KR100748599B1 - All style constant temperature chamber - Google Patents

Abstract

An integrated constant temperature chamber is provided to minimize a distance between a chamber and a test table and maintain a constant surface temperature of a panel by forming a chamber in a "Korean alphabet giyok" shape and allowing the panel to be transferred inside the chamber by including a panel transfer robot inside the chamber. A housing(10) forms an exterior of a constant temperature chamber, includes an opening at an upper portion thereof, and has a 'Korean alphabet giyok' shape. A panel transfer robot(20) is mounted on the housing to load and unload a panel inside the constant temperature chamber. An air jet is mounted on the opening to prevent heat inflow and heat release of the inside of the constant temperature chamber. A camera(40) is mounted to the panel transfer robot to capture the inside of the constant temperature chamber and allow real-time examination from the outside of the constant temperature chamber. A test table is mounted at a lower end portion of a front side outside the housing, and tests the panel by loading or unloading the panel transferred by the panel transfer robot.

Description

All-in-one constant temperature chamber

BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the external shape of the integrated constant temperature chamber (ACC) by this invention.

2 is a view showing a cross-sectional structure inside the integral thermostatic chamber.

3 is a view showing a mounting structure of an integrated constant temperature chamber (ACC) and an inspection table.

Figure 4 is a picture installed with an internal surveillance camera.

5A and 5B show the flow of hot air inside an integrated constant temperature chamber (ACC).

6 is a view showing a position where the air jet is mounted to the integrated thermostatic chamber.

Figure 7 is a photograph showing the structure of the integrated constant temperature chamber and the inspection table.

8 is a photograph showing that the air jet is mounted.

9 is a view showing a process sequence of a panel transport robot.

Figure 10a is a view showing the structure of the panel transfer equipment (PTD) according to the present invention.

10B and 10C show the “A” and “B” portions of FIG. 10A, respectively.

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<Explanation of symbols for main parts of the drawings>

10 housing 12 opening

20: panel transfer robot 30: air jet

40: camera 50: inspection table

The present invention relates to an LCD panel inspection device, in particular an integrated thermostatic chamber (ACC) comprising an orthogonal robot for panel inspection and a panel arrangement of one row, two columns, three rows and more after panel inspection or during panel transport. A panel conveying apparatus (PTD) configured to be able to automatically convey a panel on a surface, that is, to hold and change a hold clamp of the panel automatically when the panel arrangement is changed.

In the conventional general temperature chamber, the door is configured to maintain a constant temperature in the open or unopened state, but this method is a structure that is difficult to maintain a constant temperature until the inspection of the panel.

In general, during the visual inspection of a panel that has completed liquid crystal (liquid crystal) injection on the LCD panel manufacturing process, the entire panel surface must be maintained at a specific temperature to obtain the efficiency of the inspection. In this case, the surface temperature of the panel may change during panel transport, which may cause a problem in temperature uniformity and reproducibility.

Conventional equipment has a structure that can not be applied in the case of manual operation or multi-row when changing the panel, and even if possible, an additional operation sequence has a problem that it is difficult to proceed with the continuous installation.

In addition, in the related art, a method of manually removing some sampled panels per lot and performing direct visual inspection by an operator has been applied.

In the case of the conventional inspection equipment, the temperature of the panel to be inspected must be maintained uniformly, and the panel maintained at the uniformity is configured to be transported to the outside, that is, to be inspected as soon as possible. However, this method has a method of speeding up the feeding speed of the panel in order to transfer it to the inspection table in a short time, which has a big problem that the temperature uniformity is destroyed during the panel feeding by the external environment, that is, the temperature is lowered. .

In addition, another method for reducing the temperature drop of the panel surface is a problem that the work yield is reduced when the transfer at a relatively low speed.

In the panel conveying method, it is divided into cassettes having a multi-row structure. Panels stacked in three rows and two rows of cassettes have a small size of 15 inches to 32 inches. Having is the common way currently used in LCD lines.

The conventional method has a method of adsorbing and moving the panel surface by vacuum using a small panel transfer or robot hand, but this is a method in which a clamp directly touches the panel surface, and a conventional panel transfer device (PTD) Existing application facilities have a method of transporting panels by a carrier method during panel transport, which is applied to heat insulation (1 row) or 2 rows, but is limited to small size.

In order to solve the above problems, there is an important factor in the development of an integrated chamber, which includes an orthogonal robot having a short panel transfer speed and a minimum transfer time until reaching the inspection table.

The technical problem to be achieved by the present invention is to inspect the LCD process equipment and other research equipment for the purpose of the panel, to minimize the temperature change in accordance with the inspection characteristics of the panel sensitive to the influence of temperature during the panel inspection The panel transfer robot is installed in the chamber to meet the purpose, and the integrated next-generation chamber (ACC) equipped with a camera for checking the inside of the chamber and an air jet and the next generation large size for the transfer of panels after panel inspection It is an object of the present invention to provide an automatic clamping panel transfer device (PTD) that effectively responds to panel inspection of size.

An integrated constant temperature chamber (ACC) according to the present invention for solving the above technical problem comprises a housing having an outer portion, an opening in the upper portion, the "a" structure; A panel transfer robot mounted on the housing to load and unload the panel in the thermostatic chamber; An air jet mounted on the opening and preventing heat inflow and heat discharge in the thermostatic chamber; A camera mounted to the panel transfer robot to enable real-time recording and real-time confirmation of the inside of the temperature chamber outside the temperature chamber; And an inspection table mounted on the outer front lower end of the housing and inspecting the panel by loading and unloading the panel transported by the panel transport robot.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Figure 1 shows the external shape of the integrated constant temperature chamber (ACC) according to the present invention, Figure 2 shows a cross-sectional structure inside the integrated constant temperature chamber (ACC), constitutes the outside of the constant temperature chamber, and includes an opening at the top, Housing 10 having “a” structure, panel transport robot 20 mounted on the housing, air jet 30 mounted on the opening of the housing, camera 40 mounted on the panel transport robot, and the housing outer front It consists of an inspection table 50 mounted on the lower end.

Referring to Figures 1 and 2 will be described the structure and operation of the integrated constant temperature chamber (ACC) according to the present invention.

The panel transfer robot 20 is an orthogonal robot, which is mounted on the upper portion inside the housing 10 for discharging the panel on the constant temperature chamber, and an inspection table 50 for inspection is mounted on the lower portion of the front surface of the housing 10. This is an orthogonal robot method deviating from the method of the articulated (multi-axis) robot that is conventionally applied at the time of panel transfer, and can be implemented by covering almost all processes related to panel transfer inside the thermostatic chamber.

The panel transport robot 20 is included in the housing 10 to allow the panel to be transported in the constant temperature chamber so that hot air is injected from the chamber so that the surface temperature of the panel is kept constant. Uniformity can be maintained.

In addition, in the integrated constant temperature chamber (ACC) according to the present invention, since the panel for inspection is exposed to the outside only when the inspection table 50 is inserted for inspection, an external environment (air contact) at different temperatures generated when the robot is transferred. And by minimizing the contact of the robot hand) panel temperature uniformity and thereby the objectivity of the inspection process can be increased.

In the case of the integrated constant temperature chamber (ACC) according to the present invention, it has the technology of the constant temperature chamber applied to the same process of the current line, and can be inspected by improving the uniformity of the existing equipment, that is, maintaining the uniformity of the temperature as much as possible.

In addition, for the temperature uniformity inside the chamber, the direction of the hot air flow is adopted as a downflow method in which the air flows from the top to the bottom, and in order to preserve the temperature uniformity inside the chamber, the front front / left / Heating air is supplied from the hot air port (60 in FIG. 5B) on the right side and minimizes the temperature compensation of the chamber itself according to the two-stage (upper / lower) arrangement of the housing 10 of the heater (70 in FIG. 5B). It consists of a chamber.

In addition, the upper part of the chamber has an opening 12 due to the transfer of the orthogonal robot, which is the panel transport robot 20, and an air jet on the upper part of the opening 12 to eliminate the problem of external heat inflow or internal heat discharge. , 30) are installed.

Since the internal and external configuration of the constant temperature chamber is made of stainless (SUS) material, there is a practical limit to visually check the inside of the chamber. For example, there is a problem that it is difficult to determine the slot (slot) position of the panel existing in the chamber or the CST input process / presence, etc., in the present invention, the panel transfer robot 20 is configured to monitor the chamber 40 inside the chamber It is configured to enable real-time confirmation of shooting and partial elements that need confirmation.

The “a” structure in which the test table 50 is positioned at the front lower end of the constant temperature chamber in which the housing 10 and the test table 50 are connected can minimize the distance between the constant temperature chamber and the test table 50.

Cassettes with a specific temperature from the incubation chamber of the previous stage are transferred to the integrated constant temperature chamber (ACC) by the in-line conveyor, and the transferred cassettes are transferred to the panel located inside the chamber for panel inspection. The robot unloads the panel. The panel transfer has a robot hand structure in which not only one row (heat insulation) but also two rows and three rows can be removed, and the resolution of the robot movement is accurate to 0.5mm or less.

3 shows the mounting structure of the integrated constant temperature chamber (ACC) and the inspection table.

4 is a picture showing the internal surveillance camera, the integrated constant temperature chamber (ACC) by installing the camera 40 to check the interior of the chamber inside the panel transfer robot, the operator enters into the chamber or a simple viewing window ( With a structure improved by a view port), by attaching the camera 40 to the panel transfer robot 20 has a feature that can be confirmed in real time the panel and the panel transfer robot hand.

That is, by attaching a camera 40 capable of identifying important parts to the panel transport robot so that the inside of the chamber can be visually checked, the panel slot position in the cassette and the cassette clamp inside the chamber are located inside the constant temperature chamber through a screen outside the chamber. It is possible to check the status of other driving devices such as cassette clamps, and to control the heat uniformity in the chamber by applying the air jet 30 to the upper part of the chamber to remove heat inflow and heat discharge inside the chamber. I can keep it.

Figures 5a and 5b shows the flow of hot air inside the integrated constant temperature chamber (ACC) according to the present invention, the front / rear / left / top of the integrated constant temperature chamber for temperature uniformity inside the chamber Hot air flow occurs in the rain / light and is designed to secure the air flow path from the top to the bottom.

In order to complement the integrated constant temperature chamber (ACC) top opening 12 generated by configuring the panel transfer robot inside the chamber, an air jet is mounted above the opening.

FIG. 6 shows a position where the air jet is mounted in the integrated constant temperature chamber (ACC), and FIG. 8 is a photograph showing that the air jet is mounted.

When the air jet 30 is mounted above the opening 12, the temperature inside the thermostatic chamber may be kept constant by minimizing the inflow of the outside cold air into the facility and the outflow of the heating air in the chamber.

In the case of all the constant temperature chambers, there is no opening to maintain the temperature in the chamber, but the opening 12 is generated due to the characteristics of the integrated constant temperature chamber (ACC) as in the present invention.

9 shows the process sequence of the panel transfer robot inside the integrated constant temperature chamber (ACC).

The panel transfer robot 20, which has evicted the panel, is transferred to the upper side of the front inspection side 50 of the integrated constant temperature chamber (ACC) and stands by as an input state for inspecting the panel. 50) the panel is supplied. This proceeds in a manner to maintain the panel temperature by preventing the panel temperature drop required during the uniformity and inspection of the panel.

It is effective in increasing the efficiency of inspection by blocking the error during inspection by the operator by keeping the supply at a constant temperature of the panel.

FIG. 10A illustrates the structure of the panel transfer equipment (PTD) according to the present invention. FIG. 10B illustrates a portion “A” of FIG. 10A, which illustrates a panel clamping method of 32 inches or more, and FIG. 10C illustrates “B” of FIG. 10A. The part shows a panel clamping method of 32 inches or less.

The panel is moved to the inspection table for inspection, and the finished panel is transferred by a panel transfer device (PTD) located in the inspection table.

The panel transfer device (PTD) device can be automatically adjusted without manual operation during the feeding of the heat insulation (1 row) and 2 rows and 3 rows panels to transfer the panels. In addition, the LCD panel sizes ranging from 15 inch to 57 inch to large size panels, and 1 row / 2 row / 3 row type panels can be supplied without contacting the panel surface without additional device and operator's operation. Only the outer guide surface is clamped to enable panel transfer using the automatic transfer method.

By applying the panel outer guide clamping method instead of the clamping method by surface adsorption, surface scratches and external damage can be minimized, and additional problems that can occur due to the vacuum method (supply pressure / set point / panel contact part) It has an efficient structure that can solve the problem at once and improve the efficient operation of the equipment and improve the process yield.

As described above, the present invention has been described with reference to the embodiments illustrated in the drawings, which are merely exemplary, and it should be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. will be. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

The integrated constant temperature chamber (ACC) according to the present invention has an integral structure of the "a" structure to minimize the distance between the chamber and the inspection table, and also includes a panel transfer robot in the chamber so that the panel can be transferred from the inside. The surface temperature of the panel can be kept constant.

In addition, the integrated constant temperature chamber (ACC) according to the present invention can visually check the important parts of the chamber by attaching the camera to the panel transfer robot, and by applying an air jet to the upper part of the chamber to remove heat inflow and heat emission inside the chamber. There is an advantage to this.

Claims (5)

In the constant temperature chamber for panel inspection, A housing constituting the thermostatic chamber and including an opening at an upper portion thereof, the housing having an “a” structure; A panel transfer robot mounted on the housing to load and unload the panel in the thermostatic chamber; An air jet mounted on the opening and preventing heat inflow and heat discharge in the thermostatic chamber; A camera mounted to the panel transfer robot to enable real-time recording and real-time confirmation of the inside of the temperature chamber outside the temperature chamber; And And an inspection table mounted on the outer front lower end of the housing and inspecting the panel by loading and unloading the panel transported by the panel transport robot. The method of claim 1, A heater uniformly supplying heat to an upper portion and a lower portion of the constant temperature chamber, and mounted to the upper and lower portions of the housing in two stages; And And a hot air port for supplying heating air for preserving the temperature uniformity inside the thermostatic chamber and mounted on the front and front left and right sides of the housing. The method of claim 1, wherein the panel transfer robot An integrated thermostatic chamber, characterized by an orthogonal robot. The method of claim 1, wherein the panel transfer robot Integral constant temperature chamber, characterized in that the panel is exposed to the outside only when the panel is put into the inspection. The method of claim 2, wherein the heating air An integrated constant temperature chamber, characterized in that flows in the form of a downflow (airflow) from the top to the bottom through the air flow (air flow).

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