KR100516624B1 - Tilt angle measuring device by using scanner and measuring method thereof - Google Patents

Abstract

The present invention relates to an inclination angle measuring apparatus using a scanner. More particularly, when the laser beam 42 projected at a predetermined inclination angle is reflected from the object to be measured, the reflected laser beam is used to reflect the reflector 70. When incident to the scanner 60, the scanner 60 converts it into an electrical signal and transmits it to the calculator, the calculator 60 is configured to calculate and display the received signal.

The present invention uses a scanner capable of measuring a wide range of angular changes, so that accurate data measurement is possible, and measurement errors are significantly reduced, thereby improving reliability, and quickly adjusting various parts of the object under measurement by only adjusting the position of the xy stage. It can be measured so that the measurement time is very short.

Description

Tilt angle measuring device by using scanner and measuring method

The present invention relates to an inclination angle measuring apparatus using a scanner, and more particularly, to an inclination angle measuring apparatus using a scanner capable of quickly observing or accurately measuring structural deformation due to changes in product properties at high and low temperatures, and a measuring method thereof. It is about.

In general, products that require precision require a device that measures the twist or tilt of parts in a short time because the quality of the whole product is deteriorated when the twist or tilt of the parts occurs due to the change of physical properties in the assembly process. do.

For example, a pickup base on which precise optical components, such as an optical pickup, are installed is a product that requires high reliability, and thus cannot be used if deformation occurs over time. Therefore, the conventional pickup base material used a lot of unchanged metal material, but in recent years it is a trend to use a synthetic resin to make lighter and cheaper.

By the way, the synthetic resin has a property that changes significantly with temperature and time. Therefore, when injecting the pick-up base to the synthetic resin, first, the plastic resin deformation range is calculated based on the results of the virtual simulation through a computer, and thus injection conditions are changed or structural changes are made to prevent such a phenomenon from occurring.

However, the problem is that the results of the virtual simulation through the computer and the actual deformation of the pickup base are not the same by various variables.

Therefore, there is a need for equipment capable of measuring structural deformation in which pick-up bases change minutely in a short time.

However, these equipments have a considerable difficulty in development because they have to put the measured object in the chamber and measure the change from the outside. That is, since the temperature change in the chamber is severe and affects the measuring device itself, the change must be measured from the outside.

1 shows an example of a conventional tilt angle measuring device.

Referring to this, a table 1 is provided, and the chamber 2 is provided at one side of the upper surface of the table 1.

The upper plate of the chamber 2 is composed of a transmission window 2a, and cooling and heating means 3 are provided in the chamber so as to apply a high or low temperature to the object M.

Here, the cooling and heating means 3 is a well-known technique, and description thereof will be omitted.

The object to be measured M is fixedly mounted on the upper surface of the cooling and heating means 3.

On the other side of the upper surface of the table 1, a support post 1a is formed extending in the vertical direction, and an extension shaft 1b is formed at an upper end of the support post 1a substantially horizontally in the direction of the chamber 2. At the end of 1b), an auto collimator 4 is installed.

The automatic collimator 4 projects the laser beam 4a perpendicularly to the object to be measured M, and has an CCD sensor module 5 configured to detect a beam reflected from the object to be measured M at the upper end thereof.

The CCD sensor module 5 is electrically connected to a separate computing device 7 via a cable 6, which is equipped with a monitor 8 for displaying the degree of change.

The operation of the conventional tilt angle measuring device configured as described above is briefly described, and the laser collimator 4 projects the laser beam 4a in the direction of the object M to be measured by the automatic collimator 4. Then, the projected laser beam 4a is reflected by the object to be measured M and is incident on the CCD sensor module 5, which is converted into an electrical signal and transmitted to the computing device 7. Then, the data stored in the computing device and the received signal are compared and detected, and the result is displayed on the monitor 8, whereby the changed twist or tilt of the measured object M can be known.

However, such a conventional tilt angle measuring device has a beam path in which the laser beam projected from the automatic collimator is reflected back from the object to be measured and returned back to the CCD sensor module. There was a disadvantage that the range was very narrow.

That is, since the measurement range is narrow, the position of the components arranged in the chamber is limited, so that only one object to be measured can be arranged in the chamber.

In addition, in order to measure several parts within a single measurement object, the position of the measurement object has to be changed little by little, which causes a disadvantage in that it takes a long time to measure several parts of the measurement object. As a result, there was a problem that the reliability is very low.

In addition, the conventional inclination angle measuring device has a problem that the change of the object to be measured during the measurement, or the measurement near the monitor boundary line, the laser beam disappears during the measurement, the discontinuity error of the data. Therefore, the measurement was not possible in some cases.

In addition, the conventional tilt angle measuring device has a distance limitation between the measuring object and the automatic collimator because of the angle of the beam reflected back to the object to be measured, which has the disadvantage that the positioning of the instrument is not free.

The present invention has been made to solve the problems described above, the object is to allow the laser beam reflected from the object to be measured to enter the scanner through the reflector to measure a wide range of angle change scanner It is to provide a tilt angle measuring apparatus using.

Another object of the present invention is to provide an inclination angle measuring device using a scanner that can be arranged in the chamber, and to measure the inclination angle of the plurality of objects quickly while adjusting the position of the laser module and the scanner. .

Still another object of the present invention is to provide an inclination angle measuring apparatus using a scanner which can improve the reliability by measuring various parts without changing the position of the object to be measured.

Still another object of the present invention is to provide an inclination angle measuring apparatus using a scanner that enables precise measurement according to the performance of the scanner and the distance between the workpiece and the scanner.

Still another object of the present invention is to provide a method of measuring the tilt angle measuring apparatus using the scanner as described above.

An inclination angle measuring apparatus using a scanner according to the present invention for achieving the above object and other objects is provided with a transmission window on the upper surface, the chamber is provided with the object to be measured; A cooling / heater for applying cooling or heating to the object under test provided in the chamber; An x-y stage disposed at a predetermined distance from the chamber, capable of horizontal movement in up, down, left and right, and fixed in the moved position; a laser module installed on an x-y stage to project a laser beam to the object to be measured at an inclined angle; a scanner installed on the x-y stage and receiving a laser beam reflected from the object to be measured, and detecting the incident laser beam and converting the laser beam into an electrical signal; A reflector for reflecting the laser beam reflected on the object to be measured by the scanner; An calculator electrically connected to the scanner to receive and calculate a signal transmitted from the scanner; And a monitor for displaying the calculated data.

Here, the front of the scanner is provided with a dispersion plate for dispersing the incident laser beam.

Here, the reflecting plate is installed to be inclined at a predetermined angle on the upper portion of the scanner through a separate structure.

In addition, a frame for supporting the scanner is provided on the x-y stage, and the laser module is installed on the upper portion of the frame to move the scanner and the laser module together.

Here, the laser module is installed on the part of the frame through the tilt adjuster is configured to enable the angle adjustment.

And, the tilt adjuster is fixed to the frame, the upper surface is provided with a connecting rod perpendicular to the upper surface; A lower plate disposed at a predetermined distance from the upper plate; One end is fixed to the bottom of the upper plate, the other end is fixed to the upper surface of the lower plate, a plurality of tension springs to give an elastic force in close contact with each other to prevent separation of the upper plate and the lower plate; Hinge pins are assembled to penetrate through one corner portion of the upper plate, the end portion is in contact with the upper surface of the lower plate so that the upper plate and the lower plate to maintain a predetermined gap; A first tilt adjustment screw that presses a portion of the upper surface of the lower plate while moving up and down in the direction of loosening and tightening by screwing to an edge portion of the upper plate which is symmetrical with a hinge pin; A second tilt adjustment screw that presses a portion of the upper surface of the lower plate while moving up and down in the direction of loosening and tightening by being screwed to an edge portion of the upper plate which is symmetrical with the first tilt adjusting screw in a diagonal direction; And it is coupled to the upper end of the connecting rod of the upper plate is configured to be rotatable, it is configured to be fixed in the adjusted position, the end of the laser module is configured to include a fixed fixedly installed inclined at a predetermined angle.

In addition, a plurality of objects to be measured are provided in the chamber at predetermined intervals.

In addition, the scanner is configured to have a DPI of 100 DPI or more.

In addition, the laser beam is reflected so as to reflect from the object to be measured is configured so that the total moving distance to the scanner is more than 1000mm.

The measuring method of the tilt angle measuring device using a scanner for achieving another object of the present invention includes the steps of applying a temperature change to the object to be measured provided in the chamber; Obliquely projecting a laser beam onto the object to be measured; Reflecting the laser beam reflected from the object to be measured through a reflector to a scanner; Reading the incident laser beam in a scanner and converting the laser beam into an electrical signal and transmitting the same to an operator; And storing and calculating the signal received by the calculator, and displaying the calculated data.

The method may further include adjusting the position of the xy stage so that the projected laser beam reaches the object to be measured, and adjusting the tilt of the laser module to adjust the angle of the projected laser beam. .

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

2 is a perspective view showing an inclination angle measuring apparatus using a scanner according to the present invention, Figure 3 is a side view of Figure 2, Figure 4 is an enlarged perspective view showing a tilt adjuster for supporting a laser module in the present invention.

Referring to this, the present invention is provided with a chamber (10).

The chamber 10 has a structure in which all four sides are sealed, and the top plate is configured to be opened and closed. In addition, the upper plate is composed of a transmission window 12 so that the laser beam can be transmitted, the measurement object (M) is provided on the measurement plate inside.

Here, the object to be measured (M) provided in the chamber 10 is to be installed so that a plurality of objects to be measured simultaneously in a spatial concept without replacement work.

In addition, the chamber 10 is installed above the cooling / heater 20.

The cooler / heater 20 adjusts the temperature in the chamber so that the temperature in the chamber 10 changes to a high or low temperature. Therefore, it is possible to give a thermal change to the object to be measured M provided in the chamber 10.

Here, since the cooling / heater 20 is a known technique also used in the prior art, a detailed description thereof will be omitted.

According to the present invention, the x-y stage 30 is provided at a predetermined distance from the chamber 10.

The x-y stage 30 is a well-known technique that is commonly used. The x-y stage 30 is horizontally movable up, down, left and right, and is configured to be fixed at the moved position.

In the drawing, the x-y stage 30 is illustrated to be disposed on the upper surface of the calculator 80, which will be described later. However, the x-y stage 30 may be configured to be disposed on a separate flat table.

The frame 32 is provided on the xy stage 30, and a laser module 40 for projecting the laser beam 42 inclined at a predetermined angle to the measurement object M is installed on the upper portion of the frame 32. do.

The laser module 40 is installed on the frame through the tilt adjuster 50 and configured to enable angle adjustment.

The tilt adjuster 50 includes a top plate 51 fixed to the frame 32 via a screw and having a connecting rod 51a extending in a vertical direction on the top surface thereof, and a bottom plate 52 disposed at a predetermined distance from the top plate. .

A plurality of tension springs 53 are provided between the upper plate 51 and the lower plate 52.

One end of the tension spring 53 is fixed to the bottom surface of the upper plate 51, the other end is fixed to the upper surface of the lower plate 52, to give elastic force in the direction in which the upper plate 51 and the lower plate 52 in close contact with each other This prevents the upper and lower plates from separating.

In addition, the hinge plate 54 and the first and second tilt adjustment screws 55 and 56 are provided so that the upper plate 51 and the lower plate 52 are not in close contact with each other but maintain a predetermined interval.

The hinge pin 54 is assembled to penetrate through one corner portion of the upper plate 51, and an end thereof contacts the upper surface of the lower plate 52 to maintain a gap between the upper plate and the lower plate.

The first tilt adjustment screw 55 is mounted to press a portion of the upper surface of the lower plate 52 while moving up and down in the direction of tightening and loosening by screwing to an edge portion of the upper plate symmetrical with the hinge pin 54.

The second tilt adjustment screw 56 is screwed to an edge portion of the upper plate that is symmetrical with the first tilt adjustment screw 55 in a diagonal direction to press a portion of the upper surface of the lower plate 52 while moving up and down in the loosening and tightening direction. Is mounted.

The fixing bar 57 is coupled to the upper end of the connecting rod 51a of the upper plate 51 in a substantially horizontal direction.

Fixing table 57 is rotatably coupled to the connecting rod (51a), is configured to be fixed through the bolt in the adjusted position, the laser module 40 is fixed to the end is installed inclined at a predetermined angle.

According to the present invention, the scanner 60 is installed in the frame 32 provided on the xy stage 30, and the reflecting plate 70 is inclined at a predetermined angle at a predetermined distance in the upper space of the chamber 10. do.

Therefore, the laser beam 42 projected obliquely at a predetermined angle from the laser module 40 hits the object to be measured M and is reflected in the direction of the reflecting plate 70, and is reflected back from the reflecting plate 70 to be scanned by the scanner 60. It has a beam path that is incident to.

Here, the reflective plate 70 will be described later, but in order to precisely measure the angular change of the object under test (M), a separate structure is formed so that the laser beam is reflected from the object under test to reach at least 1000 mm or more. It is desirable to allow installation at a high position via 72.

The scanner 60 detects the incident laser beam 42, converts it into an electrical signal, and transmits the data to a calculator 80 described later.

Here, the front of the scanner 60 is provided with a dispersion plate 44 for dispersing the incident laser beam 42, the dispersion plate 44 is formed as thin as paper to the front of the scanner 44 Is provided on. Here, the dispersion plate 44 is provided to use the scanner as a sensor plate using position information, which causes the laser beam coming into the scanner to cause dispersion of laser light by the dispersion plate. The scanner can read the position only by the position of the beam placed on the front of the scanner, regardless of the angle of the beam. The technical principle and operation of the scanner 60 are well known and the description thereof will be omitted.

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In addition, although the measurement accuracy of the scanner 60 will be described later, it is preferable to configure the scanner 60 to have a high DPI of at least 100 DPI or more for precise measurement of the angular change of the measured object M.

The calculator 80 is electrically connected to the scanner 60 through a cable C to receive and calculate a signal transmitted from the scanner 60, and display the calculated data on the monitor 82.

Now, the tilt angle measuring method of the present invention configured as described above will be described.

First, a temperature change is applied to the measurement object M provided in the chamber 10 through the cooling / heater 20. In this case, the inside of the chamber 10 may be heated to measure the change of the measured object M at a high temperature, and the inside of the chamber 10 may be cooled to measure the change of the measured object M at a low temperature.

Then, the laser beam 42 is obliquely projected onto the measurement object M through the laser module 40. Then, the projected laser beam 42 strikes the measurement object M and is reflected in the direction of the reflecting plate 70, and is then reflected by the reflecting plate 70 to enter the scanner 60.

At this time, by adjusting the position of the xy stage 30 in front, rear, left and right, the laser beam 42 projected from the laser module 40 is accurately projected on any one of the objects to be measured among the plurality of objects M. Be sure to

In addition, when a plurality of parts are to be respectively measured in the measurement object M to be measured, the partial parts may be measured while finely adjusting the position of the x-y stage 30.

In addition, when it is necessary to adjust the angle of the laser beam to be projected, the tilt of the laser module 40 may be adjusted through the tilt adjuster 50.

That is, since the upper plate 51 and the lower plate 52 of the tilt adjuster 50 have a force in a direction that will always be in close contact by the restoring force of the plurality of tension springs 53, tighten the first tilt adjusting screw 55, and When the two tilt adjustment screws 56 are released, a portion of the upper plate 51 on which the first tilt adjustment screws 55 are mounted rises in a direction away from the lower plate 52, and the second tilt adjustment screws 56 are moved. A portion of the upper plate 51 mounted is lowered in a direction closer to the lower plate 52, so that the angle of the upper plate 51 is inclined, and the inclination angle of the laser module 40 is also changed.

On the contrary, when the first tilt adjusting screw 55 is loosened and the second tilt adjusting screw 56 is tightened, a part of the upper plate 51 on which the first tilt adjusting screw 55 is mounted is closer to the lower plate 52. Is lowered in the direction, and a part of the upper plate 51 on which the second tilt adjusting screw 56 is mounted rises in a direction away from the lower plate 52, so that the angle of the upper plate 51 is opposite to the above description. It is inclined at an angle, and the inclination angle of the laser module 40 is also reversed.

When it is necessary to adjust the angle of the laser beam as described above, the angle of the laser module 40 may be adjusted while loosening and tightening the first and second tilt adjustment screws 55 and 56.

Here, the object to be measured M is preferably configured to reflect the laser beam 42 well. Therefore, if the object to be measured does not reflect the laser beam, a separate reflector may be attached to the reflective surface. .

When the laser beam 42 reflected in the object M to be adjusted is incident to the scanner 60, the scanner 60 is operated to read the incident laser beam 42 and convert the laser beam 42 into an electrical signal. 80).

At this time, since the scanner 60 has a wide range of measurement, the angle change up to about 20 ° can be precisely measured.

Next, the calculator 80 stores and calculates the received signal and displays the calculated data through the monitor 82.

Now, a method of obtaining the inclination value of the object to be measured will be described with reference to FIG. 5.

First, the equation for obtaining the inclination angle θ 'of the measured object is shown in Equation 1 below.

Here, θ is the inclination angle of the object to be measured, Δx is the small displacement of the laser beam, and l is the distance the laser beam is reflected from the object to be measured and reaches the scanner. The value of θ is a radian value.

The process of calculating the equation is as follows.

Since the inclination angle of the object to be measured in the present invention is very narrow Becomes

Therefore, when the measured object is deformed, the equation for obtaining the inclination angle θ 'of the laser beam reflected from the measured object is

Becomes

However, since the actual inclination angle θ of the object to be measured should be divided into two angles between the angle at which the laser beam is incident on the object to be measured and the reflection angle, Becomes

therefore, Becomes

Since the value obtained by the above equation is a radian value, the value obtained by the above expression is multiplied by the radian value 57.3 to obtain an accurate value of θ.

An example of obtaining the inclination angle θ of the measurement object through Equation 1 will be described below.

If the measurement accuracy of the scanner is configured to 100 DPI, the laser beam is reflected from the object to be measured, and the distance l reaching the scanner is 1000 mm, and the microdisplacement Δx of the beam is 0.254 mm. As a result, the inclination angle θ of the measurement object is 0.000254.

However, since this value is a radian value, multiplying the value by the radian value 57.3 results in an actual inclination angle of the measured object to be 0.01455 degrees or 0.873 minutes.

As described above, the present invention can measure the change in physical properties according to the thermal change of the measurement object very precisely and quickly through the change amount of the inclination angle.

In addition, the present invention has a wide measurement range because the laser beam reflected from the object to be measured is incident on the scanner and its displacement is measured through the scanner.

That is, since the scanner can measure a wide range of angular changes, the laser beam reflected from the object to be measured can be measured as long as it is within a certain range, so that not only the measurement error is significantly reduced, As such, the measurement time is shortened because the work of adjusting the position of the object to be measured according to the change angle or the measurement position of the object is not necessary.

In addition, since the present invention can quickly measure the inclination angle of a plurality of objects to be measured while placing the plurality of objects in the chamber and adjusting the position of the laser module and the scanner, the operation of continuously exchanging the objects as in the prior art is difficult. Omitted, workability is greatly improved, and the work time is also significantly shortened.

In addition, the present invention improves reliability because various parts of the object to be measured can be quickly measured while only adjusting the position of the x-y stage without changing the position of the object to be measured.

On the other hand, Figure 6 is shown another embodiment of the present invention, and when compared with the above embodiment only because the overall configuration is similar and the operation and effect is the same as follows.

According to the present exemplary embodiment, the main axis 34 extends in a vertical direction on a portion of the xy stage 30 instead of a frame, and the extension axis 36 extends in a horizontal direction at an end of the main axis 34. The laser module 40 is installed at the end of the extension shaft 36 to enable angle adjustment via the tilt adjuster 50.

In addition, the reflector 70 is mounted inclined to one minute of the extension shaft 36 and positioned above the scanner 60, and is configured to be movable together with the x-y stage 30.

In this embodiment including such a configuration, the calculation method for measuring the inclination angle of the object to be measured M is the same as that of the above-described embodiment, and thus redundant description will be omitted.

On the other hand, the present invention described above can be applied to various fields, such as distortion of the pickup base, distortion of the PCB, deformation angle of the injection molding, distortion of the semiconductor.

As described above, since the present invention uses a scanner capable of measuring a wide range of angle changes, accurate data measurement is possible, and measurement errors are significantly reduced, thereby improving reliability, and adjusting the position of the xy stage to be measured. Since the various parts of the water can be measured quickly, the measurement time is very short.

While the invention has been shown and described in connection with specific embodiments as described above, it is well known in the art that various modifications and changes can be made without departing from the spirit and scope of the invention as indicated by the claims. Anyone who owns it can easily find out.

1 is a side view showing a tilt angle measuring device according to the prior art,

2 is a perspective view showing an inclination angle measuring apparatus using a scanner according to the present invention;

3 is a side view of FIG. 2;

Figure 4 is an enlarged perspective view of the tilt adjuster for supporting the laser module in the present invention,

5 is a schematic diagram of a laser beam path shown to explain a method of obtaining an inclination angle of an object to be measured in the present invention;

Figure 6 is a side view showing another embodiment of the inclination angle measuring apparatus using a scanner according to the present invention.

◎ Explanation of symbols for main part of drawing

10: chamber 12: transmission window

20: cooling / heater 30: x-y stage

32: frame 34: spindle

36: extended shaft 40: laser module

42: laser beam 50: tilt adjuster

51: top 51a: connecting rod

52: Bottom 53: Tension spring

54: hinge pin 55: first tilt adjustment screw

56: second tilt adjustment screw 57: fixed base

60: scanner 70: reflector

72: structure 80: calculator

82: monitor C: cable

M: measured object

Claims (16)

A chamber having a transmission window provided on an upper surface thereof and an object to be measured provided therein; A cooling / heater for cooling or heating the object to be measured provided in the chamber; An x-y stage disposed at a predetermined distance from the chamber and capable of horizontally moving up, down, left and right, and fixed at the moved position; A laser module installed on the x-y stage to project the laser beam to the object to be measured at an inclined angle; A scanner installed on the x-y stage and receiving a laser beam reflected by the object to be measured and detecting the position of the incident laser beam and converting the converted laser signal into an electrical signal; A reflector for reflecting the laser beam reflected on the object to be measured by the scanner; An calculator electrically connected to the scanner to receive and calculate a signal transmitted from the scanner; And An inclination angle measuring device using a scanner, characterized in that it comprises a monitor for displaying the calculated data. The method of claim 1, An inclination angle measuring device using a scanner, characterized in that the front of the scanner is provided with a dispersion plate for dispersing the incident laser beam. The method of claim 1, The reflector is an inclination angle measuring device using a scanner, characterized in that installed inclined at a predetermined angle on the upper portion of the scanner through a separate structure. The method of claim 1, The reflector is inclined at a predetermined angle on the x-y stage to be positioned above the scanner is inclined angle measurement apparatus using a scanner, characterized in that configured to be movable with the x-y stage. The method of claim 1, A frame for supporting the scanner is provided on the x-y stage, and the laser module is installed on the upper portion of the frame to move the scanner and the laser module together. The method of claim 5, The laser module is a tilt angle measuring device using a scanner, characterized in that the angle is adjustable to be installed through a tilt adjuster in a portion of the frame. The method of claim 6, The tilt adjuster A top plate fixed to the frame and provided with a connecting rod vertically on an upper surface thereof; A lower plate disposed at a predetermined distance from the upper plate; One end is fixed to the bottom of the upper plate, the other end is fixed to the upper surface of the lower plate, a plurality of tension springs to give an elastic force in close contact with each other to prevent separation of the upper plate and the lower plate; A hinge pin which is assembled to penetrate through one corner portion of the upper plate, and an end portion of the upper plate contacts the upper surface of the lower plate so that the upper plate and the lower plate maintain a predetermined gap; A first tilt adjustment screw which presses a portion of the upper surface of the lower plate while moving up and down in the direction of tightening and loosening by screwing to an edge portion of the upper plate symmetrical to the hinge pin; A second tilt adjustment screw that presses a portion of the upper surface of the lower plate while moving up and down in the direction of loosening and tightening by being screwed to an edge portion of the upper plate that is symmetrical with the first tilt adjusting screw; And The upper portion of the connecting rod of the upper plate is coupled to the rotation adjustment, is configured to be fixed in the adjusted position, the end of the scanner, characterized in that the laser module is configured to include a fixed fixed inclined at a predetermined angle Tilt angle measuring device used. The method of claim 1, And a main axis extending in a vertical direction on a portion of the upper surface of the x-y stage, an extension axis extending in a horizontal direction at an end of the main axis, and the laser module being installed at an end of the extension axis. The method of claim 8, The laser module is installed on the end of the extension shaft via a tilt adjuster tilt angle measuring apparatus using a scanner, characterized in that configured to be adjustable. The method of claim 9, The tilt adjuster A top plate fixed to the extension shaft and provided with a connecting rod vertically on an upper surface thereof; A lower plate disposed at a predetermined distance from the upper plate; One end is fixed to the bottom of the upper plate, the other end is fixed to the upper surface of the lower plate, a plurality of tension springs to give an elastic force in close contact with each other to prevent separation of the upper plate and the lower plate; A hinge pin which is assembled to penetrate through one corner portion of the upper plate, and an end portion of the upper plate contacts the upper surface of the lower plate so that the upper plate and the lower plate maintain a predetermined gap; A first tilt adjustment screw which presses a portion of the upper surface of the lower plate while moving up and down in the direction of tightening and loosening by screwing to an edge portion of the upper plate symmetrical to the hinge pin; A second tilt adjustment screw that presses a portion of the upper surface of the lower plate while moving up and down in the direction of loosening and tightening by being screwed to an edge portion of the upper plate that is symmetrical with the first tilt adjusting screw; And The upper portion of the connecting rod of the upper plate is coupled to the rotation adjustment, is configured to be fixed in the adjusted position, the end of the scanner, characterized in that the laser module is configured to include a fixed fixed inclined at a predetermined angle Tilt angle measuring device used. The method of claim 1, An inclination angle measuring device using a scanner, characterized in that a plurality of objects to be measured are provided in the chamber at predetermined intervals. The method of claim 1, The scanner is tilt angle measuring apparatus using a scanner, characterized in that configured to have a DPI of 100DPI or more. The method of claim 1, The tilt angle measuring apparatus using the scanner, characterized in that the laser beam is reflected from the object to be measured and the total distance traveled by the scanner is 1000mm or more. Applying a temperature change to the object under test provided in the chamber; Obliquely projecting a laser beam onto the object to be measured; Reflecting the laser beam reflected from the object to be measured through a reflector to a scanner; Reading the incident laser beam by a scanner and converting the incident laser beam into an electrical signal and transmitting the same to an operator; And And storing and calculating the signal received by the calculator, and displaying the calculated data. The method of claim 14, Adjusting the position of the x-y stage so that the projected laser beam reaches the object to be measured; And adjusting the tilt of the laser module to adjust the angle of the laser beam to be projected. The method of claim 14, The equation for obtaining the inclination angle of the measured object in the calculating step is (Where θ is the angle of inclination of the object under test, Δx is the small displacement of the laser beam, l is the distance the laser beam is reflected from the object under test and reaches the scanner, and the value of θ is the radian value) Tilt angle measurement method using a scanner, characterized in that.