KR100809919B1 - Test handler, lot card assortment method of lot card assortment apparatus for test handler and test support method of test handler - Google Patents

Abstract

A test handler, a lot card assortment method of a lot card assortment apparatus for the test handler, and a test support method of the test handler are provided to assort lot cards according to the test support condition without special management and to support a test of semiconductor devices on the basis of lot information read from the lot cards. A test handler is composed of a lot card assortment apparatus(500) for receiving plural lot cards inputted from a manager and then assorting plural lot cards according to information about test support conditions of semiconductor devices and a controller(100) transmitting information about test support conditions of semiconductor devices to the lot card assortment apparatus. The lot card assortment apparatus comprises an input/output unit for inserting or discharging plural lot cards and a lot card assorting unit dividing plural lot cards according to each test support condition in receiving information about test support conditions from the controller.

Description

TEST HANDLER, LOT CARD ASSORTMENT METHOD OF LOT CARD ASSORTMENT APPARATUS FOR TEST HANDLER AND TEST SUPPORT METHOD OF TEST HANDLER}

1 to 2 are conceptual views for explaining a problem in that the test support for the after lot after the test support for the previous lot according to the prior art.

3 is a conceptual diagram of a test handler according to an embodiment of the present invention.

FIG. 4 is a block diagram of a lot card classification and reader configured in the test handler of FIG.

FIG. 5 is a flowchart illustrating a lot card sorting method performed in the lot card sorting and reader of FIG. 4.

6 is a flowchart illustrating a test support method performed by the test handler of FIG. 3.

* Description of the symbols for the main parts of the drawings

100: controller

500: Lot card classification and reader

510: access means 520: information reading means

530: means for sorting and sorting cards

531: Lotte Card Division 532: Exhibition Department

540: command input means

The present invention relates to a test handler (TEST HANDLER), and more particularly, a technique for supporting a test by using a lot information, or lot information has a lot card in the lot (Continuous) test support of the lot (LOT) It is about.

The test handler loads the semiconductor devices manufactured through a predetermined manufacturing process from the customer tray to the test tray, and then the semiconductor devices arranged in the test tray are tested by the tester. It is a device that supports the testing of semiconductor devices by a tester by enabling the test and then classifying the semiconductor devices according to test results and unloading them from the test tray to the customer tray. The description of this test handler has already been made public through a number of public documents.

In general, the produced semiconductor devices are managed and tested according to a certain quantity (lot, LOT, hereinafter referred to as "lot"), which is a distinction between the production line of semiconductor devices (e.g., if the defect rate is high in a particular lot). This is due to the need to easily track the production line in which a particular lot was produced, and to distinguish the consumer (for example, to deliver a semiconductor device of the same performance or function to the consumer). Therefore, the semiconductor devices are divided into lots and supplied to the test handler, and when the test of the semiconductor devices of the corresponding lot is completed, the semiconductor devices of the next lot are supplied to the test handler.

In the conventional test handler, when all the test support for the former lot of semiconductor devices is completed, the test handler for the late lot semiconductor devices is performed. That is, as shown in FIG. 1, after the testing of all the semiconductor devices of the whole lot is sorted according to their status, the testing support of the semiconductor devices of the lot after completion of the test support of all the lots. This was done. By the way, according to the prior art, as shown in FIG. 2, the test tray carrying the last quantity of the front lot is moved out of the test position Tp to the unloading position Up, and then the first quantity of the after lot. The tester has a float waiting time (idle idle time) from the loading position Lp to the test position Tp (arrow a + b). This is problematic because of the increased time it takes for multiple lots to be ultimately tested and a decrease in the operational efficiency of the tester.

Therefore, the applicant of the present invention sends two test trays which are sequentially loaded from the unloading position to the loading position after the last quantity of all the lots are loaded before the present invention, that is, the last of the whole lot After loading all the volume, the third test tray was loaded to load the volume of the float, which greatly reduced the test wait time of the tester. The reason for sending two test trays which are sequentially loaded to the loading position after all the last quantity of the whole lot is loaded to the tester side is to distinguish the semiconductor elements of the previous lot and the rear lot.

However, even in such a case, there is still a decrease in the test wait time and the operation rate of the tester due to cycling the two empty test trays.

Therefore, the applicant of the present invention has previously developed a technology for loading semiconductor devices of different lots into one test tray, and then sorting and unloading them by lot again. Patent Application No. 10-2006-0085990 (Name of the invention: test support method and test handler of the test handler, hereinafter referred to as' first invention 1 '), Patent Application No. 10-2006-0085991 (Invention: test support method and test handler of the test handler, hereinafter' It is presented in the first application invention 2 ').

According to the present inventions 1 and 2, even when semiconductor devices of different lots are loaded together in one test tray, they can be sorted by lot during unloading so that there is no confusion or mixing of lots for semiconductor devices. do.

On the other hand, an arbitrary lot is accompanied by a lot card having all the information about the lot.

Until now, when testing semiconductor devices, the manager has taken the method of checking the lot number of the semiconductor device and the lot number of the lot card. Before the test support for the random lot, the manager can check the random lot. The lot information about the lot was confirmed from the lot card, and the confirmed lot information was inputted one by one. The lot information includes quantity information of the semiconductor devices of the lot or information on test support conditions for supporting the test of the semiconductor devices of the lot (for example, temperature conditions according to preheating / precooling, test inspection items, etc.). Included.

However, the lot card processing method as described above does not have a big problem when lots are tested by lot, but when the semiconductor devices of different lots are continuously tested, such as the original inventions, lots of confusion may occur. There is also a hassle to enter the lot information for each lot to be tested.

The present invention is to solve the above-mentioned problems, even if the administrator does not pay special attention to the classification of the rat card according to the test support situation, by reading the lot information of the lot card to support the testing of the semiconductor devices based on the read lot information It is aimed at providing a technology that can be used.

The test handler according to the present invention for achieving the above object, a LOT card separator for storing a plurality of LOT card input from the manager to classify the LOT cards according to the information on the test support status of semiconductor devices ; And a controller transmitting information on a test support situation of semiconductor devices to the lot card separator. Includes, the lot card separator, the access means for entering and exiting a plurality of lot cards; A lot card classification means for classifying a plurality of lot cards according to a test support situation according to a test support situation when receiving information on a test support situation from the controller; Characterized in that it comprises a.

The lot card dividing means is further characterized in that it outputs the lot card of the test is completed through the access means based on the information on the test support situation.

The lot card separator may include: information reading means for reading lot classification information of a plurality of lot cards inputted through the access means; In addition, the lot card classification means, characterized in that it is characterized by further separating the plurality of the lot card by the test support situation based on the lot classification information read by the information reading means.

The lot card dividing means selects a lot card of the tested lot based on the lot classification information read by the information reading means and the information on the test support status, and outputs the selected lot card through the access means. Including a selection unit is characterized by more specific features.

In addition, the rat card classification method of the rat card separator for test handlers according to the present invention for achieving the above object, a lot card storing step of receiving a plurality of rat cards input from the manager; A lot card classification step of classifying a plurality of lot cards received in the lot card storing step according to a test support situation; Characterized in that it comprises a.

The lot card classification step may be characterized by outputting a lot card of the tested lot in accordance with the test support situation.

An information reading step of reading the lot classification information of the plurality of lot cards stored in the lot card storing step; Further, the rat card classification step is characterized by further distinguishing the plurality of rat cards by the test support situation based on the rat classification information read in the information reading step.

The lot card classification step may further include selecting a lot card of the tested lot based on the lot classification information read in the information reading step and information on a test support situation, and outputting a selected lot card.

In addition, the test handler according to the present invention for achieving the above object, the loading unit for loading the semiconductor elements from the customer tray to the test tray; A test support unit which docks the test tray loaded with the semiconductor devices by the loading unit to a tester side so that the semiconductor devices loaded on the test tray are engaged with a contact socket of the tester so that a test can be performed; An unloading unit classifying and unloading the semiconductor devices tested by the test support unit by test grade; A controller for controlling the loading unit, the test support unit, and the unloading unit according to the lot information including the lot information of the lot; And a lot card reader for reading the stored lot card and providing the read lot information to the controller. Characterized in that it comprises a.

The lot card reader, the access means for entering and receiving the rat card; Information reading means for reading the lot information of the lot card inputted through the access means and providing the read lot information to the controller; It includes a more specific feature to include.

The controller provides the lot identification information of the semiconductor devices to be tested to the lot card reader, and the lot card reader includes: access means for accessing and storing a plurality of lot cards; Lot card classification means for selecting a lot card having lot classification information received from the controller among a plurality of lot cards received by the access means; Information reading means for reading information provided to the rat card selected by the rat card separating means and providing the same to the controller; It is another feature to include a.

In addition, the test support method of the test handler according to the present invention for achieving the above object, a lot card storing step of receiving a lot card input from the manager; A lot information reading step of reading lot information of the lot card stored in the lot card storing step; And a test supporting step of supporting a test of semiconductor devices according to the lot information read in the lot information reading step. Characterized in that it comprises a.

The test support method may include: a test start lot determining step of determining a lot at which a test is started; Further, the lot information reading step is characterized in that the lot information for reading the lot information on the lot card of the lot determined in the test start lot determination step.

A lot card selection step of selecting a lot card of the lot determined in the test start lot determination step among the plurality of lot cards received in the lot card storing step; In addition, the lot information reading step is characterized in that it is another feature to read the lot information of the lot card selected in the lot card selection step.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention as described above will be described in detail.

3 is a conceptual diagram of a test handler according to an embodiment of the present invention.

As shown in FIG. 3, the test handler according to the present embodiment includes a loading unit 200, a test support unit 300, an unloading unit 400, a lot card classification and reader 500, a controller 100, and the like. It is configured to include.

The loading unit 200 loads the semiconductor devices from the customer tray to the test tray.

The test support unit 300 docks the test tray to the tester side and supports the semiconductor devices loaded on the test tray to be mated with the contact socket of the tester.

The unloading unit 400 serves to unload the tested semiconductor devices from the test tray at the unloading position to the customer trays while classifying the tested semiconductor devices according to the quality of the test results.

The lot card classification and reader 500 stores a plurality of lot cards inputted from the manager, and then classifies the plurality of lot cards according to the information on the test support status of the semiconductor devices from the controller 100, and then, from the lot card. The read lot information is provided to the controller 100 so that the controller 100 can control the loading unit 200, the test support unit 300, and the unloading unit 400 according to the read lot information. In the present embodiment, the lot card separator and the reader 500 are configured to perform the role of reading the lot information and the like, while the lot card is distinguished from the lot cards. It may be implemented to divide the reader separately and configure only one of them to perform only the role of the corresponding configuration.

The controller 100 supports the testing of semiconductor devices by controlling the loading unit 200, the test support unit 300, and the unloading unit 400, and classifies the lot card information and the reader 500 on the test support situation. To send. For example, when a plurality of lot quantities are continuously tested, the controller 100 determines which lot is the lot at which the test is started, which lot is the lot being tested, and which lot is the end of the test. Afterwards, the grasped information is transmitted to the lot card separator and the reader 500. As described above, the controller 100 checks the lot of the semiconductor devices that are supported for the test and identifies the state of the test support. The detailed description thereof will be omitted.

FIG. 4 is a block diagram of the lot card classifier and reader 500 of FIG. 3, and the lot card classifier and reader 500 will be described in detail with reference to the rat card classifier and reader 500.

As illustrated in FIG. 4, the lot card separator and reader 500 includes an access unit 510, an information reading unit 520, a lot card sorting and classifying unit 530, a command input unit 540, and the like. It is composed.

The access means 510 stores a plurality of lot cards input from the manager and outputs the plurality of lot cards.

The information reading means 520 is a lot identification information (such as lot number that can know the lot card of the lot card that has a lot card input through the access means 510) The branch reads lot information (lot quantity, test conditions, etc.) for the lot. The information reading means 520 should be provided as a character reading means when the lot classification information or the lot information is a character, and when the barcode or other digital mark is used, the information reading means 520 should be provided as a means for reading the barcode or digital mark. will be.

When the lot card selection and classification means 530 receives information on a test support situation from the controller 100, the lot card classification and classification means 530 divides a plurality of lot cards by the test support situation, or selects a lot card starting the test. . In order to perform this role, the lot card sorting and dividing means 530 is configured to include a lot card sorting unit 531 and an exhibition unit 532.

Lot card selection unit 531 is a lot identification information read by the information reading means 520 and the information on the test support status received from the controller 100 (Rat classification information of the test starting lot or end of the test end) The lot card of the lot that starts the test is selected from among the plurality of lot cards based on the ragu classification information. There is no need to have a separate process for sorting lots of cards. That is, by selecting the lot card of the lot to be started the test is to play the role of selecting the lot card of the end of the test. In addition, by selecting the lot card to be tested in this way, the information reading means 520 supports reading the lot card of the lot to be started, and the test is completed by outputting the selected lot card through the access means 510. The lotcard for a lot is distinguished from that of lots that are currently in testing or waiting for testing. Similarly, if it is implemented to input the lot card in the order to be tested, since the lot card can be selected by the input order, the configuration of the lot card selection unit 531 may not be required.

The display unit 532 may be provided as a display module suitable for displaying information, such as an LCD display module, and displays lot-specific information on a test support situation received from the controller 100. For example, if A, B, C, and D lots are continuously tested, if the test of A lot is ended and the current test of B lot is being performed, the display part is the end of the test, and the current B lot Test is in progress, and lots C and D show that they are waiting for testing.

And the command input means 540 is provided to input the command of the manager, in this embodiment, the manager outputs a lot card output for the lot card for the end of the test through the command input means 540 Is provided for inputting. If the controller 100 is configured to automatically output the tested card after the test support condition received from the controller 100, the configuration of the command input means 540 may not be required.

As described above, in the test handler according to the present embodiment, the controller 100 and the lotcard separator and the reader 500 are configured as separate modules, but according to the implementation, the controller 100 and the lotcard reader and the separator 500 are implemented. ) May be configured as an integrated module or the controller may be configured in the lot card classification and the reader 500 separately from the controller 100.

In the test handler configured as described above, a lot card classification method, a lot card classification method of the reader 500, and a test support method of the test handler will be described in order of convenience.

<Example about the method of classifying a card>

The present embodiment will be described with reference to FIG. 5 as a method for classifying a lot card and a lot card housed by the reader 500 according to a test situation.

First, the manager accommodates customer trays in which untested semiconductor devices are loaded in a stacker (not shown). In general, one customer tray is loaded with semiconductor devices of the same lot. For example, if 50 semiconductor devices can be loaded in one customer tray and a total of 60 customer trays can be stored in a stacker capable of storing a customer tray loaded with untested semiconductor devices, A lot Assuming that the quantity of 1500, B lot 700, C lot 800 is possible, you can support the test of A lot, B lot and C lot at a time. That is, in such a case, the manager may store the plurality of lot quantities in the stacker at one time by dividing the lots (for example, A lot, B lot, and C lot in order).

1.Lard card storing <S501>

When the manager stores the customer trays in the stacker and inputs a lot card for a plurality of lots stored in the stacker, the lot card classification and the reader 500 stores the plurality of lot cards through the access means 510. At this time, it is possible to configure so that the lot card can be input in the order of the lot to be supported for testing, but in this embodiment, a configuration is possible in which the lot card can be arbitrarily inputted.

2. Receive test support status <S502>

After the lot cards are stored in step S501, when the test handler starts to support the test, the controller 100 transmits the test support status to the lot card classifier and the reader 500, and the lot card classifier and the reader 500 Receives the test support status from the controller 100. For example, when the quantity of A lot is first loaded, the controller 100 notifies the lot card classification and reader 500 that test support for the quantity of A lot has begun to be performed, and if the quantity of A lot is When the test support for the quantity of B lot is started after the test for B lot is completed, the controller 100 ends the test support for the quantity of the lot of A lot and continues the test support for the quantity of B lot. The division and the reader 500 will be notified. And the notification of the controller 100 is received by the lot card reader and reader 500. Here, the controller 100 has already suggested through the first invention and the first invention that the determination of the lot-by-lot test support status is made by camera or input lot quantity information.

3. Lot card output command received <S503>

When the administrator inputs to output the test-ended rat card through the command input means 540, the manager receives the command. Of course, it is also preferable to automatically output the tested rat card, in which case step S503 can be omitted.

4. Information reading <S504>

Upon receiving a lot card output command input from the manager in step S503, the information reading means 520 is activated to read the lot identification information (lot number, etc.) of the plurality of lot cards.

5. Lot card selection and output <S505>

When the lot classification information on the lot cards is read by step S504, the lot card selection unit 531 checks the lot classification information on the lot card of the lot which has been tested, among the read lot classification information, and identifies the corresponding lot classification information. After selecting a lot card having a, and outputs it through the access means 510 to distinguish between the lot card of the lot under test lot or the lot under test lot lot.

6. Exhibition <S506>

On the other hand, upon receiving the information on the test support situation from the controller 100, the display unit 532 displays the information on the test support situation so that the manager can know the current situation.

Although the above-described lot card classification and the lot card classification method of the reader 500 describe a method of selecting and outputting a lot card that has been tested out of the lot cards inputted regardless of the order, the lot cards are tested in order of test support. If it is implemented to input, since the lot cards are output sequentially according to the input order, step S504 for reading the lot classification information or the process for selecting the lot card may be omitted.

And in the above-mentioned lot card classification method, the step S504 of reading the rack classification information is described in a later order than the step S503 of receiving the command from the administrator, but according to the implementation, the lot cards stored through the access means 510. It is also preferable to configure so that the lot card of the lot which was tested by the command of an administrator is sorted and outputted, in the state which read all the ragu | division | partial_part_information information about (at) first.

That is, the above-described method for classifying a lot card has been described with the order of convenience for explanation, but according to the implementation, the order of progress may be changed and some steps may be omitted.

<Example of test support method>

This embodiment is a method for supporting a test based on the lot information of the stored lot card, which will be described with reference to FIG. 6, and for the sake of brevity, the redundant description will be omitted or compressed.

1.Lard card storing <S601>

When the manager stores the customer trays in the stacker and inputs a lot card for a plurality of lots stored in the stacker, the lot card classification and the reader 500 stores the plurality of lot cards through the access means 510.

2. Test start lot judgment <S602>

When a plurality of lot cards are stored in the lot card classifier and the reader 500 by the step S601, the controller 100 determines the lot from which the test starts. For example, as shown in the prior art, by using a camera to shoot the semiconductor device to start the test to read the rat classification information, or according to the input quantity information all loading of the whole lot is finished and the loading of the quantity of the lot When started, the controller 100 may determine which lot is the lot to be tested. Of course, if it is implemented to enter only one lot card into the lot card reader and reader 500, since the lot of the lot card will be supported for testing, this process will not necessarily be configured.

3. Lot card selection <S603>

After the controller 100 determines the lot that is currently being tested at step S602, and provides the determined information to the lot card classification and reader 500, the lot card selection and classification means of the lot card classification and reader 500 ( 530, more specifically, the lot card selection unit selects lots starting from the plurality of lot cards based on the determined information. Of course, if the cards are entered in the test order, this process will not necessarily be configured.

4. Read Lot Information <S604>

When the lot card starting the test is selected in step S603, the information on the lot card classification and the information reading means 520 of the reader 500 reads the lot information (the quantity of the lot or the test conditions, etc.) of the selected lot card.

5. Test support <S605>

After the lot information of the lot card to be tested in step S604 is read and the read lot information is provided to the controller 100, the controller 100 loads 200 and the test support unit 300 according to the lot information. And testing the semiconductor devices by controlling the unloading unit 400.

On the other hand, the above-described embodiment is divided into a technology for classifying the lot card and the technology to support the test by using the lot information of the lot card, but it will be readily understood that the two technologies can be combined together. For example, after a plurality of lot quantities are loaded into the stacker and a plurality of lot cards are input to the lot card separator and the reader 500, the controller 100 checks the lots of the semiconductor devices to be tested for the first time, and then determines Provided information to the lot card classification and reader 500. In addition, the lot card classification and the reader 500 selects a lot card of the lot (the lot starting the test support) from which the loading starts among the plurality of lot cards according to the information received from the controller 100, and then the selected lot card. Read lot information, and provides the read information to the controller (100). Subsequently, the controller 100 controls each unit to support the testing of the semiconductor devices of the lot to be tested according to the lot card classification and the lot information received from the reader 500, and then, for the semiconductor devices of the lot. When all the tests are finished, the rag classification information for the lottery lot and the test started lot is sequentially or simultaneously provided to the lottery card reader and the reader 500, and the lottery card reader and the reader 500 selects the lottery card selected earlier After outputting, the lot card of the lot to be tested is selected, and the above-described process is repeated to continuously test a plurality of lots.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings. However, since the above-described embodiments have only been described with reference to preferred examples of the present invention, the present invention is limited to the above embodiments. It should not be understood that the scope of the present invention is to be understood by the claims and equivalent concepts described below.

As described in detail above, according to the present invention, even when the quantities of different lots are continuously tested, there is no confusion of the lot cards, so the lot management is convenient and the administrator does not need to pay attention to the lot cards. It does not have to take the hassle of the administrator inputting the items to be input for the test support.

Claims (14)

A lot card separator configured to classify a plurality of lot cards according to information on a test support situation of semiconductor devices after receiving a plurality of lot cards inputted from a manager; And A controller for transmitting information on a test support situation of semiconductor devices to the lot card separator; Including; The lot card separator, Access means for accessing a plurality of cards; A lot card classification means for classifying a plurality of lot cards according to a test support situation according to a test support situation when receiving information on a test support situation from the controller; Test handler comprising a. The method of claim 1, The lot card dividing means is a test handler, characterized in that for outputting the rat card of the completed test lot through the access means based on the information on the test support situation. The method of claim 1, The lot card separator may include: information reading means for reading lot classification information of a plurality of lot cards inputted through the access means; More, And the rat card dividing means divides the plurality of rat cards for each test support situation based on the rat dividing information read by the information reading means. The method of claim 3, The lot card dividing means selects a lot card of the tested lot based on the lot classification information read by the information reading means and the information on the test support status, and outputs the selected lot card through the access means. A test handler comprising a selection unit. A lot card storing step of storing a plurality of lot cards inputted from a manager; A lot card classification step of classifying a plurality of lot cards received in the lot card storing step according to a test support situation; The rat card classification method of the rat card separator for a test handler comprising a. The method of claim 5, The lot card classification step is a lot card identification method of the lot card separator for the test handler, characterized in that for outputting a lot card of the test complete lot in accordance with the test support situation. The method of claim 5, An information reading step of reading the lot classification information of the plurality of lot cards stored in the lot card storing step; More, The lot card classification step is a lot card identification method of the rat card separator for a test handler, characterized in that for distinguishing a plurality of lot cards by the test support status based on the lot classification information read in the information reading step. The method of claim 7, wherein The lot card classification step is a lot for the test handler, characterized in that to select the lot card of the test complete lot based on the information on the lot classification information and the test support status read in the information reading step to output the selected lot card How to identify the cards in the card separator. A loading unit for loading semiconductor devices from a customer tray into a test tray; A test support unit which docks the test tray loaded with the semiconductor devices by the loading unit to a tester side so that the semiconductor devices loaded on the test tray are engaged with a contact socket of the tester so that a test can be performed; An unloading unit classifying and unloading the semiconductor devices tested by the test support unit by test grade; A controller for controlling the loading unit, the test support unit, and the unloading unit according to the lot information including the lot information of the lot; And A lot card reader for reading the stored lot card and providing the read lot information to the controller; Test handler comprising a. The method of claim 9, The card reader, Access means for accessing and storing the card; Information reading means for reading the lot information of the lot card inputted through the access means and providing the read lot information to the controller; Test handler comprising a. The method of claim 9, The controller provides the lot identification information of the semiconductor devices to be tested to the lot card reader, The card reader, Access means for accessing and storing a plurality of cards; Lot card classification means for selecting a lot card having lot classification information received from the controller among a plurality of lot cards received by the access means; Information reading means for reading information provided to the rat card selected by the rat card separating means and providing the same to the controller; Test handler comprising a. delete A lot card storing step of storing a lot card inputted from a manager; A test start lot determination step of determining a lot at which the test starts; A lot information reading step of reading lot information on the lot card of the lot determined in the test start lot determining step among the lot cards stored in the lot card storing step; And A test supporting step of supporting a test of semiconductor devices according to the lot information read in the lot information reading step; Test support method of the test handler comprising a. The method of claim 13, A lot card selection step of selecting a lot card of the lot determined in the test start lot determination step among the plurality of lot cards received in the lot card storing step; More, The lot information reading step is a test supporting method of the test handler, characterized in that for reading the lot information of the lot card selected in the lot card selection step.

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