KR100670713B1 - 입자 생성 장치 - Google Patents

입자 생성 장치 Download PDF

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Publication number
KR100670713B1
KR100670713B1 KR1020027000869A KR20027000869A KR100670713B1 KR 100670713 B1 KR100670713 B1 KR 100670713B1 KR 1020027000869 A KR1020027000869 A KR 1020027000869A KR 20027000869 A KR20027000869 A KR 20027000869A KR 100670713 B1 KR100670713 B1 KR 100670713B1
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South Korea
Prior art keywords
reactant
reaction chamber
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reaction
light
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Expired - Fee Related
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KR1020027000869A
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English (en)
Korean (ko)
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KR20020047094A (ko
Inventor
모소로날드제이
비시앙신
가드너제임스티
쿠마수지트
필립스사무엘알
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나노그램 코포레이션
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J6/00Heat treatments such as Calcining; Fusing ; Pyrolysis
    • B01J6/008Pyrolysis reactions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/121Coherent waves, e.g. laser beams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0879Solid

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Thermal Sciences (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020027000869A 1999-07-21 2000-07-18 입자 생성 장치 Expired - Fee Related KR100670713B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/362,631 1999-07-21
US09/362,631 US20010051118A1 (en) 1999-07-21 1999-07-21 Particle production apparatus

Publications (2)

Publication Number Publication Date
KR20020047094A KR20020047094A (ko) 2002-06-21
KR100670713B1 true KR100670713B1 (ko) 2007-01-18

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ID=23426886

Family Applications (1)

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KR1020027000869A Expired - Fee Related KR100670713B1 (ko) 1999-07-21 2000-07-18 입자 생성 장치

Country Status (6)

Country Link
US (2) US20010051118A1 (enExample)
EP (1) EP1230016A4 (enExample)
JP (1) JP2003505233A (enExample)
KR (1) KR100670713B1 (enExample)
CN (1) CN1202908C (enExample)
WO (1) WO2001007155A1 (enExample)

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JP3413131B2 (ja) * 1999-10-04 2003-06-03 キヤノン株式会社 光学装置及びデバイス製造方法
AU2002224399A1 (en) 2000-10-17 2002-04-29 Neophotonics Corporation Coating formation by reactive deposition
DK1335829T3 (da) 2000-10-26 2011-12-05 Neophotonics Corp Optiske strukturer med flere lag
US6917511B1 (en) 2001-08-14 2005-07-12 Neophotonics Corporation Reactive deposition for the formation of chip capacitors
US6723435B1 (en) 2001-08-28 2004-04-20 Nanogram Corporation Optical fiber preforms
US7521097B2 (en) * 2003-06-06 2009-04-21 Nanogram Corporation Reactive deposition for electrochemical cell production
US8865271B2 (en) 2003-06-06 2014-10-21 Neophotonics Corporation High rate deposition for the formation of high quality optical coatings
US7160489B2 (en) * 2003-10-10 2007-01-09 The Board Of Trustees Of The University Of Illinois Controlled chemical aerosol flow synthesis of nanometer-sized particles and other nanometer-sized products
US20070142589A1 (en) * 2004-02-24 2007-06-21 Rogers Martin E Process and systems for the efficient production of polymeric microspheres
US20070003694A1 (en) * 2005-05-23 2007-01-04 Shivkumar Chiruvolu In-flight modification of inorganic particles within a reaction product flow
FR2894493B1 (fr) 2005-12-08 2008-01-18 Commissariat Energie Atomique Systeme et procede de production de poudres nanometriques ou sub-micrometriques en flux continu sous l'action d'une pyrolyse laser
CN100517140C (zh) * 2006-10-23 2009-07-22 财团法人工业技术研究院 动态光在线粒径量测与控制系统
WO2008079242A1 (en) * 2006-12-19 2008-07-03 Nanogram Corporation Hollow silica nanoparticles as well as synthesis processes and applications thereof
WO2008118865A2 (en) * 2007-03-27 2008-10-02 Innovalight, Inc. Optimized laser pyrolysis reactor and methods therefor
FR2916193B1 (fr) * 2007-05-18 2009-08-07 Commissariat Energie Atomique Synthese par pyrolyse laser de nanocristaux de silicium.
US8471170B2 (en) 2007-07-10 2013-06-25 Innovalight, Inc. Methods and apparatus for the production of group IV nanoparticles in a flow-through plasma reactor
US8968438B2 (en) 2007-07-10 2015-03-03 Innovalight, Inc. Methods and apparatus for the in situ collection of nucleated particles
US20090020411A1 (en) * 2007-07-20 2009-01-22 Holunga Dean M Laser pyrolysis with in-flight particle manipulation for powder engineering
JP5526033B2 (ja) * 2007-11-14 2014-06-18 ザ ユニバーシティ オブ クィーンズランド 微粒子製造装置および微粒子製造方法
US20110232312A1 (en) 2010-03-24 2011-09-29 Whirlpool Corporation Flexible wick as water delivery system
US8895962B2 (en) * 2010-06-29 2014-11-25 Nanogram Corporation Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods
US9925512B2 (en) 2013-03-14 2018-03-27 Crititech, Inc. Equipment assembly for and method of processing particles
US8778181B1 (en) 2013-03-14 2014-07-15 Crititech, Inc. Equipment assembly for and method of processing particles
WO2014189886A1 (en) 2013-05-24 2014-11-27 Nanogram Corporation Printable inks with silicon/germanium based nanoparticles with high viscosity alcohol solvents
FI129342B (en) 2015-11-11 2021-12-15 Teknologian Tutkimuskeskus Vtt Oy Multipass cell with small volume
WO2018098189A1 (en) * 2016-11-22 2018-05-31 Hepatochem, Inc. Photochemistry device
KR102176234B1 (ko) * 2017-09-07 2020-11-09 주식회사 엘지화학 나노 입자 생산 반응기
KR102299019B1 (ko) * 2018-07-23 2021-09-08 주식회사 엘지화학 나노입자 합성 장치 및 이를 이용한 나노입자의 합성 방법
US10981132B2 (en) 2018-11-01 2021-04-20 Saudi Arabian Oil Company Aerosolization method for producing solid product particles having desired characteristics from precursor particles
KR102564937B1 (ko) * 2021-10-18 2023-08-08 주식회사 그린시티솔루션 총유기탄소 분석시스템용 이산화탄소 검출장치와 이것이 구비된 총유기탄소 분석시스템 그리고 다공성 지지체의 제조방법

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Also Published As

Publication number Publication date
WO2001007155A1 (en) 2001-02-01
US20010051118A1 (en) 2001-12-13
US20050200036A1 (en) 2005-09-15
CN1202908C (zh) 2005-05-25
WO2001007155A9 (en) 2002-08-29
EP1230016A1 (en) 2002-08-14
KR20020047094A (ko) 2002-06-21
JP2003505233A (ja) 2003-02-12
EP1230016A4 (en) 2004-05-12
CN1374883A (zh) 2002-10-16

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