KR100771480B1 - Tray transfer system - Google Patents

Abstract

A tray transfer system is provided to transfer a tray supplied with a resin in X, Y and Z axial directions, respectively, thereby solving a congestion phenomenon. A tray transfer system includes a tray transferring unit transferring a tray in an X axial direction, a pickup unit(300) picking up the tray transferred from the tray transferring unit, and a lifting unit(200) lifting the pickup unit in the X axial direction. The tray transfer unit has a base(110) with a guide rail(120) extending in the X axial direction, a guide rail(130) provided on the guide rail and extending in a Y axial direction, and a transfer member(140) installed on the guide rail.

Description

Tray transfer system

1 is a front view showing a conventional tray feeder,

2 is a perspective view of a tray conveying system of the present invention;

Figure 3 is a perspective view of the tray transfer unit provided in the tray transfer system of the present invention,

Figure 4 is a plan view of the tray transfer unit provided in the tray transfer system of the present invention,

Figure 5 is a side view of the tray transfer unit provided in the tray transfer system of the present invention,

Figure 6 is a perspective view of the lift and lower portion and the pickup portion provided in the tray transport system of the present invention,

Figure 7 is a bottom perspective view of the lift and lower portion and the pickup portion provided in the tray transport system of the present invention,

8 is a front view of the lifting and lowering portion and the pickup portion provided in the tray transfer system of the present invention;

9 is a side view of the lift and lower portion and the pickup portion provided in the tray transport system of the present invention;

10 is a plan view showing an operating state of the tray transport system of the present invention,

11 is a side view showing an operating state of the tray transfer system of the present invention;

12 is a front view showing an operating state of the tray transfer system of the present invention;

13 is a block diagram schematically showing an operating state of the tray transport system of the present invention.

Explanation of symbols on the main parts of the drawings

100: tray transfer unit 110: base

110 ': support plate 120: guide rail

120a: first guide rail 120b: second guide rail

130: guide rail 131: support

132: reciprocating guide member 132 ', 140': sliding guide

134: fixed body 140: transfer member

141: fastening portion 150: the first driving portion

151: transfer guide 152: rotation guide member

160: second driving unit 200: lifting and lowering unit

210: support member 220: fixed support

230: lifting and lowering guide member 300: pickup

310: seating member 320: rotational force transmission member

330: finger 340: buffer member

350: sensor M1: motor

BS1, BS2: Ballscrew T: Tray

The present invention relates to a tray conveying system, wherein the trays are transported in the X-axis, Y-axis, and Z-axis directions, respectively, and the trays supplied with the resin are supplied to the water receptacle, and the empty trays supplied to the water receptacle are washed. Or it relates to a tray transfer system for delivering to the resin supply.

In general, a semiconductor device manufacturing process includes a raw material inspection for checking wafer defects, a sawing process for cutting a wafer into pieces, and a separate semiconductor chip in a lead frame. Die Bonding process for attaching to the mounting plate, Wire Bonding process for connecting the chip pad and lead frame lead provided on the semiconductor chip with wire, Internal circuit of semiconductor chip and other Molding process to wrap the outside with encapsulant to protect the components, trim process to cut the dam bar connecting the lead and lead, and foaming process to bend the lead into the desired shape, completed through the above process Inspection of the defective package.

Here, the molding step is a step of wrapping the semiconductor device with a thermosetting resin to protect the semiconductor device from the external environment.

This molding process is largely divided into two methods. That is, it is divided into a method of supplying a thermosetting resin in a solid state or a resin in a powder form to the inside of the top and bottom molds.

In the former case, since the thermosetting resin is continuously supplied into the recessed part, it is impossible to supply the correct amount of resin. That is, the supply of the resin to be molded is excessively supplied, resulting in a problem that the molding thickness of the semiconductor element is too thick.

Therefore, in the art of manufacturing semiconductor devices, the latter case of supplying a resin in powder form has been adopted. In this case, the amount of powder set in accordance with the size of the semiconductor device can be loaded on the tray, and there is an advantage in that the supply amount of the resin can be precisely corrected even when molding other semiconductor devices having various sizes.

By the way, since the tray proceeds the process from receiving the resin from the resin supply part to transferring the tray to the water-receiving part with only one tray, the tray conveying part has had a considerable time of congestion.

That is, FIG. 1 is a view schematically illustrating a tray conveying system for receiving powder resin from a resin supply unit and transferring a tray loaded with resin to a water mold.

As shown in Figure 1, the operation description of the conventional tray transfer system is as follows. First, the empty tray T is supplied to the buffer part 2 by the loader part 1. Thereafter, the tray T seated on the buffer unit 2 is lowered, and then the tray T is transferred in the lateral direction. Then, the tray T is lifted to receive the resin from the resin supply unit 3. In addition, the tray T which has been supplied with the resin is lowered and then transferred again in the lateral direction. Then, the tray T is lifted and supplied to the loader unit 1. Subsequently, the loader part 1 supplies the tray T to the water-receiving part ahltl, and when the resin is supplied to complete the molding process of the semiconductor device, the empty tray is supplied to the buffer part 2. Will be.

That is, the operation of the buffer unit 2 is operated in the same order as ↑ ↓ ← ↑ ↓ → ↑. Then, the tray repeats the operation as described above, and this operation time takes longer than the time that the molding is completed in the water-receiving portion, the stagnation phenomenon of supplying the resin occurs.

In addition, when a resin is attached to the tray and molding failure of the semiconductor device occurs, the tray should be cleaned. At this time, the tray is supplied from the buffer unit to the cleaning unit, and the tray which has been cleaned is transferred again from the buffer unit. You will receive. If such a process is added, the time for supplying the tray to the receiving part becomes a problem that is further delayed.

SUMMARY OF THE INVENTION An object of the present invention for solving the above problems is to provide a tray conveying system capable of eliminating congestion of a tray for supplying a resin by transferring the trays in the X-axis, Y-axis, and Z-axis directions, respectively. have.

In addition, the X-axis and Y-axis feed is to provide a tray transfer system that can be driven to be separated from the Z-axis to move the plurality of trays individually.

In addition, the Z-axis to temporarily store at a specific height to provide a tray transfer system that can perform the transfer of the other tray in the X, Y axis while performing a separate process, that is, supplying the tray to the cleaning unit.

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A tray conveying system of the present invention, comprising: a tray conveying unit which conveys a tray in an X-axis direction; A pickup unit for picking up the tray received from the tray transfer unit; And a lifter and a lowerer for raising and lowering the pickup unit in a vertical direction with respect to the X-axis direction, wherein the tray transfer unit comprises: a base having a guide rail formed in the X-axis direction; A guide rail disposed on the guide rail and installed in a Y-axis direction; And a conveying member installed on the guide rail and moved in the Y-axis direction.
In the tray conveying system of the present invention, the guide rail includes first and second guide rails disposed in parallel with each other on an upper surface of the base, and the guide rail includes the first and second guide rails. Includes a support that is connected to the two guide rails, and is installed spaced apart from the base.

In the tray conveying system of the present invention, the tray conveying unit comprises: a first driving unit which reciprocates the conveying member in the X-axis direction; And a second driving part for reciprocating the transfer member in the Y-axis direction, wherein the first driving part is installed on an upper surface of the base and is connected to the support.

In the tray conveying system of the present invention, the first driving unit includes a motor, a ball screw connected to the rotating shaft of the motor and penetrating the support; It is provided on the support, the transfer guide for guiding the rotation of the ball screw; is further included.

In the tray conveying system of the present invention, the tray conveying unit, a conveying member connected to the second driving unit, installed between the guide rail and the conveying member; And a fastening part provided in the transfer member and the transfer member, respectively, wherein the transfer member is replaced with the transfer member according to the type of the tray.

In the tray conveying system of the present invention, the tray conveying system further includes an elevating and lowering means portion provided on the base, wherein the pick-up portion is configured to elevate the lowering means in the state of picking up the tray loaded on the conveying member. It is raised or lowered by the department.

In the tray conveying system of the present invention, the lifting and lowering means portion further includes a support member fixedly coupled to the base, wherein the pick-up portion is lifted or lowered with respect to the support member.

In the tray conveying system of the present invention, the pick-up portion further comprises a plurality of fingers rotated in both directions due to the hinge, the finger is picked up while pressing both sides of the tray.

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Hereinafter, with reference to the accompanying drawings to explain the configuration and operation of the tray transport system of the present invention.

As shown in FIG. 2, the tray transfer system is largely divided into a tray transfer unit 100, a lifting unit 200, and a pickup unit 300.

And, the tray transfer unit 100 as shown in Figures 3 to 5 attached, the base 110, the guide rail 120, the guide rail 130, the transfer member 140, the first driving unit 150 The second driving unit 160 is included.

The base 110 serves as a support in a plate shape of a flat plate. The base 110 is provided with a plurality of fastening members are installed in the resin supply device (not shown). In addition, a separate support plate 110 ′ is fixed to the upper surface of the base 110.

In addition, the guide rail 120 is installed on the upper surface of the base 110 or the support plate 110 ′. That is, although the support plate 110 ′ is illustrated in a state in which the support plate 110 ′ is installed in the base 110, the support plate 110 ′ is a member that is selectively provided. 110 ') is not installed. Therefore, the guide rail 120 may be provided on the upper surface of the base 110.

The guide rail 120 is preferably provided with the first and second guide rails 120a and 120b, and is provided in the X-axis direction above the base 110. In addition, the first and second guide rails 120a and 120b are provided to face each other in parallel to each other, and guide grooves and guide protrusions are formed, respectively.

The guide rail 130 is disposed on the guide rail 120 and is installed in the Y-axis direction with respect to the X-axis direction of the first guide rail 120a and the second guide rail 120b. That is, the guide rail 120 is provided in an arrangement state such as "〓" when viewed in plan view, and the guide rail 130 has an arrangement state such as "│" when viewed in plan view.

The guide rail 130 is composed of a support 131, a reciprocating guide member 132. The support 131 is respectively supported by the guide rails 120, and reciprocates in the X-axis direction along the guide rails 120. That is, the grooves and protrusions corresponding to the guide grooves and the guide protrusions provided in the guide rail 120 are installed in close contact with each other at the lower end of the support 131.

In addition, the reciprocating guide member 132 is coupled to the upper end of the support 131. A pair of the support 131 is connected, and the reciprocating guide member 132 is disposed to be spaced apart from the guide rail 120. That is, the guide rail 130 is installed in a state spaced apart from the upper surface of the base 110.

On the other hand, the transfer member 140 is installed in close contact with the reciprocating guide member 132, the transfer member 140 is located on the upper side of the reciprocating guide member 132. In addition, sliding guides 132 ′ and 140 ′ are provided on the contact surfaces of the transfer member 140 and the reciprocating guide member 132. The sliding guides 132 ′ and 140 ′ may be configured of the aforementioned guide protrusions and guide grooves. However, the sliding guides 132 ′ and 140 ′ may be provided as racks and pinions, or ball screws.

In addition, the transfer member 140 is sliding reciprocating relative to the reciprocating guide member 132. That is, the transfer member 140 is reciprocated in the Y-axis direction. Here, the reciprocating implementation configuration of the transfer member 140 can be implemented in a variety of ways. This will be referred to in the description of the second driving unit 160 to be described later.

In addition, the transfer member 140 is provided with a fastening portion 141. The fastening part 141 serves to temporarily fix the tray to which the resin is supplied or the empty tray. The fastening part 141 may change its position according to the size of the tray. However, the transfer member 140 may be replaced according to the size of the tray. In this case, a separate fixture 134 is provided between the transfer member 140 and the reciprocating guide member 132. The fixed body 134 has a lower end coupled to an upper surface of the reciprocating guide member 132, and an upper end coupled to the transfer member 140.

On the other hand, the first driving unit 150 is a means for the guide rail 130 to reciprocate in the X-axis direction along the guide rail 120. The first driving unit 150 may be provided as a hydraulic cylinder or a motor (M) that is operated hydraulically.

However, in the drawing shown, the first driving unit 150 is shown to be operated by the driving of the motor (M). The first driving unit 150 is composed of a motor (M), a ball screw (BS1), the transfer guide 151.

The motor M is coupled to the upper surface of the base 110 or the support plate 110 ′ described above. The motor M is located between the guide rails 120.

In addition, one end of the ball screw (BS1) is coupled to the rotating shaft of the motor (M). However, the rotation shaft of the motor M and one end of the ball screw BS1 may be provided with a reduction gear. In addition, the spur gear, the helical gear, the bevel gear, the worm gear, etc. may be configured in the form of various gears according to the position direction of the motor M. FIG.

 The other end of the ball screw (BS1) is supported by a separate rotation guide member 152 in the state inserted into the bearing.

In addition, a portion of the transfer guide part 151 is located in the ball screw BS1, and the transfer guide part 151 is coupled to the guide rail 130 described above. That is, the upper end of the transfer guide 151 is fixedly coupled to the reciprocating guide member 132 provided in the guide rail 130.

Therefore, when the motor M is rotated, the ball screw BS1 rotates itself, and the transfer guide part 151 is coupled to the reciprocating guide member 132 according to the rotation of the ball screw BS1. It reciprocates in the X-axis direction.

On the other hand, the second driving unit 160 serves to reciprocate the transfer member 140 in the Y-axis direction. The second driving unit 160 may be connected to a separate driving device, and may be provided inside the reciprocating guide member 132. The former is implemented by a motor or a cylinder, and the latter is implemented in the same form as the first driving unit 150 mentioned above. However, the second driving unit 160 may be composed of a rack and pinion, and the sliding guides 132 ′ and 140 ′ provided on the close contact surfaces of the transfer member 140 and the reciprocating guide member 132. Therefore, it guides the movement in the Y-axis direction.

6 to 9, the lifting and lowering unit 200 serves to raise or lower the pickup unit 300 to be described later. The lifting and lowering part 200 includes a support member 210, and the support member 210 is installed in a direction perpendicular to the base 110 described above. The lifting and lowering unit 200 may be fixedly coupled to the base 110, but a separate fixed support 220 is coupled to the lifting and lowering unit 200. That is, the fixing support 220 is coupled to the upper surface of the base 110 by a fastening member, and the lifting and lowering part 200 is coupled to a side of the fixed support 220 by a plurality of fastening members.

The lifting and lowering unit 200 may be configured as one member, but a plurality of members may be provided in a separated state. The lifting and lowering portions 200 are provided with ball screws BS2 in the vertical direction. In addition, the upper end of the ball screw (BS2) is installed so as to rotate by a bearing on the upper end of the lifting and lowering unit 200, the lower end is connected to the rotating shaft of a motor (not shown) which is a separate drive unit.

The ball screw BS2 is provided with a lifting and lowering guide member 230 at a portion thereof. The lifting and lowering guide member 230 is formed with a through hole, and a screw of the same thread as the ball screw BS2 is formed on the inner circumferential surface of the through hole. In addition, the pick-up part 300, which will be described later, is coupled to the lifting / lowering guide member 230.

The lifting and lowering unit 200 is composed of a motor and a ball screw (BS2), but may be implemented in various forms such as rack and pinion, wire, belt. That is, although the drawing shows the lifting and lowering of the pickup unit 300 by the rotation of the motor and the ball screw (BS2), the rack and pinion, wires, belts, etc. described above are widely used in the mechanical field. It is also possible to raise and lower the pickup unit 300.

On the other hand, the pickup unit 300 serves to raise or lower the tray, and is provided with a seating member 310 on which the lower surface of the tray is seated and is provided on the seating member 310 to pick up the tray. A plurality of fingers 330 are provided.

One end of the seating member 310 is raised or lowered in a vertical direction with respect to the above-mentioned lifting unit 200. That is, the seating member 310 is coupled to the lifting and lowering guide member 230 provided in the lifting and lowering part 200. The seating member 310 is provided in a shape such as "┌" when viewed from the side. In addition, the seating member 310 has a shape such as "⊂" and "c" when viewed in a plan view. However, these shapes are only shown as an example in the accompanying drawings and may be configured in various shapes.

In addition, the rotational force transmission member 330 is provided below the seating member 310. The rotational force transmitting member 330 is connected to a separate drive unit and a control unit, respectively. In addition, the rotation force transmission member 330 is coupled to the finger 330. As mentioned above, the finger 330 is a member that substantially fixes or releases the tray. That is, the finger 330 is fixedly coupled to the lower end of the rotational force transmitting member 330, the upper end is installed in the vertical direction of the seating member (310). In the figure, the number of the fingers 330 is illustrated as four, and the pair of fingers 330 is configured to face each other. In addition, the two fingers 330 are positioned to penetrate the upper surface of the seating member 310, and the other two fingers 330 are vertically installed in close contact with the front part of the seating member 310. The finger 330 presses or releases the side of the tray to substantially pick up the tray.

In addition, the seating member 310 is further provided with a buffer member 340 and the sensor 350. The buffer member 340 is installed on an upper surface of the seating member 310 and is provided at a position adjacent to the finger 330. The shock absorbing member 340 is to keep the lower surface of the tray in close contact with each other to suppress the occurrence of load and shaking due to the weight of the tray. In addition, the sensor 350 may be provided inside a central portion of the buffer member 340 or may be positioned on a portion of an upper surface of the seating member 310.

The sensor 350 serves to detect whether the tray is seated, and is connected to a separate control unit to control the rotational force transmitting member 330 and the finger 330.

Description of the state of use of the tray transfer system of the present invention configured as described above is as follows.

10 to 13, the tray transfer unit 100 is reciprocated in the X-axis and Y-axis directions, respectively, in the state installed in the base 110. The pickup 300 is reciprocated in the Z-axis (vertical) direction with respect to the base 110 and the support member 210.

First, the X-axis reciprocating motion of the tray transfer unit 100 is implemented according to the operation of the first driving unit 150. That is, it is implemented by a pair of guide rails 120 installed on the upper surface of the base 110.

The support rails 131 are mounted on the guide rails 120, and the support 131 is coupled to the reciprocating guide member 132. And, the guide rail 120 is installed between, the ball screw (BS1) coupled to the rotating shaft of the motor (M) is the transfer guide portion 151 is coupled to the reciprocating guide member 132 is located. Therefore, when power is applied to the motor M, the rotation shaft of the motor M rotates, and the ball screw BS1 rotates due to the rotation of the motor M. FIG. Here, the ball screw (BS1) is rotated by itself, the transfer guide 151 installed in the ball screw (BS1) is moved position. Then, the reciprocating guide member 132 coupled with the transfer guide unit 151 is reciprocated forward and backward.

Here, it may be connected to the reduction gear between the rotating shaft and the ball screw (BS1), it may be connected in the form of a variety of gears, such as bevel gears, helical gears, worm gears according to the installed direction of the motor (M).

However, the ball screw BS1 is coupled to the rotating shaft of the motor M as shown in the drawing.

The reciprocating motion is implemented according to the forward or reverse rotation of the motor M, and the reciprocating motion in the X-axis direction with respect to the base 110.

Due to the operation as described above, the tray is moved in the X-axis direction. The tray is to reciprocate to receive the resin from the resin supply unit, or to transfer the tray to which the resin is supplied to the pickup unit 300.

On the other hand, the Y-axis reciprocating motion of the tray is implemented according to the operation of the second drive unit (160). That is, it is implemented by the operation of the drive device provided in the reciprocating guide member 132 of the guide rail 130, or the operation of the drive device connected to the transfer member 140.

A ball screw (not shown) may be provided inside the reciprocating guide member 132 similarly to the first driving unit 150 described above. In addition, the reciprocating guide member 132 and the transfer member 140 may be connected by a rack and a pinion gear. In addition, the transfer member 140 may be provided in connection with a separate driving device. Due to any one of the conditions described above, the transfer member 140 is reciprocated in the Y-axis direction with respect to the reciprocating guide member 132. In this case, the reciprocating motion is performed along the sliding guides 132 ′ and 140 ′ provided between the transfer member 140 and the reciprocating guide member 132.

The reciprocating movement of the tray in the Y-axis direction according to the operation of the second driving unit 160 is implemented to transfer the tray to which the resin is supplied to the pickup unit 300 or to transfer a new tray to the resin supply unit. will be.

On the other hand, the pickup unit 300 described above is lifted or lowered in the state that the pickup unit 300, the tray is filled with the resin, that is, the resin is filled, or the empty tray is picked up.

The pickup unit 300 is implemented according to the operation of the lifting and lowering unit 200. That is, the support member 210 and the fixed support 220 is vertically fixed to the base 110. In addition, the support member 210 is provided with a ball screw (BS2) connected to the motor (not shown), the ball screw (BS2) is provided with a lifting and lowering guide member 230 in a portion thereof. In addition, since the lifting and lowering guide member 230 is connected to the pickup part 300, the pickup part 300 is connected to the ball screw BS2 according to the operation of the motor and the ball screw BS2. It reciprocates in the Z-axis (vertical) direction.

In addition, the pick-up unit 300 is provided with a rotational force transmission member 320 and a plurality of fingers 330, the fingers 330 to secure or release the tray in accordance with the operation of the rotational force transmission member 320. Done.

On the other hand, when the pickup 300 is moved up and down along the support member 210, the temporarily stopped position can be stopped at various positions as well as upper, middle, and lower. That is, the pickup unit 300 may be stopped at various heights, such as 2, 3, 4, 5 points.

For example, if it stops only at two points, it stops only at the top and bottom. In this case, the resin supply unit transfers the trays in which the resin supply is completed in the X-axis and Y-axis directions, and transfers the trays to the pickup unit 300 at the lowermost end. Thereafter, only the pickup part 300 may be elevated to the uppermost level in order to supply the tray to the resin molding part.

However, in addition to setting the stop position of the pickup unit 300 only at the top and bottom, the role of the pickup unit 300 can be realized in various ways.

That is, the pick-up unit 300 located at the top may be supplied with the empty tray at the position where the pick-up unit 300 is primarily lowered, and the empty tray may be supplied to the cleaning unit at the position where the second pick-up unit 300 is lowered. In the correct position, the tray may be supplied with the cleaning completed. In addition, the pickup unit 300 may serve to receive or transfer a separate tray according to the position at which the pickup unit 300 is stopped.

The position setting of the pickup unit 300 is a resin supply device, that is, a resin supply device such as a process of transporting the trays in the X-axis, Y-axis, and Z-axis directions from the process of supplying resin to the empty tray, and cleaning the tray, respectively. Due to the addition of each process in the various settings can be made.

In the tray transfer system of the present invention made as described above, the tray which is supplied with the resin or the resin which is supplied with the resin may be transferred in the X-axis, Y-axis, and Z-axis directions, respectively, thereby eliminating the congestion of the tray.

In addition, since the trays are transported in the X-axis and Y-axis directions and the other trays can be moved up and down on the Z-axis, a plurality of trays can be moved individually.

In addition, the Z axis may be temporarily stored at a specific height so that an additional process may be additionally performed, and at the same time, the X and Y axes may transfer other trays.

Claims (13)

A tray transfer unit for transferring the tray in the X-axis direction; A pickup unit for picking up the tray received from the tray transfer unit; And A lifting and lowering portion for lifting up and down the pick-up portion in a vertical direction with respect to the X-axis direction; The tray transfer unit, A base on which a guide rail is formed in the X-axis direction; A guide rail disposed on the guide rail and installed in a Y-axis direction; And And a transfer member installed on the guide rail and moved in the Y-axis direction. delete delete The method of claim 1, The guide rail, And first and second guide rails installed in parallel with each other on an upper surface of the base, The guide rail, And a support body connected to the first and second guide rails and spaced apart from the base. The method of claim 4, wherein The tray transfer unit, A first driving part which reciprocates the transfer member in the X-axis direction; And a second driving part configured to reciprocate the transfer member in the Y axis direction. The first driving unit, The tray transport system is installed on the upper surface of the base, and connected to the support. The method of claim 5, The first driving unit, motor, A ball screw connected to the rotating shaft of the motor and penetrating the support; The tray conveying system, characterized in that it further comprises; a conveyance guide portion provided in the support, for guiding the rotation of the ball screw. The method of claim 6, The tray transfer unit, A transfer member connected to the second driving part and installed between the guide rail and the transfer member; And Includes; fastening portion provided in the transfer member; The transfer member, The tray transfer system, characterized in that for selectively replacing the transfer member according to the type of tray. The method of claim 7, wherein The tray transport system, Further comprising a lifting means for lowering the base portion, The pickup unit, And the tray conveyance system is lifted or lowered by the lifting and lowering means in the state of picking up the tray loaded on the conveying member. The method of claim 8, The raising and lowering means section, Further comprising; a support member fixed to the vertical perpendicular to the base; And said pick-up part is raised or lowered relative to said support member. The method of claim 9, The pickup unit, Further comprising a plurality of fingers rotated in both directions due to the hinge, And the finger is picked up while pressing both sides of the tray. delete delete delete

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