KR100848340B1 - Laser Irradiation Device and Fabrication method using the same for Organic Light Emitting Diode display device - Google Patents

Abstract

The present invention relates to a laser irradiation apparatus and a method of manufacturing an organic light emitting display device using the same, wherein a laser beam generated from a laser source passes through a desaturated absorption film formed of a desaturated absorber, thereby making the laser beam homogeneous. A method of manufacturing an irradiation apparatus and an organic light emitting display device using the same.

The present invention provides a laser source for generating a laser beam; And a beam homogenizer including a desaturated absorption film for homogenizing the laser beam.

The present invention provides a substrate on which a first electrode is formed, laminating a donor substrate including a substrate layer, a photothermal conversion layer, and a transfer layer, which is an organic layer, on the substrate, and including a reverse saturation absorption film in a portion of the donor substrate. Irradiating a laser beam generated by a laser irradiation device to form an organic film layer pattern on the substrate, separating the donor substrate from the substrate, and forming a second electrode on the substrate including the organic film layer pattern. The present invention relates to a method of manufacturing an organic light emitting display device.

Organic light emitting display device, laser irradiation device.

Description

Laser irradiation device and fabrication method of organic light emitting display device using the same {Laser Irradiation Device and Fabrication method using the same for Organic Light Emitting Diode display device}

1 is a schematic diagram of a laser irradiation apparatus according to a first embodiment of the present invention.

2A to 2C are perspective views sequentially illustrating a method of manufacturing an organic light emitting display device using a laser irradiation device according to a first embodiment of the present invention.

<Description of Symbols for Drawing Major Symbols>

100: laser irradiation device 110: laser source

120: image transformation device 130: beam homogenizer

140: projection lens 300: chuck

500: workpiece 510: substrate

520: donor substrate

The present invention relates to a laser irradiation apparatus and a method of manufacturing an organic light emitting display device using the same, wherein a laser beam generated from a laser source passes through a desaturated absorption film formed of a desaturated absorber, thereby making the laser beam homogeneous. A method of manufacturing an irradiation apparatus and an organic light emitting display device using the same.

Flat panel display devices are used as display devices replacing cathode ray-ray tube display devices due to their light weight and thinness. Representative examples of such a flat panel display include a liquid crystal display (LCD) and an organic light emitting diode (OLED). Among these, the organic light emitting display device has excellent luminance characteristics and viewing angle characteristics as compared to the liquid crystal display device, and does not require a backlight, and thus, an organic light emitting display device may have an ultra-thin shape.

Such an organic light emitting display device combines electrons and holes injected through a cathode and an anode to an organic thin film to recombine to form excitons, and a specific wavelength is determined by energy from the excitons formed. The display device using the phenomenon that light is generated.

The organic light emitting display device is classified into a passive matrix method and an active matrix method according to a driving method, and an active driving method has a circuit using a thin film transistor (TFT). The passive driving method has an advantage in that the display area is composed of a matrix-type device by an anode and a cathode, and thus is easy to manufacture, but due to problems such as resolution, an increase in driving voltage, and a decrease in material life, Limited to the application of the display. In the active driving method, a thin film transistor is mounted in each pixel to display a stable luminance by supplying a constant current to each pixel. In addition, low power consumption plays an important role in realizing high resolution and large display.

Laser induced thermal imaging (Laser Induced Thermal Imaging) is a method of forming red, green, and blue light emitting layers in order for the organic light emitting display device to realize full color. The laser thermal transfer method can finely pattern the light emitting layer and has an advantage of being a dry process.

The laser thermal transfer method is a method of forming a light emitting layer pattern by irradiating a laser beam onto a base substrate of a donor substrate including a base substrate, a photothermal conversion layer, and a transfer layer to transfer the transfer layer onto an accept substrate.

However, when the energy distribution in the laser beam used in the laser thermal transfer method is uneven, and the organic layer layer pattern including one or a plurality of light emitting layers of the organic light emitting display device is formed by the laser thermal transfer method, the organic layer pattern is There is a problem that the luminance is unevenly transferred and the overall brightness is nonuniform.

Accordingly, the present invention is to solve the problems of the prior art as described above, the laser irradiation device for making the laser beam homogeneous by passing the laser beam generated from the laser source through the reverse saturation absorption film and the organic electroluminescence using the same It is an object of the present invention to provide a method for manufacturing a display device.

The object of the present invention is a laser source for generating a laser beam; And a beam homogenizer including a desaturated absorption film for homogenizing the laser beam.

In addition, the above object of the present invention is to provide a substrate on which a first electrode is formed, laminating a donor substrate including a substrate layer, a photothermal conversion layer, and a transfer layer, which is an organic film layer, on a portion of the donor substrate. Irradiating a laser beam generated by a laser irradiation apparatus including a reverse saturation absorption film to form an organic layer pattern on the substrate, separating the donor substrate from the substrate, and forming a substrate on the substrate including the organic layer layer pattern. It is achieved by a method of manufacturing an organic light emitting display device comprising forming two electrodes.

Details of the above object, technical configuration and effects according to the present invention will be more clearly understood by the following detailed description with reference to the drawings showing preferred embodiments of the present invention. In addition, in the drawings, the lengths, thicknesses, and the like of layers and regions may be exaggerated for convenience, and like reference numerals denote like elements throughout the specification, and the expression “image” denotes a laser beam. When irradiated to the surface of the treatment means the area to which the actual laser beam is irradiated.

The laser irradiation apparatus according to the present invention allows a laser beam generated from a laser source to pass through a reverse saturable absorption film formed of a reverse saturable absorbent material (RSA material), thereby making the laser beam homogeneous. Doing.

The RSA material is a material whose absorption rate varies according to the intensity of light transmitted by nonlinear optical properties. When the intensity of transmitted light is greater than or equal to a certain intensity, the RSA material absorbs more than the predetermined intensity. To have.

In more detail, the nonlinear optical properties of the RSA material, when light or an electric field is applied to a material, is a polarization P (Polarization) indicating the state of change of the electric field inside the material. Polarization P is expressed as follows.

값이 선형 계수이고,

값은 3차 비선형성의 전도를 나타내는 계수로서, 그 자체가 복소수(complex number)로서 물질의 복소 굴절률(complex refractive index)과 관련이 있다.here,

The value is a linear coefficient,

The value is a coefficient representing the conduction of third order nonlinearity, which in itself is related to the complex refractive index of the material as a complex number.

That is, the complex refractive index of the material considering the nonlinearity is expressed as follows.

값과 비례하는 관계임을 알 수 있다. 즉, 비선형 계수의 실수부가 양인 경우는 3차 비선형 물질이 볼록렌즈 역할을 하게 되어 상기 3차 비선형 물질을 통과한 빛이 집속 작용(Focusing) 되는 자기 집속(Self-focusing) 효과를 보이고, 상기 실수부가 음인 경우는 3차 비선형 물질이 오목렌즈 역할을 하게 되어 3차 비선형 물질을 통과하는 빛이 퍼지는 효과를 보인다. 또한, 비선형 계수의 허수부가 양인 경우는 빛의 세기(Intensity)가 클수록 흡수율이 증가하는 성질을 가지고, 허수부가 음인 경우는 빛의 세기가 클수록 흡수율이 감소하는 성질을 가진다. Looking at the above equation, the change of the refractive index due to the third order nonlinearity eventually

It can be seen that the relationship is proportional to the value. That is, when the real part of the nonlinear coefficient is positive, the tertiary nonlinear material acts as a convex lens, and shows a self-focusing effect in which light passing through the tertiary nonlinear material is focused. In the negative case, the third nonlinear material acts as a concave lens, so that light passing through the third nonlinear material spreads. In addition, when the imaginary part of the nonlinear coefficient is positive, the absorption rate increases as the light intensity increases, and when the imaginary part is negative, the absorption rate decreases as the light intensity increases.

Therefore, if the imaginary part of the nonlinear coefficient is negative, it shows a saturable absorption property, and the intensity of light passing through the nonlinear material is above a certain intensity, and if it is positive, it shows a reverse saturable absorption property and passes through the nonlinear material. The intensity of one light is below a certain intensity.

The material exhibiting the reverse saturation absorption properties is called a reverse saturable absorber (RSA material), and is a C60, porphyrin-based and a metal oxide such as Si, GaAs, PbS, PbSe, Cds, CdSe, and other metals such as TiO2, MnO2, ZnO, and the like. Very large reverse saturation absorption properties also occur in organic substances such as phthalocyanine-based compounds.

The present invention allows the laser beam to pass through the RSA material exhibiting the above-mentioned reverse saturation absorption properties, so that the laser beam is homogeneous.

(Example)

1 is a schematic diagram showing a laser irradiation apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a laser irradiation apparatus 100 according to an exemplary embodiment of the present invention may include a reverse source absorbing material formed of a laser source 110 generating a laser beam, an image deforming device 120, and a desaturating absorber (RSA material). A beam homogenizer 130 and a projection lens 140 including a film (not shown).

The image modifying device 120 is a device for modifying the shape of the image of the laser beam (L1) generated from the laser source 110, the image (L2) of the laser beam passing through the image modifying device 120 is It may be in the form of a line having a length in one direction. The line shape means not only a line shape in a dictionary meaning, but also a rectangular shape having a relatively high aspect ratio.

Although not shown, the laser beam L2 having an image in the form of a line passing through the image transformation apparatus 120 may pass through a mask (not shown). The mask is formed with one or more light transmission patterns or light reflection patterns, so that the laser beam L2 having the line-shaped image passes through the mask, whereby the one or more light transmission patterns or light reflection patterns Will have the image patterned by Preferably, the one or more light transmission patterns or light reflection patterns are arranged in the line-shaped image of the laser beam L2, and more preferably arranged in the longitudinal direction of the laser beam L2. .

The beam homogenizer 130 is for homogenizing the laser beam L2 passing through the image modifying apparatus 120 or the mask, and the laser beam L2 is formed of a desaturated absorber (RSA material). Passing through the reverse saturation absorption film, the laser beam (L3) of the same intensity is achieved. The beam homogenizer 130 may form a desaturated absorption film by depositing or applying one or more RSA materials on a transparent substrate such as glass, and two transparent substrates. It may be formed by inserting one or a plurality of RSA materials in a liquid state therebetween.

Since the absorption rate of the desaturated absorption film of the beam homogenizer 130 varies according to the intensity of light transmitted therethrough, the laser beam L3 passing through the beam homogenizer 130 by controlling the intensity of the laser beam L2 is controlled. Can be made into a desired shape such as a top-hat, and for this purpose, the image transformation apparatus 120 controls the focus of the laser beam L2 to control the beam homogenizer ( An optical lens (not shown) capable of controlling the intensity of the laser beam L2 passing through 130 may be further included. The optical lens may be movable between the image transformation apparatus 120 and the beam homogenizer 130 in order to variably control the intensity according to the wavelength of the laser beam L2.

The laser beam L3 having a homogeneous and line-shaped image passing through the beam homogenizer 130 passes through a projection lens 140 and is positioned below the laser irradiation apparatus 100. Irradiated to the water surface.

2A to 2C are perspective views sequentially illustrating a method of manufacturing an organic light emitting display device by a laser thermal transfer method using a laser irradiation apparatus according to an exemplary embodiment of the present invention.

First, referring to FIG. 2A, a transfer layer (not shown) formed of a base substrate (not shown), a photothermal conversion layer (not shown), and the organic layer is formed on a substrate 510 on which a first electrode (not shown) is formed. After laminating the donor substrate 520 including the first electrode and the transfer layer to face each other, the workpiece 500 having the substrate 510 and the donor substrate 520 laminated thereon for laser thermal transfer. It is mounted on the chuck 300 of the laser irradiation apparatus.

The laser irradiation apparatus 100 is positioned on the stage 200, the chuck 300 on which the workpiece 500 is mounted, and the chuck 300 reciprocates in one direction (X direction). A chuck guide bar 250 for moving, a laser source 110 described above, an image deforming device 120, a beam homogenizer 130 and a projection lens 140, the chuck 300 It includes an optical system 450 for irradiating a laser to the object to be processed 500, and an optical guide bar 400 equipped with the optical system 450. The optical system 450 may move along the optical guide bar 400 in a direction (Y direction) perpendicular to a direction in which the chuck is moved (X direction), so that all regions of the object 500 are processed. Allow the laser beam to be irradiated onto it.

Subsequently, referring to FIG. 2B, when the laser beam generated by the optical system 450 is irradiated onto a portion A of the donor substrate 520 of the workpiece 500, the laser beam may generate the donor substrate ( The photothermal conversion layer of 520 absorbs, and the photothermal conversion layer converts the absorbed laser beam into heat so that the transfer layer corresponding to the area A to which the laser beam is irradiated is transferred to the substrate 510 on which the first electrode is formed. Transfer to form a transfer layer pattern. The donor substrate 520 may be pre-patterned with a region B to be irradiated with the laser beam, and the transfer layer may be an organic layer including one or a plurality of light emitting layers.

As shown in FIG. 1, the laser beam irradiated onto the donor substrate 520 may include a beam homogenizer 130 including a desaturated absorption film in which the laser beam L1 generated from the laser source 110 is formed of a desaturated absorber. After passing through), the donor substrate 520 is irradiated onto the donor substrate 520, so that the energy absorbed by the photothermal conversion layer of the donor substrate 520 becomes the same since the laser beam is homogeneous by the desaturated absorption film. As a result, the transfer layer of the donor substrate 520 is uniformly transferred onto the substrate 510.

Next, the optical system 450 is moved along the optical guide bar 400 in one direction (Y direction) at a constant speed to irradiate a laser beam to the object 500, and the object ( The transfer layer pattern is formed on the substrate of 500 in the direction in which the optical system 450 moves.

Subsequently, as shown in FIG. 2C, when the laser beam irradiation is completed in one direction (Y direction) of the optical system 450, the workpiece 500 is perpendicular to the one direction (Y direction). (B direction) by moving a predetermined distance so that the area B, which is not irradiated with the laser beam by the optical system 450, is positioned below the optical system 450.

Subsequently, as described above, when the optical system 450 moves in one direction (Y direction), the optical beam is irradiated with a laser beam, and the substrate of the object 500 is moved by the movement of the optical system 450 and the chuck 300. All of the transfer layer patterns are formed on the 510.

Next, although not shown, the donor substrate 520 is separated from the substrate 510, and a second electrode is formed on the substrate 510 including the organic layer to display an organic light emitting display. Complete the device.

As a result, the laser irradiation apparatus and the method of manufacturing the organic light emitting display device using the same according to an embodiment of the present invention is a homogeneous beam including a desaturated absorption film formed of a desaturated absorber (RSA material) of the laser beam generated from the laser source Homogeneous through the group allows the transfer layer to be uniformly transferred onto the substrate in the laser thermal transfer method.

Therefore, the laser irradiation apparatus and the method of manufacturing the organic light emitting display device using the same according to the present invention homogeneize the laser beam generated from the laser source through a beam homogenizer including a desaturated absorption film formed of a desaturated absorber (RSA material). Thus, the transfer layer is uniformly transferred onto the substrate by the laser thermal transfer method, thereby preventing the overall luminance from becoming uneven.

Claims (14)

A laser source for generating a laser beam; And And a beam homogenizer including a desaturated absorption film for homogenizing the laser beam. The method of claim 1, The reverse saturation absorption film is a laser irradiation apparatus, characterized in that formed of any one or a plurality selected from the group consisting of metal oxides, porphyrin-based organic material and phthalocyanine-based organic material. The method of claim 2, The metal oxide is a laser irradiation apparatus, characterized in that any one of TiO ₂ , MnO ₂ or ZnO. The method of claim 1, The reverse saturation absorption film is a laser irradiation apparatus, characterized in that formed of any one or a plurality of Si, GaAs, PbS, PbSe, CdS or CdSe. The method of claim 1, And an image transformation device, positioned between the laser source and the beam homogenizer, for transforming the image of the laser beam into a line shape. The method of claim 5, wherein The image modifying apparatus further comprises an optical lens for controlling the intensity of the laser beam passing through the beam homogenizer. Providing a substrate on which a first electrode is formed, Laminating a donor substrate including a substrate substrate, a photothermal conversion layer, and a transfer layer, which is an organic layer, Homogenizing the laser beam generated from the laser source using the reverse saturation absorption film of the laser irradiation device, Irradiating the laser beam homogenized by the laser irradiation apparatus to a portion of the donor substrate to form an organic layer pattern on the substrate, Separating the donor substrate from the substrate, A method of manufacturing an organic light emitting display device comprising forming a second electrode on a substrate including the organic layer pattern. The method of claim 7, wherein The reverse saturation absorption film is a method of manufacturing an organic light emitting display device, characterized in that any one selected from the group consisting of metal oxide, porphyrin-based organic material and phthalocyanine-based organic material. The method of claim 8, The metal oxide is a method of manufacturing an organic light emitting display device, characterized in that any one of TiO ₂ , MnO ₂ or ZnO. The method of claim 8, The reverse saturation absorption film is Si, GaAs, PbS, PbSe, CdS or CdSe manufacturing method of an organic light emitting display device, characterized in that any one. The method of claim 7, wherein The laser irradiation device A laser source for generating a laser beam; A beam homogenizer including a desaturated absorption film for homogenizing the laser beam; And And a projection lens positioned below the beam homogenizer. The method of claim 11, Located between the laser source and the beam homogenizer, the method of manufacturing an organic light emitting display device further comprises an image transformation device for transforming the image of the laser beam in the form of a line. The method of claim 12, And the image deforming device further comprises an optical lens for controlling the intensity of the laser beam passing through the beam homogenizer. The method of claim 7, wherein The organic layer is a manufacturing method of an organic light emitting display device comprising one or a plurality of light emitting layers.

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