KR100533988B1 - Automatic skipping lot process system in manufacturing semiconductor and method using the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to a system and method for omitting lot process progress in a semiconductor manufacturing process, and a computer-readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

According to the present invention, a worker performs a process progress omission request including process data of a corresponding lot using an integrated automation system for semiconductor line management, and a plurality of distributed servers transmit a process data and process progress omission request of the corresponding lot to a database. System and method, and a computer-readable recording medium having recorded thereon a program for realizing the lot process in a semiconductor manufacturing process which can omit the process of the lot without additional work by the operator. To provide.

3. Summary of Solution to Invention

The present invention includes a first step in which a worker interface process receives a request to skip a lot process from the outside; A second step of transmitting and receiving the lot process progress skip request by the worker interface process and the worker interface server; A third step of checking and updating the lot process progress skip request data received by the operator interface server in a master database and transmitting data related to the identified lot process progress skipped to a cell management server; The cell management server receiving the data related to the lot process skipping from the operator interface server checks and updates the data related to the lot process skipping in the master database, and updates the data related to the lot process skipping to the lot schedule server. A fourth step of transmitting; A fifth step of the cell management server transmitting a data check result related to the omission of a lot process in a master database to the worker interface server; A sixth step of the cell management server recording data related to the omission of the lot process in a history information server queue file and transmitting a result message to the history information server; And the history information server receiving a message indicating that data related to the lot process skipping from the cell management server has been recorded in the history information server queue file, obtains data related to the process progress skipping of the corresponding lot from the history information server queue file. The seventh step of checking and updating the history database is performed.

4. Important uses of the invention

The present invention is used in a method of eliminating the progress of the lot in the semiconductor manufacturing process.

Description

System for omitting lot process in semiconductor manufacturing process and method thereof {AUTOMATIC SKIPPING LOT PROCESS SYSTEM IN MANUFACTURING SEMICONDUCTOR AND METHOD USING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for omitting lot processing in a semiconductor manufacturing process, and a computer readable recording medium having recorded thereon a program for realizing the same. Lot process progress elimination system and method and method, and program for realizing this, which can eliminate the additional work of the operator by exchanging messages between servers and updating lot process progress skip data of the relevant lot. The present invention relates to a readable recording medium.

In general, in the semiconductor manufacturing process, as the process is stabilized, the number of measurements of the lot is measured every time in order to increase the production efficiency, and then selectively measured. At this time, the lot which does not need a measurement skips the process to proceed.

In the related art, a worker judges and designates a lot that does not require a measurement process, and the worker directly inputs information on the process omission to omit the process of the lot.

However, the conventional lot process progress skipping method which performs a series of processes as mentioned above has a possibility that a production efficiency may be greatly reduced when the information about the next process is wrongly input during the process omission information input of an operator.

The present invention has been made to solve the above problems, the operator performs a process progress omission request including the process data of the corresponding lot by using the integrated automation system for semiconductor line management, a plurality of distributed servers the corresponding lot Lot process progress skip system and method, and program for realizing the process data in the semiconductor manufacturing process that can skip the process progress of the lot without additional work by the operator by checking and updating the process data and process progress skip request in the database Its purpose is to provide a computer readable recording medium having recorded thereon.

Lot process progress omission system in a semiconductor manufacturing process to which the present invention is applied to achieve the above object, the operator interface means for providing an environment that can input a lot process progress omission request from the outside; Server means for checking and transmitting a lot process progress skip request received from said operator interface means; And storage means for storing the production information generated in the semiconductor manufacturing process, wherein the server means checks and updates the data.

In the semiconductor manufacturing process according to the present invention, the lot process progress skipping method may include a first step of receiving, by an operator interface process, a lot process progress skipping request from the outside; A second step in which the worker interface process transmits a lot process progress skip request to a worker interface server, and the worker interface server receives the lot process progress skip request; A third step of the worker interface server confirming and updating the lot process progress skip request data received from the worker interface process in a master database, and transmitting data related to the lot process progress skipped identified in the master database to a cell management server; ; The cell management server receiving the data related to the lot process skipping from the operator interface server checks and updates the data related to the lot process skipping in the master database, and updates the data related to the lot process skipping to the lot schedule server. A fourth step of transmitting; A fifth step of the cell management server transmitting a data check result related to the omission of a lot process in a master database to the worker interface server; A sixth step of the cell management server recording data related to the omission of the lot process in a history information server queue file and transmitting a result message to the history information server; And the history information server receiving a message indicating that data related to the lot process skipping from the cell management server has been recorded in the history information server queue file, obtains data related to the process progress skipping of the corresponding lot from the history information server queue file. The seventh step of checking and updating the history database is performed.

The present invention also provides a semiconductor process automation system having a processor, comprising: a first function of receiving, by an operator interface process, a request for skipping a lot process from the outside; A second function in which the worker interface process sends a lot process progress skip request to a worker interface server and the worker interface server receives the lot process progress skip request; A third function for the worker interface server to check and update the lot process progress skip request data received from the worker interface process in a master database and to transmit data related to the lot process progress skipped identified in the master database to a cell management server ; The cell management server receiving the data related to the lot process skipping from the operator interface server checks and updates the data related to the lot process skipping in the master database, and updates the data related to the lot process skipping to the lot schedule server. A fourth function of transmitting; A fifth function of transmitting, by the cell management server, a data check result related to omitting lot process progress from a master database to the worker interface server; A sixth function in which the cell management server records data related to the omission of the lot process in a history information server queue file, and transmits a result message to the history information server; And the history information server receiving a message indicating that data related to the lot process skipping from the cell management server has been recorded in the history information server queue file, obtains data related to the process progress skipping of the corresponding lot from the history information server queue file. A computer readable recording medium having recorded thereon a program for realizing a seventh function of checking and updating in a history database is provided.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a schematic configuration of a lot process progress elimination system in a semiconductor manufacturing process to which the present invention is applied. Referring to FIG. 1, in a lot process progress elimination system to which the present invention is applied, an operator progresses a process. The worker interface process 200 which provides an environment for requesting omission, the worker interface server 202 which receives, confirms and transmits a lot process progress skip request from the worker interface process, and the worker interface server 202 The master database 204 acquires and updates cassette information, lot information, and process information to omit the lot process, and data related to the lot process omission received from the operator interface server 202 may be stored in the master database 204. The cell management server 206 for checking and updating, from the cell management server 206 The lot schedule server 208 receives data related to the process progress omission of the corresponding lot and modifies the process progress schedule of the corresponding lot in the master database 204, and the cell management server 206 relates to the omission of the process progress. A history information server queue file 210 for temporarily storing data, a message received from the cell management server 206, and obtaining and confirming and updating data related to lot process progress omission in the history information server queue file 210; A history database 214 that stores lot history information, cassette history information, and process history information so that the history information server 212 and the history information server 212 can check and update data on omitting lot process progress. It consists of.

Hereinafter, the operation of the lot process progress elimination system configured as described above will be described with reference to FIGS. 2 to 5.

2 is a flowchart illustrating an embodiment for performing a method of omitting lot processing in a semiconductor manufacturing process according to the present invention.

Referring to FIG. 2, when the worker requests to skip the lot process using the worker interface process 200 (S300), the worker interface process 200 and the worker interface server 202 request to skip the lot process. Send and receive (S302).

The worker interface server 202 confirms and updates the lot process progress skip request data received from the worker interface process 200 in the master database 204 (S304), and transmits the master database (206) to the cell management server 206. In step 306, data related to the lot process progress omission is confirmed (S306).

The cell management server 206 having received the data related to the lot process skipping from the worker interface server 202 checks and updates the data related to the lot process skipping in the master database 204 (S308). The data related to omitting the lot process is transmitted to the lot schedule server 208 (S310). At this time, the lot schedule server 208 modifies the schedule of the corresponding lot based on the data related to the omission of the lot process received from the master database 204.

Thereafter, the cell management server 206 transmits the data check result related to the omission of the lot process from the master database 204 to the operator interface server 202 (S312). In this case, the worker interface server 202 transmits the data check result related to the omission of the lot process received from the cell management server 206 to the worker interface process 200, and the worker interface process 200 receives the received data. The data check result related to the omission of one lot process is output to the screen for the operator to check.

Subsequently, the cell management server 206 records the data related to the omission of the lot process in the history information server queue file 210 (S314), and transmits the result message to the history information server 212 (S316).

The history information server 212, which has received a message from the cell management server 206 that the data relating to the omission of the lot process, has been recorded in the history information server queue file 210, the history information server queue file 210. In step S318, data relating to the process progress omission of the corresponding lot is obtained and confirmed and updated in the history database 214 (S318).

Attached FIG. 3 is a detailed flowchart of the process (S304) of checking and updating the lot process progress skip request data received from the worker interface process from the worker interface process in the master database in FIG. 2. Then, the worker interface server 202 checks the worker information in the lot process progress skip request data from the worker interface process 200 (S400), the corresponding lot in the master database 204 using the confirmed worker information Data of the corresponding lot is obtained from the cassette information table, the lot information table, and the process information table in step S402.

The operator interface server 202 obtains the next process, bay and equipment group ID to be performed by the corresponding lot from the process and product progress information table of the master database 204 (S404), and in the master database 204 The equipment group information table of the corresponding lot is selected and updated (S406).

4A to 4C show that the cell management server 206 receives data related to the lot process skipping from the operator interface server 202 in FIG. 2 and transmits data related to the lot process skipping to the master database 204. 4A to 4C, the cell management server 206 may include a lot information table, a device group information table, and a lot information of the corresponding lot in the master database 204. The process information table is read (S500), and it is determined whether the corresponding lot is contained in the cassette (S502).

As a result of the determination (S502), if the corresponding lot is contained in the cassette, the cell management server 206 reads the cassette information table of the corresponding lot from the master database 204 (S504), and the corresponding database from the master database 204. The process progress information table of the lot is read (S506).

On the other hand, if the determination result (S502), the lot is not contained in the cassette, the cell management server 206 immediately performs step S506.

After performing step S506, the cell management server 206 determines whether the equipment area, the lot status, the process progression of the lot in the lot information table, the equipment group information table, the process information table, and the process progress information table of the master database 204; Check the process information (S508), and again determine whether the lot is contained in the cassette (S510).

As a result of the determination (S510), when the corresponding lot is contained in the cassette, the cell management server 206 checks the location of the cassette containing the corresponding lot ID and the corresponding lot in the cassette information table of the master database 204 (S512). ), Check the next process of the corresponding lot and set the process information of the corresponding lot (S514).

On the other hand, if the determination result (S510), the lot is not contained in the cassette, the cell management server 206 immediately performs step S514.

After performing step S514, the cell management server 206 removes the planned process processing date and time of the corresponding lot, sets the processing completion date and time of the previous process (S516), and then executes the lot of the master database 204. The restriction process of the corresponding lot is released from the information table (S518).

The cell management server 206 sets the worker of the corresponding lot, the next process reservation equipment, and whether to stop the automatic progress in the lot information table of the master database 204 (S520), and proceeds from the lot information table of the master database 204. The device group ID and the device ID information that are supposed to be removed are removed (S522).

The cell management server 206 sets the state of the corresponding lot in the lot information table of the master database 204 (S524), removes the lot process movement information (S526), and then the lot information of the master database 204. The table and the process information table are updated (S528).

After performing step S528, the cell management server 206 determines whether the corresponding lot is contained in the cassette (S530).

If it is determined in S530 that the corresponding lot is contained in the cassette, the cell management server 206 sets a cassette state and an equipment group ID in the cassette information table of the master database 204 (S532), and the cassette information table. After updating (S534), the lot information table of the master database 204 is updated (S536).

The cell management server 206 deletes the process information table of the corresponding lot of the master database 204 (S538).

On the other hand, if the determination result (S530), the lot is not contained in the cassette, the cell management server 206 immediately performs step S536.

In FIG. 5, the history information server 212 receives a message indicating that data related to the omission of the lot process from the cell management server 206 is recorded in the history information server queue file 210 in FIG. 2. A detailed flowchart of a process (S318) of acquiring data related to the process skip of the corresponding lot from the information server queue file 210 and confirming and updating in the history database 214. Referring to FIG. 5, the history information server 212 receives a message from the cell management server 206 indicating that the data relating to the omission of the lot process has been recorded in the history information server queue file 210, and in the history information server queue file 210 of the corresponding lot. After acquiring data related to the process progress omission, the lot state history table of the lot for which the process is to be skipped is selected in the history database 214 (S600).

Next, the history information server 212 is a process to skip the lot in the data related to the process progress omission obtained from the history information server queue file 210, whether or not to stop the process progress, wafer quantity, whether to rework and rework After checking the information such as the process to be returned (S602), and updating the lot state history table of the lot to omit the process in the history database (214) (S604), the lot corresponding to the lot history information table of the history database Insert process skip information of (S606).

The history information server 212 updates the process progress state history table and the process progress history table of the history database 214 (S608), and inserts a process progress skip command into the lot instruction history table of the corresponding lot (S610).

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, by using the integrated automation system for semiconductor line management received a process progress omission request including the process data of the corresponding lot, a plurality of distributed servers database the process data and process progress omission request of the corresponding lot By checking and updating at, it is possible to improve the production efficiency by reducing the additional time and manpower by eliminating the process of the lot without additional work by the operator.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a schematic configuration of a lot process progress elimination system in a semiconductor manufacturing process to which the present invention is applied.

Figure 2 is an embodiment process flow diagram for performing a lot process progress skip method according to the present invention.

3 is a detailed flowchart illustrating an embodiment of a worker interface server for performing the lot process progress skipping method of FIG.

4A to 4C are detailed flowcharts illustrating an embodiment of a cell management server for performing the lot process progress skipping method of FIG. 2.

FIG. 5 is a detailed flowchart illustrating an embodiment of a cell management server for performing the lot process progress skipping method of FIG.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: lot schedule server 210: history information server queue file

212: history information server 214: history database

Claims (14)

Operator interface means for providing an environment in which a lot process progress skip request can be input from the outside; Server means for checking and transmitting a lot process progress skip request received from said operator interface means; And Storage means for storing the production information generated in the semiconductor manufacturing process, the server means to check and update the data Lot process progress skip system in the semiconductor manufacturing process comprising a. The method of claim 1, The server means, A worker interface server for receiving, checking and transmitting a lot process progress skipping request from the worker interface process; A cell management server for confirming and updating data related to the omission of the lot process received from the operator interface server in the storage means; A lot schedule server configured to receive data related to the omission of the process progress from the cell management server and to modify the process progress schedule of the corresponding lot in the storage means; And And a history information server which receives a message from the cell management server and acquires, confirms and updates data related to the lot process skipping. The method of claim 1, The storage means, A master database in which the operator interface server acquires and updates cassette information, lot information, and process information to omit lot process progress; A history information server queue file in which the cell management server temporarily stores data related to omitting the lot process; And And a history database storing lot history information, cassette history information, and process history information so that the history information server can check and update the data on the lot process skipping. A first step in which a worker interface process receives a request for skipping lot processing from the outside; A second step in which the worker interface process transmits a lot process progress skip request to a worker interface server, and the worker interface server receives the lot process progress skip request; A third step of the worker interface server confirming and updating the lot process progress skip request data received from the worker interface process in a master database, and transmitting data related to the lot process progress skipped identified in the master database to a cell management server; ; The cell management server receiving the data related to the lot process skipping from the operator interface server checks and updates the data related to the lot process skipping in the master database, and updates the data related to the lot process skipping to the lot schedule server. A fourth step of transmitting; A fifth step of the cell management server transmitting a data check result related to the omission of a lot process in a master database to the worker interface server; A sixth step of the cell management server recording data related to the omission of the lot process in a history information server queue file and transmitting a result message to the history information server; And The history information server receiving the message that the data related to the lot progress skipping from the cell management server has been recorded in the history information server queue file, obtains data related to the process progress skipping of the corresponding lot from the history information server queue file, Seventh step to check and update in the history database Lot process progress omission method in a semiconductor manufacturing process comprising a. The method of claim 4, wherein The fourth step, And the eighth step of the lot schedule server modifying a schedule of the corresponding lot based on the data related to the elimination of the lot processing progress received from the master database. The method of claim 4, wherein The fifth step, A ninth step of transmitting, by the worker interface server, data verification results related to the omission of the lot process progress received from the cell management server to the worker interface process; And a tenth step of outputting a data check result related to the omission of the lot process received by the operator interface process to a screen so that an operator can confirm the lot process progress in the semiconductor manufacturing process. The method of claim 4, wherein The third step, An eleventh step of the worker interface server confirming worker information in the lot process progress skip request data from a worker interface process; A twelfth step of acquiring data of the corresponding lot from the cassette information table, the lot information table, and the process information table of the corresponding lot in the master database using the identified worker information; A thirteenth step, wherein the worker interface server acquires a next process, bay, and equipment group ID for the corresponding lot to proceed from the process and product progress information table of the master database; Step 14, wherein the worker interface server selects and updates the equipment group information table of the corresponding lot in the master database; And And a fifteenth step of transmitting, by the operator interface server, data relating to the omission of the lot process progress confirmed in the master database to a cell management server. The method of claim 4, wherein The fourth step, A sixteenth step of the cell management server receiving data related to omitting the lot process from the operator interface server; The cell management server reads the lot information table, the equipment group information table, and the process information table of the corresponding lot from the master database, and determines whether the corresponding lot is contained in the cassette; An eighteenth step in which the cell management server reads the cassette information table of the corresponding lot from the master database when the lot is contained in the cassette as a result of the determination of the seventeenth step; A nineteenth step of the cell management server reading a process progress information table of the corresponding lot from a master database; After performing the nineteenth step, the cell management server checks the equipment area, the lot status, whether the process is stopped or the process information in the lot information table, the equipment group information table, the process information table, and the process progress information table of the master database. A 20th step of determining whether the corresponding lot is contained in the cassette; A twenty-first step of identifying, by the cell management server, the lot ID and the location of the cassette containing the corresponding lot in the cassette information table of the master database when the lot is contained in the cassette; A twenty-second step of the cell management server confirming a next process of the corresponding lot and setting process information of the corresponding lot; A twenty-third step of the cell management server removing a planned process processing date and time of the corresponding lot and setting a processing completion date and time of a previous process; A twenty-fourth step of the cell management server releasing the restriction process of the corresponding lot from the lot information table of the master database; A twenty-fifth step of setting, by the cell management server, a worker of a corresponding lot, a next process reservation equipment, and whether to stop automatic progress in a lot information table of a master database; Step 26, the cell management server removing the device group ID and the device ID information which are supposed to proceed from the lot information table of the master database; A step 27 of the cell management server setting a state of a corresponding lot in a lot information table of a master database and removing lot process movement information; Step 28, by the cell management server, updating the lot information table and the process information table of the master database; Step 29, the cell management server determining whether a corresponding lot is contained in a cassette; A thirtieth step for setting, by the cell management server, a cassette state and an equipment group ID in a cassette information table of a master database when the lot is contained in a cassette; A thirty-first step of updating, by the cell management server, a lot information table of the master database after updating a cassette information table; And And performing a step 32 in which the cell management server deletes a process information table of a corresponding lot of a master database after the step 31 is performed. The method of claim 8, And the thirteenth step of performing the nineteenth step by the cell management server when the lot is not contained in the cassette as a result of the determination in the seventeenth step. The method of claim 8, And a step 34 in which the cell management server performs the twenty-second step if the corresponding lot is not contained in the cassette as a result of the determination in the twenty step. The method of claim 8, And a thirty-fifth step in which the cell management server performs the thirty-first step if the corresponding lot is not contained in the cassette as a result of the determination in the twenty-ninth step. The method of claim 8, The sixth step, Step 36, by the cell management server, recording data related to omitting lot processing in a history information server queue file; And And the 37th step of transmitting the result message of the 36th step to the history information server by the cell management server. The method of claim 8, The seventh step, A 38 step of receiving, by the history information server, a message indicating from the cell management server that data relating to the omission of the lot process has been recorded in the history information server queue file; The 39th step of acquiring, by the history information server, data related to omission of process progress of the corresponding lot from a history information server queue file; Step 40, wherein the history information server selects a lot status history table of a lot to omit a process from a history database; After the step 40, the process to skip the lot from the data related to the process progress omission obtained from the history information server queue file, whether or not to stop the process, the number of wafers, whether or not to rework and return after rework Step 41 for confirming information such as a process to be performed; Step 42, wherein the history information server updates the lot status history table of the lot to omit the process from the history database, and inserts process omission information of the corresponding lot into the lot history information table of the history database; Step 43, wherein the history information server updates the process progress history table and the process progress history table of the history database; And And 44) inserting, by the history information server, the process progress skip command into the lot command history table of the corresponding lot. In a semiconductor process automation system equipped with a processor, A first function for the operator interface process to receive a lot process progress skip request from the outside; A second function in which the worker interface process sends a lot process progress skip request to a worker interface server and the worker interface server receives the lot process progress skip request; A third function for the worker interface server to check and update the lot process progress skip request data received from the worker interface process in a master database and to transmit data related to the lot process progress skipped identified in the master database to a cell management server ; The cell management server receiving the data related to the lot process skipping from the operator interface server checks and updates the data related to the lot process skipping in the master database, and updates the data related to the lot process skipping to the lot schedule server. A fourth function of transmitting; A fifth function of transmitting, by the cell management server, a data check result related to omitting lot process progress from a master database to the worker interface server; A sixth function in which the cell management server records data related to the omission of the lot process in a history information server queue file, and transmits a result message to the history information server; And The history information server receiving the message that the data related to the lot progress skipping from the cell management server has been recorded in the history information server queue file, obtains data related to the process progress skipping of the corresponding lot from the history information server queue file, Seventh function to check and update in the history database A computer-readable recording medium having recorded thereon a program for realizing this.