KR100662241B1 - Dry type cleaning apparatus - Google Patents

Abstract

A dry cleaning apparatus is provided to prevent a secondary contamination of a cleaning object by adsorbing and removing unwanted material from carbon dioxide using a purifying unit. A dry cleaning apparatus includes a purifying unit, a fine control valve and an ionizing unit. The purifying unit is used for purifying carbon dioxide supplied from a cylinder. The fine control valve is used for controlling the supply of the purified carbon dioxide to a nozzle. The ionizing unit(73) is used for ionizing the carrier gas supplied from the outside and supplying the ionized carrier gas to the nozzle. The purifying unit is composed of an adsorbent adding portion(30) for mixing an adsorbent to the carbon dioxide with an unwanted material and a purifying portion(40) for filtering the adsorbent adsorbed with the unwanted material.

Description

Dry cleaning apparatus {Dry type cleaning apparatus}

1 is a block diagram of an embodiment of a dry cleaning apparatus according to the present invention.

Figure 2 is an exploded perspective view of one embodiment of the spray nozzle of the dry cleaning apparatus according to the present invention.

3 is a cross-sectional view of the spray nozzle shown in FIG. 2.

4 is a longitudinal cross-sectional view of the spray nozzle shown in FIG. 2.

5 is an enlarged cross-sectional view of the dry ice generator.

6 is another embodiment of the injection nozzle final injection pipe of the dry cleaning device according to the present invention.

* Description of the symbols for the main parts of the drawings *

10: bomb 20: pressure gauge

30: adsorbent added part 40: purifying part

50: Air actuator valve 60: Micrometering valve

71: regulator 72: solenoid valve

73: ionization part 74: branch pipe

100: mixing chamber 200: injection unit

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dry cleaning apparatus, and more particularly, to a dry cleaning apparatus for spraying sublimable solid particles onto a surface of a cleaning object to clean the surface of the cleaning object.

Recently, techniques for dry cleaning using sublimable solid particles represented by dry ice have been developed to clean the surface of a cleaning object without defects. An example of such a prior art is US Pat. No. 4,806,171. This U.S. Patent No. 4,806,171 adiabatically expands a mixture comprising gaseous carbon dioxide and liquid carbonic acid through a multi-stage chamber to produce approximately 46% dry ice particles, and accelerates and injects the particles through a venturi tube. The manner is described.

However, the nozzle described in U.S. Patent No. 4,806,171 thermally expands the mixture containing gaseous carbon dioxide and liquid carbonic acid droplets, and allows dry ice particles to be produced while passing through a venturi tube. There was a problem of low solid conversion.

That is, there is a problem in that a relatively large amount of carbon dioxide gas should be used to generate sufficient dry ice particles due to the low solid conversion rate.

In addition, the carbon dioxide gas required to generate the dry ice particles includes oil, and the dry ice particles using the carbon dioxide containing such oil remain when the oil sublimates after colliding with the surface of the object to be cleaned. There was a problem of recontamination.

In view of the above problems, the present invention has another object to provide a dry cleaning apparatus which can prevent the cleaning object from being contaminated again or damaged by static electricity after dry cleaning.

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Dry cleaning apparatus according to the present invention for achieving the above object, the purification unit for purifying the carbon dioxide supplied from the bomb, the fine adjustment valve for controlling the supply amount of the carbon dioxide purified from the purifier unit, and ionizing the carrier gas And an ionization unit to supply the nozzle.

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When described in detail with reference to the accompanying drawings an embodiment of the present invention configured as described as follows.

1 is a block diagram of an embodiment of a dry cleaning apparatus according to the present invention.

Referring to this, the dry cleaning apparatus according to the present invention includes a cylinder 10 for storing liquefied carbon dioxide and supplying gaseous carbon dioxide, a pressure gauge 20 for measuring the pressure of carbon dioxide output from the cylinder 10, The adsorbent addition unit 30 for adding the adsorbent to the carbon dioxide, the purifying unit 40 for filtering the adsorbent adsorbed with carbon dioxide, the air actuator valve 50 for controlling the amount of carbon dioxide supplied to the nozzle and the micro metering valve A condensation preventing gas (60), a regulator (71) and a solenoid valve (72) for supplying a carrier gas, an ionizer (73) for ionizing the carrier gas and supplying it to a nozzle, and a part of the ionized carrier gas It comprises a branch pipe (74) branched from the carrier gas supply pipe to be used as.

Hereinafter, the configuration and operation of the dry cleaning apparatus according to the present invention configured as described above in more detail.

First, the liquefied carbon dioxide is stored in the cylinder 10, and a plurality of cylinders 10 may be installed to extend the replacement cycle of the cylinder according to an increase in the amount of carbon dioxide used.

Carbon dioxide flowing out of the bomb 10 may be a gas phase or a liquid phase. The degree of outflow of carbon dioxide may be measured in the pressure gauge (20).

Next, the adsorbent addition unit 30 adds the adsorbent to the carbon dioxide. This contains 1 to 5 ppm of oil in general industrial carbon dioxide gas, and is intended to adsorb and remove this oil.

In this way, the oil adsorbed by the adsorbent in the carbon dioxide is filtered out by the purification unit 40 together with the adsorbent.

The air actuator valve 50 then controls the transfer of the purified carbon dioxide to the nozzle 80 side, and the micro metering valve 60 controls the flow rate of the carrier gas supplied to the nozzle 80.

The reason for using the air actuator valve 50 is to prevent the problem that the carbon dioxide can be charged when using the electric valve.

In addition, the micro metering valve 60 controls the pressure of the carbon dioxide so that the high-pressure carbon dioxide and the low-pressure carrier gas can be properly mixed, and a Cv (coefficient value) of less than 0.004 is used.

The above description is about a path through which carbon dioxide enters the nozzle 80, and a carrier gas is introduced through a separate path. The carrier gas may use nitrogen gas or clean dry air (CDA).

The carrier gas flows into the ionizer 73 through the regulator 71 and the solenoid valve 72. Since the gas used in the dry cleaning device is dry, it is easy to generate static electricity by friction with pipes, and when static electricity is generated, it can be charged to tens of thousands of V when cleaning precision semiconductor parts. Abnormalities can occur.

In order to prevent this, the ionizer 73 ionizes the carrier gas using plasma or the like. Due to the ionization of the carrier gas, no static electricity is generated between the pipe and the carrier gas.

The ionized carrier gas flows into the nozzle 80 to assist the injection of the sublimable solid particles, and branches through the branch pipe 74 to prevent condensation from occurring on the surface of the nozzle 80. do.

As described above, the solid cleaning apparatus according to the present invention removes the oil contained in the carbon dioxide to prevent secondary contamination of the cleaning object and prevents the generation of static electricity by ionizing the carrier gas so that the cleaning object is prevented by static electricity. The damage can be prevented.

Hereinafter will be described in detail the configuration and operation of the embodiment of the injection nozzle applied to the dry cleaning apparatus according to the present invention.

Figure 2 is an exploded perspective view of one embodiment of the spray nozzle of the dry cleaning apparatus used in the dry cleaning apparatus according to the present invention, Figure 3 is a cross-sectional view of the spray nozzle shown in Figure 2, Figure 4 is a spray nozzle shown in Figure 2 Is a longitudinal cross-sectional view of.

Referring to this, one embodiment of the cleaning spray nozzle according to the present invention generates a dry ice by adiabatic expansion of the supplied carbon dioxide, the mixing chamber 100 for mixing the dry ice and the carrier gas, and the mixing chamber 100 Including the injection unit 200 to increase the particle diameter of the dry ice conveyed by the carrier gas and to increase the hardness of the dry ice.

The mixing chamber 100 thermally expands the carbon dioxide inlet 110 including the inlet 111 through which the liquid carbon dioxide is introduced and the liquid carbon dioxide introduced through the carbon dioxide inlet 110 to generate fine dry ice particles. The dry ice generator 130, the carrier gas inlet 120 positioned outside the dry ice generator 130, into which the carrier gas is introduced, and the dry ice generated through the dry ice generator 130. Mixing unit 140 for mixing the ice with the carrier gas and outflow.

The injection unit 200 insulates the dry ice and carrier gas uniformed through the buffer unit 220 and the buffer unit 220 to buffer and uniformly spray the dry ice carried by the carrier gas. Inflated to increase the particle size of the dry ice particles, the hardness of the final injection unit 230 for spraying on the cleaning object and the buffer unit 220 and the final injection unit 230 spaced apart from the predetermined distance It is sealed in a state and provided with a condensation prevention gas inlet 211 and a condensation prevention gas outlet 212 to allow the condensation prevention gas to flow in the outer diameter of the buffer unit 220 and the final injection unit 230 to generate condensation. It is configured to include a condensation preventing substrate 210 to prevent.

Hereinafter, the structure and operation of the nozzle of the dry cleaning device according to the present invention configured as described above will be described in more detail.

First, the carbon dioxide supply unit 110 supplies carbon dioxide introduced through the provided carbon dioxide supply port 111 to the dry ice generator 130.

5 is an enlarged cross-sectional view of the dry ice generator 130.

Referring to this, the dry ice generator 130 thermally expands the fine orifice 131 for pressurizing carbon dioxide introduced from the carbon dioxide supply unit 110 and the carbon dioxide passing through the fine orifice 131 to generate dry ice particles. It is configured to include an adiabatic expansion tube (132).

The diameter of the fine orifice 131 is preferably 0.1 to 0.35mm, the length is 0.2 to 0.5mm, the diameter of the adiabatic expansion tube 132 is about 1.2 to 1.5mm, the adiabatic expansion tube The length of 132 is 40-45 mm.

The limitation of the diameter and length of the fine orifice 131 and the adiabatic expansion tube 132 is to maximize the adiabatic expansion to increase the solid conversion rate of the dry ice particles.

In addition, the limitation of the length of the adiabatic expansion tube 132 is that if the length is too long, the growth of particles may be excessive, the nozzle may be clogged by dry ice particles, if the length is too short, the growth of dry ice particles This is because the cleaning power in the injecting state is lowered due to immaturity.

As described above, the dry ice generated in the dry ice generator 130 is mixed with the carrier gas in the mixing unit 140.

At this time, the carrier gas is preferably ionized nitrogen gas or ionized purified CDA. The mixing unit 140 has a shape in which an inclined surface 141 gradually decreases in diameter at an outlet side of the dry ice generator 130 to increase a flow rate of carrier gas, and thus the dry ice generator 130. The runoff of dry ice generated in the water becomes smooth.

In addition, vortex generation of the carrier gas can be prevented by installing the inclined surface 141 as described above.

Dry ice mixed with the carrier gas flows into the buffer unit 220.

The shape of the buffer unit 220 is a shape of a tube having a diameter of 3 to 4 mm larger than the output portion of the mixing unit 140 and a length of 50 to 100 mm, in the center one or more buffer pins 221 ) Is provided.

The buffer unit 220 serves to maintain uniformity of the particles when the dry ice particles and the carrier gas are injected.

Then, the dry ice particles of the buffer unit 220 increases the particle diameter of the dry ice particles carried by the carrier gas through the final injection pipe 230 by the carrier gas, and the hardness of the dry ice particles increases.

The final injection pipe 230 has a structure in which dry ice of the buffer unit 220 is introduced into the inlet pipe 231 by the carrier gas and pressurized dry ice and the carrier gas introduced through the inlet pipe 231. The orifice 232 and the injection port 233 for thermally expanding the dry ice passing through the orifice 232 and spraying the cleaning object.

At this time, the injection angle is to be injected in the range of 45 degrees to 60 degrees acute angle.

The shape of the portion connected to the orifice 232 of the inlet pipe 231 is a form in which the diameter gradually decreases, which is a structure that can prevent the generation of vortex. The diameter of the orifice 232 is suitably 1 to 1.5mm.

The condensation prevention substrate 210 is provided on the outer side of the final injection pipe 230 and the buffer unit 220, the condensation prevention substrate 210 is the surface of the final injection pipe 230, the buffer unit 220 Condensation prevention gas flows in to prevent condensation.

The condensation preventing gas may be used by branching the carrier gas.

6 is another embodiment of the injection nozzle final injection pipe 230 of the dry cleaning apparatus according to the present invention.

Referring to this, the injection nozzle final injection pipe 230 of the dry cleaning apparatus according to the present invention may be a slit 234 having no orifice.

3 and 4 has a shape of the final injection pipe 230 is a dry ice pressurized in the orifice 232 is adiabatic expansion at the injection port to increase the particle diameter of the dry ice particles, as shown in FIG. The final injection pipe 230 of the slit type is thermally expanded as the dry ice pressurized by the slit 234 is injected to the outside to increase the particle diameter of the dry ice particles and to increase the hardness thereof.

The slit 234 of the slit-shaped final injection pipe 230 is preferably 1mm x 12mm.

The present invention has been shown and described with reference to certain preferred embodiments, but the present invention is not limited to the above-described embodiments and has ordinary skill in the art to which the present invention pertains without departing from the concept of the present invention. Various changes and modifications are possible by the user.

As described above, the dry cleaning apparatus according to the present invention has an effect of preventing adsorption and removal of oil contained in carbon dioxide to prevent secondary contamination of the cleaning object.

In addition, the dry cleaning apparatus according to the present invention is to adjust the supply pressure of the carbon dioxide in consideration of the supply pressure difference between the carrier gas and carbon dioxide, the effect of preventing the reduction of the mixing ratio of carbon dioxide and carrier gas by the supply pressure difference. There is.

In addition, the dry cleaning apparatus according to the present invention has the effect of preventing the cleaning object from being damaged by ionizing the carrier gas to prevent static electricity from being generated in the carrier gas.

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Claims (16)

Purifier unit for purifying the carbon dioxide supplied from the bomb; Fine adjustment valve for controlling the supply amount of the carbon dioxide purified by the purifier unit to supply to the nozzle; And Drying apparatus comprising an ionizer for ionizing the carrier gas supplied from the outside to the nozzle. The method of claim 1, The purifier unit adsorbent addition unit for mixing the adsorbent adsorbing the oil contained in the carbon dioxide to the carbon dioxide; And Dry cleaner comprising a purifying unit for filtering the adsorbent adsorbed the oil. The method of claim 1, The ionization unit dry cleaning apparatus, characterized in that for ionizing the carrier gas using a plasma. The method according to any one of claims 1 to 3, Drying apparatus further comprises a branch pipe for branching the carrier gas ionized in the ionization portion flows to the surface of the nozzle opening. The method according to any one of claims 1 to 3, Drying apparatus further comprises an air actuator valve for controlling the flow rate of the purified carbon dioxide through the purifier unit in accordance with the pressure of the carrier gas to send to the fine adjustment valve side. The method of claim 4, wherein The nozzle comprises a mixing chamber for adiabatic expansion of the supplied carbon dioxide to produce dry ice, and mixing the dry ice and the carrier gas; An injection unit which increases the particle diameter of the dry ice carried by the carrier gas in the mixing chamber and increases the hardness of the dry ice; And And a condensation preventing substrate for preventing condensation of the injection portion by flowing a condensation preventing gas to the surface of the injection portion. The method of claim 6, The mixing chamber has an inlet for receiving carbon dioxide; Dry ice generating unit for producing a dry ice particles by adiabatic expansion of the carbon dioxide introduced into the inlet; And And a mixing unit having a carrier gas inlet and mixing the dry ice generated by the dry ice generator. The method of claim 7, wherein The dry ice generating unit includes a plurality of fine orifices pressurizing carbon dioxide introduced into the inlet; And Dry cleaning apparatus comprising a plurality of adiabatic expansion tube for adiabatic expansion of the pressurized carbon dioxide through each of the plurality of fine orifices. The method of claim 8, The diameter of the fine orifice is 0.1 to 0.35mm, the length is 0.2 to 0.5mm, the diameter of the adiabatic expansion tube is 1.2 to 1.5mm, the length of the dry cleaning device, characterized in that 40 to 45mm. The method of claim 7, wherein And the mixing part has an inclined surface in which the diameter of the output end side of the dry ice generating unit is gradually smaller than the diameter of the portion into which the carrier gas is introduced. The method of claim 6, The spray unit includes a buffer unit for improving the uniformity of dry ice supplied from the mixing chamber; And Drying apparatus comprising a final injection portion for increasing the particle size of the dry ice by adiabatic expansion by receiving the dry ice with increased uniformity in the buffer portion and increasing the hardness. The method of claim 11, The buffer unit is a tube of a relatively larger diameter than the diameter of the output tube of the mixing chamber, the dry cleaning device, characterized in that the buffer pin is provided in the inner center. The method of claim 11, The final injection unit comprises a plurality of orifices for pressing the dry ice particles supplied from the buffer unit; And Dry cleaning device comprising a spray hole for thermally expanding the dry ice particles pressurized by the plurality of orifices and sprayed to the cleaning object. The method of claim 11, The final injection unit comprises a slit-type injection port to pressurize the dry ice particles supplied from the buffer unit, and to adiabatic expansion from the outside. The method of claim 6, The condensation preventing substrate is sealed with a gap between the outer diameter of the injection unit, and a condensation preventing gas is introduced into the gap, and an inlet and an outlet port through which the introduced condensation preventing gas is allowed to flow out to the outside is provided. Dry cleaning equipment. The method of claim 15, The condensation preventing gas is a dry cleaning device, characterized in that the carrier gas is introduced into the branch.

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