KR100687446B1 - Substrates alignment apparatus - Google Patents

Abstract

The present invention relates to a substrate bonding machine, and more particularly, to provide a monitoring window to visually check the degree of wear of the cam when the cam is rotated when the cam applied during the fine alignment of the substrate, which is essential for the manufacturing process of the flat panel display. It is provided with a gap sensor to accurately check the degree of wear of the separate, and relates to a substrate bonding machine that can accurately and easily check the degree of wear of the light transmission by the illumination unit.

That is, the present invention comprises a cam housing in which a plurality of cams are installed on the lower plate to finely adjust the chamber, the cam housing having a monitoring window formed in a predetermined area in which the cam and the lower plate are eccentrically provided therein. A substrate bonding machine is provided.

Board Bonder, Chamber, Cam Module, Cam, Sensing, Wear

Description

Substrate alignment apparatus

1 is a cross-sectional view showing a conventional substrate bonding machine.

FIG. 2 is an enlarged partial cross-sectional view of the cam module of FIG. 1.

3 is a cross-sectional view showing a cam module installed in the substrate combiner of one embodiment of the present invention.

4 is an enlarged cross-sectional view of the cam module of FIG. 3.

5 is an enlarged cross-sectional view of a cam module installed in the substrate combiner of another embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

100: chamber 102, 101: upper, lower plate

106: base 107: cam housing

108: monitoring window 109: cam

112: outgoing member 113: gap sensor (Gap Sensor)

114: lighting unit

The present invention relates to a substrate bonding machine, and more particularly, to provide a monitoring window to visually check the degree of wear of the cam when the cam is rotated when the cam applied during the fine alignment of the substrate, which is essential for the manufacturing process of the flat panel display. It is provided with a gap sensor to accurately check the degree of wear of the separate, and relates to a substrate bonding machine that can easily check the degree of wear of the light transmission by the illumination unit.

As the information society develops, the demand for display devices is increasing in various forms, and in recent years, various flat panel display devices such as liquid crystal devices (LCDs) and plasma display panels (PDPs) are utilized. Among the devices, LCD is currently being used most frequently as a substitute for CRT (Cathode Ray Tube) for mobile image display because of its excellent image quality and light weight, thinness, and low power consumption. In addition to the mobile use, various developments have been made for televisions and monitors for receiving and displaying broadcast signals.

A typical substrate joining machine is composed of a frame forming an outer appearance, a stage portion attaching a substrate, a chamber portion which is a space for bonding the substrate, and moving means for driving the chamber portion and the stage portion.

Here, the adsorption process attaches the color filter substrate to the upper stage installed in the chamber by the loading means using a vacuum chuck or the like, and attaches the TFT array substrate to the lower stage.

Since the structure of the substrate bonding machine corresponds to a structure generally used in the manufacturing process of the liquid crystal display, the overall structure is omitted and only the structure of the stage portion in the surface plate will be described.

As shown in FIG. 1, the stage substrates 3 and 4 provided in the upper and lower plates 2 and 1 have two substrates (TFT array substrate and color filter substrate 5) as the upper stage. After arrange | positioning horizontally to (3) and the lower stage 4, it has a structure which adhere | attaches up and down.

That is, in the conventional substrate joining machine, the upper stage 3 and the lower stage 4 constituting the joining machine face each other in the upper space and the lower space in the upper and lower platen 2, 1 of the bonding machine, respectively, and the substrate loading means. The substrate 5 loaded on each of the stages 3 and 4 can be bonded up and down by means of (not shown), and is located in the upper region of the base 6 as described above. , A plurality of cam modules provided with a cam housing 7 having cams 8 for aligning the lower plates 2 and 1 are fixedly installed along the upper edge of the base 6.

The cam 8 described above is installed inside the cam housing 7 in an eccentric state and fixedly installed in the upper region of the shaft portion 10 extending from the drive device 9. Here, the appearance member 11 which serves as a medium for converting the rotational movement of the cam 8 into a linear movement is provided in contact with each other through the outer surface of the lower plate 1 and the circumferential surface of the cam 8. .

However, in the process of finely adjusting the lower platen 1 in accordance with the rotation of the cam 8 described above, the cam 8 of the cam 8 is mounted along the projection member 11 interposed between the cam 8 and the lower platen 1. When the circumferential surface and the projecting member 11 are inevitably contacted and the amount of wear on the circumferential surface of the cam 8 is severe as time passes, the occurrence rate of the error during mark alignment related to horizontality is high, and the cam is contacted. In order to confirm the wear state of (8), the dismantling of the cam housing 7 was unavoidable, and thus there was a problem in that the required time and the associated cost increased.

The present invention has been made to solve the above problems, the object of the present invention is to provide a monitoring window for monitoring the inside of the cam housing to be installed in the vicinity of the lower wall outer wall and the edge of the base of the substrate bonding machine and the cam there The present invention provides a substrate bonder that can detect the amount of wear by installing a gap sensor that detects a gap between the bottom surface and a lower plate of a light or a lighting unit that detects the degree of wear by the amount of light transmitted.

In order to achieve the above object, the present invention provides a substrate adhering device of a flat panel display manufacturing equipment in which a plurality of cams are installed on a lower plate to finely adjust a chamber, the cam housing having the cams eccentrically provided therein; By including a monitoring window through the cam housing in a predetermined region on the cam housing side, it is possible to visually check the wear state around the cam rotated in a state in which the bottom surface of the cam is in contact with the lower plate through the monitoring window and accordingly Maintenance or repairs in due time reduce the time or cost.

In addition, since the monitoring window in the present invention is provided in the height region of the cam housing, the amount of wear of the cam is inspected through the monitoring window formed on the circumferential surface while rotating the cam.

In addition, the monitoring window in the present invention is preferably provided in the upper area of the cam housing that the cam is in contact, so that the amount of wear of the cam is inspected through the monitoring window formed in the upper area of the cam housing.

In addition, it is preferable to further include an illumination unit provided in an area adjacent to the monitoring window in the cam housing in the present invention, so that the amount of wear can be determined by transmitting light through the contact portion between the circumferential surface of the cam and the side wall of the lower plate.

In addition, the present invention further includes a gap sensor provided in an area adjacent to the monitoring window in the cam housing for sensing a distance between the cam and the lower surface of the contact surface, thereby sensing a contact distance between the circumferential surface of the cam and the side wall of the lower surface. It is preferable because it can be quantified.

In addition, the present invention further includes an alarm unit that is electrically connected to the gap sensor and is output when the sensed value exceeds the reference value, so that the operator can be notified when the measured value sensed by the gap sensor exceeds the set reference value.

In addition, in the present invention, the output value sensed by the gap sensor further includes a display window output on the screen, so that the operator can data the wear amount of the cam that is digitized.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 3, the substrate joining device of the present invention is provided in the upper region of the base 106 and provided with upper and lower plates 102 and 101 for moving by a predetermined range. Two substrates (TFT array substrate and color filter substrate 105) in the upper region and the lower region in the 102 and 101 are horizontally loaded on the upper stage 103 and the lower stage 104 by loading means (not shown), respectively. The upper stage 103 and the lower stage 104 which are adsorbed are installed.

In addition, a plurality of cam housings 107 provided at the edges of the upper region of the base 106 are arranged at minute intervals by the rotation of the cams 109 provided therein. Cam member is provided with a projection member 112 for converting the rotational motion by the 109 to a linear motion in contact with the circumferential surface of the cam 109 and one side wall of the lower plate (101).

On the other hand, the contact portion of the cam housing 107 is installed at a predetermined position of the height region or the upper region, but the contact member with the projection member 112 interposed between the rotating cam 109 and the lower plate 101 is visually confirmed from the outside. A monitoring window 108 is provided.

Referring to the cam module described above in more detail, as shown in FIG. 4, the cam 109 installed inside the cam housing 107 and the cam housing 107 described above and eccentrically positioned may be the cam described above. It is installed in the upper region of the shaft portion 111 extending from the drive unit 110 for imparting a driving force to the 109. Here, the plate-shaped outgoing member 112 for converting the rotational movement of the cam 109 into linear reciprocating motion is installed in contact with the circumferential surface of the cam 109. Therefore, when the cam 109 described above is rotated, the sunk member 112 installed in contact with the cam 109 is linearly reciprocated, and the sunk member 112 in contact with the outer wall of the lower plate 101 described above. ), The upper and lower plates 102 and 101 can be finely adjusted.

In addition, the gap sensor 113 is installed upward at a predetermined position of the base 106 where the cam housing 107 is installed, that is, the contact area between the circumferential surface of the cam 109 and the projecting member 112.

Here, the gap sensor 113 senses the distance between the circumferential surface of the cam 109 and the contact surface of the projecting member 112 and outputs the value.

The above-described gap sensor 113 is controlled by a separate control unit (not shown), and an alarm unit (not shown) may be installed to alert a worker by voice when the detection result value has a predetermined value or more, and the detection result value A display window (not shown) may be installed at a predetermined position of the cam housing 107 so as to quantify.

The cam housing 107 described above has a cylindrical shape opened downward as shown in FIG. 5 so that the monitoring window 108 has an upper region so as to observe the contact portion of the cam 109 and the projecting member 112 from the outside. It is installed at a predetermined position.

The cam 109 described above is stepped in the lower region in an eccentric elliptical shape.

On the other hand, the lower plate 101, which is installed on both sides of the cam housing 107 of the cam module installed in the upper region of the base 106 and moved by a predetermined amount, can be returned to its original position after completion of the bonding of the substrate 105. An elastic member having a is installed.

Therefore, the operator visually recognizes the degree of wear of the interlocking member 112 interposed between the cam 109 and the lower plate 101 depending on time by the monitoring window 108 installed in the cam housing 107. Secondly, the result value of the interval by the sensing of the gap sensor 113 may be known.

On the other hand, in the process of bonding the substrate to the substrate bonding machine of the present invention to determine the wear of the haunting member involved in the cam and the lower plate according to the fine adjustment operation by the cam module, as shown in Figure 3 cam housing ( The interval between the cam 109 and the sunk member 112 is primarily inspected through the monitoring window 108 installed in the upper region or the height region of the 107, and the contact area between the cam 109 and the sunk member 112 described above. By the gap sensor 113 which can sense the precise result can be obtained.

Here, in the state where the monitoring window 108 is formed in the height region of the cam housing 107, the amount of wear is inspected in front of the cam 109 while rotating the cam 109, and the monitoring window 108 is the cam housing 107. The amount of wear is inspected from above the cam 109 while the cam 109 is rotated even in the state formed in the upper region of the cam.

Therefore, the degree of wear of the cam 109 can be easily known by the sensing of the gap sensor 113, thereby preventing the error occurrence rate during mark alignment.

As shown in FIG. 6, the substrate joining device of the present invention is installed inside the cam housing 107 having a hollow interior and the cam housing 107 described above, but the cam 109 which is eccentrically provides a driving force. It is installed in the upper region of the shaft portion 111 extending to the drive unit 110.

Here, the plate-shaped member 112 for converting the above-described rotational motion of the cam 109 into a linear reciprocating motion is installed to come into contact with the circumferential surface of the upper region of the cam 109, and the cam 109 described above. The lighting unit 114 is installed in the lower region of the contact area between the cam 109 and the sunk member 112 intervening in the lower plate 101, and the cam 109 and the sunk member 112 in the above-described light unit 114. When light is transmitted through the contact area of the light, the amount of light transmitted varies depending on the amount of wear. If the amount of light is transmitted, the wear of the cam 109 is severe. If the amount of light is transmitted, the wear of the cam 109 is low. .

The above-described embodiment does not obtain an accurate output value than the result of the sensing value by the gap sensor 113, but there is an advantage in terms of cost.

Here, the positions of the above-described gap sensor 113 and the lighting unit 114 may be variously changed within any limited position.

It is installed in the substrate joining device of the present invention as described above to provide a monitoring window to check the wear level of the cam in the process of alignment of the surface plate by the fine adjustment of the cam, and to sense the contact area between the cam and the projection member By allowing the gap sensor and the lighting unit to determine the degree of wear according to the amount of light transmitted, the occurrence rate of errors during mark alignment is reduced, and the wear state of the contact surface of the lower plate provided to be in contact with the cam is reduced. There is an effect that can be easily confirmed.                     

In addition, since the wear amount of the cam can be confirmed, repair or replacement at an appropriate time has the effect of reducing the time or cost.

Claims (7)

In the substrate joining machine of the flat panel display manufacturing equipment with a plurality of cams installed in the lower plate to fine-tune the chamber, A cam housing having the cam eccentrically provided therein; And a surveillance window through the cam housing in a predetermined region on one side of the cam housing. The method of claim 1, wherein the monitoring window, And a substrate bonder provided in a height region of the cam housing. The method of claim 1, wherein the monitoring window, And the cam housing is provided in an upper region of the cam housing in contact with the cam. The method of claim 1, And a lighting unit provided in an area adjacent to the monitoring window in the cam housing. The method of claim 1, And a gap sensor provided in an area adjacent to a monitoring window in the cam housing to sense a gap between a contact surface of the cam and the lower plate. The method of claim 5, And an alarm unit electrically connected to the gap sensor and output when the sensed value exceeds a reference value. The method of claim 6, And the output value sensed by the gap sensor further comprises a display window output on the screen.

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