KR100735870B1 - Sealing structure of pipe supplies monomer in apparatus for coating with parylene - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paraline coating, and in particular, a paraline which completely blocks leakage of a monomer supplied in a simple configuration by being pressurized and screwed by a ring nut while the end portion of the monomer supply pipe is inserted into the flange and the connecting body. It relates to a closed structure of the parylene monomer supply pipe of the coating apparatus.

The present invention comprises a vaporization unit for vaporizing the parine dimer powder to produce a gaseous dimer; A pyrolysis unit configured to pyrolyze the gaseous dimer by a heat transfer coil installed in the tube to generate a parylene monomer; And a deposition unit for supplying the parylene monomer so as to bypass the baffle provided vertically on the inner wall of the deposition chamber in a polymer state on a base material disposed on a jig in the deposition chamber to form a paraline polymer film. It is provided on one side of the pyrolysis unit, the end of the monomer supply pipe connected to the supply pipe of the deposition unit is inserted into the step of the water container and the connector, the water container is provided with a stepped part cut along the inner peripheral surface of the pipe end; The end of the body is inclined to extend to the outside and then extend further in the longitudinal direction, the flange is formed with a male thread along the outer peripheral surface of the extended end, the connecting member is in the form of a ring in close contact with the inner surface of the flange of the water container Bent vertically out of the flange along the end perimeter; A female thread coupled to the male thread of the flange is formed along the inner circumferential surface of one end portion, and a ring nut is provided to protrude some vertically along the inner circumference of the other end, and the vertical protrusion of the ring nut presses the vertical bent portion of the connector. In close contact with the state; O-rings are interposed between the water container, the connecting body, and the supply pipe / branch.

Closed structure, supply pipe, paraline, coating, monomer, water receptor

Description

Sealing structure of paraline monomer supply pipe of paraline coating equipment {SEALING STRUCTURE OF PIPE SUPPLIES MONOMER IN APPARATUS FOR COATINGUS PARYLENE}

1 is a front sectional view showing a pretreatment unit in a parallel coating apparatus according to the present invention,

2 is a side cross-sectional view showing a preprocessor of FIG. 1;

3 is a cross-sectional view showing a preprocessor of FIG.

4 is a front sectional view showing a vaporization unit, a pyrolysis unit, and a deposition unit in the paraline coating apparatus according to the present invention;

5 is a side cross-sectional view showing a vaporization unit and the like of FIG.

6 is a cross-sectional view showing a vaporization unit and the like of FIG. 4,

7 is a partially enlarged cross-sectional view showing a closed structure of the paraline monomer supply pipe of the paraline coating apparatus according to the present invention;

FIG. 8 is a partially enlarged cross-sectional view illustrating a closed structure of a paraline monomer supply pipe of a conventional paraline coating apparatus.

<Explanation of symbols for the main parts of the drawings>

10: vacuum chamber 11: hinge

12: Door 13: Guide rail

15: discharge pipe 20: negative electrode

30: positive electrode 40: base material storage plate

51: gas injection port 52: injection nozzle

60: vacuum pump 100: vaporizer

200: pyrolysis unit 210: heat transfer coil

220: heat insulating material 230: supply pipe

300: deposition unit 310: deposition chamber

310: baffle 311a: through hole

312 supply pipe 312 'branch pipe

313: cold trap 314: vacuum pump

410: water container 411: body

411a: step 412: flange

412a: male thread 420: connector

421: vertical bending portion 430: ring nut

431: female thread 432: vertical protrusion

440: O-ring

The present invention relates to a paraline coating, and more particularly, to a closed structure of the paraline monomer supply pipe of the paraline coating apparatus for supplying while being easy to fasten and preventing the leakage of monomer in a simple configuration.

Plastics are widely used in identification cards (such as national ID cards, driver's licenses, passports, corporate ID cards / passports, etc.) or credit cards in keeping with the information age.

ID cards or credit cards made of plastics cause a lot of damage during use. ID cards can be forged for criminal purposes because printed materials on the surface are easily erased by chemicals (eg organic solvents or acids). In the case of a credit card, damage to the magnetic strip on the surface of the credit card makes it impossible to use the credit card.

Accordingly, a technique for preventing damage to credit cards and forgery of identification cards by coating polymer materials having high chemical corrosion resistance and thermal stability is proposed, but in the case of credit cards or ID cards completed by the currently proposed technologies, The uneven coating of the vulnerable part occurs.

On the other hand, parylene is composed of a group of polymers capable of vapor deposition and its name is given according to the substituent. It can be uniformly coated on any base material regardless of its shape, and especially in deep holes or cracks. There is a feature that can be coated.

In addition, since it is transparent and chemically very stable and does not dissolve easily in any existing chemical solvents, the paraline coating has been widely used in medical equipment and electronic packaging.

However, conventionally, as shown in FIG. 8, when the monomer supply pipe 2 of the pyrolysis unit 1 is connected to the supply pipe 4 of the deposition chamber 3, the end of the supply pipe 4 is extended to be inclined outwardly. The monomer supply pipe (2) was formed to be inclined so as to be accommodated in the expansion portion, and then joined by sandwiching the O-ring (5).

However, the coupling structure is not horizontally made because the two pipes (2, 4) simply by inserting the coupling, the O-ring (5) and the pipe (2, 4) when the position of the two pipes are distorted due to external impact during operation The gap between the layers may not be maintained, resulting in a coating failure.

In addition, since the conventional paraline coating film is directly deposited on the surface of the base material without a separate pretreatment process, the adhesion with the base material is somewhat weak, so that deformation occurs such as peeling off or being easily worn by a strong impact.

The present invention has been made to solve the problems of the prior art as described above, because the sealing force is excellent when the monomer supply pipe is connected to ensure a vacuum state, the reliability of the coating product is secured, and the base material surface is pretreated to bond with the polymer film. It is an object of the present invention to provide a closed structure of the paraline monomer supply pipe of the paraline coating apparatus for improving the properties.

In order to achieve the above object, the paraline monomer supply pipe sealing structure of the paraline coating apparatus of the present invention comprises: a vaporization portion for vaporizing the parine dimer powder to generate gaseous dimers;

A pyrolysis unit configured to pyrolyze the gaseous dimer by a heat transfer coil installed in the tube to generate a parylene monomer; And

A vapor deposition unit forming a paraline polymer film by supplying the parylene monomer in a polymer state on a base material disposed on a jig in the deposition chamber while supplying bypass to a baffle provided perpendicularly to an inner wall of the deposition chamber;

As provided on one side of the pyrolysis unit, the end of the monomer supply pipe connected to the supply pipe of the deposition unit is inserted into the step of the water container and the connector,

The pipe acceptor is a body having a stepped portion cut along the inner circumferential surface of the tube and a flange extending to the outside after the end of the body is inclined and further extended in the longitudinal direction, and a male thread is formed along the extended end outer circumferential surface. Made up of

The connecting body is in the form of a ring in close contact with the inner surface of the flange of the water container and is bent vertically out of the flange along the outer periphery of the end;

A female thread coupled to the male thread of the flange is formed along the inner circumferential surface of one end portion, and a ring nut is provided to protrude some vertically along the inner circumference of the other end, and the vertical protrusion of the ring nut presses the vertical bent portion of the connector. In close contact with the state;

O-ring is characterized in that the part in contact with both the water container, the connecting body and the supply pipe / branch pipe.

And it is characterized in that it comprises a pre-treatment for generating a plasma in the state in which the base material is placed on the jig in the vacuum chamber to clean and modify the surface of the base material to improve the adhesion to the paraline polymer film.

In addition, the preprocessing unit,

A negative electrode and a positive electrode which are installed alternately in a vertical chamber at intervals in a vacuum chamber provided with a door and to which high frequency is applied;

A base material storage plate installed between the negative electrode and the positive electrode and having a number of slits formed therein to receive the base material;

A gas tank supplying a reaction gas through a gas injection port extending into the vacuum chamber; And

A vacuum pump controlling a pressure in the vacuum chamber through a discharge pipe provided at one side wall of the vacuum chamber;

Characterized in that consists of.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a front cross-sectional view showing a pretreatment unit in a paraline coating apparatus according to the present invention, FIG. 2 is a side cross-sectional view showing a pretreatment unit of FIG. 1, and FIG. 3 is a cross-sectional view showing a pretreatment unit of FIG. 1.

As shown, the plasma generating apparatus for performing the pre-treatment process in the parallel coating apparatus of the present invention is a vacuum chamber 10, a negative electrode 20, a positive electrode 30, a gas tank (outlet) (not shown), the base material storage The plate 40 and the vacuum pump 60 and the like.

The vacuum chamber 10 is provided in the upper front and is provided with a door 12 that is opened and closed while being rotated by the hinge 11, the negative electrode 20 and the positive electrode 30 to which a high frequency is applied inside the vacuum chamber 10 ) Alternately installed up and down at intervals.

The negative electrode 20 extends to the distribution electrode 22 in which the main electrode 21 extends from the bottom of one side of the vacuum chamber 10 to the vicinity of the ceiling, and the distribution electrode 22 is a vacuum chamber 10 at regular intervals. Further extends horizontally to the other side wall adjacent to the wall.

The positive electrode 30 is formed in a U-shape between two horizontal ends between the horizontally extending negative electrodes 20, and both ends are guided back and forth along the guide rails 13 installed on both side walls of the vacuum chamber 10. Detachable while sliding.

The base material storage plate 40 is installed between the negative electrode 20 and the positive electrode 30, and a large number of slits are formed vertically at a fine interval in the frame to accommodate the base material in the form of a card. For example, both support members 41 are inserted into and fixed to the positive electrode 30.

A gas tank (outlet) (not shown) supplies a reaction gas to be plasmaized in the vacuum chamber 10, for communication with the gas injection port 51, and the gas injection port 51 is a negative electrode to promote plasma formation. A spray nozzle 52 provided at the end extending horizontally between the electrode 20 and the positive electrode 30 is positioned at the center of the vacuum chamber 10.

The vacuum pump 60 is in communication with the discharge pipe 15 provided on one side wall of the vacuum chamber 10 to adjust the pressure in the vacuum chamber 10, the discharge pipe 15 performs the pressure control quickly and uniformly In order to be symmetrical to the central portion of the one side wall of the vacuum chamber 10 and a plurality of peripheral portions (three in the embodiment including the central portion in the drawing) are formed.

4 is a front sectional view showing a vaporization unit, a pyrolysis unit, and a vapor deposition unit in a paraline coating apparatus according to the present invention, FIG. 5 is a side sectional view showing a vaporization unit, etc. of FIG. 4, and FIG. 6 is a vaporization unit, etc. of FIG. 4. It is a cross-sectional view showing.

When the plasma is applied to the substrate and cleaning and surface modification are completed as described above, the substrate is disposed at intervals on a jig (not shown) installed so as to divide and store layers in the vacuum chamber 310 of the deposition unit 300.

Then, after the pretreatment process and the base material arrangement is finished, the process of vaporizing the powdered paraline dimer (Dimer) in the vaporization portion 100 of the coating device (1).

In this process, the paraline dimer powder is heated to a temperature of about 150 ° C. under vacuum so that the paraline is immediately sublimed without melting.

Next, the pyrolysed vaporized dimer is subjected to a pyrolysis process from the pyrolysis unit 200 to a paraline monomer.

In this process, the vaporized paraline dimer is passed through the tube, but heat is applied at about 700 ° C. by the heat transfer coil 210 to produce a paraline monomer. This is to prevent the deterioration of various properties including the optical properties of the polymer film.

At this time, the outer circumferential surface of the tube in which the heat transfer coil 210 is installed is preferably wrapped with a heat insulating material 220 to increase the thermal efficiency.

Finally, the generated paraline monomer is subjected to a process of depositing (synthesizing) the paraline polymer film on the base material surface in the deposition unit 300.

In this process, the pyrolyzed pyrolyl monomer is injected into the deposition chamber 310. At this time, after passing through a baffle 311 provided perpendicular to the inner wall of the deposition chamber 310 for uniform deposition, it is bypassed. To be supplied.

In addition, the supply pipe 230 communicating with the pyrolysis unit 200 may include a supply pipe 312 at one central portion of the deposition chamber 310 and a plurality of branch pipes connected to the peripheral portion so as to be symmetrical to the central portion thereof (up and down in the drawing) Branched into one 312 'to achieve even injection of the parine monomer.

7 is a partially enlarged cross-sectional view illustrating a closed structure of a paraline monomer supply pipe of a paraline coating apparatus according to the present invention.

As shown, the parallel structure of the supply pipe of the paraline monomer of the present invention is provided on one side of the pyrolysis unit 200, the water supply receptor for the monomer supply pipe 230 is connected to the supply pipe 312 of the deposition unit 300 is coupled 410, a connecting body 420, a ring nut 430, and an o-ring 440.

The water container 410 is composed of a body 411 and a flange 412, the body 411 is a short tube shape is cut along the end inner circumferential surface to form a step 411a and the monomer supply pipe to the step 411a The end of 230 is inserted.

In addition, the flange 412 extends outward while the end of the body 411 is inclined and further extends in the longitudinal direction, and a male screw thread 412a is formed along the extended outer circumferential surface thereof.

The connecting body 420 has a ring shape corresponding to the inner surface of the flange 412 of the water container 410, and has a vertical bending part 421 vertically bent outward of the flange 412 along the outer periphery of the end portion and has a monomer. The end of the supply pipe 230 is inserted.

The ring nut 430 has a female thread 431 coupled to the male thread 412a of the flange 412 along the inner peripheral surface of one side end portion, and a vertical protrusion 432 partially protruding vertically along the inner circumferential edge of the other end portion. Is formed, the vertical protrusion 432 is in close contact with the pressing state of the vertical bending portion 421 of the connecting body 420.

The o-ring 440 is interposed between the water container 410, the connector 420, and the monomer supply pipe 230 in contact with each other for a perfect sealing.

Finally, when the paraline monomer is cooled by the cold trap 313 and the vacuum pump 314 communicating with the lower portion of the deposition chamber 310, the paraline monomer is changed into a polymer state, and the polymer state The paraline polymer film is uniformly coated with a thickness of 5 ~ 10㎛ on the base material surface.

The paraline monomer supply pipe sealing structure of the paraline coating apparatus of the present invention configured as described above functions as follows.

First, the monomer supply pipe 230 is inserted into the water container 410 and the connecting body 420 in the state where the O-ring 440 is interposed, and then the connecting body 420 to the vertical protrusion 432 of the ring nut 430. While pressing the vertical bending portion 421 of the female thread 431 is coupled to the male thread 412a.

Therefore, since the O-ring 440 is connected between the water container 410, the connecting member 420, and the supply pipe 230, the sealing force of the monomer is excellent, and in particular, the sealing force is pressurized by the ring nut 430. This doubles and the tightening also becomes simpler.

On the other hand, as a pre-treatment process for coating the parent material to the base material is placed in the slit of the base material storage plate 40 installed in the vacuum chamber 10 of the pretreatment unit, the vacuum pump 60 is a vacuum chamber through the discharge pipe 15 The high frequency is applied to the negative electrode 20 while the gas tank supplies the reaction gas into the vacuum chamber 10 while regulating the pressure in 10.

Then, the reaction gas is diffused into the internal space of the vacuum chamber 10 through the gas injection port 51 communicating with the gas tank to promote plasma formation, thereby cleaning and modifying the surface of the base material, thereby improving adhesion, wear resistance, and chemical resistance with the polymer membrane. To improve the back.

The parallel structure of the paraline monomer supply pipe of the paraline coating apparatus of the present invention configured as described above is simple in construction, convenient to fasten, and excellent in sealing force, thereby ensuring a vacuum state, as well as ensuring the reliability of the coated product and coating the baseline on the base material. In the pretreatment process, plasma is applied to the base material surface conveniently and uniformly, thereby cleaning and modifying the base material surface, thereby exerting a useful effect of remarkably improving the adhesion and abrasion resistance with the paraline polymer film in the future.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various changes or modifications can be made within the spirit and scope of the present invention, and such modifications or variations are attached thereto. Belong to the claims.

Claims (3)

A vaporization unit for vaporizing the parylene dimer powder to generate a gaseous dimer; A pyrolysis unit configured to pyrolyze the gaseous dimer by a heat transfer coil installed in the tube to generate a parylene monomer; And A vapor deposition unit forming a paraline polymer film by supplying the parylene monomer in a polymer state on a base material disposed on a jig in the deposition chamber while supplying bypass to a baffle provided perpendicularly to an inner wall of the deposition chamber; As provided on one side of the pyrolysis unit, the end of the monomer supply pipe connected to the supply pipe of the deposition unit is inserted into the step of the water container and the connector, The pipe acceptor is a body having a stepped portion cut along the inner circumferential surface of the tube and a flange extending to the outside after the end of the body is inclined and further extended in the longitudinal direction, and a male thread is formed along the extended end outer circumferential surface. Made up of The connecting body is in the form of a ring in close contact with the inner surface of the flange of the water container and is bent vertically out of the flange along the outer periphery of the end; A female thread coupled to the male thread of the flange is formed along the inner circumferential surface of one end portion, and a ring nut is provided to protrude some vertically along the inner circumference of the other end, and the vertical protrusion of the ring nut presses the vertical bent portion of the connector. In close contact with the state; Supply pipe sealing structure of the parylene monomers, characterized in that the O-ring is interposed in the contact portion, both the pipe acceptor, the connector and the supply pipe / branch pipe. delete The method of claim 1, It includes a pre-treatment for generating a plasma in a state in which the base material is placed on the jig in the vacuum chamber to clean and modify the surface of the base material to improve the adhesion to the paraline polymer film, The preprocessing unit, A negative electrode and a positive electrode which are installed alternately in a vertical chamber at intervals in a vacuum chamber provided with a door and to which high frequency is applied; A base material storage plate installed between the negative electrode and the positive electrode and having a number of slits formed therein to receive the base material; A gas tank supplying a reaction gas through a gas injection port extending into the vacuum chamber; And A vacuum pump controlling a pressure in the vacuum chamber through a discharge pipe provided at one side wall of the vacuum chamber; The paraline monomer supply pipe sealing structure of the paraline coating apparatus, characterized in that consisting of.

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