KR100639832B1 - Continuous hydrogen furnace equipment for manufacturing diamond tool and heat treatment method of diamond tool material using the same - Google Patents

Abstract

The present invention relates to a continuous hydrogen furnace apparatus capable of performing heat treatment on an object to be treated in a core tube of a hydrogen atmosphere. The present invention provides a more reliable isolation of hydrogen from outside air from oxygen in outside air. It is an object of the present invention to provide a device with continuous hydrogen which prevents the risk of explosion caused by contact of oxygen in the water.

To this end, the present invention provides a continuous hydrogen furnace apparatus in which the inlet zone, the heating zone and the outlet zone are continuously arranged along a pipeline consisting of the inlet pipe, the core pipe and the outlet pipe, the continuous hydrogen furnace device being treated. A transfer unit provided to transfer the gas through the pipe, a heating unit provided around the core pipe to heat the object to be transferred into the core pipe, and blowing hydrogen gas into the pipe to form a hydrogen atmosphere inside the pipe. And a gas curtain unit which forms a gas curtain in the inlet pipe and the outlet pipe, and insulates the hydrogen atmosphere in the pipe from oxygen outside the pipe.

Continuous furnace, hydrogen furnace, hydrogen atmosphere, gas supply unit, gas curtain unit, nitrogen, slow cooling zone, heating unit, transfer unit

Description

CONTINUOUS HYDROGEN FURNACE EQUIPMENT FOR MANUFACTURING DIAMOND TOOL AND HEAT TREATMENT METHOD OF DIAMOND TOOL MATERIAL USING THE SAME}

1 is an overall view of a device with continuous hydrogen in accordance with an embodiment of the present invention.

2 is a sectional view taken along the line I-I of FIG.

3 is a view for explaining the conveyor belt structure of the transfer unit according to an embodiment of the present invention.

4 is a view for explaining a heater structure of a heating unit according to an embodiment of the present invention.

Figure 5 is a flow chart schematically showing a heat treatment method using a continuous hydrogen furnace apparatus of the present invention.

<Code Description of Main Parts of Drawing>

I: inlet area H: heating area

O: outlet area 10: pipeline

12: entrance tube 14: core officer

16: outlet pipe 20: transfer unit

42: slow cooling zone 44: cooling unit

50: heating unit 52: furnace structure mall

54: heater 56: temperature sensor

60: gas supply unit 70a, 70b: gas curtain unit

The present invention relates to a continuous hydrogen furnace apparatus, and more particularly, a continuous hydrogen furnace apparatus capable of forming the core tube in a hydrogen atmosphere, and performing heat treatment to the object to be treated in the core tube of the hydrogen atmosphere and It relates to a heat treatment method using the same.

In general, a continuous hydrogen furnace apparatus includes a pipeline including a core tube, and a gas supply unit capable of blowing hydrogen gas into the pipeline is connected to perform heat treatment such as sintering under a hydrogen atmosphere. Such continuous hydrogen furnace apparatus is widely used for heat treatment for sintering diamond tools.

Diamond tools are widely used in civil engineering, construction, stone, or precision machining. Examples include saws, core drills, cutters, profilers, and end mills. civil / construction / stone tools such as mills, strait wheels, ID wheels, rotary dressers, and edge grinding wheels.

In general, in order to manufacture a diamond tool, heat treatment processes such as sintering and fusion are required. As a filler used for fusion, a nickel-based filler having a very high bonding strength is mainly used. Melting temperature of such a nickel-based filler is 1020 ℃ ~ 1100 ℃, there is a problem that diamond is oxidized or carbonized at a temperature in this range.

Natural diamond is a very stable material that does not produce oxidation and carbonization at high temperatures. However, artificial diamond, which is mainly used in the manufacture of diamond tools, is oxidized when it is 600 ° C or higher. In addition, the artificial diamond is a carbonization phenomenon occurs when the temperature is more than 900 ℃ due to nickel contained therein, the strength is greatly reduced. Therefore, in order to prevent the oxidation and carbonization of diamond, a method of heat treating a diamond tool in a hydrogen atmosphere that is a reducing gas is widely used.

However, hydrogen may explode when it comes into contact with oxygen in the air. In particular, when the mass ratio of oxygen and hydrogen is 2: 1 at 500 ° C. or higher, the risk of explosion is further increased. Therefore, the inner side of the core tube where heat treatment such as sintering is performed is performed. It is necessary to isolate the hydrogen atmosphere from oxygen in the outside air.

On the other hand, for the sintering of the diamond tool, the diamond tool material is sintered at a high temperature and then cooled. The cooling is performed in a quenching manner, which causes thermal deformation in the metal part of the diamond tool. In many cases, the life of the product is shortened due to the high risk of vibration.

In addition, a non-metallic heating element such as silicon carbide is mainly used as a heating means for heating a processing object such as a diamond tool material, which increases the electrical resistance and deteriorates the heating value in the long term, and causes the heating state to deteriorate. There is a problem that must be replaced at the end of life.

The present invention is to solve the problems of the prior art, it is to continuously isolate the hydrogen atmosphere in the core tube from the oxygen in the outside air more continually to reduce or suppress the risk of explosion caused by the contact of hydrogen and oxygen in the outside air It is an object to provide an apparatus with formula hydrogen.

In addition, an object of the present invention is provided with a gas supply unit for forming the inside of the pipeline including the core pipe to the hydrogen atmosphere, the gas supply unit is configured to blow nitrogen into the inside of the pipeline is oxygen before the composition of the hydrogen atmosphere It is to provide a device as a continuous hydrogen that can remove the air in advance from the pipeline.

Further, another object of the present invention is to provide an apparatus with continuous hydrogen, which is configured to gradually cool an object to be heated in the core tube, to prevent thermal deformation that may occur upon cooling of the object.

In addition, the present invention more reliably isolates the hydrogen atmosphere inside the core tube from oxygen in the outside air when performing heat treatment such as sintering on the object to be treated, especially the diamond tool material, and explodes by contact of oxygen and hydrogen. It is to provide a heat treatment method that can prevent the risk.

In order to achieve the above object, the present invention provides an apparatus with continuous hydrogen in which the inlet region, the heating region and the outlet region are continuously arranged along the pipeline consisting of the inlet tube, the core tube and the outlet tube. The continuous hydrogen furnace apparatus includes a transfer unit provided to transfer a treatment object through the conduit, a heating unit provided around the core tube to heat the treatment object transferred into the core tube, and hydrogen gas in the conduit. And a gas supply unit which blows the gas into the hydrogen atmosphere and forms a gas curtain in the inlet pipe and the outlet pipe, and insulates the hydrogen atmosphere in the pipe from oxygen outside the pipe.

Here, the gas supply unit is preferably configured to selectively supply nitrogen and hydrogen into the conduit while being connected to a nitrogen supply source and a hydrogen supply source, respectively. In addition, the gas supply unit preferably further includes a hydrogen purifier for purifying hydrogen, such a gas supply unit allows the inside of the pipeline to form a high purity hydrogen atmosphere.

In addition, the heating unit preferably comprises a heater made of a metal heating element, the heater is made of a plurality, each of the heaters are controlled to have a different heating temperature based on the heating temperature measured by a plurality of temperature sensors Can be.

On the other hand, it is preferable that a slow cooling zone for slow cooling the object heated in the heating zone and a cooling unit for cooling the processed object cooled in the slow cooling zone at a lower temperature are continuously disposed in the outlet region. It can suppress or reduce thermal deformation that may occur in the object to be treated.

Furthermore, it is preferable that the core pipe is disposed horizontally, and each of the inlet pipe and the outlet pipe is inclined downward with respect to the core pipe by 5 to 10 degrees.

In addition, the present invention provides a heat treatment method for heat-treating an object to be treated using a continuous hydrogen furnace apparatus in which the inlet region, the heating region, and the outlet region are continuously arranged along a pipeline consisting of an inlet tube, a core tube, and an outlet tube. The heat treatment method according to the present invention comprises the step of forming an atmosphere inside the pipeline with a hydrogen atmosphere, by forming a nitrogen curtain in the inlet pipe and the outlet pipe to isolate the hydrogen in the pipeline from oxygen in the outside air, and the treatment Transferring an object from the inlet area toward the outlet area, heating the object to be treated in the core tube in the heating area, and cooling the object to be treated at the outlet area.

Here, the heat treatment method according to the invention preferably further comprises the step of removing the air in the pipeline containing oxygen as nitrogen gas, before the inside of the pipeline to form a hydrogen atmosphere. In addition, the cooling preferably includes slow cooling the object to be heated in the core tube and subsequently cooling the object to be slowly cooled to a lower temperature. The object to be treated is a diamond tool material, and the heat treatment is preferably sintered.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention.

1 is an overall view of a device with continuous hydrogen in accordance with an embodiment of the present invention. Referring to FIG. 1, the continuous hydrogen furnace apparatus 1 according to the present embodiment includes a pipe 10 inclined at both ends, and the pipeline 10 includes an inlet region I and a heating region H. And the inlet pipe 12, the core pipe 14, and the outlet pipe 16 along the outlet area O.

As will be described in detail below, the core pipe 14 is arranged horizontally in the heating zone H, and therein heat treatment for the object M (see FIG. 2), more preferably, in the diamond tool material. Sintering heat treatment is performed. In addition, the inlet pipe 12 and the outlet pipe 16 are respectively inclined downward at an angle of approximately 5 to 10 degrees at both ends of the core pipe 14, where the supply and cooling of the treatment object is substantially performed. At this time, when the inclination angle of the inlet pipe 12 and the outlet pipe 16 is less than 5 degrees, the consumption of hydrogen gas for forming the conduit 10, in particular the core pipe 14 in the hydrogen atmosphere is increased, When the inclination angle exceeds 10 degrees, the object to be processed slides on the conveyor belt described below, which makes it difficult to reliably convey the object.

On the other hand, the continuous hydrogen furnace apparatus 1 according to the present embodiment includes a transfer unit 20 for transferring the processing object from the inlet region (I) through the heating region (H) to the outlet region (O). The transfer unit 20 includes a drive motor 22, a pair of pulleys 24 and 26 which are rotationally driven by the drive motor 22 while being installed at both ends of the inlet region I and the outlet region O. And an inlet pipe 12, a core pipe 14, and a conveyor belt 25 extending inwardly of the outlet pipe 16 while spanning the pulley.

In addition, the transfer unit 20 is a mesh belt type conveyor (MESH BELT-TYPE CONVEYOR), and has a mesh conveyor belt 25 as shown in FIG. In addition, the transfer unit 20 may control the speed of the mesh conveyor belt 25 and the transfer speed of the object to be processed through the speed control of the drive motor 22.

The mesh conveyor belt 25 is formed of a heat-resistant metal material to withstand the heat applied to the core tube 14 by the heating unit 50 described below, in this embodiment, a high Ni-Cr content It is formed of STS310S or STS314 material having excellent heat resistance and oxidation resistance at high temperature. In addition, the mesh conveyor belt 25 is inclined at an angle of 5 to 10 degrees in the inlet pipe 12 and the outlet pipe 16, if the inclination angle exceeds 10 degrees, improper sliding of the object to be processed. Cause.

Meanwhile, the outlet region O is provided with a slow cooling section 42 and a cooling unit 44 for cooling the object to be heated in the heating region H without thermal deformation. The slow cooling zone 42 is provided adjacent to the core pipe 14 of the heating zone H on the outlet pipe 16, and air outside the outlet pipe 16 is discharged without installing any heating and cooling means. (16) and the object to be heated are cooled slowly by cooling the object to be conveyed therein. This slow cooling section 42 prevents the object to be quenched and also contributes to extending the life of the cooling unit 44 provided downstream.

In addition, the cooling unit 44 is composed of a plurality of water cooling jacket (44a, 44b) surrounding the outlet pipe (16). Each of the water cooling jackets 44a and 44b is installed in an independent structure with respect to each other, thereby facilitating assembly and repair thereof. In addition, by adjusting the amount of cooling water flowing through the plurality of water cooling jackets 44a and 44b, the object to be passed through the outlet pipe 16 can be cooled step by step, which together with the slow cooling zone 42 described above. Contributes to preventing heat deformation.

As mentioned above, a heating zone H is located between the inlet zone I and the outlet zone O, and the heating zone H has an outer side of the core pipe 14 and the core pipe 14. Surrounding heating unit 50 is provided. The core pipe 14 is piped to the inlet pipe 12 and the outlet pipe 16 at both ends, and the heating unit 50 has a furnace structure 52 to allow the core pipe 14 to penetrate.

FIG. 2 is a cross-sectional view taken along the line I-I of FIG. 1, and with reference to FIG. 2, the core tube 14 and the heating unit 50 surrounding the well are shown.

The core tube 14 is preferably made of STS310S or Inconel steel, which is particularly excellent in heat resistance. In particular, the Inconel steel has Ni as a main component, 15 wt% Cr, 6 to 7 wt% Fe, 2.5 wt% A heat resistant alloy prepared by adding Ti, less than 1 wt% Al, Mn, and Sn, and having a service life of approximately twice that of STS310S in the use temperature range of 1020 to 1040 ° C.

As shown in FIG. 2, the core pipe 14 allows passage of the conveyor belt 25 described above, allowing the conveyor belt 25 to transfer the object M to the outlet area. Meanwhile, the heating unit 50 includes a furnace structure 52 surrounding the core pipe 14 and a plurality of heaters 54 installed in the furnace structure 52.

The furnace structure 52 includes an iron frame 522, a heat insulating wall 524, and a heat insulating filler 523. The steel frame 522 forms an outer portion of the furnace structure 52, and the insulation wall 524 forms a base of the furnace structure 52 at the lower portion of the furnace structure 52. In addition, the insulating filler 523 fills the upper portion of the furnace structure 52 inside the steel frame 522 while being made of ceramic fibers. The insulating filler 523 prevents heat loss due to temperature difference between the inside and the outside of the furnace structure 52 to increase the overall thermal efficiency of the heating unit 50. At this time, the heat insulating wall 524 is preferably made of a refractory material and a heat insulating material, acid refractory (SiO ₂ ), neutral refractory (R ₂ O ₃ ), basic refractory (RO) and the like are used.

The plurality of heaters 54 are provided side by side above and below the core tube 14, respectively, and are made of a metal heating element according to a preferred embodiment of the present invention. The existing heater used in the existing heat treatment device is made of silicon carbide (SiC), so the initial electrical resistance is large, and the electrical resistance continues to increase and the heating value decreases with long-term use, so the voltage must be adjusted from time to time to maintain the same heating value. In contrast to the fact that the heater life was short, the heater of this embodiment is made of a metal heating element, which has excellent initial electrical resistance characteristics and constant electrical resistance, thereby reducing the effort of adjusting the voltage. It has the advantage of having a long life.

Examples of the metal heating element constituting the heater 54 include an alloy heating element such as Ni-Cr, Ni-Cr-Fe, Cr-Al-Fe, or platinum (Pt), tungsten (W), molybdenum (Mo), or the like. As shown in FIG. 4, the heater 54 of the present embodiment uses a coil-shaped metal heating element 542 made of Ni-Cr based alloy of Ni 76 wt% and Cr 19 wt% as shown in FIG. 4. I wind it up (544) and use it.

Furthermore, the heating unit 50 according to the present embodiment includes a plurality of temperature sensors 56. Each of the plurality of temperature sensors 56 faces the top or side of the core tube 14 while installed in the furnace structure (shown well in FIGS. 1 and 2). By using the temperature value in the furnace structure measured by the temperature sensor 56, the control unit (not shown) of the apparatus may control the upper and lower heaters 54 of the heating unit 50 to a separate heating temperature. As such, by controlling the temperature of the upper and lower heaters 54 differently, the upper and lower temperature variations in the core tube 14 can be reduced, which contributes to the improvement of the life of the core tube 14.

At this time, since the temperature of the core pipe 14 rises to about 1100 degreeC, the R type thermocouple which can measure temperature in the range of 0-1600 degreeC can be used suitably for this invention.

As is well known, R-type thermocouples are composed of Pt 87wt%, Rh 13wt%, and these R-type thermocouples can be continuously used in an oxidizing and inert atmosphere, generally from 0 to 1400 ° C, sometimes 1600 ° C.

Referring again to FIG. 1, the continuous hydrogen furnace apparatus 1 according to the present embodiment blows hydrogen into a conduit 10 including a core tube 14, and in particular, a core tube 14. ) Gas supply unit 60 for forming the inside of the hydrogen (H ₂ ) atmosphere.

In the present embodiment, the gas supply unit 60 is connected to the conduit 10 and two gas injectors 62 which can switch and blow hydrogen (H ₂ ) and nitrogen (N ₂ ) into the conduit 10. ). Each of the gas injectors 62 is continuously connected to the outlet pipe 16 to blow gas into the outlet pipe 16 and the core pipe 14 and the inlet pipe 12 through the outlet pipe 16. I can put it. In this embodiment, although the gas injector 62 is shown and described as two, this is only one embodiment and sufficient if more than one.

In addition, the gas supply unit 60 is connected to the nitrogen source 64 and the hydrogen source 66 to receive hydrogen and nitrogen, respectively, and hydrogen and nitrogen by valves v connected to the gas supply line 65. Can be switched and fed into the pipeline. Furthermore, the gas supply unit 60 further includes a hydrogen purifier 67 provided in the gas supply line between the hydrogen supply source 66 and the gas injector 62 to purify the hydrogen gas.

This hydrogen purifier 67 is particularly required for the sintering heat treatment of diamond tool products, and increases the purity of hydrogen gas supplied to 6N (99.9999%), greatly increasing the oxidation and carbonization of diamond which may be caused at high temperatures. It can be suppressed.

As mentioned above, the gas supply unit 60 according to the present embodiment can switch the hydrogen and nitrogen to supply them to the pipeline, the supply of nitrogen by the gas supply unit 60 is the hydrogen atmosphere of the pipeline 10 Before the composition serves to push the air in the conduit 10, that is, air containing oxygen to the outside of the conduit 10.

When the oxygen-containing air is discharged to the outside of the conduit 10, the gas supply unit 60 receives hydrogen from the hydrogen supply source 66 and blows it into the conduit 10, through which the conduit 10, in particular, The core tube 16 is composed of a hydrogen atmosphere.

Hydrogen filled in the conduit 10 from the gas supply unit 60 is lighter than other gases, and hydrogen is concentrated in the core pipe 14 positioned higher than the inclined inlet 12 and the outlet 16. By concentrating intensively, the composition of the hydrogen atmosphere of the core pipe 14 is enabled.

At this time, if the inclination angle of the inlet pipe 12 and the outlet pipe 16 is less than 10 degrees, the height of the core pipe 14 is reduced, so that the consumption of hydrogen for the composition of the hydrogen atmosphere increases.

Meanwhile, the continuous hydrogen furnace apparatus 1 according to the present embodiment further includes first and second gas curtain units 70a and 70b which form nitrogen curtains at the inlet pipe 12 and the outlet pipe 16. . The gas curtain units 70a and 70b include nitrogen injectors 74a and 74b which receive nitrogen from the nitrogen sources 72a and 72b and inject them into the inlet pipe 12 and the outlet pipe 16. Nitrogen curtain (N ₂ curtain) which more strictly isolates the hydrogen atmosphere of the core pipe 14 from oxygen in the outside air in the inlet pipe 12 and the outlet pipe 16 by nitrogen gas injection of the injectors 74a and 74b. Is formed. At this time, the nitrogen curtain may be formed before or after forming the hydrogen atmosphere.

Figure 5 is a flow chart for explaining the heat treatment method of the present invention, hereinafter, with reference to Figures 1 and 5, the diamond tool material as the object to be treated more sintering heat treatment in the apparatus with the above-described continuous hydrogen It will be described in detail.

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The heat treatment method according to the present embodiment generally includes a hydrogen atmosphere composition step (A), a transfer step (B), a heat treatment step (C), and a cooling step (D).

In the hydrogen atmosphere forming process (A), nitrogen gas is blown into the pipe line 10 by using the gas supply unit 60. Through this, air existing in the pipe line 10, that is, air containing oxygen, is piped. It is discharged by being pushed out through the both ends of (10). Thereafter, the gas supply unit 60 is switched to the hydrogen supply mode, and hydrogen is blown into the pipe line 10, whereby the pipe, in particular the core pipe 14, is filled with hydrogen. At this time, the oxygen-containing air is excluded by the nitrogen blown into the pipe line 10 first. Before and after the composition of the hydrogen atmosphere, nitrogen curtain units 70a and 70b are used to form nitrogen curtains in the inlet pipe 12 and the outlet pipe 16 of the pipe line 10, which are the pipes, in particular the core pipe. The hydrogen atmosphere of (14) is isolated from the oxygen-containing air outside the pipe.

In the conveying process (C), the conveying unit 20 is operated. As the conveying unit 20 is operated, the object to be treated, that is, the diamond tool material, is moved along the conveyor belt 25 into the pipeline 10. This transfer step is performed simultaneously with the heat treatment step and the cooling step described below.

In the heat treatment step (C), the diamond tool material moved into the heating zone (H), especially the core pipe (14), along the conveyor belt (25) is heated to a predetermined sintering temperature. This heating is made by a plurality of heaters 54 provided in the heating unit 50, the temperature of the heater 54 is controlled by a plurality of temperature sensors 56 installed in the furnace structure (52).

The cooling step (D) is a step of cooling the diamond tool material heated to a predetermined sintering temperature in the heat treatment step (C). First, in the slow cooling zone 42, the diamond tool material is cooled as an air cooling temperature, and then a plurality of It is cooled by the water cooling temperature using the water cooling jackets 44a and 44b. At this time, since the cooling temperatures of the water cooling jackets 44a and 44b can be set to different temperatures, it is possible to cool the diamond tool material step by step.

Since the heat treatment step (C) of the above-described processes is performed under a hydrogen atmosphere, the oxidation and carbonization of the diamond tool material is reduced or suppressed, and since the hydrogen atmosphere is strictly isolated from the outside air by the nitrogen curtain, the heat treatment of the diamond tool material is performed. The risk of explosion due to the contact of hydrogen and oxygen is prevented in advance.

In addition, the above-described cooling process (D) is performed by slow cooling the heated diamond tool material and then cooling it again, thereby reducing thermal deformation of the diamond tool material. In addition, cooling performed after the slow cooling may also have a plurality of different temperatures. Since the water cooling jacket is made in stages, it is possible to more strictly prevent thermal deformation of the diamond tool material due to quenching.

As described above, the continuous hydrogen furnace apparatus of the present invention is capable of forming a gas curtain to prevent the contact of hydrogen and oxygen in each of the inlet pipe and the outlet pipe through the core pipe, so that the hydrogen inside the pipe line with the oxygen outside the pipe line. Prevents direct contact, which reduces or suppresses the risk of explosion due to contact of oxygen and hydrogen.

In addition, the present invention is configured to remove air in the conduit by blowing nitrogen prior to blowing hydrogen into the conduit, in particular the core conduit, to avoid the risk of explosions that may occur when forming the hydrogen atmosphere of the conduit. .

In addition, the present invention has the effect of preventing the thermal deformation caused by the rapid cooling of the object by taking a cooling method of slowly cooling the object to be heated in the core tube at a low temperature.

In addition, the continuous hydrogen furnace apparatus according to the present invention has the effect of improving the life of the metal heating element instead of silicon carbide as a heating means for the object to be treated.

Claims (12)

In a continuous hydrogen furnace apparatus for the production of diamond tools in which the inlet zone, the heating zone and the outlet zone are continuously arranged along a pipeline consisting of an inlet pipe, a core pipe and an outlet pipe, A conveying unit provided to convey a diamond tool material through the conduit; A heating unit provided around the core tube to heat the diamond tool material transferred into the core tube; A gas supply unit which blows hydrogen gas into the conduit to form an inside of the conduit with a hydrogen atmosphere; A gas curtain unit which forms a gas curtain in the inlet pipe and the outlet pipe to isolate the hydrogen atmosphere in the pipe from oxygen outside the pipe; Continuous hydrogen furnace apparatus for manufacturing diamond tools, characterized in that it comprises. The continuous hydrogen furnace apparatus of claim 1, wherein the gas supply unit is configured to selectively supply nitrogen and hydrogen into the conduit while being connected to a nitrogen supply source and a hydrogen supply source. The continuous hydrogen furnace apparatus for manufacturing a diamond tool according to claim 2, wherein the gas supply unit includes a hydrogen purifier for purifying hydrogen. The apparatus of claim 1, wherein the gas curtain unit blows nitrogen gas into the inlet pipe and the outlet pipe to form a nitrogen curtain. The continuous hydrogen furnace apparatus for manufacturing a diamond tool according to claim 1, wherein the heating unit comprises a heater made of a metal heating element. The method of claim 1, wherein the heating unit is made of a plurality of heaters, each of the heaters can be controlled to have a different heating temperature based on the heating temperature measured by the plurality of temperature sensors to manufacture a diamond tool For continuous hydrogen furnace equipment. The cooling device according to any one of claims 1 to 6, wherein the outlet region includes a slow cooling zone for slow cooling the diamond tool material heated in the heating unit and a slow cooling of the diamond tool material cooled in the slow cooling zone at a lower temperature. Continuous hydrogen furnace apparatus for producing diamond tools, characterized in that the units are arranged in series. The diamond tool manufacturing according to any one of claims 1 to 6, wherein the core pipe is disposed horizontally, and each of the inlet pipe and the outlet pipe is inclined downward by 5 to 10 degrees with respect to the core pipe. For continuous hydrogen furnace equipment. The diamond tool material using the continuous hydrogen furnace device, which heat-treats the diamond tool material using the continuous hydrogen furnace device in which the inlet area, the heating area and the outlet area are continuously arranged along the pipeline consisting of the inlet pipe, the core pipe and the outlet pipe. In the heat treatment method, Forming a hydrogen atmosphere in the conduit, and forming a nitrogen curtain in the inlet pipe and the outlet pipe to separate the hydrogen atmosphere in the conduit from oxygen in the outside air; Transferring the diamond tool material from the inlet area toward the outlet area, performing a heat treatment for heating the diamond tool material in the core tube in the heating area, and cooling the diamond tool material subjected to the heat treatment in the outlet area. ; Heat treatment method of the diamond tool material using a continuous hydrogen furnace apparatus comprising a. 10. The method of claim 9, wherein nitrogen gas is blown into the pipe to remove air from the pipe before the inside of the pipe is formed with a hydrogen atmosphere. 10. The diamond using continuous hydrogen furnace apparatus of claim 9, wherein the cooling comprises cooling the diamond tool material heated in the core tube, followed by cooling the diamond tool material subsequently cooled to a lower temperature. Heat treatment method of tool material. The method of heat treatment of a diamond tool material according to any one of claims 9 to 11, wherein the heat treatment is sintering.

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