KR100730039B1 - A manufacturing method of pellicle frame - Google Patents

Abstract

A method for manufacturing a pellicle frame is provided to restrain the waste of the material for the pellicle frame and to realize simply mass-production. A basic structure of a frame is formed by preparing and drying an injection object material using an injector and an injection mold. A defect inspecting process is performed on the injection object material. A mounting hole and a vent hole are formed on the resultant structure. An acute portion is removed from an edge of the resultant structure. A polishing process is performed on the resultant structure in order to improve a surface flatness and to remove particles. A cleaning process is performed thereon. Then, a frame coating process is performed on the resultant structure by using a jig.

Description

{A manufacturing method of pellicle frame}

1 is a perspective view of a pellicle frame to which the present invention relates

2 is a manufacturing process diagram of the present invention

<Description of Signs of Main Parts in Drawings>

10: pellicle frame

The present invention relates to a method for manufacturing a pellicle frame for manufacturing a pellicle frame for supporting a pellicle film in a pellicle used for manufacturing a semiconductor integrated circuit, and more particularly, an injection molding process of injection molding a frame through a synthetic resin; The machining process and the surface treatment process make it easier and cheaper to manufacture a pellicle frame.

In general, in the manufacture of integrated circuits such as ICs and LSIs, photomasks and reticles used to form circuit patterns on semiconductor substrates have foreign substances such as dust attached on the exposed patterns or foreign substances on the photomasks and reticles. The pellicle is attached and exposed to prevent the shadow of foreign matter from being projected upon exposure.

The pellicle is composed of a pellicle film made of nitro cellulose or the like and a pellicle frame on which the pellicle film is placed. The pellicle is superimposed on them so as to cover the photomask or the reticle.

When the pellicle is used, foreign matters can be prevented from adhering to the photomask or reticle, and even if the foreign matters are attached to the pellicle film, the projection image of the foreign material projected at the time of exposure is not formed on the pattern, so-called fuzzy. Since it becomes a phase, the bad influence by a foreign material can be excluded.

In the related art, the pellicle frame is typically manufactured through an aluminum disc material, and a method of manufacturing a pellicle frame using an aluminum disc material includes; The first step of cutting the 4-5mm thick aluminum plate material into the form of a workpiece, that is, a square, to form a processed plate material, and an air adsorption fixing jig which is fixed to the lathe chuck or milling die. After attaching, the 2nd process of making a reference surface by cutting 1 ~ 1.5mm on one surface in a firm fixed state without bending, and a plate-type air adsorption fixing die which fixes the processed plate material on one surface to another lathe and milling After attaching the machined surface, the 3rd process of obtaining 1 ~ 1.5mm of the non-machined side and cutting the finished plate of 2 ~ 3mm thickness, and 2nd machining of CNC machine tool It has been proposed to include a fourth step of ultrafine cutting.

However, in the conventional method for manufacturing a pellicle frame, the aluminum plate having a suitable thickness is cut to a suitable size, and then polished on both sides, and subsequently processed through a machine center or a dedicated machine, so that the product has a small number of various types due to the characteristics of the product. When there was an order, there was a disadvantage that frequent replacement of the jig was required, and there was a problem that the quality of the product was not stabilized due to a lot of replacement time, and a considerable degree of skill required.

Therefore, a new method for manufacturing a pellicle frame that can improve the productivity by improving the manufacturing method of the pellicle frame and significantly reduce the manufacturing cost has been proposed (Patent No. 419742). The manufacturing method includes a fixing step of firmly fixing the aluminum raw material through the jig; An inner and outer cutting step of cutting the upper and outer parts of the aluminum raw material fixed in the fixing step to form a frame material in a circular or square ring shape having a predetermined thickness; A fine machining step of finely machining the surface of the frame material in the form of a circular or square ring formed on the upper portion of the aluminum raw material through the inner and outer cutting steps; After the fine processing step is characterized in that it comprises a cutting step for cutting the frame material formed on the aluminum raw material to a predetermined height, and the inner and outer cutting processing step is roughing the upper and inner sides of the aluminum raw material through the roughing bite After forming the frame material is characterized in that the surface of the grinding process again through the grinding bite.

However, the conventional method for manufacturing a pellicle frame is also a material that requires a lot of material costs because it forms a basic form of the frame by cutting and processing the aluminum raw material, and then completes the frame through grinding, fine processing, and cutting steps. It requires a lot of working time with the operator, the defect rate is high, as well as the manufacturing cost was a problem.

The present invention has been made in view of the above problems of the conventional method for manufacturing a pellicle frame, the object of which is to make the pellicle frame more easily and inexpensively without wasting material, thereby improving productivity. Of course, to provide a method of manufacturing a pellicle frame to reduce the production cost.

The present invention is the frame injection molding step of producing a basic form of the frame by injecting the injection raw material through the injection mold to achieve the above object; A frame processing step of removing oil and foreign substances by cleaning the mounting holes, the vent holes, and the surface thereof and then cleaning them It characterized in that the pellicle frame through the frame coating step of performing a coating for the charge treatment on the back and front of the product, the following detailed description of the present invention.

That is, Fig. 1 shows a perspective view of a pellicle frame to which the present invention relates, and Fig. 2 shows a manufacturing process diagram of the present invention, wherein a rectangular ring or circle having a predetermined thickness t and height h is shown. Method for producing a pellicle frame of the present invention to manufacture a ring-shaped pellicle frame 10

Frame injection molding step of arranging and drying the injection raw material to produce the basic shape of the frame through the injection mold;

A frame processing step of inspecting appearance and injection defects, processing mounting holes and vent holes, processing sharp edges, removing surface flatness and foreign matter by polishing, and removing oil and foreign matter by cleaning;

After mounting on the front jig to coat the back and dry and then again mounted on the front jig to coat the front and then drying and cooling the frame coating step; consisting of

In the injection molding step of the present invention, the injection molding conditions may be varied depending on the components of the synthetic resin, which is an injection raw material, and the size and shape of the frame to be molded. For example, the after-heating of the injection machine may be 265 to 275 ° C. It is 275-285 degreeC, an injection machine heat transfer can be 285-295 degreeC, and a nozzle temperature can be 280-285 degreeC.

Also, the fixed side temperature of injection mold can be 115 ~ 135 ℃ and the movable side temperature of injection mold can be 120 ~ 140 ℃, and injection molding pressure and injection molding speed can be controlled in multiple stages, but injection molding pressure is 1st. 80kg / cm ² , 2nd 75kg / cm ² , 3rd 70kg / cm ² , and the injection molding speed can be 95% 2nd and 85% 3rd when the 1st 100%.

When ejecting the product from the injection mold, if the pin is ejected at the lower part of the product (moving side), a partial warping occurs or a separate pin burr is needed, so a separate removal process is required. It is better to use the method of ejecting the whole lower part of the product.

In the frame processing step of the present invention, when visually inspecting the appearance and injection defects, visual inspection, after processing the mounting hole and the vent hole, the diameter is measured through a digital caliper or micrometer, and the sharp edges of the edges are chamfered. After processing, it is desirable to check the working results with a tool microscope.

In addition, after removing the surface flatness and foreign matter by polishing, it is recommended to make a precise measurement through micrometer, and to remove oil and foreign matter, it is recommended to use ultrasonic cleaning method.

In the frame coating step of the present invention, the front coating thickness and the back coating thickness is 10 ~ 25㎛, the surface charging of the product is preferably set between 10 ^-3 ~ 10 ^-8 Ω, the drying temperature after coating is 160 ℃ It is good to set it as follows.

As described above, the present invention fabricates the basic form of the frame by injection molding, and then forms a hole in the processing step, and performs a coating for electrification treatment on the back and front sides after chamfering, polishing and cleaning operations. In order to easily manufacture the pellicle frame by the present invention, the pellicle frame can be easily mass-produced without waste of materials, thereby greatly improving the productivity of the pellicle frame and greatly reducing the production cost. And the like can be obtained.

Claims (4)

A frame injection molding step of arranging and drying the injection raw materials to produce a basic form of the frame through an injection machine and an injection mold; A frame processing step of inspecting appearance and injection defects, processing mounting holes and vent holes, processing sharp edges, removing surface flatness and foreign matter by polishing, and removing oil and foreign matter by cleaning; Method of manufacturing a pellicle frame comprising a; frame coating step of mounting on the front jig and then coating the back and drying and then mounting on the front jig again to coat the front and then dry and cool. The injection molding machine according to claim 1, wherein the injection machine post-heating is at 265 to 275 ° C, the injection machine middle heat is at 275 to 285 ° C, the injection machine heat transfer is at 285 to 295 ° C, and the nozzle temperature is 280 to 285 ° C. A method for producing a pellicle frame, characterized in that the fixed side temperature of the mold is 115-135 ° C and the movable side temperature of the injection mold is 120-140 ° C. The method of manufacturing a pellicle frame according to claim 1, wherein a method of ejecting the entire lower end of the product is used when ejecting the product from the injection mold during injection molding. The method of claim 1, wherein the front coating thickness and the back coating thickness is 10 ~ 25㎛ when the frame coating, the surface charging of the product is set between 10 ^-3 ~ 10 ^-8 Ω, the drying temperature after coating is 160 ℃ Method for producing a pellicle frame, characterized in that below.

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