off control of the light source unit 20 and its on / off time are controlled and the output of light is adjusted.

In addition, the controller 60 adjusts the motor driver 62 and the support driver 63 to reflect the pre-stored standard pattern, and emits light to the stage unit 10 through the scan unit 30 and the light transmitting unit 40. In this case, the injected light is incident to the photographing unit 181 through the filter unit 183, thereby preventing damage to the photographing unit 181 due to the light. If the filter unit 183 is not provided, the photographing unit 182 is protected by adjusting the light output by adjusting the light source unit 20 by the light source driver 61.

 When light is incident on the stage unit 10, the camera unit 180 is also positioned as an incident coordinate of light by a standard pattern stored by the controller 60, and the camera unit 180 is connected to the stage unit 10. In the case of fixed mounting, the driving of the stage unit 10 by the support driver 63 is driven by the driving driver 63 and when the camera unit 180 is driven on the stage unit 10. After determining the position of the camera by matching the center of the sensor of the photographing unit 181 with the coordinate values of the stage unit 10, the camera driver 164 drives the camera unit 180 to match the trajectory of the incident light. The photographing unit 181 of the camera unit 180 captures an image of the incident light by changing the coordinates of the unit 180.

Actual coordinates of the light captured by the camera unit 180 are transmitted to the comparison unit 165 and stored in the pattern information unit 70 through a compensation algorithm previously stored in the control unit 60 in the comparison unit 165. By comparing the image of the standard pattern with the actual pattern image that is directly captured and transmitted, the deviation between the two images is measured and the measured amount of deviation is analyzed.

When the image information of the camera unit 180 has a constant resolution, an error is determined by measuring the number of pixels between the position of light that should be incident by the standard pattern image and the center position of the incident light, and the measured number of pixels is emitted. Deviation amount is calculated by converting the absolute distance using the triangulation method using the absolute coordinate values of the height and light, and when it is determined that the adjustment of the light source unit 20 or the scan unit 30 is necessary, The control unit 60 controls the light source driver 61 and the driving driver 62 according to the amount of deviation to correct the X coordinate value and the Y coordinate value of the light.

After the correction of the optical path is completed, the workpiece is loaded on the stage unit 10 and the corrected controller 60 adjusts the spray and scan operations of the light according to the corrected pattern image to work on the same pattern as the intended standard pattern image. Allow it to form in water.

When etching is performed by a device for calibration using a built-in camera having such a configuration, deviations between the standard pattern and the actual working pattern can be measured and analyzed even in actual field work, and thus various operational advantages occur.

As described above, the present invention relates to a calibration apparatus using a built-in camera used in a laser etching operation, comprising a camera mounted on a stage portion to enable coordinate change according to a standard pattern of a laser etching apparatus, It is an invention that has an excellent effect of improving the workability and convenience of the product by providing the comparator on the control unit for comparing the deviation between the light path and the pre-stored standard pattern to automatically perform the correction of the optical path even during the field work. .

Claims (4)

The light source unit for generating light, the scan unit for reflecting the light generated by the light source unit, the light transmitting unit for scanning the light reflected from the scanning unit to the stage and the electrical signal received from the pattern information unit to form a desired pattern In the calibration device formed by including a control unit for adjusting the light trajectory of the light source unit, the scanning unit and the stage unit and a camera unit for imaging the trajectory of the light, And the camera unit is mounted on the stage unit to move the coordinates along a path of light corresponding to the standard image stored in the pattern information unit. The method of claim 1, And the control unit includes a comparator configured to receive a trajectory of light captured by the camera unit and measure a deviation between the transmitted image and the stored standard image. The calibration device of claim 1, wherein the camera unit is capable of changing coordinates by a driving unit having a linear motor that operates linearly. The method of claim 1, Calibration device using a built-in camera, characterized in that the filter unit is attached to the front end of the camera unit is incident light.

Images