KR100531151B1 - Method of forming sustain electrode of plasma display device and plasma display device - Google Patents
Method of forming sustain electrode of plasma display device and plasma display device Download PDFInfo
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- KR100531151B1 KR100531151B1 KR1019980007146A KR19980007146A KR100531151B1 KR 100531151 B1 KR100531151 B1 KR 100531151B1 KR 1019980007146 A KR1019980007146 A KR 1019980007146A KR 19980007146 A KR19980007146 A KR 19980007146A KR 100531151 B1 KR100531151 B1 KR 100531151B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/22—Electrodes, e.g. special shape, material or configuration
- H01J11/24—Sustain electrodes or scan electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2211/00—Plasma display panels with alternate current induction of the discharge, e.g. AC-PDPs
- H01J2211/20—Constructional details
- H01J2211/22—Electrodes
- H01J2211/24—Sustain electrodes or scan electrodes
- H01J2211/245—Shape, e.g. cross section or pattern
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Abstract
본 발명은 플라즈마 표시장치의 전극 형성방법 및 플라즈마 표시장치에 관한 것으로, 특히 패널의 전면유리기판 내측에 형성되는 유지전극의 제조공정을 단축시키면서 버스전극과 투명전극간의 밀착력을 향상시키고 유지전극의 저저항과 특히, 버스전극에 의한 광차단효과를 구현하기 위한 전극의 제조방법 및 플라즈마 표시장치를 제공하는데 목적이 있다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode forming method and a plasma display device of the plasma display device. In particular, the manufacturing process of the sustain electrode formed inside the front glass substrate of the panel is shortened, and the adhesion between the bus electrode and the transparent electrode is improved, An object of the present invention is to provide a method of manufacturing an electrode and a plasma display device for implementing a resistance and, in particular, a light blocking effect by a bus electrode.
이를 실현하기 위하여 본 발명은 버스전극이 형성될 투명전극 부위를 에칭하여 요철부를 형성하고, 그 위에 버스전극을 무전해도금하여 직접 형성시키는 것이다.In order to realize this, the present invention is to form the uneven portion by etching the transparent electrode portion on which the bus electrode is to be formed, and directly formed by electroless plating the bus electrode thereon.
Description
본 발명은 플라즈마 디스플레이 패널(PDP)에 관한 것으로서, 특히 패널의 전면기판상에 금속산화물박막과 버스전극의 쌍으로 이루어지는 유지전극 형성방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel (PDP), and more particularly, to a method of forming a sustain electrode comprising a pair of metal oxide thin films and bus electrodes on a front substrate of a panel.
도 1 은 일반적인 3 전극 면방전 PDP의 구조를 나타낸 것으로 구조를 살펴보면, 화상의 표시면인 전면기판(1)과, 상기 전면기판(1)과 일정거리를 사이에 두고 평행하게 위치한 배면기판(2)으로 이루어지는데, 상기 전면기판(1)에는 배면기판(2) 대향면에 일정간격으로 형성된 복수개의 유지전극라인(6,7)과, 상기 복수개의 유지전극라인(6,7)위에 형성되어 방전전류를 제한하는 유전층(8)과, 상기 유전층(8)위에 형성되어 상기 유지전극라인(6,7)을 보호하는 보호층(9)으로 구성되며, 상기 배면기판(2)에는 복수개의 방전공간을 형성시키는 복수개의 격벽(3)과, 상기 격벽(3)사이에 유지전극라인(6,7)과 직교하도록 형성된 복수개의 어드레스 전극라인(4)과, 상기 각 방전공간의 내부면 중 양측 격벽면과 배면기판면에 해당 어드레스전극라인(4)을 감싸도록 형성되어 방전시 가시광선을 방출하는 형광층(5)으로 이루어진다.1 illustrates a structure of a general three-electrode surface discharge PDP. Referring to the structure, the front substrate 1, which is a display surface of an image, and the rear substrate 2 disposed in parallel with a predetermined distance therebetween. The front substrate (1) is formed on the plurality of sustain electrode lines (6,7) and the plurality of sustain electrode lines (6,7) formed at regular intervals on the opposite surface of the back substrate (2) A dielectric layer 8 for limiting discharge current and a protective layer 9 formed on the dielectric layer 8 to protect the sustain electrode lines 6 and 7, and a plurality of discharges on the back substrate 2. A plurality of partitions 3 forming a space, a plurality of address electrode lines 4 formed to be orthogonal to the sustain electrode lines 6 and 7 between the partitions 3, and both sides of an inner surface of each of the discharge spaces. It is formed to surround the address electrode line 4 on the partition surface and the back substrate surface. When it made of the phosphor layer (5) for emitting visible light.
그리고 상기에서 한쌍의 유지전극라인은 도 2 에 나타낸 바와같이 약 300μm의 폭을 갖으며 산화인듐 또는 산화주석을 증착한 투명전극라인(ITO 전극;6)과 크롬(Cr)-구리(Cu)-크롬(Cr)의 3 층 금속전극형태를 갖는 버스전극라인(7)으로 구성되는데, 상기 투명전극라인(6)은 양단에 방전전압이 공급되면 해당 방전공간 내부에서 상호 면방전을 일으키고, 상기 버스전극라인(7)은 금속재질로서 약50∼100μm의 폭을 갖으며 투명전극라인(6)위에 각각 형성되어 투명전극라인의 저항에 의한 전압강하를 방지한다.As shown in FIG. 2, the pair of sustain electrode lines have a width of about 300 μm, and transparent electrode lines (ITO electrode) 6 and chromium (Cr) -copper (Cu)-in which indium oxide or tin oxide is deposited. It is composed of a bus electrode line 7 having a three-layer metal electrode form of chromium (Cr), and the transparent electrode line 6 causes mutual surface discharge in a corresponding discharge space when a discharge voltage is supplied at both ends, and the bus The electrode line 7 is a metal material and has a width of about 50 to 100 μm and is formed on each of the transparent electrode lines 6 to prevent a voltage drop due to the resistance of the transparent electrode line.
그러나 종래 버스전극(7)을 형성하는 방법으로 널리 알려진 것은 진공증착에 의해 Cr 층을 형성하고 그 위에 Cu 층을 형성하고 다시 그 위에 Cr 층을 형성하는 3 중구조의 버스전극층이 사용되고 있는데, 3 중전극의 버스전극층을 형성하는 경우 두종류의 금속을 증착에 의해 형성하므로 공정비용이 더 소요되며 전면베타 형성후 패턴을 형성하므로 프로세스가 복잡하게 된다.However, what is widely known as a method of forming the bus electrode 7 is a triple layer bus electrode layer which forms a Cr layer by vacuum deposition, forms a Cu layer thereon, and then forms a Cr layer thereon. In the case of forming the bus electrode layer of the pole, two kinds of metals are formed by evaporation, which requires more processing cost, and the process is complicated because a pattern is formed after the front beta is formed.
또한, 버스전극이 투명전극에 충분한 밀착력을 갖지 못하므로 두께에 제한을 갖고 따라서 저항을 충분히 낮출 수 없는 문제점이 있었다.In addition, since the bus electrode does not have sufficient adhesion to the transparent electrode, there is a problem in that the thickness is limited and thus the resistance cannot be sufficiently lowered.
본 발명은 상기한 바와같은 종래 기술의 문제점을 해결하기 위하여 발명된 것으로 버스전극의 형성공정에 있어서 글라스 기판 위의 투명전극등의 금속산화물층 표면을 에칭하여 roughness(요철)를 부여한 후 그 위에 버스전극을 무전해 도금방법으로 직접 형성시킴으로써, 버스전극의 형성공정을 간단히 하며 투명전극과 버스전극간의 밀착력을 향상시킴으로서, 충분히 낮은 저항치를 확보할 수 있게함과 동시에 이와 같은 방법으로 형성된 금속전극 배면의 흑화현상에 의해 광차단효과를 얻도록 하는데 목적이 있다.The present invention was invented to solve the problems of the prior art as described above, in the forming process of the bus electrode, the surface of the metal oxide layer such as the transparent electrode on the glass substrate is etched to give roughness and then to the bus. By directly forming the electrode by the electroless plating method, the process of forming the bus electrode is simplified, and the adhesion between the transparent electrode and the bus electrode is improved, so that a sufficiently low resistance value can be secured and the back surface of the metal electrode formed in this manner can be secured. It is aimed to obtain light blocking effect by blackening phenomenon.
이하, 본 발명을 첨부도면을 참조하여 이하에서 상세히 설명한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
도 3 은 전면유리기판(101)상에 형성된 본 발명의 유지전극구조를 나타낸 것으로 버스전극의 구조에 있어 투명전극(102)과의 밀착력을 위해 종래 형성되었던 Cr 층이 필요하지 않고, 구리(Cu) 혹은 금(Au) 등의 금속전극(103)을 투명전극(102)위에 직접 형성한 후 그 위에 금속전극(103) 보호를 위한 Cr 층을 형성하였다.3 shows the sustain electrode structure of the present invention formed on the front glass substrate 101. In the structure of the bus electrode, a Cr layer, which has been conventionally formed for adhesion with the transparent electrode 102, is not required. ) Or a metal electrode 103 such as gold (Au) was formed directly on the transparent electrode 102, and then a Cr layer for protecting the metal electrode 103 was formed thereon.
이러한 본 발명 유지전극의 형성공정을 도 4 를 참조하여 살펴보면 다음과 같다.Looking at the formation process of the sustain electrode of the present invention with reference to FIG.
먼저 전면기판(101)에 (가)와 같이 투명전극(102)을 형성한 후, (나)와 같이 상기 투명전극(102)상에 포토레지스트(PR)를 도포하고 노광→현상→박리 공정을 거쳐 금속전극을 형성할 부위를 패턴해 내고, 투명금속산화물 표면을 에칭하여 요철을 형성한다. 그리고 상기 투명전극(102)상에 (다)와 같은 금속전극층(103)을 무전해도금을 통해 형성시키면 요철부에 금속전극층(103)이 밀착 결합된다. 그리고 이러한 버스전극의 형성공정에 있어서 글라스 기판 위의 투명전극등의 금속산화물층 표면을 에칭하여 roughness(요철)를 부여한 후 그 위에 금속전극을 무전해 도금방법으로 직접 형성시킴으로써, 금속전극의 형성공정을 간단히 하며 투명전극과 금속전극간의 밀착력을 향상시킴을써 충분히 낮은 저항치를 확보할 수 있게함과 동시에 이와 같은 방법으로 형성된 금속전극 배면의 흑화현상에 의해 광차단효과를 얻도록 하는데 목적이 있다. 금속전극층(103) 상에는 Cu 전극의 산화를 보호하는 목적으로 크롬(Cr)층을 역시 무전해도금을 통해 형성시킴으로 (라)와 같은 유지전극의 형성이 완성되게 되는 것이다.First, the transparent electrode 102 is formed on the front substrate 101 as shown in (a). Then, photoresist (PR) is applied on the transparent electrode 102 as shown in (b), and the exposure-development-removal process is performed. By patterning out the site for forming the metal electrode, the surface of the transparent metal oxide is etched to form irregularities. When the metal electrode layer 103 such as (C) is formed on the transparent electrode 102 through electroless plating, the metal electrode layer 103 is tightly coupled to the uneven portion. In the process of forming the bus electrode, the metal oxide layer such as the transparent electrode on the glass substrate is etched to give roughness, and then the metal electrode is directly formed by an electroless plating method, thereby forming the metal electrode. The purpose of the present invention is to improve the adhesion between the transparent electrode and the metal electrode, to secure a sufficiently low resistance value, and to obtain a light blocking effect by blackening of the back surface of the metal electrode formed in this manner. On the metal electrode layer 103, a chromium (Cr) layer is also formed through electroless plating for the purpose of protecting oxidation of the Cu electrode, thereby forming a sustain electrode such as (d).
종래 기술에서는 금속전극의 밀착을 위해 크롬층을 편평한 투명전극상에 형성하였으나, 본 발명에서는 투명전극(102)의 요철부위에 금속전극(103)을 직접 형성시킴으로 넓어진 접촉면적과 표면요철에 의한 앵커(anchor)효과에 의해 상호간의 밀착력이 증대되는 동시에 공정을 단축할 수 있게 된다.In the prior art, a chromium layer was formed on a flat transparent electrode to closely adhere to the metal electrode. However, in the present invention, the metal electrode 103 is formed directly on the uneven portion of the transparent electrode 102, thereby expanding the contact area and anchor by the surface unevenness. The anchor effect increases the adhesion between the two and shortens the process.
또한 제조공정시 상기 금속전극(103)이 고밀착력을 갖으므로 충분한 두께조절을 통해 저저항이 가능하게 되며, 이와 같이 형성한 버스전극과 투명전극의 계면의 흑화 현상으로 전극에 의한 광차단효과를 갖게된다.In addition, since the metal electrode 103 has a high adhesion in the manufacturing process, low resistance is possible through sufficient thickness control, and the light blocking effect by the electrode is caused by blackening of the interface between the bus electrode and the transparent electrode. Will have
이상 설명한 바와같이 본 발명의 전극형성방법 및 플라즈마 표시장치는 종래 3 층으로 형성되던 버스전극층을 간단히 2 층으로 형성시킴으로 제조공정을 단축시키면서 투명전극과의 밀착력을 더욱 향상시켜 저저항을 구현할 수 있고, 광차단효과를 나타내는 효과가 있다.As described above, the electrode forming method and the plasma display device of the present invention can realize low resistance by further improving adhesion to the transparent electrode while shortening the manufacturing process by simply forming two layers of the bus electrode layer, which is conventionally formed of three layers. This has the effect of showing a light blocking effect.
도 1 은 일반적인 플라즈마 디스플레이 패널의 상,하 기판 분리 사시도.1 is a perspective view of the upper and lower substrate separation of a typical plasma display panel.
도 2 는 종래 유지전극의 상세 구조도.2 is a detailed structural diagram of a conventional sustain electrode.
도 3 은 본 발명이 적용된 유지전극의 상세 구조도.3 is a detailed structural diagram of a sustain electrode to which the present invention is applied.
도 4 는 본 발명 유지전극의 제조공정도.Figure 4 is a manufacturing process of the sustain electrode of the present invention.
*** 도면의 주요 부분에 대한 부호의 설명 ****** Explanation of symbols for the main parts of the drawing ***
1 : 전면기판 2 : 배면기판1: Front board 2: Back board
3 : 격벽 4 : 어드레스전극3: bulkhead 4: address electrode
5 : 형광층 6 : 투명전극5: fluorescent layer 6: transparent electrode
7 : 버스전극 8 : 유전층7 bus electrode 8 dielectric layer
101 : 전면기판 102 : 투명전극101: front substrate 102: transparent electrode
103 : 버스전극103: bus electrode
Claims (7)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019980007146A KR100531151B1 (en) | 1998-03-04 | 1998-03-04 | Method of forming sustain electrode of plasma display device and plasma display device |
| US09/260,090 US6555956B1 (en) | 1998-03-04 | 1999-03-02 | Method for forming electrode in plasma display panel and structure thereof |
| JP05771399A JP3652543B2 (en) | 1998-03-04 | 1999-03-04 | Electrode structure and formation method of plasma display panel |
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| KR1019980007146A KR100531151B1 (en) | 1998-03-04 | 1998-03-04 | Method of forming sustain electrode of plasma display device and plasma display device |
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| KR19990073903A KR19990073903A (en) | 1999-10-05 |
| KR100531151B1 true KR100531151B1 (en) | 2006-02-28 |
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| KR100683788B1 (en) * | 2005-06-25 | 2007-02-20 | 삼성에스디아이 주식회사 | Alternative-Current type of discharge display panel wherein electrode lines of plural layers are formed |
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|---|---|---|---|---|
| JPS63291835A (en) * | 1987-05-25 | 1988-11-29 | Oki Electric Ind Co Ltd | Method of forming plated coat on glass |
| JPH08120448A (en) * | 1994-08-23 | 1996-05-14 | Shipley Far East Kk | Plating on insulating base material and plated object obtained by this plating |
| JPH08227656A (en) * | 1995-02-20 | 1996-09-03 | Merutetsukusu Kk | Formation of conductive pattern for plasma display |
| JPH0935628A (en) * | 1995-07-17 | 1997-02-07 | Dainippon Printing Co Ltd | Electrode formation of ac plasma display panel |
Also Published As
| Publication number | Publication date |
|---|---|
| KR19990073903A (en) | 1999-10-05 |
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