KR100537180B1 - Method for simulating communication a host between a equipment in manufacturing semiconductor process - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to a method for simulating communication between a device and a host of a semiconductor manufacturing process, and a recording medium for realizing the same.

2. The technical problem to be solved by the invention

The present invention provides a graphical user interface operator environment that is easy to perform a communication simulation test in performing a communication simulation test method between a device and a host of a semiconductor manufacturing process, and transmits and receives a message in real time. To provide a simulation test method for the communication between the device and the host of the semiconductor manufacturing process that can be confirmed by the operator through the graphical user interface environment, and a recording medium for realizing this.

3. Summary of Solution to Invention

The present invention includes a first step of opening a library file in which a message is predefined and stored; A second step of determining a type of message in one of a host and a device to which the communication test unit is connected; A third step of storing the received message in a history file and determining whether the received message is a message to which a response is to be received, when the determination result of the second step is a received message; A fourth step of storing the message to be transmitted in a history file, transmitting the message to a device, and performing the second step again when the transmission message is a result of the determination in the second step; And a fifth step of performing the second step again if the received message is a message for which a response is desired.

4. Important uses of the invention

The present invention is used in the simulation test method between the equipment and the host of the semiconductor manufacturing process.

Description

METHOD FOR SIMULATING COMMUNICATION A HOST BETWEEN A EQUIPMENT IN MANUFACTURING SEMICONDUCTOR PROCESS}

The present invention relates to a method for simulating communication between a device and a host in a semiconductor manufacturing process, and a recording medium for realizing the same.

In general, command and data transmission between a device and a host of a semiconductor manufacturing process are performed through a Semi Equipment Communications Standard (SECS) message. Update the contents of the host database.

However, the host can analyze the exact contents of the message only if it is defined by checking the message structure and communication order in advance for the characteristics of each device.

You can also define the host's message by checking the SECS message of the device, but in practice, the message structure and value of the host will vary depending on the situation of each line, the process in which the device is placed, and the bay used. do.

Therefore, it is necessary to apply a host message that corresponds to the actual use of each device, and thus a communication test between the device and the host is required.

Accordingly, in the related art, a system for simulating a communication test between a device and a host in a semiconductor manufacturing process has been developed and used.

However, in the conventional simulation test system between the semiconductor manufacturing process equipment and the host, the environment for performing the communication simulation test is configured in the text mode, and therefore, an incorrect SECS message is not formed due to an incorrect input by the operator. When the misconfigured SECS message is applied to the actual line, it does not provide a smooth communication environment between the equipment and the host, which reduces the production efficiency.

In order to solve the above problems, the present invention provides a graphical user interface operator environment that is easy to perform a communication simulation test in performing a communication simulation test method between a device and a host of a semiconductor manufacturing process. The present invention provides a method for simulating communication between a host and a device of a semiconductor manufacturing process and a recording medium for realizing the message transmission and reception in real time through the graphical user interface environment. have.

The present invention for achieving the above object, the first step of opening a library file in which a message is predefined and stored; A second step of determining a type of message in one of a host and a device to which the communication test unit is connected; A third step of storing the received message in a history file and determining whether the received message is a message to which a response is to be received, when the determination result of the second step is a received message; A fourth step of storing the message to be transmitted in a history file, transmitting the message to a device, and performing the second step again when the transmission message is a result of the determination in the second step; And a fifth step of performing the second step again if the received message is a message for which a response is desired.

In addition, the present invention includes a first function of opening a library file in which a message is predefined and stored; A second function of determining a type of message in any one of a host and a device to which the communication test unit is connected; A third function of storing a received message in a history file and determining whether the received message is a message to which a response is to be received, when the determination result of the second function is a received message; A fourth function of storing a message to be transmitted in a history file, transmitting the message to a device, and performing the second function again when it is determined that the second function is a transmission message; And a computer readable recording medium having recorded thereon a program for realizing a fifth function of performing the second function again when the received message is a message for which a response is desired as a result of the determination of the third function.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, a system providing a method for simulating communication between a device and a host in a semiconductor manufacturing process according to the present invention includes a message structure and sequence in a Semi Equipment Communication Standard (SECS) message library file. Communication test unit 100 for defining and performing a communication simulation test between the host and the device, and the host and the device (110, 120) to send and receive messages between each other using the message and the sequence defined in the communication test unit 100 And a SECS message library file 130 that stores a message for performing a simulation test between the host and the device 110 and 120, and a message transmitted and received between the host and the device 110 and 120. It consists of a history file 140 to store.

In this case, the communication test unit 100 may be connected to any one of the host 110 and the device 120, and an embodiment to be described below may include the communication test unit 100 being connected to the host 110. If it is connected to.

Next, a method for performing a communication simulation test in a semiconductor manufacturing process according to the present invention will be described with reference to FIGS. 2 and 3.

FIG. 2 is an exemplary initial screen illustrating a message flow on a monitor for performing a communication simulation test in a semiconductor manufacturing process according to an embodiment of the present invention. FIG. 2 illustrates a flow of messages between a host 110 and a device 120 in real time. You can monitor and select a message to send.

In the drawing, SimSECS (Simulate SECS) 200 refers to the host 110 to which the communication test unit 100 is connected.

Next, the EQUIPMENT 202 is a simulated test target device that transmits and receives a message with the host 110.

Reference numeral 204 denotes a message box in which the host 110 and the device 120 can select a SECS message to transmit and receive.

Reference numeral 206 denotes a message box capable of displaying in real time the SECS message being transmitted and received by the host 110 and the device 120.

Reference numeral 208 denotes communication setting information between the host 110 and the device 120.

3 is an exemplary diagram for setting a configuration of a message for performing a communication simulation test in a semiconductor manufacturing process according to the present invention, and establishes a communication environment between the host 110 and the device 120.

In the figure, the baud rate 300 is a selection area for setting a data transmission rate in communication between the host 110 and the device 120 and indicates the number of bits that can be transmitted per second. Here, SECS is 9600 by default.

Next, the port 302 represents a hardware device that is directly connected to the equipment in communication. Here, the SECS is connected to a COM port which is a serial port.

Reference numeral 304 is a selection area for setting a sender and a receiver during communication between the host 110 and the device 120. MASTER means a sender and SLAVE means a receiver.

In the drawing, Retry 306 is a selection area for setting the number of retries when a communication error occurs during communication between the host 110 and the device 120.

In the figure, Time Out 308 is a transmission time T1 of each byte in one message, a maximum time T2 at which a response to a message transmission should occur, and a maximum wait until a response message is received. It is an area for setting the time T3 and the maximum time T4 for waiting for divided messages when the length of one message is so large that the reception cannot be received at one time.

In the drawing, Device ID 310 is an area for inputting a unique device number determined for each device, and it is possible to know which device the message currently being communicated is through the Device ID. Here, HEX (hexa decimal) means hexadecimal and DEC (decimal) means decimal.

4 is a flowchart illustrating a communication simulation test method between a device and a host of a semiconductor manufacturing process according to the present invention.

First, the communication test unit 100 opens the SECS message library file 130 in which the SECS message is defined and stored (S400), and establishes communication between the host 110 and the device 120 (S402). .

Subsequently, the communication test unit 100 determines whether the message reception message or the transmission message in the host 110 (S404).

If the determination result (S404), the received message, the communication test unit 100 confirms the message reception (S406), and stores the received message in the history file 140 (S408).

Subsequently, the communication test unit 100 determines that the received message is a message for which a response is desired (S410), and if the received message is a message for which a response is desired, proceeds to step S404 again.

If the determination result (S410), the received message is a message that does not want a response, the communication test unit 100 stores the message in the history file 140 (S412).

Next, the host 110 transmits a message to the device 120 (S414), and the communication test unit 100 proceeds to step S404 again.

If the determination result (S404), the transmission message, the communication test unit 100 proceeds again from the step S412.

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, in the communication simulation test method between the equipment and the host of the semiconductor manufacturing process, by performing the communication simulation test in a graphical user environment, by configuring the SECS message through the correct input to the appropriate SECS message to the actual line Applicability has the effect of providing the optimal operation method between the equipment and the host.

1 is a block diagram showing the configuration of a system for providing a communication simulation test method in a semiconductor manufacturing process according to the present invention.

Fig. 2 is an exemplary initial screen showing a flow of messages for performing a communication simulation test in a semiconductor manufacturing process according to the present invention on a monitor;

3 is an exemplary diagram for setting the configuration of a message for performing a communication simulation test in a semiconductor manufacturing process according to the present invention.

4 is a process flow diagram for performing a communication simulation test in a semiconductor manufacturing process according to the present invention.

* Explanation of symbols for the main parts of the drawings

100: communication test unit 110: host

120: Equipment 130: SECS message library file

140: history file

Claims (4)

A first step of opening a library file in which a message is predefined and stored; A second step of determining a type of message in one of a host and a device to which the communication test unit is connected; A third step of storing the received message in a history file and determining whether the received message is a message to which a response is to be received, when the determination result of the second step is a received message; A fourth step of storing the message to be transmitted in a history file, transmitting the message to a device, and performing the second step again when the transmission message is a result of the determination in the second step; And A fifth step of performing the second step again if the received message is a message for which a response is desired; Communication simulation test method between the device and the host of the semiconductor manufacturing process comprising a. The method of claim 1, The first step, And a sixth step of establishing communication between the host and the device. The method according to claim 1 or 2, And a seventh step of performing the fourth step again if the received message is a message that is not desired to be answered, as a result of the determination in the third step. In a system that provides a simulation test method between the device and the host of the semiconductor manufacturing process, A first function of opening a library file in which a message is predefined and stored; A second function of determining a type of message in any one of a host and a device to which the communication test unit is connected; A third function of storing a received message in a history file and determining whether the received message is a message to which a response is to be received, when the determination result of the second function is a received message; A fourth function of storing a message to be transmitted in a history file, transmitting the message to a device, and performing the second function again when it is determined that the second function is a transmission message; And A fifth function for performing the second function again if the received message is a message for which a response is desired as a result of the determination of the third function; A computer-readable recording medium having recorded thereon a program for realizing this.