KR100676823B1 - Transferring apparatus for wafer and transferring method for the same - Google Patents

Abstract

The present invention relates to a wafer transfer device for transferring the wafers taken out of a wafer cassette containing a plurality of wafers to a reactor for performing a predetermined process, wherein the wafers supported in the wafer cassette are supported and transferred to the reactor. A wafer transfer section having an arm; Three or more sensors provided on the outlet side of the wafer cassette to be spaced apart from each other in the transverse direction in the conveying direction of the wafer; The target position of the wafer is corrected to the detection position of the wafer when the target position and the detection position calculated on the basis of the transfer speed of the arm for extracting the supported wafer and the detection signal sensed by the sensors are different. It characterized in that it has a control unit for controlling the wafer transfer unit to transfer the wafer to the reactor. Thereby, a wafer transfer apparatus and its transfer method, which can take a relatively short centering time of a wafer, are provided.

Description

Wafer transfer device and its transfer method {TRANSFERRING APPARATUS FOR WAFER AND TRANSFERRING METHOD FOR THE SAME}

1 is a plan view showing a wafer transfer apparatus according to the present invention,

2 is a perspective view illustrating sensing a wafer drawn out from a wafer cassette;

3 is a plan view showing the arm of the wafer transfer unit;

4 is a plan view showing a wafer display portion of a wafer;

5 is a plan view showing an arm and a wafer sensed by a sensor;

6 is a flowchart illustrating a centering process according to wafer transfer.

* Explanation of symbols for the main parts of the drawings

10: wafer transfer device

20: wafer cassette 21: wafer

23: wafer display unit 30: reactor

40: wafer transfer part 41: arm

43: arm detector 45: adsorption holes

47: link

50: sensor 60: target position

70: detection position 80: reference point

The present invention relates to a wafer transfer apparatus and a transfer method thereof, and more particularly, to a wafer transfer apparatus and a transfer method that can take a relatively short centering time of the wafer.

Wafers go through various processes to produce semiconductor chips. When the wafer undergoes a process such as an etching process and a deposition process, a wafer cassette containing a plurality of wafers, a reactor receiving the wafer and carrying out a predetermined process, and a wafer taken out of the wafer cassette are transferred to a predetermined position of the reactor. It has a transfer drive like a robot. In the transfer drive unit, it is common to carry out the centering of the wafer during transfer so that the wafer which is not accurately accommodated in the same position can be taken out and the wafer can be accurately seated at the predetermined position of the reactor.

The prior art has a separate aligner between the wafer cassette and the reactor. In this prior art, the transfer driving unit extracts the wafer from the wafer cassette, moves the wafer into and out of the aligner for centering the wafer, and then transfers the wafer to the reactor.

By the way, in the prior art, since the wafer enters and exits the wafer from the wafer cassette to the aligner, the wafer is transferred to the reactor, and thus the transfer time of the wafer is relatively high due to the time taken by the aligner.

Accordingly, it is an object of the present invention to provide a wafer transfer apparatus and a transfer method thereof in which the centering time of the wafer can be relatively small.

The object of the present invention is to provide a wafer transfer apparatus for transferring a wafer taken out from a wafer cassette containing a plurality of wafers to a reactor for performing a predetermined process, wherein the wafer accommodated in the wafer cassette is supported to support the wafer. A wafer transfer unit having an arm for transferring to the reactor; Three or more sensors provided on the outlet side of the wafer cassette to be spaced apart from each other in the transverse direction in the conveying direction of the wafer; The target position of the wafer is corrected to the detection position of the wafer when the target position and the detection position calculated on the basis of the transfer speed of the arm for extracting the supported wafer and the detection signal sensed by the sensors are different. It can be achieved by a wafer transfer apparatus characterized by having a control unit for controlling the wafer transfer unit to transfer a wafer to the reactor.

Here, the target position is calculated with respect to the arm based on the feed speed of the arm and the detection signal of the arm detected by the sensors, and the detection position is detected by the feed speed of the arm and the sensors. And calculating the arm using a circle equation based on the detected arm and the detection signal of the outer peripheral surface of the wafer.

In addition, the detection position may include calculating the unknown of the original equation using the Gaussian elimination method.

In addition, the unknown may include checking whether the equation of the circle satisfies the equation of the circle.

The wafer may include a wafer display unit formed on an outer circumferential surface, and the controller may include excluding a pair of detection signals detected by a sensor that detects the wafer display unit among the sensors from the detection position calculation. .

The wafer display unit may include any one of a flat zone and a notch formed in one region of an outer circumferential surface of the wafer.

In addition, the arm may include an arm detection unit provided to be detected by two or more of the sensors.

On the other hand, an object according to the present invention, in the wafer transfer method for transferring the wafer taken out from the wafer cassette containing a plurality of wafers to a reactor for performing a predetermined process, for supporting the wafer to transfer to the reactor Introducing an arm of a wafer transfer portion into the wafer cassette; Mounting and supporting the wafer in the wafer cassette to the arm; The arm supporting the wafer is withdrawn from the wafer cassette; Detecting at least three sensors on the exit side of the wafer cassette, the arms and the outer peripheral surface of the wafer being spaced apart from each other in the transverse direction in the transverse direction; The target position of the wafer is corrected to the detection position of the wafer when the target position and the detection position calculated on the basis of the transfer speed of the arm for extracting the supported wafer and the detection signal sensed by the sensors are different. And controlling the wafer transfer unit to transfer a wafer to the reactor.

Wherein the correcting and controlling step includes calculating a target position for the arm based on the feed speed of the arm and the detection signal of the arm sensed by the sensors, the feed speed of the arm and the sensors And calculating a detection position of the arm using a circle equation based on the arm detected by the arm and the detection signal of the outer circumferential surface of the wafer.

In addition, the step of calculating the detection position may include calculating the unknown of the original equation using the Gaussian elimination method.

The detecting position calculating step may include checking whether the equation of the circle is satisfied by substituting an unknown index into the equation of the circle.

Hereinafter, a wafer transfer apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.

In the wafer transfer apparatus 10 and the wafer transfer method according to the present invention, as illustrated in FIGS. 1 and 6, the wafer 21 drawn from the wafer cassette 20 containing the plurality of wafers 21 is predetermined. An apparatus and a method for transferring to the reactor 30 which proceeds the process of, the wafer transfer part 40 having an arm 41 for supporting the wafer 21 accommodated in the wafer cassette 20 to transfer to the reactor 30; ; Three or more sensors 50 provided on the exit side of the wafer cassette 20 so as to be spaced apart from each other in the transverse direction of the transfer direction of the wafer 21; The target position of the wafer 21 relative to the arm 41 is calculated based on the detection speed information according to the feed speed of the arm 41 and the signal of the arm 41 sensed by the sensors 50. A detection position of the wafer 21 with respect to the arm 41 is calculated based on the detection speed information of the arm 41 and the wafer outer peripheral surface detected by the conveying speed of the sensor 41 and the sensors 50, and the wafer And a control unit (not shown) for controlling the wafer transfer unit 40 to correct the target position 60 of the target 21 to the detection position 70 of the wafer 21 so that the wafer 21 is transferred to the reactor 30. .

The wafer cassette 20 houses a plurality of wafers 21 as shown in FIG. 1. In addition, of course, the wafer cassette 20 may be provided in plurality.

The wafer 21 has a wafer display portion 23 that is circular and can be a reference point of a process operation, as shown in FIGS. 2 and 4. In addition, the wafer 21 is accommodated in the wafer cassette 20 in a process such as an etching process or a deposition process and transferred to the reactor 30 one by one to perform a predetermined process.

As illustrated in FIG. 4, the wafer display unit 23 includes a flat zone 23a and a recessed notch 23b formed in one region of the outer circumferential surface of the wafer 21 so as to be a position reference point of the wafer 21. It may include any one of. In addition, since the wafer display unit 23 does not form the outer circumferential surface of the wafer 21 in a circular shape, the detection position information according to the detection signal detected by the sensor 50 that has passed through the wafer display unit 23 is described in the following description. Excluded from the calculation of 70). Accordingly, the quantity of the sensor 50 is determined in consideration of the wafer display portion 23 of the wafer 21.

As shown in FIG. 1, the reactor 30 receives the wafer 21 drawn out from the wafer cassette 20 and performs a predetermined process, and may be provided in plural. In addition, the reactor 30 maintains the temperature and pressure necessary to perform a predetermined process. In addition, in the reactor 30, the wafer 21 should be seated at the correct position in order to proceed with a predetermined process.

As illustrated in FIG. 1, the wafer transfer unit 40 includes an arm 41 for seating and supporting the wafer 21, a link 47 connected to the arm 41, and a link 47. And a driving unit (not shown) which gives a driving force to which the arm 41 can be rotated. In addition, the wafer transfer unit 40 transfers the wafer 21 accommodated in the wafer cassette 20 to the reactor 30. In addition, in the wafer transfer unit 40, a controller (not shown) may control the direction and position of the wafer transfer unit 40, and the controller and the wafer transfer unit 40 may use communication means for mutual control.

As shown in FIGS. 1 to 3, the arm 41 seats and supports the wafer 21, and detects an arm detection unit that can be detected by two or more sensors 50 to calculate the reference point 80. 43). In addition, the arm 41 has an adsorption hole 45 that can suck the seated wafer 21 by vacuum pressure and firmly fix it to the arm 41. In addition, the arm 41 has a predetermined length (L1, L2) and the width (W), the input length, width, the conveying speed of the arm 41 and the arm detection unit detected by the sensors 50 ( The target position 60 can be calculated according to the detection signal of 43).

As shown in FIG. 3, the arm detection unit 43 not only forms a step in the transverse direction in the transport direction so that the two or more sensors 50 can detect the same, and the hole that the sensor can detect. Of course, the shape can be selectively employed. In addition, the arm detection unit 43 is provided symmetrically in pairs so as to be detected by two or more sensors 50 to correct the twist in the Y direction of the target position 60 of the wafer 21 with respect to the arm 41. Can be.

As illustrated in FIG. 2, the sensors 50 and 50 ′ include three or more spaced apart from each other in the transverse direction in the conveying direction of the wafer 21. In addition, the sensors 50 and 50 'are provided in three or more in consideration of the case where the wafer 21 cannot detect the wafer display unit 23 to form a normal circle and thus cannot use the detection position information. In addition, it is preferable that the sensors 50 and 50 'include four in consideration of the diameter of the wafer 21, the size of the wafer display unit 23, and the like. In addition, the sensor 50 is known that can detect the arm detection unit 43 and the wafer outer peripheral surface, such as an optical sensor having a transmitter 50a, 50b, 50c, 50d and receiver 50e, 50f, 50g, 50h, respectively Of course, the various sensors can be selectively employed.

As shown in FIGS. 5 and 6, the control unit uses the arm 41 based on the detection speed of the arm 41 and the detection position information according to the detection signal of the arm 41 detected by the sensors 50. Calculates a target position 60 of the wafer 21 relative to the detected position information based on the feed speed of the arm 41 and the detection signal of the arm 41 and the outer peripheral surface of the wafer detected by the sensors 50; The calculated position 70 of the wafer 21 with respect to the arm 41 is calculated, and the target position 60 of the wafer 21 is corrected to the detected position 70 of the wafer 21 so that the wafer 21 The wafer transfer unit 40 is controlled to be transferred to the reactor 30.

As shown in FIG. 5, the target position 60 is based on the detection position information according to the detection speed of the arm 41 and the detection signal of the arm 41 detected by the sensors 50. Is calculated as follows. This process is the same as the process of calculating the target position to be described later.

First, the user inputs the coordinates of each sensor 50, the wafer diameter, the lengths L1 and L2 of the arm detection unit 43 of the arm 41, and the like into an input unit (not shown). Thus, the control unit stores and calculates the data of the input unit and the transfer speed of the arm. The control unit may of course store and calculate in consideration of the transfer according to the constant velocity and acceleration of the wafer transfer unit 40. The controller receives and receives detection signals P01 and P02 of the sensors 50b and 50c that detect the pair of arm detectors 43 of the arm 41 as the wafer 21 is transferred from the wafer cassette 20. The location information is stored as time (T01, T02). The control unit uses the detection position information of the pair of arm detection units 43 to calculate the coordinates of the reference point 80. That is, the control unit recognizes the X coordinate of the reference point 80 as 0, the Y coordinate takes the average value of the detection position information of the pair of arm detectors 43, and the average value corrects the inclination of the Y coordinate of the arm 41. can do. Accordingly, the control unit calculates the X coordinate of the target position 60 to be '0', and the Y coordinate is calculated by the lengths L1 and L2 of the arm detecting unit 43 of the arm 41 and the diameter of the wafer. That is, the controller stores the coordinates of the target position 60 of the wafer 21 with respect to the arm 41 as (X, Y). For example, as shown in Fig. 5, when the radius of the wafer is 100 mm and the distance from the arm detecting portion 43 of the arm 41 to the wafer 21 is 17 mm by the input arm dimension, the controller The coordinate of the target position 60 of the wafer 21 with respect to the arm 41 is calculated as (0, 117). Here, in the case of calculating the target position 60, the controller may add means for comparing and correcting each other by comparing the target position 60 by the calculation with the measurement target position according to the detection result.

The detection position 70 is based on the detection position information according to the detection speed of the arm 41 and the wafer outer peripheral surface detected by the conveyance speed of the arm 41 and the sensors 50 as shown in FIG. The arm 41 is calculated as follows. This process is the same as the process of the detection position calculation step to be described later.

First, as described above, the transfer speed of the arm 41 and the X coordinate value of each sensor 50 are recognized by the control unit. Thus, the control unit already knows the X coordinate value at each position detected by the sensor 50. As the wafer 21 is withdrawn from the wafer cassette 20, the control unit detects the detection signals P01, P02, P1 to P8 of the arm detector 43 and the outer peripheral surface of the arm 41 detected by the sensor 50. The received position information is recognized as time T01, T02, and T1 to T8, respectively.

The control unit calculates the elapsed time from the reference point 80 to each position using the detection position information. That is, the control unit calculates, for example, the required time at the P2 position by subtracting the T01 time from the T2 time.

The controller calculates the distances S1 to S8 of each position from the reference point 80 by multiplying the elapsed time to each position by the feed speed of the arm 41. That is, the control unit calculates the distance (S2 = (T2-T01) * Va) from the reference point to P2 by multiplying the required time T2-T01 of P2 by the speed Va of the arm, for example.

)을 구한다. 제어부에서는 각 검출위치정보의 평균(M1,M2,M3,M4)을 비교하여 값이 다른 평균이 속하는 검출위치정보는 검출위치(70)의 산출에 활용하지 않는다. 예를 들면, 제어부에서는 P5에 웨이퍼(21)의 웨이퍼표시부(23)가 있어 M1의 값이 다른 값(M2, M3, M4)과 차이가 있다. 이에, 제어부는 M1값이 속하는 검출위치정보인 S1 및 S5를 검출위치(70)의 산출 시에 선택하지 않는다. 이에, 웨이퍼(21)의 웨이퍼표시부(23)와 같은 특성을 고려하여 검출위치를 산출할 수 있다.The control unit calculates an average of the pair of distances (S1 and S5, S2 and S6, S3 and S7, S4 and S8) obtained from the detection position information. For example, the control unit uses the average of P2 and P6 (M2 =

) The control unit compares the averages M1, M2, M3, and M4 of the respective detection position information, and does not utilize the detection position information to which the averages having different values belong to the calculation position 70. For example, in the control unit, the wafer display unit 23 of the wafer 21 is located at P5, and the value of M1 is different from other values M2, M3, and M4. Therefore, the control unit does not select S1 and S5, which are detection position information to which the M1 value belongs, at the time of calculating the detection position 70. Accordingly, the detection position can be calculated in consideration of the same characteristics as the wafer display section 23 of the wafer 21.

As described above, the controller selects three of the six detection position information. The control uses the equation of the circle.

X ² + Y ² + aX + bY + c = 0 --------------- (Equation 1)

The controller knows the X coordinate, the Y coordinate, and the radius r of the wafer 21, and if (1) is written again,

aX + bY + c = -X ² -Y ² ------------------- (Equation 2)

It becomes Herein, the control unit uses a Gaussian elimination method using a matrix to obtain three unknown solutions a, b, and c. That is, the controller selects X coordinates and Y coordinates, which are three detection position information, from among the six detection position information described above, and obtains unknown a, b, and c by Gaussian elimination using a matrix. In addition, if you rewrite (Equation 1),

, -

)이며, 원의 반지름은

이다. 제어부에서는 가우스소거법에 의해 구한 a, b, c가 상기의 중심과 반지름을 만족하는지 여부를 확인한다. 제어부는 원의 방정식을 만족하는 원의 중심좌표(Xa, Ya)를 검출위치(70)로 인식한다. The center of the circle is (-

,-

), The radius of the circle

to be. The controller checks whether a, b, and c obtained by the Gaussian elimination method satisfy the center and radius described above. The controller recognizes the center coordinates Xa and Ya of the circle satisfying the equation of the circle as the detection position 70.

The control unit compares the coordinates X and Y of the target position 60 with the coordinates Xa and Ya of the detection position 70, and if the target positions 60 do not coincide with each other, the target position 60 is detected. The wafer transfer unit 40 is controlled so that the wafer 21 is transferred to the reactor 30 based on the coordinates Xa and Ya of the detected detection position 70 corrected by. Of course, the control unit may be controlled to stop the operation of the wafer transfer unit 40 when the wafer transfer unit 40 is out of the range for correction in the calibration process.

As a result, the centering of the wafer 21 may be performed without going through a separate aligner, thereby shortening the process time.

With this configuration, the transfer method of the wafer transfer device 10 according to the present invention will be described with reference to FIGS. 5 to 6.

First, the power supply of the wafer transfer apparatus 10 is applied. The user inputs the distances L1 and L2 from the reference point 80 to the target position 60, the X coordinates of the sensors 50, the diameter of the wafer 21, and the like, on the input unit (not shown). The controller may control and recognize data on a speed such as an acceleration change of the wafer transfer unit.

In the arm retracting step, the arm 41 of the wafer transfer part 40 enters the lower end of the wafer 21 to the wafer cassette 20 in order to seat and support the wafer 21.

In the wafer support step, the wafer 21 in the wafer cassette 20 is seated and supported on the arm 41. In the wafer support step, the suction hole 45 provided in the arm 41 is given a predetermined vacuum pressure so that the wafer 21 being transferred is firmly supported by the arm 41.

In the wafer takeout step S100, the arm 41 supporting the wafer 21 is taken out from the wafer cassette 20.

In the sensor detection step (S110), at least three sensors 50 provided at the exit side of the wafer cassette 20 to be spaced apart from each other in the transverse direction in the transverse direction detect the arm 41 and the outer peripheral surface of the wafer 41. The detection signal is transmitted to the control unit. Thus, the detection signals detected by the sensors 50 are transmitted to the control unit and used as target position information and detection position information.

In the target position calculation step (S120), the wafer 21 for the arm 41 is based on the detection position information according to the feed speed of the arm 41 and the detection signal of the arm 41 sensed by the sensors 50. The target position 60 of is calculated. Since the calculation process of the target position calculation step S120 is described with reference to FIG. 5 and described above in detail, the description thereof will be omitted.

In the detection position calculation step (S130), the wafer with respect to the arm 41 is detected based on the feed speed of the arm 41 and the detection position information according to the detection signal of the arm 41 and the wafer outer peripheral surface detected by the sensors 50. The detection position 70 of 21 is calculated. Since the calculation process of the detection position calculation step S130 has been described above in detail, a description thereof will be omitted. In addition, the detection position calculation step (S130) includes an equation calculation step of calculating the detection position 70 by using the original equation by selecting the detection position information according to the three or more signals sensed by the sensors 50. do.

In the equation calculation step, the detection position 70 is selected by calculating the detection position information according to three or more signals detected by the sensors 50 and calculated using the original equation. Further, in the equation calculation step, the unknown of the original equation has a Gaussian elimination method using the Gaussian elimination method. Details of these steps have been described above, and thus will be omitted here.

In the verification step, it is checked whether the unknown value obtained by the Gaussian elimination method satisfies the original equation. In the checking step, the center coordinate calculated by the unknown satisfying the equation of the circle becomes the coordinate of the detection position 70.

In the correction and transfer steps S140 and S150, if the target position 60 of the wafer 21 with respect to the arm 41 and the detection position 70 of the wafer 21 with respect to the arm 41 do not coincide with each other, the target position is determined. The wafer transfer part 40 is controlled so that the wafer 60 is transferred to the reactor 30 by correcting the 60 to the detection position 70. Thus, the wafer 21 may be accurately seated at a predetermined position of the reactor 30. Thus, the wafer centering process and the transfer process are completed, and the wafer transfer unit 40 repeats the same process for the next wafer 21. In addition, the controller may control the wafer transfer unit 40 to stop operating when the correction range is out of the predetermined range.

Therefore, according to the present invention, the calculation of the detection position of the wafer with respect to the arm is quick and simple, and the centering time of the wafer is relatively small, so that the process time for transferring the wafer to the reactor can be shortened. In addition, according to the present invention, the sensors are simply installed in the area where the wafer is withdrawn from the wafer cassette, and the number of additional parts is small, so that the existing equipment can be retrofitted at a low cost.

As described above, according to the present invention, there is provided a wafer transfer apparatus and a transfer method thereof in which the centering time of the wafer can be relatively small.

Claims (11)

In the wafer transfer apparatus for transferring the wafer taken out from the wafer cassette containing a plurality of wafers to a reactor for performing a predetermined process, A wafer transfer unit having an arm for supporting the wafer accommodated in the wafer cassette and transferring the wafer to the reactor; Three or more sensors provided on the outlet side of the wafer cassette to be spaced apart from each other in the transverse direction in the conveying direction of the wafer; The arm includes an arm detection unit provided to be detected by two or more of the sensors, The target position of the wafer is corrected to the detection position of the wafer when the target position and the detection position calculated on the basis of the transfer speed of the arm for extracting the supported wafer and the detection signal sensed by the sensors are different. Wafer transfer apparatus further comprises a control unit for controlling the wafer transfer unit to transfer the wafer to the reactor. The method of claim 1, The target position is calculated with respect to the arm based on the feed speed of the arm and the detection signal of the arm detected by the sensors, And the detection position is calculated with respect to the arm using a circle equation based on the transfer speed of the arm and the detection signal of the arm and the outer peripheral surface detected by the sensors. The method of claim 2, And said detection position is calculated using a Gaussian elimination method for an unknown number of equations of a circle. The method of claim 3, The unknown value is substituted into a circle equation to determine whether or not to satisfy the equation of the circle. The method of claim 1, The wafer includes a wafer display unit formed on an outer circumferential surface thereof. And the control unit excludes the pair of detection signals detected by the sensor detecting the wafer display unit from the sensors in the detection position calculation. The method of claim 5, And the wafer display unit is any one of a flat zone and a notch formed in one region of an outer circumferential surface of the wafer. delete In the wafer transfer method for transferring the wafer taken out from the wafer cassette containing a plurality of wafers to a reactor for performing a predetermined process, Introducing an arm of a wafer transfer part for supporting the wafer and transferring the wafer to the reactor; Mounting and supporting the wafer in the wafer cassette to the arm; The arm supporting the wafer is withdrawn from the wafer cassette; Detecting at least three sensors on the exit side of the wafer cassette, the arms and the outer peripheral surface of the wafer being spaced apart from each other in the transverse direction in the transverse direction; Forming an arm detection unit provided on the arm so that two or more of the sensors can detect the arm; The target position of the wafer is corrected to the detection position of the wafer when the target position and the detection position calculated on the basis of the transfer speed of the arm for extracting the supported wafer and the detection signal sensed by the sensors are different. And controlling the wafer transfer unit to transfer a wafer to the reactor. The method of claim 8, The correcting and controlling step includes calculating a target position for the arm based on the feed speed of the arm and the detection signal of the arm sensed by the sensors, and by the feed speed of the arm and the sensors And calculating a detection position of the arm using a circle equation based on the detected signal of the arm and the outer peripheral surface of the wafer. The method of claim 9, And the detecting position calculating step includes calculating an unknown value of an equation of a circle by using a Gaussian elimination method. The method of claim 10, The detecting position calculating step includes substituting the unknown equation into a circle equation to determine whether the circle equation is satisfied.

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