JP7001231B2 - ナノ粒子生産反応器 - Google Patents
ナノ粒子生産反応器 Download PDFInfo
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- JP7001231B2 JP7001231B2 JP2020506338A JP2020506338A JP7001231B2 JP 7001231 B2 JP7001231 B2 JP 7001231B2 JP 2020506338 A JP2020506338 A JP 2020506338A JP 2020506338 A JP2020506338 A JP 2020506338A JP 7001231 B2 JP7001231 B2 JP 7001231B2
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- 239000002105 nanoparticle Substances 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000002994 raw material Substances 0.000 claims description 21
- 238000011010 flushing procedure Methods 0.000 claims description 15
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 239000001569 carbon dioxide Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 12
- 238000004088 simulation Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 3
- 238000001725 laser pyrolysis Methods 0.000 description 3
- 238000007792 addition Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005543 nano-size silicon particle Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/121—Coherent waves, e.g. laser beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J6/00—Heat treatments such as Calcining; Fusing ; Pyrolysis
- B01J6/008—Pyrolysis reactions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/06—Solidifying liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/26—Nozzle-type reactors, i.e. the distribution of the initial reactants within the reactor is effected by their introduction or injection through nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
- B01J4/002—Nozzle-type elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0869—Feeding or evacuating the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0875—Gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/12—Processes employing electromagnetic waves
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electromagnetism (AREA)
- Thermal Sciences (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Silicon Compounds (AREA)
Description
本出願は、2017年9月7日に出願された大韓民国特許出願第10-2017-0114288号に基づく優先権の利益を主張し、該当大韓民国特許出願の文献に開示されたすべての内容は本明細書の一部として組み込まれる。
本発明は、ナノ粒子生産反応器に関する。
Claims (7)
- 原料ガスが供給される第1ノズルを含むメインチャンバと、
メインチャンバと流体移動可能に連結され、内部にフラッシングガスを供給するための第2ノズルを含むレンズハウジングと、
レンズハウジングに装着されたレンズと、
レンズを通過してメインチャンバ内の原料ガスに到逹するようにレーザーを照射するための光源と、
メインチャンバで生成されたナノ粒子が排出されるフードと、を含み、
レンズハウジングは、メインチャンバに向ける方向に沿って少なくとも一部領域の断面積が小さくなるように設けられ、
レンズハウジングは、
メインチャンバに向ける方向に沿って断面積が一定に維持される第1領域、
第1領域からメインチャンバ側に延長され、断面積が減少する第2領域、及び、
第2領域から延長され、第2領域と中心軸が同軸上に位置しない第3領域をさらに含む、
ナノ粒子生産反応器。 - レンズは、第1領域側に配置される、請求項1に記載のナノ粒子生産反応器。
- 第2ノズルは、第1領域側に配置される、請求項1または2に記載のナノ粒子生産反応器。
- 第1領域と第2領域は、中心軸が同軸上に位置するように設けられる、請求項1から3のいずれか一項に記載のナノ粒子生産反応器。
- レンズハウジングは、第1領域の中心軸が第1ノズルの中心軸と直交するように配置され、
第3領域は、第1領域に対して第1ノズル側に下向きに傾斜される、請求項1から4のいずれか1項に記載のナノ粒子生産反応器。 - 光源は、レーザーが第1領域~第3領域を通過してメインチャンバ内に照射されるように配置される、請求項5に記載のナノ粒子生産反応器。
- 光源は、二酸化炭素(CO2)レーザーを照射するように設けられ、
原料ガスは、モノシラン(SiH4)を含む、請求項1から6のいずれか一項に記載のナノ粒子生産反応器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020170114288A KR102176234B1 (ko) | 2017-09-07 | 2017-09-07 | 나노 입자 생산 반응기 |
KR10-2017-0114288 | 2017-09-07 | ||
PCT/KR2018/010361 WO2019050270A1 (ko) | 2017-09-07 | 2018-09-05 | 나노 입자 생산 반응기 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020530429A JP2020530429A (ja) | 2020-10-22 |
JP7001231B2 true JP7001231B2 (ja) | 2022-01-19 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2020506338A Active JP7001231B2 (ja) | 2017-09-07 | 2018-09-05 | ナノ粒子生産反応器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11577209B2 (ja) |
EP (1) | EP3680010B1 (ja) |
JP (1) | JP7001231B2 (ja) |
KR (1) | KR102176234B1 (ja) |
CN (1) | CN111050898B (ja) |
WO (1) | WO2019050270A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000176670A (ja) | 1998-12-16 | 2000-06-27 | Ricoh Microelectronics Co Ltd | 光加工装置 |
JP2003505233A (ja) | 1999-07-21 | 2003-02-12 | ナノグラム・コーポレーション | 粒子製造装置 |
US20170189888A1 (en) | 2015-02-27 | 2017-07-06 | Shonano Co., Ltd | Nanoparticle preparation device using laser |
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JPH0638912B2 (ja) * | 1988-03-23 | 1994-05-25 | 工業技術院長 | 微粒子製造方法及び装置 |
NZ272635A (en) * | 1994-08-02 | 1998-02-26 | Mcneil Ppc Inc | Laser cutting/drilling processing head that creates a vortex gas flow within the head to clean and prevent back spatting of particles onto the lens therein |
US20030077221A1 (en) * | 2001-10-01 | 2003-04-24 | Shivkumar Chiruvolu | Aluminum oxide powders |
US6290735B1 (en) | 1997-10-31 | 2001-09-18 | Nanogram Corporation | Abrasive particles for surface polishing |
US6919054B2 (en) | 2002-04-10 | 2005-07-19 | Neophotonics Corporation | Reactant nozzles within flowing reactors |
WO2007125816A1 (ja) * | 2006-04-24 | 2007-11-08 | Nec Corporation | カーボンナノホーンの製造装置及び製造方法 |
WO2008001188A2 (en) * | 2006-06-29 | 2008-01-03 | Cadila Pharmaceuticals Limited | An improved process for the preparation of substantially pure aripiprazole |
US20080013589A1 (en) * | 2006-07-17 | 2008-01-17 | Cymer, Inc. | Window assembly for a gas discharge laser chamber |
WO2008118865A2 (en) | 2007-03-27 | 2008-10-02 | Innovalight, Inc. | Optimized laser pyrolysis reactor and methods therefor |
US8580130B2 (en) * | 2007-12-20 | 2013-11-12 | The Regents Of The University Of California | Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus |
EP2425916B1 (en) * | 2010-09-01 | 2014-11-12 | Directa Plus S.p.A. | Multiple feeder reactor for the production of nanoparticles of metal |
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KR20130130284A (ko) * | 2012-05-22 | 2013-12-02 | 한국에너지기술연구원 | 레이저를 이용한 나노입자 합성장치 및 방법 |
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KR101400836B1 (ko) * | 2013-02-01 | 2014-05-29 | 한국에너지기술연구원 | 라인 빔 레이저를 이용한 나노입자 합성장치 |
KR101505637B1 (ko) * | 2014-12-16 | 2015-03-24 | 주식회사 쇼나노 | 레이저를 이용한 나노입자 제조방법 |
CN104966981B (zh) * | 2015-07-14 | 2018-03-13 | 京东方科技集团股份有限公司 | 激光器 |
KR20170114288A (ko) | 2016-04-02 | 2017-10-16 | 김해동 | P2p 지식 재산 담보 대출 금융 기술 서비스 방법 및 그 장치 |
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2017
- 2017-09-07 KR KR1020170114288A patent/KR102176234B1/ko active IP Right Grant
-
2018
- 2018-09-05 JP JP2020506338A patent/JP7001231B2/ja active Active
- 2018-09-05 US US16/638,647 patent/US11577209B2/en active Active
- 2018-09-05 EP EP18853830.0A patent/EP3680010B1/en active Active
- 2018-09-05 WO PCT/KR2018/010361 patent/WO2019050270A1/ko unknown
- 2018-09-05 CN CN201880052374.4A patent/CN111050898B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000176670A (ja) | 1998-12-16 | 2000-06-27 | Ricoh Microelectronics Co Ltd | 光加工装置 |
JP2003505233A (ja) | 1999-07-21 | 2003-02-12 | ナノグラム・コーポレーション | 粒子製造装置 |
US20170189888A1 (en) | 2015-02-27 | 2017-07-06 | Shonano Co., Ltd | Nanoparticle preparation device using laser |
Also Published As
Publication number | Publication date |
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KR20190027472A (ko) | 2019-03-15 |
US20210129100A1 (en) | 2021-05-06 |
JP2020530429A (ja) | 2020-10-22 |
CN111050898B (zh) | 2022-02-25 |
EP3680010A1 (en) | 2020-07-15 |
CN111050898A (zh) | 2020-04-21 |
US11577209B2 (en) | 2023-02-14 |
EP3680010A4 (en) | 2020-07-29 |
KR102176234B1 (ko) | 2020-11-09 |
EP3680010B1 (en) | 2023-05-03 |
WO2019050270A1 (ko) | 2019-03-14 |
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