JP2003505233A - 粒子製造装置 - Google Patents
粒子製造装置Info
- Publication number
- JP2003505233A JP2003505233A JP2001512027A JP2001512027A JP2003505233A JP 2003505233 A JP2003505233 A JP 2003505233A JP 2001512027 A JP2001512027 A JP 2001512027A JP 2001512027 A JP2001512027 A JP 2001512027A JP 2003505233 A JP2003505233 A JP 2003505233A
- Authority
- JP
- Japan
- Prior art keywords
- reactant
- reaction
- reaction chamber
- particle
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 172
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 61
- 238000006243 chemical reaction Methods 0.000 claims abstract description 393
- 239000000376 reactant Substances 0.000 claims abstract description 374
- 239000000047 product Substances 0.000 claims description 86
- 239000007789 gas Substances 0.000 claims description 80
- 230000003287 optical effect Effects 0.000 claims description 75
- 239000011261 inert gas Substances 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 14
- 239000002105 nanoparticle Substances 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 239000007795 chemical reaction product Substances 0.000 claims description 7
- 239000010408 film Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims 2
- 238000001725 laser pyrolysis Methods 0.000 abstract description 23
- 230000004907 flux Effects 0.000 abstract description 21
- 239000000843 powder Substances 0.000 abstract description 10
- 239000000126 substance Substances 0.000 abstract description 8
- 239000000443 aerosol Substances 0.000 description 62
- 238000013459 approach Methods 0.000 description 21
- 239000007788 liquid Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 20
- 150000001875 compounds Chemical class 0.000 description 16
- 239000012159 carrier gas Substances 0.000 description 12
- 238000013461 design Methods 0.000 description 12
- 238000011109 contamination Methods 0.000 description 10
- 230000000875 corresponding effect Effects 0.000 description 7
- 230000005855 radiation Effects 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 239000006096 absorbing agent Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- -1 polypropylene Polymers 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000002296 dynamic light scattering Methods 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 238000010587 phase diagram Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005574 cross-species transmission Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003921 particle size analysis Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J6/00—Heat treatments such as Calcining; Fusing ; Pyrolysis
- B01J6/008—Pyrolysis reactions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/121—Coherent waves, e.g. laser beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0879—Solid
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Thermal Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/362,631 | 1999-07-21 | ||
| US09/362,631 US20010051118A1 (en) | 1999-07-21 | 1999-07-21 | Particle production apparatus |
| PCT/US2000/019578 WO2001007155A1 (en) | 1999-07-21 | 2000-07-18 | Particle production apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003505233A true JP2003505233A (ja) | 2003-02-12 |
| JP2003505233A5 JP2003505233A5 (enExample) | 2007-09-06 |
Family
ID=23426886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001512027A Pending JP2003505233A (ja) | 1999-07-21 | 2000-07-18 | 粒子製造装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US20010051118A1 (enExample) |
| EP (1) | EP1230016A4 (enExample) |
| JP (1) | JP2003505233A (enExample) |
| KR (1) | KR100670713B1 (enExample) |
| CN (1) | CN1202908C (enExample) |
| WO (1) | WO2001007155A1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009518174A (ja) * | 2005-12-08 | 2009-05-07 | コミッサリア タ レネルジー アトミーク | レーザ熱分解の作用によるナノ又はサブミクロン粉体の連続流生成システム及び方法 |
| JP2020530429A (ja) * | 2017-09-07 | 2020-10-22 | エルジー・ケム・リミテッド | ナノ粒子生産反応器 |
| KR20230055181A (ko) * | 2021-10-18 | 2023-04-25 | 주식회사 그린시티솔루션 | 총유기탄소 분석시스템용 이산화탄소 검출장치와 이것이 구비된 총유기탄소 분석시스템 그리고 다공성 지지체의 제조방법 |
Families Citing this family (32)
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|---|---|---|---|---|
| US6919054B2 (en) | 2002-04-10 | 2005-07-19 | Neophotonics Corporation | Reactant nozzles within flowing reactors |
| US6849334B2 (en) | 2001-08-17 | 2005-02-01 | Neophotonics Corporation | Optical materials and optical devices |
| US6788866B2 (en) | 2001-08-17 | 2004-09-07 | Nanogram Corporation | Layer materials and planar optical devices |
| US6952504B2 (en) | 2001-12-21 | 2005-10-04 | Neophotonics Corporation | Three dimensional engineering of planar optical structures |
| US7164818B2 (en) | 2001-05-03 | 2007-01-16 | Neophontonics Corporation | Integrated gradient index lenses |
| JP3413131B2 (ja) * | 1999-10-04 | 2003-06-03 | キヤノン株式会社 | 光学装置及びデバイス製造方法 |
| AU2002224399A1 (en) | 2000-10-17 | 2002-04-29 | Neophotonics Corporation | Coating formation by reactive deposition |
| DK1335829T3 (da) | 2000-10-26 | 2011-12-05 | Neophotonics Corp | Optiske strukturer med flere lag |
| US6917511B1 (en) | 2001-08-14 | 2005-07-12 | Neophotonics Corporation | Reactive deposition for the formation of chip capacitors |
| US6723435B1 (en) | 2001-08-28 | 2004-04-20 | Nanogram Corporation | Optical fiber preforms |
| US7521097B2 (en) * | 2003-06-06 | 2009-04-21 | Nanogram Corporation | Reactive deposition for electrochemical cell production |
| US8865271B2 (en) | 2003-06-06 | 2014-10-21 | Neophotonics Corporation | High rate deposition for the formation of high quality optical coatings |
| US7160489B2 (en) * | 2003-10-10 | 2007-01-09 | The Board Of Trustees Of The University Of Illinois | Controlled chemical aerosol flow synthesis of nanometer-sized particles and other nanometer-sized products |
| US20070142589A1 (en) * | 2004-02-24 | 2007-06-21 | Rogers Martin E | Process and systems for the efficient production of polymeric microspheres |
| US20070003694A1 (en) * | 2005-05-23 | 2007-01-04 | Shivkumar Chiruvolu | In-flight modification of inorganic particles within a reaction product flow |
| CN100517140C (zh) * | 2006-10-23 | 2009-07-22 | 财团法人工业技术研究院 | 动态光在线粒径量测与控制系统 |
| WO2008079242A1 (en) * | 2006-12-19 | 2008-07-03 | Nanogram Corporation | Hollow silica nanoparticles as well as synthesis processes and applications thereof |
| WO2008118865A2 (en) * | 2007-03-27 | 2008-10-02 | Innovalight, Inc. | Optimized laser pyrolysis reactor and methods therefor |
| FR2916193B1 (fr) * | 2007-05-18 | 2009-08-07 | Commissariat Energie Atomique | Synthese par pyrolyse laser de nanocristaux de silicium. |
| US8471170B2 (en) | 2007-07-10 | 2013-06-25 | Innovalight, Inc. | Methods and apparatus for the production of group IV nanoparticles in a flow-through plasma reactor |
| US8968438B2 (en) | 2007-07-10 | 2015-03-03 | Innovalight, Inc. | Methods and apparatus for the in situ collection of nucleated particles |
| US20090020411A1 (en) * | 2007-07-20 | 2009-01-22 | Holunga Dean M | Laser pyrolysis with in-flight particle manipulation for powder engineering |
| JP5526033B2 (ja) * | 2007-11-14 | 2014-06-18 | ザ ユニバーシティ オブ クィーンズランド | 微粒子製造装置および微粒子製造方法 |
| US20110232312A1 (en) | 2010-03-24 | 2011-09-29 | Whirlpool Corporation | Flexible wick as water delivery system |
| US8895962B2 (en) * | 2010-06-29 | 2014-11-25 | Nanogram Corporation | Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods |
| US9925512B2 (en) | 2013-03-14 | 2018-03-27 | Crititech, Inc. | Equipment assembly for and method of processing particles |
| US8778181B1 (en) | 2013-03-14 | 2014-07-15 | Crititech, Inc. | Equipment assembly for and method of processing particles |
| WO2014189886A1 (en) | 2013-05-24 | 2014-11-27 | Nanogram Corporation | Printable inks with silicon/germanium based nanoparticles with high viscosity alcohol solvents |
| FI129342B (en) | 2015-11-11 | 2021-12-15 | Teknologian Tutkimuskeskus Vtt Oy | Multipass cell with small volume |
| WO2018098189A1 (en) * | 2016-11-22 | 2018-05-31 | Hepatochem, Inc. | Photochemistry device |
| KR102299019B1 (ko) * | 2018-07-23 | 2021-09-08 | 주식회사 엘지화학 | 나노입자 합성 장치 및 이를 이용한 나노입자의 합성 방법 |
| US10981132B2 (en) | 2018-11-01 | 2021-04-20 | Saudi Arabian Oil Company | Aerosolization method for producing solid product particles having desired characteristics from precursor particles |
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| US4554291A (en) * | 1983-05-16 | 1985-11-19 | Allied Corporation | Iron/silicon-based catalyst exhibiting high selectivity to C2 -C62 Fischer-Tropsch reactions |
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| US4558017A (en) * | 1984-05-14 | 1985-12-10 | Allied Corporation | Light induced production of ultrafine powders comprising metal silicide powder and silicon |
| US4536252A (en) * | 1985-02-07 | 1985-08-20 | The United States Of America As Represented By The Secretary Of The Army | Laser-induced production of nitrosyl fluoride for etching of semiconductor surfaces |
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-
1999
- 1999-07-21 US US09/362,631 patent/US20010051118A1/en not_active Abandoned
-
2000
- 2000-07-18 WO PCT/US2000/019578 patent/WO2001007155A1/en not_active Ceased
- 2000-07-18 JP JP2001512027A patent/JP2003505233A/ja active Pending
- 2000-07-18 EP EP00947495A patent/EP1230016A4/en not_active Withdrawn
- 2000-07-18 CN CNB008131511A patent/CN1202908C/zh not_active Expired - Fee Related
- 2000-07-18 KR KR1020027000869A patent/KR100670713B1/ko not_active Expired - Fee Related
-
2005
- 2005-05-03 US US11/122,284 patent/US20050200036A1/en not_active Abandoned
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009518174A (ja) * | 2005-12-08 | 2009-05-07 | コミッサリア タ レネルジー アトミーク | レーザ熱分解の作用によるナノ又はサブミクロン粉体の連続流生成システム及び方法 |
| JP2020530429A (ja) * | 2017-09-07 | 2020-10-22 | エルジー・ケム・リミテッド | ナノ粒子生産反応器 |
| JP7001231B2 (ja) | 2017-09-07 | 2022-01-19 | エルジー・ケム・リミテッド | ナノ粒子生産反応器 |
| US11577209B2 (en) | 2017-09-07 | 2023-02-14 | Lg Chem, Ltd. | Reactor for nanoparticle production |
| KR20230055181A (ko) * | 2021-10-18 | 2023-04-25 | 주식회사 그린시티솔루션 | 총유기탄소 분석시스템용 이산화탄소 검출장치와 이것이 구비된 총유기탄소 분석시스템 그리고 다공성 지지체의 제조방법 |
| KR102564937B1 (ko) | 2021-10-18 | 2023-08-08 | 주식회사 그린시티솔루션 | 총유기탄소 분석시스템용 이산화탄소 검출장치와 이것이 구비된 총유기탄소 분석시스템 그리고 다공성 지지체의 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001007155A1 (en) | 2001-02-01 |
| US20010051118A1 (en) | 2001-12-13 |
| KR100670713B1 (ko) | 2007-01-18 |
| US20050200036A1 (en) | 2005-09-15 |
| CN1202908C (zh) | 2005-05-25 |
| WO2001007155A9 (en) | 2002-08-29 |
| EP1230016A1 (en) | 2002-08-14 |
| KR20020047094A (ko) | 2002-06-21 |
| EP1230016A4 (en) | 2004-05-12 |
| CN1374883A (zh) | 2002-10-16 |
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