KR100637812B1 - Machining device - Google Patents

Abstract

In the processing apparatus which processes the conductive workpiece W by the conductive tool T, if the tool T and the workpiece | work W contact at the time of a process, the tool T-workpiece | work W-brush 315 The conductor 311 is composed of the main shaft housing 12, the main shaft 11, and the tool T in a closed circuit C. In the closed circuit C, an alternating current is induced by the high frequency generator 314 and the excitation coil 312. When the contact state between the tool T and the work W is changed, the impedance of the closed circuit C is changed, the alternating current is changed, and the induction current is generated in the detection coil 313, so that the contact state is monitored by using the same. ㆍ Can be controlled According to the monitoring conditions including the light contact / heavy contact discrimination threshold, the light contact state can always be maintained at the time of machining, so that the cutting resistance does not increase, and damage to the tool T and deterioration of machining accuracy can be prevented.

Brush, Lead, Spindle Housing, Tool, High Frequency Generator, Detection Coil, Excitation Coil

Description

Processing equipment {MACHINING DEVICE}

1 is a diagram showing a processing apparatus according to a first embodiment of the present invention.

2 (a) to 2 (d) are explanatory views of a contact state between a tool and a work according to the above embodiment;

3 is a diagram illustrating a processing apparatus according to a second embodiment of the present invention.

4 is a diagram showing a processing apparatus according to a third embodiment of the present invention.

5 is a diagram showing a processing apparatus according to a fourth embodiment of the present invention.

6 is a diagram showing a processing device according to a fifth embodiment of the present invention.

7 is a perspective view showing an NC processing machine according to a sixth embodiment of the present invention.

Fig. 8 is a graph showing the relationship between the cutting amount of the tool to the work and the output signal value according to the first embodiment of the present invention.

Fig. 9 is a spray diagram showing a relationship between an output signal value at the time of processing according to the second embodiment of the present invention and the surface roughness of the processed surface after processing.

10 is an explanatory diagram of a problem of the prior art that may occur when grinding a workpiece surface having a convex portion with a tool;

<Explanation of symbols for the main parts of the drawings>

1: tool rotation drive mechanism

2: work rotation drive mechanism

3: Contact state detection, monitoring and control system

4: NC device

11: spindle

12: spindle housing

13: thrust bearing

13A: Flange

13B: Home

14: spindle air bearing

21: work axis

22: work shaft housing

24: work shaft air bearing

25: insulation material

31: information acquisition means

311: lead wire

312: excitation coil

313: detection coil

314: high frequency generator

315: brush

321: Amplifier Unit

322 controller

323: digital oscilloscope

T: Tool

W: Walk

[Document 1] Japanese Unexamined Patent Application Publication No. 10-217069 (4, 5, 8 pages, Fig. 1, Fig. 2)

The present invention relates to a processing apparatus. Specifically, the present invention relates to a processing apparatus that can perform processing while monitoring and controlling the contact state between the workpiece and the tool.

Background Art Conventionally, for example, a processing apparatus shown in Japanese Patent Laid-Open No. 10-217069 (4, 5, 8 pages, Fig. 1, Fig. 2) is known.

This processing device is a contact bearing for rotatably supporting a main shaft, interposed between the main body of the machine, a table attached to the main body, and a table for loading a work, a tool for processing a work, and a main shaft mounted between the main body and the main shaft. And a feed electrode arranged concentrically opposed to each other with a small gap therebetween with respect to the main axis, and a conducting wire for electrically connecting the machine body and the feed electrode. The machine main body, the table, the main shaft, and the feed electrode all have conductivity, and those whose work and tool also have conductivity are selected. Therefore, when a workpiece | work and a tool are close or contacted at the time of a machining, the closed circuit is comprised in order of a workpiece | work-a tool-a spindle-a feed electrode-a conductor-a machine main body-a table-a workpiece | work. In this closed circuit, an alternating current flows by an alternating current power supply. And this alternating current is detected by the current detection means containing a resistor.

When machining, the impedance of the closed circuit changes with the change of the capacitance CL of the condenser constituted by the workpiece and the tool, while the workpiece and the tool are gradually brought in close proximity and contacted from a sufficiently spaced position. The detection current in the current detection means is changed. Therefore, proximity and contact of a workpiece | work and a tool can be detected through the said detection current.

According to this processing apparatus, the proximity and the contact between the workpiece and the tool can be detected, but once the workpiece and the tool come into contact with each other, the change of the contact state cannot be detected. For example, when grinding is performed in a state where the tool T is brought into contact with the work surface W as shown in FIG. 10, the tool T proceeds to the right in FIG. 10 and is on the work surface W. FIG. When it contacts the convex part P, the grinding load (dynamic load) between the workpiece | work surface W (convex part P) and the tool T increases rapidly. Even if such a change in the contact state occurs, depending on the processing apparatus of the document, it is not corrected, and excessive grinding is performed in a state in which the grinding load is significantly increased. There is a problem.

[Patent Document 1] Japanese Patent Application Laid-Open No. 10-217069 (4, 5, 8 pages, Fig. 1, Fig. 2)

The main object of the present invention is to provide a processing apparatus capable of appropriately processing and preventing damage to a tool and deterioration of processing accuracy by performing monitoring and control of a contact state between a workpiece and a tool.

The processing apparatus of the present invention includes a workpiece holding member for holding a conductive workpiece, a tool holding member for holding a tool having conductivity for processing the workpiece, being rotatable, and having a conductivity; A first outer circumferential member that is formed to cover at least a portion of the outer circumferential surface of the tool holding member and is electrically conductive, a first non-contact bearing configured to lift the tool holding member from the inner circumferential surface of the first outer circumferential member, and the first outer circumference; When the workpiece and the tool come into contact with each other when the workpiece and the conductive wire are electrically connected to each other during machining, the closed circuit includes the workpiece, the tool, the tool holding member, the first outer peripheral member, and the conductive wire in order. AC current supply means for supplying AC current to the closed circuit, and AC flowing through the closed circuit. Detection means for detecting a flow rate; and monitoring control means for monitoring an output value of a signal based on an alternating current detected by the detection means according to a predetermined monitoring condition, wherein the monitoring condition is performed between the workpiece and the tool. The contact state is configured to include a light contact / heavy contact determination threshold for determining any of the light contact / heavy contact, wherein the supervisory control means always outputs the signal to the light contact / heavy contact discrimination threshold. And a state of contact between the workpiece and the tool so as to be settled into the area on the contact side.

In the present invention, the workpiece is processed by bringing the rotated tool into contact with the workpiece.

When the tool and the workpiece come into contact with each other during machining, a closed circuit is configured in order of the workpiece-the tool-the tool holding member-the first outer peripheral member-the lead wire-the workpiece. Here, since the 1st non-contact bearing is comprised, although the tool holding member and the 1st outer peripheral member are in a non-contact state, it is electromagnetically comprised and the capacitor (henceforth a 1st capacitor) is suitable for intimate processing. A processing apparatus can be provided.

Moreover, the processing apparatus of this invention hold | maintains the workpiece | work which has electroconductivity, becomes rotatable, the tool holding member which hold | maintains the electroconductive workpiece holding member, the tool which has electroconductivity which processes the said workpiece, A second outer circumferential member formed by covering at least a portion of an outer circumferential surface of the work holding member and having a conductivity; a second non-contact bearing configured to float the work holding member from an inner circumferential surface of the second outer circumferential member; and the second A conductive wire that electrically connects the outer circumferential member and the tool, and the workpiece is closed when the workpiece and the tool come into contact with each other during machining, in order of the tool, the workpiece, the workpiece holding member, the second peripheral member, and the conductive wire. A circuit, alternating current supply means for supplying alternating current to the closed circuit, and flowing the closed circuit. Detecting means for detecting a current, and monitoring control means for monitoring an output value of a signal based on an alternating current detected by the detecting means in accordance with a predetermined monitoring condition, wherein the monitoring condition includes: the workpiece and the tool; Is configured to include a light contact / heavy contact determination threshold for determining any of light contact / heavy contact, and wherein the monitoring control means always outputs the signal with respect to the light contact / heavy contact determination threshold. The contact state of the said workpiece | work and the said tool may be controlled so that it may be settled in the area of a light contact side.

In the present invention, the workpiece is processed by bringing the workpiece into contact with the tool.

When the tool and the workpiece come into contact with each other in the machining, a closing circuit is formed in order of the tool-the workpiece-the workpiece holding member-the second outer peripheral member-the lead-tool. Here, since the second non-contact bearing is constituted, the work holding member and the second outer circumferential member are in a non-contact state, but electromagnetically constitutes a capacitor (hereinafter referred to as a second capacitor). Can flow.

Alternating current flows in the closed circuit by the alternating current supply means. When the contact state (machining state) between the tool and the work is changed, the contact resistance (electrical resistance) or the like between the tool and the work is changed, so that the impedance of the closed circuit changes, and the alternating current flowing through the closed circuit changes. In doing so, the detection current in the detection means is changed to detect a change in the contact state.

The monitoring control means monitors the output value of the signal based on the detected current in accordance with the monitoring condition. If the output value of the signal exceeds the light contact / heavy contact determination threshold, it is determined that the monitoring condition is deviated and the monitoring control means adjusts the contact state between the work and the tool to satisfy the monitoring condition. Therefore, the contact state between the workpiece and the tool is always kept in a light contact state, and machining can be performed in a state where the cutting load (dynamic load) is light, thereby preventing damage to the tool and deterioration of machining accuracy.

As the second non-contact bearing of the present invention, a gas bearing, a magnetic bearing, a gas magnetic composite bearing, or the like can be adopted. The non-contact bearing can significantly reduce the frictional resistance between the workpiece holding member and the second outer circumferential member, so that the rotation of the workpiece holding member and the workpiece can be smoothly and accurately achieved, thereby improving the processing accuracy, thereby making it possible to achieve high precision machining. Suitable processing apparatus can be provided.

In addition, the processing apparatus of the present invention holds a workpiece having conductivity and is rotatable to hold a workpiece holding member having conductivity and a tool having conductivity to process the workpiece, and is rotatable and conductive. A tool holding member having an electroluminescence, a first outer member which is formed to cover at least a portion of the outer circumferential surface of the tool holding member and is conductive, and a second conductive member which is formed to cover at least a portion of the outer circumferential surface of the work holding member. A first non-contact bearing configured by lifting an outer circumferential member, the tool holding member from an inner circumferential surface of the first outer circumferential member, and a second non-contact bearing configured by lifting the workpiece holding member from an inner circumferential surface of the second outer circumferential member. And electrically connecting the first outer circumferential member and the second outer circumferential member. When the conducting wire and the workpiece and the tool are in contact with each other during processing, the workpiece, the tool, the tool holding member, the first outer peripheral member, the conducting wire, the second outer peripheral member, and the workpiece holding member are sequentially formed. A closed circuit, an alternating current supply means for supplying alternating current to the closed circuit, a detecting means for detecting alternating current flowing through the closed circuit, and an output value of a signal based on the alternating current detected by the detecting means. Monitoring control means for monitoring according to a predetermined monitoring condition, the monitoring condition including a light contact / heavy contact determination threshold for discriminating any one of a light contact / heavy contact in which the contact state between the workpiece and the tool is light; And the supervisory control means always outputs the light contact / heavy contact discrimination threshold. It may also belonged to the configuration, characterized in that for controlling the state of contact with the workpiece and the tool operates almost into the area of the light-side contact for.

In the present invention, the workpiece is processed by the tool by contacting both in a state where at least one of the tool and the workpiece is rotated.

Here, a first non-contact bearing and the first condenser are configured between the tool holding member and the first outer circumferential member, and a second non-contact bearing and the second condenser are configured between the workpiece holding member and the second outer circumferential member. . The closed circuit comprises a first and a second capacitor. An alternating current flows through this closed circuit, and the supervisory control means monitors and controls the contact state of a workpiece | work and a tool through the detection current by a detection means. As a result, the contact state is maintained in a light contact state, so that the tool can be stably processed without damage to the tool.

Further, in the present invention, it is preferable that the monitoring control means is provided with an alert means for alerting the user when the output value of the signal becomes a value within the heavy contact side region beyond the light contact / heavy contact discrimination threshold.

According to the present invention, when the workpiece and the tool are in a heavy contact state, when the monitoring condition is satisfied, the user's attention is aroused, and the user immediately knows that the cutting load is heavy beyond the allowable range. Therefore, measures for reducing the cutting load can be quickly taken, and damage to the tool and deterioration of machining accuracy can be prevented.

As the alert means of the present invention, various means, such as printing and outputting (printing out) a paper on which warning information is printed, displaying warning information on a display which lights an alarm lamp, which lights an alarm (alarm), is provided. It can be illustrated.

Moreover, in this invention, it is preferable that the said monitoring control means is equipped with the storage means which memorize | stores the said monitoring condition, and the input means which inputs and stores a desired monitoring condition in this storage means is provided.

According to the present invention, after appropriately inputting the most appropriate monitoring condition in accordance with the processing purpose or the selection of the tool and the workpiece, the machining can be further more appropriately based on the monitoring condition, and the damage or the precision of the tool can be improved. It is also easy to prevent deterioration.

Moreover, in this invention, it is preferable that the said supervisory control means is provided with the display means which displays the information regarding the contact state of the said workpiece | work and the said tool.

According to the present invention, the user can know the current contact state between the workpiece and the tool by viewing the information displayed on the display means.

As information regarding a contact state, what directly displayed the numerical value, waveform, absolute value, etc. of the detection current in a detection means can be employ | adopted, for example. The detection current may be calculated by an appropriate calculation means so as to be an amount suitable for displaying the contact state. In addition, when the detection means has a structure including a detection circuit described below, one which directly displays the numerical value, waveform, absolute value, or the like of the induced current generated in the detection circuit, or performs appropriate calculation on them can be employed. have. In addition, after analyzing a contact state based on the detection current in a detection means, you may display the analysis result as a character. For example, one character corresponding to the current contact state among non-contact / light contact / heavy contact may be displayed. In addition, the light touch / heavy contact determination threshold mentioned above can be used for determination of light touch / heavy contact here.

In addition, the display means is not limited to having a display screen such as a display, but includes one lamp (for example, blue) which is lit when the contact state is light contact and the other which is lit when the contact state is heavy contact. At least any one of lamps (for example, red) may be provided. At this time, the lighting of the lamp constitutes information regarding the contact state.

In the present invention, the detection means is provided with a detection circuit that is interlinked with the magnetic flux generated from the closed circuit, and the monitoring control means is configured to output an output value of the signal based on the induced current generated in the detection circuit. It is desirable to monitor according to the monitoring conditions.

When the state of contact between the workpiece and the tool changes, the current flowing through the closed circuit changes as described above. Then, the magnetic flux generated from the closed circuit and linking to the detection circuit changes, so that an induced current is generated in the detection circuit. Therefore, the contact state can be monitored using this induced current.

In the present invention, the alternating current supply means includes an alternating current generator for generating an alternating current having a constant frequency and an excitation circuit through which the alternating current flows, and the closed circuit includes a magnetic flux generated in the exciting circuit. It is desirable to be overlinked.

In the present invention, magnetic flux that is periodically varied by a constant frequency is generated from an excitation circuit through which an alternating current flows. In the closed circuit interlinked with the variable magnetic flux, an alternating current having a constant frequency is induced by electromagnetic induction. When the contact state between the workpiece and the tool changes, since the impedance of the closed circuit changes, the alternating current changes, so that the contact state can be monitored by using the detection current in the detection means.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

<First Embodiment>

1, the processing apparatus which concerns on the 1st Embodiment of this invention is shown.

This processing apparatus is an apparatus which rotates the tool T and the workpiece | work W, and performs the cutting process of the workpiece | work W with the tool T. FIG. The tool T is made of a metallic material having conductivity. The tool T may be the same as an end mill formed in a shape including a pointed end or a cutting blade, or may be the same as a grindstone used for finishing the surface to be processed. A plurality of types of tools T having different shapes are prepared in advance, and the user can select the most suitable one for the processing purpose and use it for processing. Also, the work W is selected from one having conductivity, for example, a steel system material.

The tool T is detachably attached to the tool rotation drive mechanism 1 for rotationally driving the tool T. The tool rotation drive mechanism 1 has a main cylinder 11 serving as a tool holding member that is rotatably installed with a central axis in a substantially cylindrical shape, and a main shaft serving as a first outer circumferential member formed to cover an outer circumferential side of the main shaft 11. It has a housing 12. The main shaft 11 and the main shaft housing 12 are made of a metallic material and are conductive. A flange portion 13A protrudes and is formed on the outer circumferential side surface of the main shaft 11, and a groove 13B having a shape substantially the same as the flange portion 13A is formed in a ring shape on the inner circumferential surface of the spindle housing 12. The stud bearing part 13 is comprised. Pressurized air is supplied between the outer peripheral surface of the main shaft 11 and the inner peripheral surface of the main shaft housing 12 by the compressor etc. which are not shown in figure, and the main shaft air bearing 14 as a 1st non-contact bearing is comprised. Therefore, the main shaft 11 rises from the inner peripheral surface of the main shaft housing 12, and both are in a non-contact state. In electrical terms, the main shaft 11 and the main shaft housing 12 are insulated from each other, and a capacitor is formed between them. Hereinafter, this capacitor is referred to as a capacitor (Ct).

The tool T is detachably mounted to the distal end of the main shaft 11, and both of them are integrally rotated about the axis line by rotation driving means such as an electric motor (motor) and an air turbine (not shown). It is. The number of revolutions at the time of ultra-precision machining is more than 30,000 revolutions per minute. At this time, the frictional resistance between the main shaft 11 and the main shaft housing 12 is significantly reduced by the main shaft air bearing 14, and the main shaft 11 and the tool T can rotate smoothly. Moreover, the load in the axial direction of the main shaft 11 is supported by the thrust bearing part 13, and the main shaft 11 is not moved in an axial direction. In addition, the quantity and pressure of the pressurized air supplied from the said compressor in order to comprise the main spindle air bearing 14 are set manually by the regulator which is not shown, and from the inner peripheral surface of the main shaft housing 12 of the main shaft 11 is carried out. The floating state is determined precisely, and the positioning of the axis of the main shaft 11 (so-called core formation) is precisely made. Therefore, according to this embodiment, the processing precision by the tool T can be improved significantly, and the processing apparatus suitable for ultra-precision machining can be provided. Moreover, the quantity and pressure of this pressurized air can also be comprised so that numerical control may be carried out by the NC apparatus 4 mentioned later.

The work W is detachably attached to the work rotation drive mechanism 2 for rotating the work W. FIG. The work rotation drive mechanism 2 is formed in a substantially cylindrical shape with a work shaft 21 serving as a work holding member rotatably installed around the axis as a central axis, and a second outer peripheral member formed covering the outer circumferential side of the work shaft 21. It is provided with a work shaft housing 22 as. The axis direction of the workpiece axis | shaft 21 is inclined by predetermined angle with respect to the axis line direction of the main axis | shaft 11, and this angle can be adjusted suitably by a user according to a machining purpose.

In addition, in FIG. 1, the main axis | shaft 11 and the work axis | shaft 21 are shown in the same plane for simplicity, and the relative arrangement | positioning of the actual main axis 11 and the work axis | shaft 21 can be adjusted freely by a user. Numerical control is performed by the NC device 4 described later.

A flange portion 23A protrudes and is formed on an outer circumferential side of the work shaft 21, and a groove 23B having a shape substantially the same as that of the flange portion 23A is formed in a ring shape on the inner circumferential surface of the work shaft housing 22. The thrust bearing part 23 is comprised. Pressurized air is supplied between the outer circumferential surface of the work shaft 21 and the inner circumferential surface of the work shaft housing 22 by a compressor (not shown), and the work shaft air bearing 24 as the second non-contact bearing is configured. Therefore, the work shaft 21 rises from the inner circumferential surface of the work shaft housing 22 and both are in a non-contact state.

The workpiece | work W is coaxially attached to the front-end | tip part of the workpiece shaft 21 via the insulating material 25. As shown in FIG. The work shaft 21 and the work W are integrally rotated by the rotation drive means of an electric motor (motor), an air turbine, etc. which are not shown in figure, as the central axis. At this time, the frictional resistance between the work shaft 21 and the work shaft housing 22 is significantly reduced by the work shaft air bearing 24, and the work shaft 21 and the work W can rotate smoothly. Can be. Moreover, the load in the axial direction of the workpiece shaft 21 is supported by the thrust bearing part 23, and the workpiece shaft 21 does not move to an axial direction. In addition, the amount and pressure of pressurized air supplied from the compressor for configuring the work shaft air bearing 24 are manually set by a regulator (not shown), and the work shaft housing 22 of the work shaft 21 The floating state from the inner circumferential surface is determined precisely, and the positioning of the axis of the work shaft 21 (so-called core formation) is precisely made. Therefore, according to this embodiment, the processing precision of the workpiece | work W by the tool T can be improved significantly, and the processing apparatus suitable for ultra precision machining can be provided. Moreover, the quantity and pressure of this pressurized air can also be comprised so that numerical control may be carried out by the NC apparatus 4 mentioned later.

The tool rotation drive mechanism 1 and the work rotation drive mechanism 2 are attached to an apparatus main body (not shown) of the processing apparatus. At least one of the tool rotation drive mechanism 1 and the workpiece rotation drive mechanism 2 is configured to be moved by a drive mechanism (not shown) provided in the apparatus main body, and both of them can be moved relative to each other. Therefore, it is possible to process the workpiece | work W, moving the tool T relative to the workpiece | work W. FIG. At this time, the feed speed and the cutting amount of the tool T and the workpiece W are numerically controlled by the NC device 4 described later, so that the machining is appropriately performed.

The processing apparatus of this embodiment has a contact state detection / monitoring / control system 3 which detects a contact state (processing state) between the tool T and the work W and performs monitoring and control based thereon. . The contact state detection / monitoring / control system 3 includes information acquiring means 31 for acquiring information on the contact state using the induced current caused by electromagnetic induction phenomenon, and monitoring and contact state of the contact state based on the acquired information. It is provided with the monitoring control system 32 which performs control.

The information acquiring means 31 includes a conducting wire 311 having one end attached to the main shaft housing 12 and the other end attached to the workpiece W, an exciting coil 312 ring-mounted around the conducting wire 311 and a detection. The coil 313 and the excitation coil 312 are provided with the high frequency generator (OSC) 314 as an alternating current generator which makes an alternating current of a constant frequency flow. The other end of the conductive wire 311 is attached to the work W so as to be slidable through a brush 315 having conductivity. Therefore, even if the workpiece | work W is rotated at the time of a process, the electrical connection between the other end part of the conducting wire 311 and the workpiece | work W can be maintained. Here, the excitation coil 312 constitutes the excitation circuit of the present invention, and the detection coil 313 constitutes the detection circuit of the present invention. The frequency of the alternating current generated from the high frequency generator 314 can be appropriately set in accordance with the processing purpose, the selection of the tool T, the work W, and the like.

When the tool T and the workpiece W are in contact during processing, the tool T-the workpiece W-the brush 315-the conducting wire 311-the main shaft housing ( 12) The closing circuit is configured in order of the main shaft 11-the tool T. The main shaft housing 12 and the main shaft 11 are capacitively coupled, and a capacitor of the capacitance Ct is configured as described above. Hereinafter, this closed circuit is referred to as a closed circuit (C).

When a high frequency of a certain frequency flows through the excitation coil 312 by the high frequency generator 314, magnetic flux that periodically varies from the excitation coil 312 to the same frequency is generated by electromagnetic induction. After the magnetic flux is linked to the closed circuit C, an alternating current of the same frequency is induced in the closed circuit C by electromagnetic induction, and the magnetic flux is generated from the closed circuit C. Since the magnetic flux is linked to the detection coil 313, an induced current is generated in the detection coil 313. Moreover, since the high frequency generator 314 and the exciting coil 312 play a role of supplying alternating current to the closed circuit C, the alternating current supply means of this invention is comprised.

When the contact state (machining state) between the tool T and the work W is changed, the impedance of the closed circuit C is changed due to the change in the contact resistance between the tool T and the work W, and the like. . Then, the alternating current flowing through the closed circuit C changes, and as a result, the induced current in the detection coil 313 also changes, so that a change in the contact state is detected.

Moreover, the detection coil 313 comprises the detection means of this invention which detects the alternating current flowing through the closed circuit C. As shown in FIG.

The monitoring control system 32 includes an amplifier unit (AMP) 321 for amplifying a signal (a signal based on an induction current) from the detection coil 313, and monitoring and controlling a contact state based on the amplified signal. A controller (control device) 322 and a digital oscilloscope 323 for displaying the amplified signal in real time are configured.

The amplifier unit 321 is comprised with an amplifier, a detector, a thermoelectric conversion module, etc. (all are not shown).

In the controller 322, the amplified signal (analog signal) from the amplifier unit 321 is converted into a digital signal by an analog-to-digital converter (AD) 3221, and this digital signal is converted through an input / output interface (IOF) 3322. It is input to the bus 3223. In the bus 3223, this digital signal is transferred under the arithmetic control by the CPU 3224. The CPU 3224 performs arithmetic control of the digital signal based on a control program stored in the ROM 3325 or various data and flags stored in the RAM 3326.

In the RAM 3326 as the storage means of the present invention, a monitoring condition for determining an allowable output range (unit: mu s) of the digital signal is stored. This monitoring condition includes light contact / heavy contact discrimination threshold S1 which defines an upper limit of an allowable output range, and noncontact / light contact discrimination threshold S2 which specifies a lower limit. Here, the threshold value S1 is a threshold value for discriminating any one of a light contact / heavy contact whose contact state between the tool T and the work W is light, and the threshold value S2 is a threshold value for discriminating any one of non-contact / light contact. That is, when the output value S of the digital signal is (i) S> S1, it can be seen that the tool T and the work W are in heavy contact state, and (ii) when S1 ≥ S ≥ S2, It can be seen that it is in a contact state, and (iii) if S2> S, it is known that it is in a non-contact state. The monitoring condition is met when the output value of the digital signal is in a light contact state (ii) within the permissible output range. In contrast, the monitoring condition is not satisfied in the heavy contact state (i) and the non-contact state (iii).

Each of the thresholds S1 and S2 can be stored in the RAM 3326 by inputting a value set appropriately by the user according to the selection of the tool T and the work W and the machining purpose by an input means (not shown).

Here, the contact state of the tool T and the workpiece | work W is demonstrated using FIG.2 (a)-FIG.2 (d). As for the tool T in this figure, many types of micro metal grains G are arrange | positioned at the surface, and the thing of the type which grinds the workpiece | work W by this metal grain G is shown. The arrow in the figure shows the rotation of the tool T. As shown in FIG.

2A shows a non-contact state (monitoring conditions are not satisfied). Since the tool T and the workpiece | work W do not contact, grinding is not performed. At this time, the tool T is idling. In order to grind quickly and improve the efficiency of grinding, it is necessary to shorten the time in a non-contact state as much as possible.

Fig. 2B shows a light contact state (monitoring condition is satisfied). Grinding is performed by contacting the tool T and the work W under a light grinding load. Since an excessive load on the tool T and the work W can be smoothly ground without such a problem, there is little fear of damage of the tool T, and high grinding precision can be realized. Therefore, grinding is most suitable to be performed in this light contact state.

2 (c) and 2 (d) show a heavy contact state (monitoring conditions are not satisfied). A large grinding load is bound to the tool T and the work W. In FIG. 2C, the damage of the tool T does not occur, but the tool T is forcedly pressed against the work W, which may adversely affect the machining accuracy. Moreover, in FIG.2 (d), as a result of forcibly pressing the tool T with respect to the workpiece | work W, the tool T is broken.

It returns to FIG. 1 again and continues description. In the LCD monitor 3227 having a liquid crystal display, the thresholds S1 and S2 under the monitoring conditions and the output values of actual digital signals are displayed. The user can immediately determine whether the monitoring condition is satisfied by this numerical comparison, and if the monitoring condition is not satisfied, the countermeasure, that is, adjust the tool T and the work W to a light contact state Thus, measures can be taken quickly to meet the monitoring conditions, so that the tool T and the work W can always be kept in light contact. Therefore, the heavy contact state can be avoided, thereby preventing damage to the tool T and deteriorating machining accuracy, and also avoiding non-contact state, thereby preventing the occurrence of empty cutting time. In this way, processing can be performed quickly and accurately.

Moreover, the LCD monitor 3227 comprises the display means of this invention which displays the information regarding the contact state (processing state) of the tool T and the workpiece | work W. As shown in FIG. Here, the information about the contact state indicates the output value of the digital signal.

In addition, the feed speed of the tool T, the cutting amount, the rotation speed, the feed speed of the workpiece W, the rotation speed, the amount and pressure of the pressurized air supplied by the compressor between the spindle 11 and the spindle housing 12 , The amount of pressurized air supplied by the compressor between the work shaft 21 and the work shaft housing 22, the pressure, the distance between the main shaft 11 and the spindle housing 12, the capacitance of the capacitor Ct, the work shaft ( After detecting various quantities such as 21 and the distance between the work shaft housing 22 and the appropriate detection means, the LCD monitor 3227 may be displayed as auxiliary information for monitoring the contact state. In addition, by displaying a threshold value defining the allowable range for each of these quantities together with the LCD monitor 3227, the user can accurately and quickly determine whether or not the numerical value is appropriate for each quantity, thereby making contact with a heavy contact state. Or in case of non-contact, measures can be taken quickly to return to light contact. In addition, the threshold value for defining each of these allowable ranges is input and stored in the RAM 3326 by input means (not shown), and is used as an auxiliary condition for monitoring the contact state.

The digital oscilloscope 323 introduces an amplified signal from the amplifier unit 321 into a waveform display and simultaneously receives an alarm signal from the controller 322 as a universal serial bus (USB) signal and displays it as alarm information.

Here, the alarm signal means that at least one of the monitoring condition (condition relating to the output value of the digital signal from the analog digital converter 3221) stored in the RAM 3262 and each of the auxiliary conditions is satisfied. , Via a USB interface (USB IF) 3328, of a warning signal sent towards the digital oscilloscope 323.

On the display screen of the digital oscilloscope 323, a plurality of alarm lamps for displaying alarm information are provided corresponding to the monitoring condition and each auxiliary condition, and only alarm lamps corresponding to the unsatisfied conditions are turned on. As a result, abnormalities in the contact state (heavy contact or non-contact) are notified to the user, and the user's attention is called. The user can look at the lit alarm lamp and immediately know which condition is not satisfied, so that a measure can be taken quickly and accurately to return the contact state to normal (light contact).

As described above, the digital oscilloscope 323 constitutes the alert means of the present invention.

In addition, the alarm signal from the controller 322 is serially transmitted to the NC device 4 via the highway bus interface (COM) 3229. The NC device 4 automatically corrects various numerical data for processing control appropriately based on the received alarm signal, and the processing state in which all conditions (monitoring conditions and respective auxiliary conditions) stored in the RAM 3326 are satisfied. That is, it quickly transitions to light contact.

Here, as various numerical data for the machining control, the feed speed of the tool T, the cutting amount, the rotation speed, the feed speed of the work W, the rotation speed, and are supplied by the compressor between the spindle 11 and the spindle housing 12. The amount of pressurized air, the pressure, the amount of pressurized air supplied by the compressor between the work shaft 21 and the work shaft housing 22, the pressure, the distance between the main shaft 11 and the spindle housing 12, the capacitor (Ct) And various amounts such as capacitance of the work shaft 21 and the work shaft housing 22 and the work shaft housing 22.

Thus, even if at least any one of the various conditions memorize | stored in RAM 3262 is lost because the contact state of the tool T and the workpiece | work W became abnormal (heavy contact or non-contact), the NC apparatus 4 Can be corrected immediately and all conditions are met to return the contact to normal (light contact). Therefore, by avoiding heavy contact state, it is possible to prevent breakage of the tool T and deterioration of machining accuracy, and also to avoid non-contact state, thereby preventing the occurrence of the ball cutting time, thereby improving the machining. It can be done quickly and accurately.

Moreover, in the above structure, the monitoring control system 32 and the NC apparatus 4 monitor the output value of the signal based on the induction current generated in the detection coil 313 as a detection means according to a monitoring condition, The supervisory control means of this invention which controls the contact state of (T) and the workpiece | work W is comprised.

In FIG. 1, an input / output interface (IOF) 3230 is provided for turning on / off a power supply of the high frequency generator 314. When the on / off switch (not shown) installed in the controller 322 is switched, an on / off switching signal is transmitted toward the high frequency generator 314 through the input / output interface 3230, and the power of the high frequency generator 314 is transmitted. Is switched on and off. When the power source of the high frequency generator 314 is turned on, a high frequency wave is generated to monitor and control a contact state (processing state). When the power source is turned off, a high frequency wave is not generated and a contact state is not monitored and controlled.

<2nd embodiment>

Then, 2nd Embodiment of this invention is described. The same code | symbol as the code | symbol in the said 1st Embodiment is attached | subjected about the component same as the component demonstrated in the said 1st Embodiment, and the description is abbreviate | omitted or simplified (3rd, later mentioned) The same applies to the fourth, fifth, and sixth embodiments).

As shown in Fig. 3, in the processing apparatus according to the second embodiment of the present invention, the insulating material 25 interposed between the workpiece W and the workpiece shaft 21 in the first embodiment is removed. The work W and the work shaft 21 are directly electrically connected. The other end of the conductive wire 311 is directly and electrically connected to the work shaft housing 22. The work shaft 21 and the work shaft housing 22 have conductivity.

In the above structure, when the tool T and the workpiece | work W contact at the time of a process, according to the counterclockwise rotation direction in FIG. 3, the tool T-the workpiece | work W-the workpiece axis | shaft 21-the workpiece | work The closed circuit C is formed in order of the shaft housing 22-the conducting wire 311-the main shaft housing 12-the main shaft 11, and the tool T. Here, the work shaft 21-the work shaft housing 22 are capacitively coupled, and the capacitor Cw is comprised.

The change of the alternating current flowing through the closed circuit C which arises with the change of the contact state (processing state) of the tool T and the workpiece | work W is detected as an induction current in the detection coil 313, and a contact state. The monitoring and control of the same are carried out as in the first embodiment.

In addition, the numerical value of the capacitance of the capacitor Cw can be displayed on the LCD monitor 3227 as auxiliary information for monitoring the contact state, and can also be used as numerical data for numerical control in the NC device 4. have. In addition, an auxiliary condition for defining a numerical value range of an appropriate capacitance Cw is appropriately set and stored in the RAM 3262, and when this is not satisfied, alarm information is displayed on the display screen of the digital oscilloscope 323. You may make it.

Third Embodiment

Subsequently, a third embodiment of the present invention will be described.

As shown in FIG. 4, in the processing apparatus which concerns on this embodiment, the personal computer (PC) 5 is provided instead of the LCD monitor 3227 in 1st Embodiment. The personal computer 5 exchanges data between the controllers 322 by means of a USB signal. On the display screen (display) of the personal computer 5, as in the first embodiment, all of the thresholds S1 and S2 in the allowable output range of the digital signal from the analog-to-digital converter 3221 and the output value of the actual digital signal are displayed. do. In addition, the various auxiliary information and the various auxiliary conditions for monitoring the contact state can be displayed.

<4th embodiment>

Then, 4th Embodiment of this invention is described.

As shown in Fig. 5, in the processing apparatus according to the present embodiment, the digital oscilloscope 323 in the first embodiment is not provided. Instead, the analog-to-digital converter 3221 is provided in the LCD monitor 3227. The amplified signal from the AD (analog digital) converted amplifier unit 321 is displayed in waveform. In addition, the LCD monitor 3227 may display various types of numerical information, conditions, and the like together with waveform display. In addition, a storage type display may be employed as the monitor 3227, and the above waveform display, numerical information and conditions may be drawn on the screen by an electron beam.

<Fifth Embodiment>

Subsequently, a fifth embodiment of the present invention will be described.

As shown in Fig. 6, in the processing apparatus according to the present embodiment, the digital oscilloscope 323 and the LCD monitor 3227 in the first embodiment are not provided. Instead, a personal computer PC ( 5) is installed.

The personal computer 5 performs data exchange between the controllers 322, and on the display screen (display), an amplified signal from the AD unit amplifier 321 converted in the analog-to-digital converter 3221 is waveform-formed, The various numerical information and conditions described above are displayed. Here, the display screen of the personal computer 5 can also be a storage type display.

Sixth Embodiment

Subsequently, a sixth embodiment of the present invention will be described.

Fig. 7 is a perspective view showing an NC processing machine as the processing apparatus of the present invention. As shown in the figure, the NC machining machine according to the present embodiment is a machine tool controlled by an NC device, and includes a base 61, a machine main body 611 provided on the base 61, and this machine. The NC device 4 which controls the drive of the main body 611 is provided.

The machine main body 611 is a bed 612 provided on the upper surface of the base 61 through a leveler or the like, and a table 613 provided on the upper surface of the bed 612 to be movable in the front-rear direction (Y-axis direction). ), A pair of columns 614 and 615 standing on both sides of the bed 612, a cross rail 1616 spanning between the upper portions of both columns 614 and 615, and the cross rails 1616. The slider 617 provided to be movable in the left-right direction (X-axis direction), the spindle head 618 provided on the slider 617 to be movable up and down (Z-axis direction), and the columns 614, 615 is provided so as to cover the front surface part, and the inside is comprised by the splash 19 which can be opened and closed and can open and close to an up-down direction as a support point.

The work W is mounted on the table 613 as the work holding member of the present invention. Both the workpiece | work W and the table 613 are comprised by the electroconductive material, and both are electrically conductive.

The bed 612 is provided with a Y-axis drive mechanism 621 that moves the table 613 in the Y-axis direction along with a guide (not shown) for guiding the table 613. As the Y-axis drive mechanism 621, a feed screw mechanism comprising a motor and a feed screw shaft rotated by the motor is used.

Each of the columns 614 and 615 is formed in a substantially triangular shape in which the lateral shape is wider at the lower part than the upper part. Thereby, since the lower part is a stable structure, even if the spindle head 618 rotates at high speed, generation | occurrence | production of a vibration can be reduced.

The cross rail 616 is provided with two guide rails 1623 for movably guiding the slider 617 and an X axis drive mechanism 624 for moving the slider 617 in the X axis direction. Is installed.

The slider 617 is provided with a Z-axis driving mechanism 625 for elevating the spindle head 618 in the Z-axis direction along with a guide (not shown) for guiding the spindle head 618 in the Z-axis direction. have. Also for such drive mechanisms 624 and 625, similarly to the Y-axis drive mechanism 621, a feed screw mechanism including a motor and a feed screw shaft rotated by the motor is used.

The spindle head 618 includes a main shaft 11 (not shown in FIG. 7) and a main shaft housing 12 formed by covering the outer circumferential surface, and a tool T at the distal end of the main shaft 11. Is detachably mounted.

Since the air bearing is comprised between the main shaft 11 and the main shaft housing 12, both are non-contact and electrically, the capacitor Ct is comprised. In addition, the spindle housing 12 and the table 613 are connected by the conducting wire 311 which is not shown in figure.

In the machining of the workpiece W by the tool T, if both are in contact, the tool T-the workpiece W-the table 613-the conducting wire 311-the spindle housing 12-the spindle 11- The closing circuit C (not shown) is constituted by the tool T in turn. An alternating current flows through this closed circuit C by the high frequency generator 314 and the excitation coil 312 which are not shown in figure. When a change in this alternating current occurs due to a change in the contact state (processing state) between the tool T and the work W, an induction current is generated in the detection coil 313 (not shown), and it is detected that the contact state is changed. do. The controller 322 (not shown) monitors and controls the contact state based on the induced current. When the controller 322 detects an abnormality in the contact state (heavy contact or non-contact), it sends an alarm signal to the NC device 4, and the NC device 4 automatically corrects various numerical data for processing control appropriately to normal ( Light contact).

In the machining of the workpiece W, the table 613 and the spindle head 618 are moved relative to each other in the X, Y, and Z axis directions by a command from the NC device 4, respectively. The workpiece W is processed by the rotary tool T. That is, the table 613 in the Y direction through the Y axis drive mechanism 621, and the spindle head 618 in the X and Z axis directions through the X axis drive mechanism 624 and the Z axis drive mechanism 625, respectively. The workpiece | work W is processed by the rotating tool T attached to the main shaft 11, moving.

In addition, this invention is not limited to embodiment mentioned above, The deformation | transformation, improvement, etc. in the range which can achieve the objective of this invention are included in this invention.

For example, in each said embodiment, although the main shaft air bearing 14 was provided as the 1st non-contact bearing of this invention, and the work shaft air bearing 24 was provided as the 2nd non-contact bearing of this invention, respectively, in this invention, The first and second non-contact bearings need not be air bearings, but may be magnetic bearings and pneumatic hybrid bearings, for example.

In addition, in the first embodiment, one end portion of the conductive wire 311 is attached to the main shaft housing 12, and the other end portion is attached to the work W through the brush 315. In the present invention, one end of the conductive wire 311 may be attached to the tool T via a conductive brush, and the other end may be attached to the conductive work shaft housing 22 to form the closed circuit C. FIG. Here, the insulating material 25 in FIG. 1 is removed, and the work W and the work shaft 21 are directly electrically connected. In addition, the work shaft 21 and the work shaft housing 22 both have conductivity. At this time, the closed circuit C is configured in order of the tool T-the work W-the work shaft 21-the work shaft housing 22-the conducting wire 311-the brush-the tool T, and here As the alternating current flows through, the contact state between the tool T and the work W is monitored. The work shaft 21 and the work shaft housing 22 are capacitively coupled by a capacitor Cw. In this closed circuit C, since the alternating current does not need to flow through the main shaft 11 and the main shaft housing 12, both are electrically connected by mounting an insulating material between the tool T and the main shaft 11. It is desirable to be insulated.

Moreover, in the said 1st Embodiment, although the alternating current which flows through the closed circuit C was detected through the detection of the induction current generate | occur | produced in the detection coil 313, in this invention, it flows directly through the closed circuit C. You may detect an alternating current. In addition, a resistor may be connected in series to the closed circuit C, and the alternating current may be detected through the detection of the voltage related to the resistor.

In addition, in the said 1st Embodiment, although the alternating current flows in the closed circuit C by the high frequency generator 314 and the excitation coil 312, AC power is serially connected to the closed circuit C in this invention. It is good also as a structure which connects and flows an alternating current directly. At this time, the alternating current generated from the alternating current power source is preferably a constant frequency.

EXAMPLE

Next, the Example of this invention is described.

<First Embodiment>

FIG. 8 shows a change in the value of the output signal (vertical axis) when the cutting amount (horizontal axis) of the tool T is changed to the work W in the processing apparatus of FIG. Here, the output signal refers to the amplified signal from the amplifier unit 321 AD-converted in the analog-to-digital converter 3221.

In Fig. 8, since the tool T and the work W are in a non-contact state (see Fig. 2 (a)) in the region where the amount of cut is negative, since the closed circuit C is not configured, The output signal is 0 Hz. In this state, the tool T and the work W are brought close to each other, and when both contact (when the depth of cut = 0 µm), a closed circuit C is formed, and an output signal of 6 to 7 kHz is generated immediately. do. Therefore, by monitoring the value of the output signal, the moment when the tool T and the workpiece | work W contacted can be grasped | ascertained correctly. Here, if the non-contact / light contact discrimination threshold S2 is set at, for example, about 3 mW, the non-contact state and the light contact state (see Fig. 2B) can be appropriately determined by the threshold S2.

Further, if the depth of cut is gradually increased from 0 mu m, the value of the output signal is also increased. Therefore, there is a positive correlation between the depth of cut and the output signal value. Therefore, it can be seen that by using the output signal value, it is possible to monitor the change from the light contact state accompanying the increase of the cutting amount to the heavy contact state (see Fig. 2 (c) and Fig. 2 (d)). Although the boundary between the light contact state and the heavy contact state is not necessarily clear as described above, if now the boundary is at the portion of the output signal value of 20 kV, the light contact / heavy contact discrimination threshold S1 is set to this value. Thus, the light contact state and the heavy contact state can be appropriately determined with this threshold value S1.

When machining, control is performed so that the signal output value is a value between the two threshold values S1 (= 20 Hz) and S2 (= 3 Hz) set within the above (within the allowable output range). Therefore, the tool T and the workpiece ( The contact state with W) can always be kept in light contact state.

Second Embodiment

Subsequently, Fig. 9 will be described.

Each data in this spreading degree shows the output signal value at the time of processing in the case of processing without setting light contact / heavy contact discrimination threshold S1 in said each embodiment, and the surface roughness of the processing surface after processing. (PV value: unit micrometer) is plotted. In addition, the surface roughness of a process surface is measured by the three-dimensional measuring instrument after a process.

First, as can be readily understood from the shape of the plot, there is a positive correlation between the output signal value and the surface roughness after processing. Therefore, it can be seen that the output signal value functions as an index of surface roughness after processing. Therefore, if the allowable range of the output signal value is defined by setting the light contact / heavy contact discrimination threshold S1, the surface roughness (PV value) can be suppressed within a desired range, and the processing precision can be maintained at a high precision. .

As an example, a method of setting the light contact / heavy contact discrimination threshold S1 in the case of performing a process requiring a PV precision of 0.03 μm or less using the data in FIG. 9 will be described. In Fig. 9, suitable data having a PV value of 0.03 µm or less are indicated by white circles (?), And unsuitable data having a PV value of 0.03 µm or more are shown by black circles (●). As the output signal value, it can be seen that the boundary between the white circle (circle) and the black circle (circle) is present in the vicinity of 11 kHz. Therefore, a light contact / heavy contact discrimination threshold S1 is set at this position. Then, the output signal value at the time of processing is always kept below S1, and the surface roughness (PV value) after processing can also be suppressed in the desired range (PV value <0.03micrometer).

In addition, as can be seen from the light contact / heavy contact determination threshold value S1 setting method, in this embodiment, the contact state between the tool T and the work W whose PV value is 0.03 μm or less after processing is brought into light contact state. And a contact state as heavy contact state as much as possible with PV value of 0.03 micrometer or more. Although this is only one definition of light contact / heavy contact, it is as described above that the light contact / heavy contact determination threshold S1 set as the result defined in this way is the most appropriate threshold for preventing deterioration of machining accuracy. .

According to the present invention, by performing monitoring and control of the contact state between a workpiece and a tool, it is possible to provide a processing apparatus that can make processing appropriate and prevent damage to a tool and deterioration of processing accuracy.

Claims (12)

A work holding member for holding a work having conductivity; A tool holding member which holds a tool having conductivity that performs the work of the workpiece, is rotatable, and has conductivity; A first outer peripheral member formed by covering at least a portion of an outer peripheral surface of the tool holding member and having conductivity; A first non-contact bearing configured to lift the tool holding member from the inner circumferential surface of the first outer circumferential member; A conducting wire for electrically connecting the first outer circumferential member and the workpiece; When the workpiece and the tool are in contact with each other during machining, a closed circuit composed of the workpiece, the tool, the tool holding member, the first outer circumferential member, and the conducting wire in order; Alternating current supply means for supplying alternating current to the closed circuit; Detecting means for detecting an alternating current flowing through the closed circuit; And monitoring control means for monitoring the output value of the signal based on the alternating current detected by this detecting means according to a predetermined monitoring condition, The monitoring condition comprises a light contact / heavy contact determination threshold for determining any of light contact / heavy contact in which the contact state between the workpiece and the tool is light, And said supervisory control means controls the contact state of said workpiece and said tool such that the output value of said signal is always settled within the area of light contact side with respect to said light contact / heavy contact discrimination threshold. A workpiece holding member which holds a workpiece having conductivity and is rotatable and has conductivity; A tool holding member for holding a tool having conductivity for processing the workpiece; A second outer circumferential member formed by covering at least a portion of an outer circumferential surface of the work holding member and having conductivity; A second non-contact bearing configured to lift the work holding member from the inner circumferential surface of the second outer circumferential member; A conducting wire for electrically connecting the second outer member and the tool; A closed circuit composed of the tool, the workpiece, the workpiece holding member, the second outer circumferential member, and the conducting wire in order when the workpiece and the tool come into contact with each other during machining; Alternating current supply means for supplying alternating current to the closed circuit; Detecting means for detecting an alternating current flowing through the closed circuit; And monitoring control means for monitoring the output value of the signal based on the alternating current detected by this detecting means according to a predetermined monitoring condition, The monitoring condition comprises a light contact / heavy contact determination threshold for determining whether the contact state between the workpiece and the tool is light contact / heavy contact, And said supervisory control means controls the contact state of said workpiece and said tool such that the output value of said signal is always settled within the area of light contact side with respect to said light contact / heavy contact discrimination threshold. The work holding member is rotatable and conductive. A second outer circumferential member formed by covering at least a portion of an outer circumferential surface of the work holding member and having conductivity; And a second non-contact bearing configured to float the work holding member from the inner circumferential surface of the second outer circumferential member, The conducting wire electrically connects the first outer circumferential member and the second outer circumferential member, The said closed circuit is comprised by the said workpiece | work, the said tool, the said tool holding member, the said 1st outer peripheral member, the said conducting wire, the said 2nd outer peripheral member, and the said workpiece holding member in order. The apparatus as claimed in claim 1, wherein the monitoring control means includes an alert means for alerting the user when the output value of the signal becomes a value within the heavy contact side region beyond the light contact / heavy contact discrimination threshold. Processing equipment. The apparatus as claimed in claim 2, wherein the monitoring control means comprises an alert means for alerting the user when the output value of the signal becomes a value within the heavy contact side region beyond the light contact / heavy contact discrimination threshold. Processing equipment. The said supervisory control means is provided with the memory | storage means which memorize | stores the said monitoring condition, A processing apparatus characterized by comprising input means for inputting and storing desired monitoring conditions into the storage means. The said supervisory control means is provided with the memory | storage means which memorize | stores the said monitoring condition, A processing apparatus characterized by comprising input means for inputting and storing desired monitoring conditions into the storage means. The processing apparatus according to claim 1, wherein the monitoring control means includes display means for displaying information on a contact state between the work and the tool. The processing apparatus according to claim 2, wherein the monitoring control means includes display means for displaying information relating to a contact state between the work and the tool. The detector according to claim 1, wherein the detection means is provided with a detection circuit interlinked with a magnetic flux generated from the closed circuit, And the monitoring control means monitors an output value of the signal based on the induced current generated in the detection circuit according to the monitoring condition. 3. The detection apparatus according to claim 2, wherein the detection means is provided with a detection circuit which is interlinked with a magnetic flux generated from the closed circuit, And the monitoring control means monitors an output value of the signal based on the induced current generated in the detection circuit according to the monitoring condition. The said alternating current supply means is comprised by the alternating current generator which generate | occur | produces the alternating current of a fixed frequency, and the exciting circuit through which this alternating current flows, And the closed circuit is in communication with a magnetic flux generated in the excitation circuit.

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