KR100594604B1 - vertical alignment table mechanism - Google Patents

Abstract

The vertical alignment table mechanism 21 for the board 25 for forming the printed wiring board has a vertical support wall 43, the alignment table 33 is disposed in a vertical position opposite the front of the support wall 43, The support wall 43 has an opening in which the exposure mask 23 is disposed. The alignment table 33 is supported to move relative to the vertical plane of the vertical support wall 43 by a plurality of table support devices 35. Each table support device 35 includes a ball caster 51 fixed to the support wall 43 and a ball 51a embedded therein and a contact block 53 fixed to the alignment table 33. The tension spring 55 pushes the surface of the contact block 53 toward the ball. A table transfer device 37 is also provided between the support wall 43 and the alignment table 33. Each table feed device comprises a contact block 85 on an alignment table and a driven roller 83 on a support wall 43. The spring 37 pushes the driven roller 83 toward the contact block 85. The pulse motor 71 causes the relative movement of the alignment table 33 relative to the support wall 43.

Vertical, aligned, table, exposure

Description

Vertical alignment table mechanism

1 is a perspective view of a main portion of a printed wiring board exposure apparatus to which a vertical alignment table mechanism according to a preferred embodiment of the present invention is applied;

2 is an enlarged cross-sectional view taken along line II-II of FIG. 3 showing the vertical alignment table mechanism of FIG.

3 is an enlarged cross-sectional view taken along line III-III of FIG. 2 showing the vertical alignment table mechanism of FIG.

4 is an enlarged perspective view of main parts of the vertical alignment table mechanism of FIG. 1;

5 is a plan view of a conventional horizontal alignment table mechanism

6 is a cross-sectional view of a modified conventional alignment table mechanism of the horizontal alignment table mechanism of FIG.

Explanation of symbols on the main parts of the drawings

33: alignment table 35: table support device

37: table feed device 43: support wall

47: contact member 51: ball caster

51a: ball 53: contact block

55: elastic member 59: through hole

71: actuator 79: nut

83,85: contact member 87: elastic member

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical alignment table mechanism, and more particularly, to a vertical alignment mechanism having an alignment device for supporting an object to be exposed in a vertical state, such as a board for forming a printed wiring board or an exposure mask.

In a printed wiring board manufacturing process, an etching-inspection apparatus of a conductive thin film exposes a precursory etching resist film to light through an exposure mask having an exposure pattern corresponding to a desired conductive pattern.

The exposure mask and the substrate coated with the preliminary etching photoresist film are aligned before exposing the preliminary etching photoresist film to light.

In general, a printed wiring board or an exposure mask is supported by an alignment table movable for position alignment in a vertical plane with respect to the direction in which the board and the exposure mask are arranged, the alignment table such that the board and the exposure mask are aligned with each other. Move.

Various alignment table mechanisms have been proposed for the board and exposure mask.

Basically, the alignment table mechanism is provided with an XYθ table, and performs alignment of the board by measuring the error at the time of overlapping of the register mark formed on the board with the exposure mask by a camera or the like and simultaneously moving the alignment table.

For example, a conventional horizontal alignment table mechanism widely used includes a horizontal base plate 3 and a supporting alignment table 5 such as an exposure mask.

The alignment table 5 is a rectangular flat plate and has a relatively large opening 5a through which light can pass, surrounded by its periphery.

The alignment table 5 is supported to move horizontally freely in an attached state with respect to the upper surface of the base plate 3.

The first and second actuators 9 are attached to the front surface of the base plate 3 with their rearwardly extending axes.

The third actuator 9 has a shaft extending to the left and is attached to the right side of the base plate 3.

The first, second and third actuators 9 are electrically actuated devices having operating rods 9a each linearly moving.

The first and second guide rails 11 are attached to the front surface of the alignment table 5, and the third guide rails 11 are attached to the right side of the alignment table 5. The sliders 13 are respectively attached to the guide rails 11. The movable rods 9a are each coupled to the slider 13 by a universal joint 15.

The third actuator 9 is driven to move the alignment table 5 in the left and right directions.

The first and second actuators 9 are operated to move the alignment table 5 in the front and back directions.

Both the first or second actuators 9 are operated so that the horizontal table 5 can rotate on the horizontal plane.

Since the actuator 9 protrudes outwardly from the periphery of the alignment table 5, the overall size of the conventional alignment table mechanism is large due to the alignment table 5.

If it is necessary for the actuator 9 to move the alignment table to position the alignment table 5 with an accuracy in micrometers, the couplings of the guide rail 11 and the slider 13 and the slider 13 are movable. The clearances at the joints of the actuator 9 and the alignment table 5, including the engaging portions of the rod 9a, must be infinitely close to zero, while the actuator 9 is manufactured with precision to allow no backlash at all. Should be.

Although not shown in FIG. 5, in practice, the actuator 9 is a high precision device comprising a pulse motor, a ball screw, a coupling as a drive means and complex precision bearings supporting these elements.

Therefore, the joint which couples the actuator 9 and the actuator to the alignment table 5 is expensive.

When an exposure mechanism such as an exposure mask is used in a vertical state to avoid the adverse effects of dust, the disclosed vertical alignment table mechanism 1 of FIG. 6 should be used.

The vertical alignment table mechanism 1 requires a holding mechanism 17 for supporting the alignment table 5, for example between sliding bearings set to contact opposing major surfaces of the alignment table 5. do.

When the retaining mechanism 17 is applied, the vertical alignment table mechanism 1 has a large depth, and the external dimension of the alignment table 5 must be large for engagement with the retaining mechanism 17.

Therefore, the size of the vertical alignment table mechanism 1 becomes large.

In general, the alignment table 5 supported by the holding mechanism 17 cannot move smoothly, and it is difficult to remove the backlash in the holding mechanism 17.

A portion of the retaining mechanism 17 protrudes in front of the alignment table 5, obstructing the movement of the alignment table 5 in which the position must be adjusted in relation to the object, and the alignment table mechanism 1 and peripheral mechanisms. It restricts design freedom.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide a vertical alignment table mechanism in which a low cost and compact yet precise alignment is performed.

To achieve the above object, the present invention provides an alignment table having a vertical support wall, an alignment table having a posture opposite to the front surface of the support wall, and having an exposure apparatus support area surrounded by a periphery, and the alignment table on a vertical plane. And a plurality of table support devices for moving the alignment table in directions parallel to two alignment directions perpendicular to each other, each of which supports a table. A vertical alignment table mechanism is provided that includes an elastic member that is always biased toward the support wall and a rolling member inserted between the support wall and the alignment table so that the alignment table can move in the two alignment directions.

On the other hand, in the present invention, since the rolling member is movable, the alignment table is always pressurized toward the support wall by the elastic member. Accordingly, there is no play between the alignment table and the support wall in the direction orthogonal to the vertical wall.

Since the elastic member and the rolling member of the table support apparatus do not protrude toward the front of the alignment table on which the exposure mechanism is supported, the position of the alignment table to be adjusted relative to the object is not disturbed, and thus the alignment table mechanism and its associated The freedom of design of the mechanism is significantly increased.

The present invention provides a pair of contact members, each of which is attached to the support wall and the alignment table to be in contact with each other, an elastic member forcing the contact members to contact each other, and one of the contact members. An actuator may be provided that moves to one side or away from the other.

Thus, the alignment table has no play at all in the vertical direction as well as in the alignment direction, since the contact members are always in pressure contact with each other.

Therefore, even if the actuator moves one of the contact members to or away from the other in this state, the latter contact member reliably supports the alignment table by following the motion of the former, which ensures high precision alignment operation. To ensure.

Values that include complex mechanisms to eliminate backlash between parts, because the elastic force that forces the contact members on the side of the alignment table and the contacts on the side of the support wall to act against each other is used as the initial load acting on the movable rod of the actuator. No expensive actuators are required, which reduces the manufacturing cost of the vertical alignment table mechanism.

According to the vertical alignment table mechanism of the present invention, the table support device and the table transfer device may be disposed outside the exposure mechanism support area of the alignment table.

Thus, since neither part of the table support device nor the table conveying device protrudes at all or almost outward from the alignment table, the vertical alignment table mechanism can be formed with a simple structure of a dimension corresponding to the required dimension of the alignment table.

That is, the table support apparatus and the table transfer apparatus do not require a large space at the time of installation, and the exposure mechanism support region such as the opening can be formed in a large size to match the size of the alignment table.

The contact member driven and moved by the actuator may be attached to the free end of the movable rod of the actuator or connected to the free end of the movable rod by an intermediate member.

If the contact member is directly attached to the free end of the movable rod, the table transfer device can be formed in a compact structure.

The above and other objects, features, and advantages of the present invention will become more apparent from the following description with reference to the accompanying drawings.

Hereinafter, an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 4.

1 is a perspective view of a main portion of a printed wiring board exposure apparatus to which a vertical alignment table mechanism according to a preferred embodiment of the present invention is applied, and FIG. 2 is an enlarged cross-sectional view taken along line II-II of FIG. 3 showing the vertical alignment table mechanism of FIG. 3 is an enlarged cross-sectional view taken along line III-III of FIG. 2 showing the vertical alignment table mechanism of FIG. 1, and FIG. 4 is an enlarged perspective view of the main portion of the vertical alignment table mechanism of FIG.

The vertical alignment table mechanism of the present invention is a vertical alignment table mechanism 21 for supporting an exposure mask 23 made of glass, which forms part of the exposure equipment used for forming a printed wiring board.

The exposure mask 23 is provided with a required transparent pattern, and is provided with a register mark 23a.

The exposure mask 23 is supported by the alignment table 33 included in the exposure mask alignment table mechanism 21.

The board 25 on which the printed wiring pattern is formed is exposed through the exposure mask 23.

The board 25 has a surface coated with an ultraviolet curing photosensitive film, and has a reference hole 25a for alignment with the exposure mask 23.

The board support base 27 is used to convey the board 25 in a vertical position.

The board support base 27 has a vertical suction surface 27a for supporting the board 25 by suction force.

The board support base 27 has a delivery position where the board 25 is conveyed from the conveyor to the board support base 27 and, conversely, is delivered from the board support base to the conveyor, and the board is disposed opposite the exposure mask 23 to expose the board. The exposure position can be moved.

The alignment table mechanism 21 includes a base structure 31 supported for movement along the guide rail 29, an alignment table 33 supported vertically on the base structure 31, and the base. Four table support devices 35 for supporting the alignment table 33 on the structure 31, three table movers 37 for adjusting the position of the alignment table 33, and the alignment table 33. Camera 39 for detecting a position error.

The exposure mask 23 provided with the required pattern is detachably supported on the alignment table 33.

The base structure 31 has a base member 41 that is relatively thick compared to the support wall 43 supported on the guide rail to move along the guide rail 29, and the base member 41 as shown in FIG. 1. A flat support wall 43 standing upright from the front left end of the lower left end of the support wall, a camera bracket 45 protruding rearward from the center of the left and right sides of the support wall 43, and four corners of the support wall 43, respectively. Each of the spring connection members 47 protrudes rearward from the point of.

As shown in FIG. 2, the supporting wall 43 is provided with an opening 43a which is similar in shape to the supporting wall and has a small dimension.

The alignment table 33 has a rectangular frame shape by processing a flat plate one dimension smaller than the support wall 43.

As shown in FIG. 3, the alignment table 33 has an opening 33a of a dimension substantially the same as or slightly smaller than the opening 43a of the support wall.

Thus, the support wall 43 and the alignment table 33 are both rectangular in shape.

The four table support devices 35 each have a ball caster 51 fixed to the support wall 43, a contact block 53 fixed to the alignment table 33, and a tension spring that is an elastic member. It includes.

The ball caster 51 includes a casing 51b and a ball 51a rotatably supported in the casing 51b through a plurality of fine balls (not shown).

The ball casters 51 are attached to points near the left and right ends of the upper and lower boundaries of the opening 43a on the front surface of the supporting wall 43, respectively.

A part of the ball 51a protrudes forward in the casing 51b.

The contact blocks 53 are each attached at points near the left and right ends of the upper and lower boundaries of the opening 33a at the rear of the alignment table 33.

Small spring splices 57 (FIG. 3) are attached to the upper point of the upper contact block 53 of the alignment table 33 and the lower point of the lower contact block 53, respectively.

Through-holes 59 for allowing the tension springs 55 to extend therethrough are formed at positions corresponding to the spring housings 47 near the ball casters 51 at the support walls 43, respectively.

A spring tensioning rod 61 extends forward from the rear wall of each spring housing 47.

The contact block 53 attached to the alignment table 33 is installed to be in contact with the ball 51a of the ball caster 51, and each tension spring 55 points the alignment table 33 toward the support wall 43. In addition to the convenience of contact between the contact block 53 and the ball 51a of the ball 51a of the ball caster 51, between the spring connection 57 and the front end of the spring tensioning rod 61 Extends through the through-hole 59.

The alignment table 33 is supported on the front surface of the support wall 43 in a vertical posture so that it can be moved in the vertical plane on the ball 51a of the ball caster 51.

The alignment table 33 has no play in the direction orthogonal to the vertical plane, and does not move forward unless a force exceeding the elasticity of the tension spring 55 is applied in the forward direction.

The three table transfer apparatuses 37 are arranged in the space between the supporting wall 43 and the alignment table 33.

The lower table conveying apparatus 37 is disposed on the lower surfaces of the opening 33a and the opening 43a, and the left and right table conveying apparatus 37 is disposed on the left and right sides of the opening 33a and the opening 43a, respectively. .

The lower table feeder 37 moves the alignment table 33 in the horizontal direction for alignment in the horizontal direction, and the left and right table feeder 37 moves the alignment table 33 vertically for alignment in the vertical direction. To move in the direction of

The table support device 35 and the table transport device 37 are disposed outside the space corresponding to the opening 33a.

The three table transfer apparatuses 37 are identical in structure.

As most clearly shown in FIG. 4, each table transfer device 37 is a motor housing 65 and bearing housing 67 sequentially arranged in front of the support wall 43 in an alignment direction for moving the alignment table 33. ) And a guide rail 69.

The alignment direction of the lower table conveying apparatus 37 is a horizontal direction, and the alignment direction of the left and right table conveying apparatus 37 is a vertical direction.

The pulse motor 71 is fixed on the motor bracket 65.

The bearing 73 is supported inside the bearing housing 67.

One end of the threaded rod 75 is connected to the output shaft of the pulse motor 71.

The sliding plate 77 is guided to move in the alignment direction by the guide rail 69.

The nut 79 is fixed to one end of the sliding plate 77, and the roller support shaft 81 is fixed to the other end of the sliding plate 77 so as to extend perpendicularly to the front surface of the support wall 43.

The threaded rod 75 is screwed to the nut 79, and a driven roller 83, which is a contact member, is rotatably supported on the roller support shaft 81. As shown in FIG.

When the pulse motor 71 is driven, the nut 79 is moved in a direction corresponding to the rotational direction of the output shaft of the pulse motor, thereby driving the driven roller 83 in the same direction.

The three contact blocks 85 are rectangular parallelepipeds, ie the contact members are fixed to the rear of the alignment table 33.

The lower contact block 85 is fixed substantially horizontally to the central cross section of the alignment table 33 extending below the opening 33a.

The right front end surface of the lower contact block 85 faces the left side of the driven roller 83 of the lower table transport apparatus 37.

The left and right contact blocks 85 are respectively fixed substantially vertically to the central portions of the cross section of the alignment table 33 extending on the left and right sides of the opening 33a.

Lower end faces of the left and right contact blocks 85 face the upper portions of the driven rollers 83 of the left and right table transport apparatus 37, respectively.

Each of the blocks 85 is in elastic contact with the corresponding driven roller 83 due to the elasticity of the tension springs 87, respectively.

Each table feed device 37 includes a tension spring 87 extending along the boundary of the opening 33a and the opening 43a in the alignment direction, and includes a spring nail 89 fixed to the support wall 43. It spans between the spring splices 91 fixed to the alignment table 33.

Thus, the alignment table 33 is biased to the right by the lower tension spring 87, and the lower contact block 85 is always lowered by the tension of the lower tension spring 87 and the lower table conveying device 37 Elastically comes into contact with the driven roller 83.

Further, the alignment table 33 is biased down by the left and right tension springs 87, and the left and right contact blocks 85 are always driven rollers of the left and right table transport apparatus 37 by the tension force of the left and right tension springs 87. Elastic contact with (83).

Thus, the alignment table 33 is supported at the desired position on the vertical plane by the driven rollers 83 in elastic contact with the contact blocks 85 respectively.

When the pulse motor is driven such that the output shaft of the pulse motor 71 of the lower table feed device 37 rotates in one direction, the driven roller 83 is left against the tensile force of the tension spring so that the alignment table can be moved to the left. The contact block 85 is pushed.

Then, when the pulse motor is driven so that the output shaft of the pulse motor 71 of the lower table transfer device 37 rotates in the opposite direction to the above, the driven roller 83 moves the alignment table to the right, and the contact block 85 is moved to the right along the driven roller 83 by the tension of the tension spring.

Accordingly, when the alignment table is moved in the horizontal direction, the driven rollers 83 of the left and right table transport apparatus 37 are rolled along the lower front end faces of the corresponding contact blocks 85, respectively.

The left and right table transfer apparatus 37 operates similarly, and the alignment table 33 of the left and right table transfer apparatus 37 moves upward when the output shaft of the pulse motor 71 rotates in one direction, and the pulse motor When the output shaft of 71 rotates in the opposite direction, it moves downward.

Thus, when the alignment table moves in the vertical direction, the driven roller 83 of the lower table conveying device 37 is rolled along the right front end surface of the corresponding contact block 85.

Since the alignment table 33 is always biased toward the support wall 43 whether it is movable or not, there is no play between the alignment table 33 and the support wall 43, and the alignment table relative to the support wall 43 ( Smooth movement of 33 is assured since the driven roller 83 rolls along the contact block 85 and the contact block 53 on the ball caster 51.

A suction groove, not shown, is formed in the front surface of the alignment table 33 to surround the opening 33a.

The periphery of the exposure mask 23 is attracted to the front surface of the alignment table 33 by the suction force generated in the suction groove to support the exposure mask 23 on the alignment table 33.

The camera 39 is a solid state imaging device (CCD) camera.

Each camera is mounted on a camera moving mechanism (not shown), supported on the camera bracket 45, and the standby position outside the opening 33a and the opening 43a and the optical axis of the camera lens on the exposure mask 23. It is moved between detection positions aligned with respect to the register mark.

The alignment of the exposure mask 23 with the board 25 and the operation for exposing the board 25 to light through the exposure mask 23 are as described later.

When the board support base 27 supporting the board 25 is positioned at the exposure position, the alignment table mechanism 21 causes the board support base 27 to bring the exposure mask 23 into contact with the board 25. Advance to

The position of the reference hole 25a of the board 25 relative to the register mark 23a of the exposure mask 23 is detected by the camera 39 and from the register mark 23a of the corresponding exposure mask 23. The positional deviation of the reference hole 25a of the board 25 is calculated.

Then, the alignment table mechanism 21 moves slightly away from the exposure mask 23, and the step motor 71 moves the register mark 23a of the exposure mask 23 and the reference hole of the board 25. It is driven to move the alignment table 33 supporting the exposure mask 23 on the vertical plane so that 25a) is aligned.

This alignment action continues until the positional deviation of the register mark 23a from the reference hole 25a of the corresponding board 25 is reduced to a value within the allowable range.

Subsequently, the alignment table mechanism 21 is advanced so that the exposure mask 23 contacts the board 25, the camera 39 is returned to their standby position, and an exposure lamp (not shown) disposed behind the supporting wall. ) Is turned on to irradiate the board 25 with ultraviolet rays through the exposure mask 23.

Although the present invention has been described as a preferred embodiment thereof, the present invention is not limited by the above description in practical application.

For example, the elastic member may be any suitable member other than a tension spring, and the ball 51a of the table support device 35 may be supported against rotation on the alignment table 33, and the support wall 43 It is also possible to maintain a state in which elastic contact with respect to.

The step motor 71, which is an actuator of each table transfer device 37, and the driven roller 83, which is a rolling member, may be supported on the alignment table 33 instead of the support wall 43, respectively.

The two contact members of each table transfer device 37 may both be rolling members.

The vertical alignment table mechanism of the present invention is not only applicable to the exposure mask support but also to support various kinds of exposure mechanisms, and does not necessarily require an opening.

Although the present invention has been described in detail as a preferred embodiment within a specific range, it is understood that various modifications and changes are possible, and not limited to the above description without departing from the scope and spirit of the invention.

The present invention makes it possible to provide a vertical alignment table mechanism which is low in cost and compact and precise in alignment.

Claims (12)

A vertical support wall 43; An alignment table 33 disposed in a position perpendicular to the front surface of the support wall and having an exposure mechanism support region 33a surrounded by a peripheral portion thereof; A plurality of table support devices 35 for supporting the alignment table 33 against movement on the vertical plane; A plurality of table transfer devices 37 are provided for moving the alignment table in directions parallel to two alignment directions perpendicular to each other, Each of the table support devices 35 includes an elastic member 55 which always biases the alignment table 33 toward the support wall 43, and the support wall and the alignment table so that the alignment table can move in the two alignment directions. And a rolling member (51a) inserted therebetween. The method of claim 1, The rolling member is a ball 51a supported in the ball caster 51 fixed to the supporting wall 43, and the alignment table 33 is fixed to the alignment table and has a contact block having a surface on which the ball contacts the rolling ( And 53) a vertical alignment table mechanism. The method of claim 1, The elastic member is provided in the vicinity of the rolling member (51a) vertical alignment table mechanism, characterized in that the tension spring (55) connecting the alignment table (33) and the support wall (43). The method of claim 3, wherein The support wall 43 has a spring connection member 47 protruding from the support wall in a direction away from the alignment table 33, one end of the tension spring 55 is connected to the spring connection member 47 and The other end is connected to the alignment table (33), wherein the tension spring extends through a hole (59) in the support wall. The method of claim 1, Each of the table feeders 37 A pair of contact members 83 and 85 attached to the support wall 43 and the alignment table 33 to be in contact with each other; An elastic member 87 forcing the contact members to be in pressure contact with each other; And an actuator (71) for moving one of the contact members toward or away from the other. The method of claim 5, The actuator (71) comprises a movable rod, wherein one of the contact members of each table transfer device (37) engages the free end of the movable rod of the actuator. The method of claim 5, And at least one of the contact members is a rolling member (83). The method of claim 5, One of the contact members is a contact block 85 fixed to one of the alignment table 33 and the support wall 43, and the other of the contact members is supported on the other of the alignment table and the support wall. Vertical alignment table mechanism, characterized in that the roller 83 in contact with the surface of the contact block (85). The method of claim 5, The actuator 71 is a rotary motor mounted to one of the alignment table 33 and the support wall 43, and includes an output shaft in the form of a threaded rod 75. And a nut (79) securely mounted to the threaded rod on the other of the alignment table and the support wall. The method of claim 9, Vertical alignment table mechanism, characterized in that the elastic member for forcing the contact member is a tension spring (87) whose two ends are respectively connected to the alignment table (33) and the support wall (43). The method of claim 1, A vertical alignment table mechanism, characterized in that a table support device (35) and a table feed device (37) are provided at the periphery of the alignment table (33). The method of claim 1, A table alignment device (35) and a table transfer device (37) are arranged outside the exposure mechanism support area (33a) of the alignment table.

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