KR100513877B1 - Device and method for detecting the defect of IC - Google Patents

Abstract

The present invention obtains an image inside the integrated circuit at a constant temperature level while heating the integrated circuit from room temperature to a critical temperature, and compares the initial state reference image with the image for each temperature step to detect defects generated intermittently by temperature and humidity. The present invention relates to an apparatus and method for detecting a defect of an integrated circuit.

The defect detection apparatus of an integrated circuit of the present invention includes an X-ray generator 10 for generating and irradiating X-rays passing through a substance, and an integrated circuit 18 positioned under the X-ray generator 10 to be measured. A hot plate 20 for heating the plate, a temperature sensor 32 installed adjacent to the hot plate 20, a base 22 fixing the hot plate 20, and the base 22. An image multiplier 24 for detecting and amplifying X-rays and a camera unit for detecting a structure of the integrated circuit 18 and converting the integrated circuit 18 into digital data. And a controller 28 for storing a detected image through the camera unit 26 and comparing the image detected according to an increase in temperature to detect a defect, and according to a control signal of the controller 28. A display unit 30 for displaying a comparison image and a result; X-ray control unit 16 for controlling the X-ray generator 10 in accordance with the control signal of the roller 28, the defect detection method, using the X-ray generator at room temperature to take and store the integrated circuit reference image And a second step of heating the integrated circuit using a hot plate, measuring a temperature, and taking an image using an X-ray generator at a set temperature (a) interval, and comparing the reference image with the measured image. And a third step of displaying and terminating the defective state when the defect is detected, and ending the fourth step when the measured temperature reaches the threshold temperature.

Description

Device and method for detecting defects in integrated circuits

The present invention obtains an image inside the integrated circuit at a constant temperature level while heating the integrated circuit from room temperature to a critical temperature, and compares the initial state reference image with the image for each temperature step to detect defects generated intermittently by temperature and humidity. The present invention relates to an apparatus and method for detecting a defect of an integrated circuit.

Integrated circuits (ICs), which are indispensable for most electronic products, are difficult to detect integrated circuits because they are almost impossible to visually identify when defects occur despite reliable operation. Conventionally, various inspection methods are used to detect defects of integrated circuits. In general, a method of inspecting a coupling of a lead frame attached to the outside of an integrated circuit and a method of inspecting defects in an integrated circuit using X-rays It is used.

In the external inspection method of the lead frame, an external image of the integrated circuit is photographed using a camera, and the photographed image is enlarged and compared with an image of a normal state to detect a defect of the external lead frame. In addition, the inspection method using the X-ray is to acquire and inspect the internal image of the integrated circuit using the X-ray having a transparency, there is an advantage that can detect more accurate defects than the external inspection.

However, the above inspection methods have a problem in that they are limited in appearance inspection of integrated circuits. In other words, integrated circuits mounted on the PCB are used in a variety of environments in the case of a vehicle, and even if they pass the defect detection at room temperature, intermittent defects occur as the temperature increases in actual use, and these defects are mainly caused by temperature change. This is due to internal change.

2 illustrates a defect state occurring in the conventional integrated circuit 18, in which a gold wire short occurs or stitches at a ball of a gold wire (a) in the circuit. It shows the status that occurred in. These defects normally operate when the temperature decreases, but worsen when the temperature rises, causing malfunctions or completely stopping the operation.

However, the conventional inspection of the lead frame is difficult to detect the change in the internal structure fundamentally, it is possible to detect the change in the internal structure in the case of using X-rays, but there is a limit in detecting defects due to the temperature change because the irradiation only at room temperature. In addition, the internal structure can be inspected using the fracture inspection, but it is difficult to apply because the reproducibility in the vehicle is not easy.

The present invention has been made to solve the above problems, an object of the present invention is to obtain an image inside the integrated circuit in a constant temperature step while heating the integrated circuit from room temperature to a critical temperature, the initial state reference image and each temperature step image The present invention provides a defect detection apparatus and method for an integrated circuit capable of detecting defects intermittently caused by temperature and humidity.

The defect detection apparatus of the integrated circuit of the present invention for achieving the above object is an X-ray generator for generating and irradiating X-rays passing through the material, and to heat the integrated circuit to be measured under the X-ray generator A hot plate, a temperature sensor installed adjacent to the hot plate, a base for fixing the hot plate, an image multiplier pipe located at the bottom of the base to detect and amplify X-rays, Located in the lower portion of the pipe and the camera unit for detecting the structure of the integrated circuit and converting the digital data, the controller for storing the image detected through the camera unit and comparing the detected image according to the temperature increase to detect a defect; A display unit for displaying a comparison image and a result according to the control signal of the controller, and a control signal of the controller Therefore, it includes an X-ray control unit for controlling the X-ray generator.

In addition, the defect detection method of the integrated circuit of the present invention, the first step of taking and storing the integrated circuit reference image using the X-ray generator at room temperature, and heating the integrated circuit using a hot plate and set the temperature measured A second step of taking an image using an X-ray generator at an interval of temperature (a); and a third step of displaying and terminating a bad state when a defect is detected by comparing the reference image and the measured image, and the measured temperature is And a fourth step of terminating when the critical temperature is reached.

Hereinafter, a failure detection apparatus and method of an integrated circuit of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to an apparatus and method for detecting defects in an integrated circuit, in particular, a defect occurring intermittently according to a temperature change, comprising: an X-ray generator, an image multiplier, a camera unit, and a temperature capable of detecting an internal structure of an integrated circuit. Defects are detected by taking images of integrated circuits that have reached a certain temperature and comparing them with a change state by inducing a temperature increase by using a sensor or a hot plate that can sequentially increase the temperature of the integrated circuits.

1 is a block circuit diagram of a failure detection apparatus of an integrated circuit according to the present invention. As shown, the defect detection apparatus heats the X-ray generator 10 for generating and irradiating X-rays penetrating the material and the integrated circuit 18 under the X-ray generator 10 to be measured. A hot plate 20, a temperature sensor 32 installed adjacent to the hot plate 20, a base 22 fixing the hot plate 20, and a lower portion of the base 22. And an image multiplier 24 for detecting and amplifying X-rays, and a camera unit 26 positioned under the image multiplier 24 to detect and convert the structure of the integrated circuit 18 into digital data. ), A controller 28 for storing a detected image through the camera unit 26 and comparing the detected image according to an increase in temperature, and a comparison image according to a control signal of the controller 28. And a display unit 30 for displaying the result, and the control According to a control signal (28) it includes an X-ray control unit 16 for controlling the X selected animation (10).

The X-ray generator 10 is for irradiating X-rays generated by colliding electrons accelerated at a high voltage with a metal plate using a vacuum discharge tube, and the vacuum state and the high voltage applied state are determined by the X-ray control unit 16. Controlled. The X-ray generator 10 is controlled by the X-ray control unit 16. Referring to the drawings, the X-ray control unit 16 generates the conditions necessary for operation by using the high voltage terminal 12 and the vacuum pump 14. . Meanwhile, the X-ray control unit 16 is controlled by the control signal from the controller 28. Since the X-ray generator 10 is well known in the art, a detailed description thereof will be omitted.

The hot plate 20 is a heating means for heating the integrated circuit 18 placed thereon. The hot plate 20 is powered by the control of the controller 28 to generate heat.

The side of the hot plate 20 is provided with a temperature sensor 32 for detecting a temperature change state. Temperature data detected by the temperature sensor 32 is input to the controller 28, the controller 28 determines the temperature change state to control the image shooting operation. The base 22 is for installing the hot plate 20 and the temperature sensor 32, and is made of a material that can transmit X-rays.

An X-ray image intensifier 24 is installed under the base 22 to detect X-rays projected from the X-ray generator 10. The image multiplier 24 is to enlarge and display an image which is projected and detected to the naked eye. The enlarged image is input to the camera unit 26.

The camera unit 26 is for capturing an enlarged image through the image multiplier 24, and in particular, a camera for image capturing and an A / D converter for converting the image photographed through the camera into digital data. It includes. The image output from the camera unit 26 is converted into a digital form and then input to the controller 28.

The controller 28 detects a change in the internal structure of the integrated circuit 18 by comparing the reference image with the measured image photographed according to the temperature rise. In this case, the reference image used may use an image captured at room temperature of the integrated circuit 18. Detailed functions of the controller 28 will be described later.

In addition, the display unit 30 displays the reference image and the captured image on the monitor screen so that the administrator can visually recognize the signal using the signal output from the controller 28. In addition, if a failure is detected as a result of the comparison, a failure detection status is notified. It is obvious that the detection status notification can be displayed in text on the monitor screen and output as an acoustic signal using a speaker.

The failure detection method of the present invention performed using the failure detection apparatus having the above configuration will be described with reference to the flowchart of FIG. 3.

After placing the integrated circuit 18 above the hot plate 20 as shown in FIG. 1 at room temperature (20 ° C.) or the initial set temperature, the controller 28 outputs a control signal to the X-ray control unit 16 to vacuum. Prepare the condition by creating a state and applying a high voltage. After the preparation of the photographing condition is completed, the controller 28 captures the reference image at room temperature using the camera unit 26.

The reference image photographed by the camera unit 26 is input to the controller 28 after analog-to-digital conversion. The input reference image is stored in a memory device or other storage device connected to the controller 28. The acquisition of the reference image is completed as described above. The hot plate 20 may be operated to satisfy the room temperature.

The controller 28 applies power to the hot plate 20 to heat it. The temperature of the integrated circuit 18 rises by the heating of the hot plate 20, and this temperature rise is detected by the temperature sensor 32. The detected temperature data is input to the controller 28. Since the integrated circuit 18 is heated from room temperature, the temperature rises above room temperature, and the controller 28 moves the X-ray control unit 16 and the camera unit 26 when the temperature reaches (room temperature + a) ° C. Image is taken and acquired at this time. The acquired image is input to the controller 28 after being digitally converted. Assume this is the primary image.

For example, a may be set within a range of 15 to 30 ° C., and a critical temperature Max may be set within a range of 150 to 200 ° C. Of course, such a temperature range can be variably determined according to the main application state of the integrated circuit 18.

For example, if a is 30 ° C. and the critical temperature is set to 150 ° C., the image of the integrated circuit 18 is photographed at room temperature (20 ° C.), 50 ° C., 80 ° C., 110 ° C. and 140 ° C., respectively. Will be. A may be adjusted by the administrator inputting a numerical value to the controller 28.

The controller 28 compares the input primary image with a previously stored reference image. This comparison is performed using the image comparison function inside the controller 28, and at the same time, two images are displayed on the display unit 30 so that an administrator can recognize them.

As a result of the comparison in the controller 28, it is determined that there is no abnormality when two images are primary. However, if a difference is found in the two images, it is determined that the defect has occurred and the defect state detection is displayed through the display unit 30.

If no abnormality is found in the above, the controller 28 determines whether the immediately measured temperature is the critical temperature Max. If the critical temperature is not reached, the controller 28 uses the hot plate 20 to detect whether the temperature has been reached (room temperature + 2a) ° C. while increasing the temperature. When the temperature reaches (room temperature + 2a) ° C., the secondary image is obtained by using the X-ray generator 10 and the camera unit 26 as described above, and the comparison is performed by the controller 28 as described above.

The image comparison of the integrated circuit 18 is continuously performed until the critical temperature Max is reached, and when it is determined that the critical temperature is reached, the power supply to the hot plate 20 is cut off and the defect is detected. End the job. In this way, the defect detection for one integrated circuit 18 is completed.

It is apparent that the failure detection process of the integrated circuit 18 can be automated by further including a separate integrated circuit 18 transfer device. In the case of inspecting the integrated circuit 18 in large quantities, the inspection speed can be increased by setting one reference image and comparing it with other images based on the reference image.

According to the present invention, while the integrated circuit is heated from the normal temperature to the critical temperature to obtain an image of the inside of the integrated circuit in a certain temperature unit and compare the initial state reference image with each temperature step for defects generated intermittently by temperature and humidity There is a detectable effect.

1 is a block diagram of an apparatus for detecting a defect of an integrated circuit according to the present invention;

2 is a diagram illustrating a bad state generated in a conventional integrated circuit,

3 is a flowchart illustrating a failure detection method of an integrated circuit of the present invention.

※ Explanation of symbols about main part of drawing ※

10: X-ray generator 12: High voltage terminal

14: vacuum pump 16: X-ray control unit

18: integrated circuit (IC) 20: hot plate

22: base 24: video multiplier

26: camera unit 28: controller

30: display unit 32: temperature sensor

Claims (5)

An X-ray generator 10 for generating and irradiating X-rays penetrating a material, a hot plate 20 for heating the integrated circuit 18 to be measured under the X-ray generator 10, and The temperature sensor 32 is installed adjacent to the hot plate 20, the base 22 for fixing the hot plate 20, and the lower portion of the base 22 to detect and amplify X-rays An image multiplier 24 and a camera positioned below the image multiplier 24 for detecting an image of a structure of the integrated circuit 18 and converting the image into digital data and an analog photographed by the camera. A controller for detecting a defect by comparing a camera unit 26 having an A / D conversion unit for converting an image to a digital image, and storing the image detected through the camera unit 26 and detecting the image according to an increase in temperature. 28), and of the controller 28 And a display unit 30 for displaying the comparison image and the result according to the control signal, and an X-ray controller 16 for controlling the X-ray generator 10 according to the control signal of the controller 28. An apparatus for detecting a failure of an integrated circuit. delete  The first step of capturing and storing the integrated circuit reference image using the X-ray generator at room temperature, and heating the integrated circuit using a hot plate, and measuring the temperature using the X-ray generator at the set temperature (a) intervals A second step of photographing an image, a third step of comparing a reference image with a measured image, and displaying and terminating the defective state when a defect is detected; and a fourth step of terminating when the measured temperature reaches a critical temperature. Defect detection method of an integrated circuit, characterized in that. The method of claim 3, And the set temperature (a) is determined within a range of 15 to 30 ° C.  The method of claim 3, The critical temperature (Max) is a failure detection method of an integrated circuit, characterized in that determined in the range of 150 ~ 200 ℃.