KR100796347B1 - Moving device and flat-surface grinding machine using planet gear mechanism - Google Patents

Abstract

A moving device and a flat surface grinding machine using a planetary gear mechanism are provided to carry out a high precision plane surface grinding process by moving a work through a quadrilateral trajectory. A moving device includes a planetary gear mechanism(1), and a moving unit which operates by the planetary gear mechanism. The planetary gear mechanism includes a sun gear, an internal gear arranged coaxially with the sun gear, a plurality of planetary gears arranged in the space formed between the sun gear and the internal gear, and a driving pin projected from one of the planetary gears. The sun gear has a size half of the internal gear, and the planetary gear has a size one fourth of the internal gear. The planetary gear turns four times while the planetary gear revolves around the sun gear one time by the rotation o the sun gear. The moving unit is engaged to the driving pin, and moves along a quadrilateral trajectory.

Description

Moving device and flat-surface grinding machine using planet gear mechanism}

1 is a front view of a planar polishing machine according to the present invention.

Fig. 2 is a plan view of the planar polishing machine shown in Fig. 1.

Fig. 3 is a side view of the planar polishing machine shown in Fig. 1.

4 is a plan view of main parts of a driving means in the moving device of the present invention;

5 is a longitudinal sectional front view of the drive means shown in FIG. 4;

Figure 6 is a plan view of the mobile device of the present invention.

7 is a side view of the mobile device shown in FIG. 6;

8 is an explanatory view of the operation of the drive means shown in FIG. 4;

9 is an explanatory diagram of a polishing trajectory in Example 2 of the present invention.

Fig. 10 is a front view of the planar polishing machine according to the third embodiment of the present invention.

Fig. 11 is a plan view of the planar polishing machine shown in Fig. 10.

12 is a side view of the planar polishing machine shown in FIG. 10.

FIG. 13 is an operation explanatory diagram of the planar polishing machine shown in FIG. 10; FIG.

14 is an explanatory view of the operation of the planar polishing machine shown in FIG. 10;

Fig. 15 is an explanatory diagram of a link mechanism of the planar polishing machine shown in Fig. 10.

Fig. 16 is a perspective view showing a Hoffman type planar polishing machine of the conventional example.

17 is a plan view of the planar polishing machine illustrated in FIG. 16.

FIG. 18 is an explanatory diagram showing an overall moving distance of two points of a workpiece in the polishing operation by the planar polishing machine shown in FIG. 16; FIG.

<Description of the symbols for the main parts of the drawings>

1: planetary gear mechanism 2: drive pin

3: driven body 4: link mechanism

5: circular trajectory 6: quadrilateral trajectory

7: link fixation 8: link termination

9: link verse 10: link mechanism

11: expect 12: pinhole

29 carrier plate 29a square hole

32: work carrier 33: work

35: lower lap board 36: upper lap board

37: sun gear 38: planetary gear

39: Pinch 43: Bed

49: air cylinder 51: dispensing tank

52: slide head 104: drive motor

109: material joint

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving device using a planetary gear mechanism and a planar polishing machine, in particular a moving device capable of generating a motion of a quadrilateral trajectory, and a planar polishing device having the moving device.

In general, when moving an object via a quadrilateral trajectory, an X, Y biaxial slide mechanism is used, or a double cam is used. However, in the former case, the cost increases, and in the latter case, it is difficult to obtain an accurate quadrature trajectory.

On the other hand, a single cam having a roller group mounted on its circumferential surface, and a follower body having a rectangular inner circumferential surface in which the cam is inscribed through the roller group, has a motion in which the follower moves through a square trajectory by rotation of the cam. A mechanism (Japanese Patent Laid-Open No. 2002-168316) is known.

As a conventional planar polishing machine, a Hoffman type system as shown in Figs. 16 and 17 exists. FIG. 16 is a perspective view thereof, FIG. 17 is a plan view thereof, in which 37 is a sun gear rotated about a rotation drive shaft 101, 39 is concentrically arranged with a sun gear 37 and is held in a stationary state. 38 is four planetary gears meshed with the sun gear 37 and the end gear 39. Each planet gear 38 is provided with a square hole 40 into which a rectangular work 33 is inserted. 41 is a lower lap panel rotated about the rotation drive shaft 102 while supporting the lower surface of the workpiece 33 inserted into the square hole 40, and 42 is the workpiece 33 inserted into the square hole 40. The upper wrap panel is rotated about the rotational axis coaxial 103 while pressing the upper surface of the. The upper lap panel 42 can be operated in a shanghai motion, so that the work 33 can be supplied to the planetary gear 38 and the work 33 can be taken out from the planetary gear 38.

When machining the work 33, after raising the upper lap board 42 and supplying the work 33 into the square hole 40 of each planet gear 38, this upper lap board 42 is dropped and each work Press the upper surface of (33) to a suitable pressure. At this time, each of the workpieces 33 is pressed into the lower wrap plate 41 by the same pressure. Thereafter, the sun gear 37 is rotated at an appropriate speed. At this time, the upper wrap panel 42 or the lower wrap panel 41 is rotated at a suitable speed in a suitable direction in accordance with the processing situation. As a result, each work 33 is moved to the body shape according to the rotational and revolving displacements of the planetary gears 38, and the upper and lower surfaces are simultaneously polished by the upper and lower lap panels 42 and 41.

This machine is intended to avoid the difference in the total travel distance due to the distance difference from the centers of the respective lap boards 41 and 42 at any two points of the workpiece 33 by simultaneously performing the rotational displacement and the idle displacement. High quality polishing is performed by bringing the entire travel distances of all the points in (33) to the same.

However, when the conventional single cam is used, the structure is complicated and expensive, and the driven body is temporarily stopped near each corner point, so that the movement speed of the quadrilateral trajectory is repeated from zero to the maximum speed, and vibration is generated. There was a defect that occurred.

In addition, the Hoffman method has the following drawbacks.

18 shows an arbitrary two points of one work w, i.e., a corresponding planetary gear, when the upper and lower lap panels 42 and 41 are stopped and only the sun gear 37 is rotated 180 degrees in the Hoffman type planar polishing machine. It shows the entire trajectory of each point (P) which does not coincide with the center of rotation (38). As can be seen from this figure, the movement trajectories of these two points P and Q are different from each other. That is, in this planar grinding | polishing machine, the moving distance of each point of each workpiece | work 33 will not become the same. The difference in the movement distance of each point can be ignored practically when the workpiece 33 is small, but cannot be ignored when the workpiece 33 becomes large. That is, this difference becomes a difference in the amount of polishing of the machined surface, which is the upper and lower surfaces of the work 33, and it becomes difficult to finish the machined surface in a planar shape, and at the same time, the uneven wear of the polishing planes of the upper and lower lap panels 42 and 41 Generate.

In addition, since each planetary gear 38 is rotated about the rotation driving shaft 101 in contact with the lower lap panel 41, the rotation around the rotation driving shaft 101 and the rotation driving shaft of the lower lap panel 41 With respect to the rotational direction relative to the rotation about the center 102, since the movement distance of each point in the radial direction of the lower wrap panel 41 is different, and therefore, the lower wrap panel 41 depending on the situation ), The wear amount gradually increases toward the radially outward direction, or conversely, it gradually decreases, so that the lower surface of each work 33 cannot be polished properly.

In addition, the top view of the polishing plane of the lower wrap panel 41 is important for high quality polishing, and the polishing plane, in which the amount of wear gradually changes as described above, needs to be corrected by the jig. However, this modification not only requires skill, but is also difficult to make completely. The problem caused by the relative rotation of the planetary gear 38 and the lower lap board 41 becomes even more important for large workpieces.

The present invention is intended to eliminate such drawbacks.

The moving device using the planetary gear mechanism of the present invention comprises a planetary gear mechanism and a moving means driven by the planetary gear mechanism, wherein the planetary gear mechanism is arranged concentrically with the sun gear and the sun gear. And a plurality of planetary gears circumferentially spaced apart from each other so as to engage with each other in a space formed between the sun gear and the internal gear, and the rotation of any one of the planetary gears. The planetary gear has a driving pin protruding from the central axis, and the planetary gear is 1/4 of the dimension of the sun gear, and the planetary gear revolves around the sun gear once by the rotation of the sun gear. Rotating four times during the operation, the moving means is coupled to the drive pin, it is characterized in that it is driven along a substantially quadrilateral trajectory.

In addition, the planar polishing machine of the present invention comprises a planetary gear mechanism, a moving means of a workpiece to be driven driven by the planetary gear mechanism, a planar polishing means, and the planetary gear mechanism includes a sun gear and the An internal gear disposed concentrically with the sun gear and held in a stationary state, a plurality of planetary gears circumferentially spaced from each other so as to be engaged with each other in a space formed between the sun gear and the internal gear, and the planetary gear Any one of which consists of a drive pin protruding at a position eccentric from its center of rotation, the dimension of the planetary gear being 1/4 of the dimension of the sun gear, and the planetary The gear rotates four times while revolving once around the sun gear, and the moving means is engaged with the driving pin, and follows a substantially quadrilateral trajectory through a link mechanism. It is characterized by being driven.

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described based on drawing.

Example 1

1 to 3 relates to a planar polishing machine according to the present invention, Figure 1 is a front view, Figure 2 is a plan view, Figure 3 is a side view. The planar polishing machine of the present invention includes a bed 43, on which the lower wrap plate 35 is fixed in a horizontal shape, and the carrier plate 29 is disposed near the upper portion of the lower wrap plate 35. 1, the follower 3 is arrange | positioned at the right side of this carrier plate 29. As shown in FIG. In addition, the planetary gear mechanism 1 having the sun gear 37 driven by the output shaft of the drive motor 104 while the drive motor 104 is fixed to the bed 43 is provided with the driven body 3. To the lower position of.

A dispensing tank 51 made of lap and an air cylinder 49 are disposed above the bed 43, and a material joint 109 is interposed in the lower end of the slide head 52 connected to the output shaft of the air cylinder 49. To fix the upper wrap panel 36.

As shown in Figs. 4 and 5, the planetary gear mechanism 1 is arranged concentrically with the sun gear 37 rotated by the drive motor 104 and the sun gear 37, and stops. And three planetary gears 38 disposed spaced apart from each other by 120 ° in the circumferential direction so as to engage them in the space formed between the sun gear 37 and the internal gear 39 held in the state. And any one of the planetary gears 38 has a driving pin 2 protruding at a position eccentric from its center of rotation.

In the planetary gear mechanism 1, the dimensions of the gears engaged with each other become a number corresponding to the diameter of the gears. Therefore, for example, the dimension A corresponding to the diameter of the sun gear 37 is 40, and the dimension B corresponding to the diameter of the internal gear 39 is set to the dimension A of the sun gear. It is set to twice, that is, 80, and the dimension C corresponding to the diameter of the planetary gear 38 is 1/4 or 20 of the dimension B of the internal gear 39.

As shown in Figs. 6 and 7, the carrier plate 29 is formed of a relatively large horizontal rectangular frame plate, and the carrier plate 29 is formed with a rectangular hole 29a, and the rectangular hole ( The work carrier 32 which fits the several workpiece 33 in 29a) is detachable, and one side of this carrier plate 29 is couple | bonded with the follower 3, and is formed in this follower 3 At the same time, the driving pin 2 protruding from the planetary gear 38 is fitted into one hole, and the driven body 3 is supported by the parallelogram link mechanism 4 to support the carrier plate 29 and the longitudinal end. The body 3 is movable in the XY direction in the horizontal plane. As a result, the work 33 is sandwiched between the fixed lower lap board 35 and the upper lap board 36, and thereby polished simultaneously.

In the planar polishing machine having the above-described configuration, when the sun gear 37 of the planetary gear mechanism 1 is rotated at a constant speed by the drive motor 104, the planetary gear 38 is shown in FIG. Since the motor rotates four times while revolving around the sun gear 37, the drive pin 2 provided eccentrically on the planetary gear 38 is different from the circular trajectory 5 of the rotational center of the planetary gear 38. Another approximately quadrilateral trajectory 6 is obtained.

According to such a planar polishing machine, a highly precise planar polishing can be performed by moving the workpiece through the quadrilateral trajectory 6 with an extremely simple configuration. The diametrical trajectory 6 is made larger by increasing the diameter of the planetary gear mechanism 1. By increasing the size of one side, planar polishing of the large workpiece 33 can be performed. Furthermore, efficient planar polishing can be performed by moving the workpiece 33 at high speed.

However, in such a planar polishing machine, the substantially quadrilateral trajectory 6 does not change with each rotation of the sun gear 37.

As a result, there existed a fault which a trace of trace generate | occur | produces in the workpiece | work 33 grind | polishing along the said substantially quadrilateral trace 6. Embodiment 2 of this invention is for eliminating such a fault.

Example 2

In Example 2 of this invention, when the dimension B of the internal gear 39 is 80, for example, the dimension C of the planetary gear 38 is the dimension of the internal gear 39 ( (1/4) +1 of B), that is, 21, and the dimension A of the sun gear 37 is (1/2) -2 of the dimension B of the internal gear 39, that is, 38 Shall be. In other words, the dimension C of the planetary gear 38 is set to the value obtained by dividing the dimension B of the internal gear in half, plus 1, and the dimension A of the sun gear 37 is the value of the internal gear. It is set to the value obtained by dividing the dimension (B) in half and subtracting two.

According to the second embodiment, the planetary gear 38 rotates by 80/21 revolutions, that is, 4 revolutions-18 ° while the planetary gear 38 revolves around the sun gear 37 once by the rotation of the sun gear 37. As a result, as shown in FIG. 9, the substantially quadrilateral trajectory 6 is gradually shifted by 18 degrees counterclockwise for each rotation of the sun gear 37, and the trajectory of the substantially quadrilateral deformation 6 ) Returns to the position of FIG. 8 only when the sun gear 37 rotates 20 times, so that the traces of the trajectory are hardly generated on the work 33.

The above relationship is similarly established even when the dimension B of the internal gear 39 is 60, 100, 120, 140, 160, or the like.

Example 3

In the third embodiment of the present invention, as shown in Figs. 10 to 15, the link mechanism (10) consisting of the link fixing section (7), the link termination section (8), and the link original section (9) is a lower wrap panel ( It is arrange | positioned at both sides of 35, the said link fixation section 7 of each said link mechanism 10 is rotatably supported by the base 11, and the link original section 9 is supported by the lower lap board 35 3, which is rotatably supported on the side surface of the crankshaft, rotatably supported on the pin hole 12 provided in the carrier plate 29, and connected to the side of the carrier plate 29. The driving pins 2 protruding from the planetary gears 39 are fitted to the holes formed therein, and the sun gears 37 of the planetary gear mechanism 1 are rotated at a constant speed by the driving motor 104.
As shown in Fig. 15, the link mechanism 10 is composed of a plurality of links, that is, a fixed cut link 10a, a pair of terminated links 10b, and a broken link 10c. That is, one end of the stationary link link 10a is rotatably mounted to the base 11 via the link anchor section 7, and one end of the end link 10b is respectively connected to the carrier plate 8 via the link end section 8. (29) is rotatably mounted, and the circumferential link (10c) is rotatably mounted to the lower wrap panel (35) via the link circumference (9). On the other hand, the other end of the fixed link (10a) and the other end of the original link (10c) is hinged to each other, the other end of each longitudinal link (10b) is hinged in the middle of the fixed link link (10a) and the original link (10c) Combined.

As a result, when the lower lap board 35 swings according to a substantially quadrangle trajectory 6, and the carrier plate 29 also has a link ratio of 1: 2 in accordance with the link ratio of the link mechanism 10, The carrier plate 29 moves at half its speed relative to the lower lap board 35, and the lower surface of the work 33 mounted on the carrier plate 29 is polished by the lower lap board 35, while the fixed upper part is fixed. The upper surface of the work 33 is polished at the same speed as the lower surface of the work 33 by the lap board 36.

When the ratio of the link is other than 1: 2, the lower surface and the upper surface of the work 33 are polished at different speeds, respectively.

According to the third embodiment, the plan view and parallelism by the polishing of the work 33 can be easily shown, and since the power system is one system, the polishing machine can be made compact, and the low cost and resource saving can be achieved.

As described above, according to the planar polishing machine of the present invention, it is possible to perform high-precision planar polishing by moving the workpiece through the substantially quadrilateral trajectory 6 with an extremely simple configuration, and to increase the diameter of the planetary gear mechanism 1 By increasing the size of one side of the quadrangle trajectory 6, planar polishing of the large workpiece 33 can be performed. Furthermore, efficient planar polishing can be performed by moving the workpiece 33 at high speed.

According to the planar polishing machine of the present invention, it is possible to perform high-precision planar polishing by moving a workpiece through a quadrilateral trajectory with an extremely simple configuration. It is possible to perform planar polishing, and furthermore, efficient planar polishing can be performed by moving the workpiece at high speed.

Claims (5)

It consists of a planetary gear mechanism (1) and a moving means driven by the planetary gear mechanism (1), wherein the planetary gear mechanism (1) is concentric with the sun gear (37) and the sun gear (37). And a plurality of planetary gears circumferentially spaced apart from each other so as to be engaged with each other in the space formed between the sun gear 37 and the internal gear 39 and the internal gear 39 held in a stationary state. 38) and drive pins 2 protruding from any one of the planetary gears 38 at a position eccentric from its center of rotation, and the dimensions of the sun gear 37 are the internal gear 39 ), The planetary gear 38 has a dimension of 1/4 of the internal gear 39, and the planetary gear 38 is rotated by the sun gear 37 by the rotation of the sun gear 37. 37) rotates four times during one revolution of the circumference, and the moving means is engaged with the driving pin 2 to form a substantially quadrilateral shape. Mobile device that uses a planetary gear mechanism characterized in that the drive according to the trajectory (6). The planetary gear mechanism 1 is constituted by a planetary gear mechanism 1, a moving means of a workpiece 33 to be polished driven by the planetary gear mechanism 1, and a planar polishing means. (37), the internal gear (39) arranged concentrically with the sun gear (37) and held in a stationary state, and in the space formed between the sun gear (37) and the internal gear (39). And a plurality of planetary gears 38 circumferentially spaced apart from each other so as to engage with each other, and a driving pin 2 protruding from any one of the planetary gears 38 at an eccentric position from the center of rotation thereof. The dimension of the sun gear 37 is 1/2 of the dimension of the internal gear 39, the dimension of the planetary gear 38 is 1/4 of the dimension of the internal gear 39, the sun gear Rotation of 37 causes the planetary gear 38 to rotate four times while revolving around the sun gear 37 once. The carrier means is engaged with the drive pin 2, and is driven along a substantially quadrilateral trajectory 6 via a link mechanism 10, and the planar polishing means carries a carrier plate for holding a workpiece 33 to be polished. (29), and the upper wrap plate 36 and the lower wrap plate 35 to sandwich the work 33 from the upper and lower surfaces, the carrier plate 29 is the upper and lower wrap plate (36,35) by the moving means Planar polishing machine, characterized in that relatively moved to. It consists of a planetary gear mechanism (1) and a moving means driven by the planetary gear mechanism (1), wherein the planetary gear mechanism (1) is concentric with the sun gear (37) and the sun gear (37). And a plurality of planetary gears circumferentially spaced apart from each other so as to be engaged with each other in the space formed between the sun gear 37 and the internal gear 39 and the internal gear 39 held in a stationary state ( 38 and a drive pin 2 protruding from any one of the planetary gears 38 at a position eccentric from its central axis of rotation, and having a dimension corresponding to the diameter of the sun gear 37 (A). ) Is set to the value obtained by dividing the dimension B corresponding to the diameter of the internal gear 39 by half, subtracting 2, and the dimension C corresponding to the diameter of the planetary gear 38 is the internal value. The value obtained by dividing the dimension B of the gear 39 by 4 is set to the value obtained by adding 1 to the rotation of the sun gear 37. As a result, the planetary gear 38 rotates by 4 rotations-18 degrees while the planetary gear 38 revolves around the sun gear 37 once, and the moving means is engaged with the driving pin 2 to form a substantially quadrilateral trajectory ( 6) A moving device using a planetary gear mechanism, characterized in that driven along. The planetary gear mechanism 1, the moving means of the workpiece 33 to be polished driven by the planetary gear mechanism 1, and the planar polishing means, and the planetary gear mechanism 1 comprises a sun gear ( 37) and an internal gear 39 concentrically arranged with the sun gear 37 and retained in a stationary state, and engaging with them in a space formed between the sun gear 37 and the internal gear 39. And a plurality of planetary gears 38 circumferentially spaced apart from each other so as to be spaced apart from each other, and a drive pin 2 protruding from any one of the planetary gears 38 at an eccentric position from the center of rotation thereof. The dimension A corresponding to the diameter of the sun gear 37 is set to the value obtained by dividing the dimension B corresponding to the diameter of the internal gear 39 by half and subtracting 2, and the planetary gear 38 The dimension (C) corresponding to the diameter of) is obtained by dividing the dimension (B) of the internal gear 39 by 4 and adding 1 to it. The rotation of the sun gear 37 causes the planetary gear 38 to rotate four revolutions to 18 ° while revolving around the sun gear 37 once. A carrier plate 29 which is engaged with the pin 2 and is driven along a substantially quadrilateral trajectory 6 via a link mechanism 10, the planar polishing means holding a workpiece 33 to be polished, It consists of an upper wrap panel 36 and a lower wrap panel 35 to sandwich the workpiece 33 from its upper and lower surfaces, and the carrier plate 29 is relatively moved to the upper and lower wrap panels 36 and 35 by the moving means. Planar polishing machine, characterized in that. 5. The fixed linkage (10a) according to claim 2 or 4, wherein one end of the link mechanism (10) is mounted on the base (11) via a link anchorage (7) and the angle adjustment is possible. A pair of longitudinal links 10b, which are mounted on the carrier plate 29 around the link longitudinal section 8 so as to be angle-adjustable, and one end is mounted to the lower wrap panel 35 about the link original section 9, respectively. It is composed of a distal link (10c) formed to be able to adjust the angle, the other end of the fixed link (10a) and the other end of the distal link (10c) is hinged to each other while the other end of each longitudinal link (10b) 10a) and hinged to an intermediate portion of the distal link 10c, characterized in that the relative speed of the carrier plate 29 and the lower wrap plate 35 is changed according to the link ratio of the link mechanism 10. Flat grinding machine.

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