KR100481299B1 - Information data control method for equipment for semiconductor manufacturing - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for controlling information data of a semiconductor manufacturing facility. The present invention includes a backup information data storage buffer and a keeping module in a predetermined area of a facility, and includes backup information data identical to the information data stored by the host. By storing the data in advance, even if an abnormality occurs in the on-line state between the host and the equipment, and the communication between the host and the equipment is interrupted, the equipment can proceed according to the same backup information data as the information data stored in the host. The accident can be prevented in advance.

Description

Information data control method for equipment for semiconductor manufacturing

The present invention relates to a method for controlling information data of a semiconductor manufacturing facility. More specifically, by storing backup information data having the same content as information data stored in a host in the buffer area of the facility, the overall production efficiency of the product is remarkably improved. It relates to a method for controlling information data of a semiconductor manufacturing facility.

In general, semiconductor devices require a high degree of precision, and accordingly, most semiconductor device manufacturing processes are performed by disposing facilities such as sputtering equipment and etching equipment that can be processed in a normal semiconductor production line. .

At this time, the operator tries to improve the line work efficiency by closely monitoring the operation status of each facility.

1 is a conceptual diagram schematically showing an arrangement of a conventional semiconductor manufacturing facility that performs such a function.

As shown, a facility 2 for executing a process is arranged in a production line, in which a lot 1 is loaded into a suitable semiconductor product.

At this time, the operator closely observes the operation of the facility through the facility and the online O / I PC (Operater Interface PC: 4).

Here, the facility 2 is online with the host 3 having a control function. At this time, the host 3 is the basic information data most necessary and appropriate for the facility among various process progress information data stored in its database. For example, by calculating a lot ID (LOTID) and a PPID (Process Program ID) and downloading the information data to the facility 2, the process conditions of the facility 2 are set to an appropriate state.

At this time, the facility 2 stores the basic information data set by the host 3, and when the corresponding lot 1 is loaded, proceeds with the process according to the set process program, thereby making the lot 1 an appropriate semiconductor product. Manufacture.

For example, when the lot 1 corresponding to the lot ID A set and stored from the host 3 is loaded, the facility 2 refers to the lot 1 set and stored from the host 3 and is requested to the lot 1. Program C of process step B is executed. As a result, the lot 1 of the lot ID A is appropriately processed and manufactured according to the operation of the facility 2 executed by the program C. FIG.

As described above, the conventional semiconductor manufacturing facility 2 stores basic information data such as lot ID and PPI ID set from the host 3, and then loads corresponding to the lot 1 according to the basic information data. By processing 1), the given semiconductor manufacturing process is advanced suitably.

However, there are some serious problems in the information data control method of a conventional semiconductor manufacturing facility that performs this function.

First, as described above, the conventional equipment is configured to store only basic information such as lot ID, PPI, etc. from the host and proceed with the semiconductor manufacturing process accordingly. When turned off, the facility proceeds with the semiconductor manufacturing process irrespective of this, causing a problem in which the actual process situation in the facility and the process state of the facility previously stored in the database area of the host are inconsistent with each other.

Second, after restoring the on-line state of the host and the facility, in order to normalize the process, it is necessary to match the process state previously stored in the host with the process state of the facility, and this operation takes a long time.

Third, according to this time, when the process normalization is delayed for a long time, there is a problem that an unexpected process accident occurs.

Accordingly, an object of the present invention is to provide a backup information data storage buffer and a keeping module in a predetermined area of a facility, and to store the same backup information data as the information data stored by the host in advance, so that the online state between the host and the facility is maintained. Even if an error occurs and communication between the host and the facility is interrupted, the device can proceed according to the same backup information data as the information data stored in the host, thereby preventing unforeseen process accidents. The present invention provides a method of controlling information data of a facility.

Another object of the present invention, as described above, by pre-store the backup information data in the information data buffer of the equipment, the semiconductor manufacturing equipment to be able to quickly resume the process status of the host and equipment after the online state recovery of the host and equipment The present invention provides a method of controlling information data.

It is still another object of the present invention to enable the host to modify / reference the above-described backup information data when necessary, so that the host can appropriately change the backup information data of the facility when the host information thereof is changed. Accordingly, an object of the present invention is to provide a method of controlling information data of a semiconductor manufacturing facility which enables the aforementioned backup information data to be flexibly operated.

According to an aspect of the present invention, there is provided a first step of downloading backup information data from a host, storing the backup information data in a backup information data buffer area, and continuously determining whether the host is online with the host. ; A second step of, if not in an online state with the host, turning on a keeping module and restoring the backup information data and then performing a predetermined semiconductor manufacturing process according to the backup information data; A third step of determining again whether or not a facility call message has been downloaded from the host if the determination result is online with the host; A fourth step of determining whether the facility call message is a message to modify the backup information data when the facility call message is downloaded from the host as a result of the determination; A fifth step of uploading the backup information data to the host if the facility call message is not a message for modifying the backup information; And if the facility call message is a message for modifying the backup information, downloading the modified backup information data from the host and modifying the backup information data.

Preferably, the facility call message is characterized in that the stream function (Stream function) message.

Preferably, the variable ID carried in the stream function message is a VID.

Preferably, the variable ID carried in the stream function message is an ECID.

Preferably, the stream function message is characterized in that the S1F3.

Preferably, the stream function message is characterized in that the S1F5.

Accordingly, in the present invention, even if an abnormality occurs in the on-line state between the host and the facility, the facility can quickly proceed the process according to the same content as the information data stored in the host.

Hereinafter, an information data control method of a semiconductor manufacturing apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

2 is a conceptual diagram schematically showing an arrangement of equipment for implementing the present invention.

As shown therein, the facility 10 is provided with a backup information data storage buffer area 11 capable of storing backup information data.

At this time, the facility 10 and the online host 3 download all the information data previously stored in their database into the backup information data storage buffer area 11 and store the backup information data having the same contents as the information data. Write in. As a result, backup information data having the same content as that of the host 3 is properly stored in the backup information data storage buffer area 11 of the facility 10.

In addition, the above-described backup information data storage buffer area 11 is connected to a keying module 12 having a data save function. Such a keying module 12 has a backup information data storage buffer area 11 when certain conditions are satisfied. Quickly set up a key lock to protect and save the backup information data stored therein.

3 is a flowchart sequentially illustrating a method of controlling information data of a semiconductor manufacturing facility according to the present invention.

As shown therein, the information data control method of the semiconductor manufacturing facility 10 according to the present invention downloads the backup information data from the host 3 and stores the backup information data in the backup information data buffer area 11. The first step (S10) of continuously determining the online state with the host (3), and if the determination result is not in the online state with the host (3), by turning on the keying module 12 to resave the backup information data After the second step (S20) to proceed with the appropriate semiconductor manufacturing process according to the stored backup information data, and if the determination result, if the online state with the host 3, whether or not the facility call message is downloaded from the host 3 again If the facility call message has been downloaded from the host 3 as a result of the third step (S30) of judging, the facility call message modifies the backup information data. A fourth step (S40) of determining whether or not the message to be requested; and if the facility call message is not a message to modify the backup information data as a result of this determination, uploading the above-described backup information data to the host 3; Step 5 (S50), and if it is determined that the facility call message is a message for modifying the backup information data, the sixth step (S60) of downloading the modified backup information data from the host 3 to modify the above-described backup information data ). Accordingly, in the present invention, even when the facility 10 and the host 3 are not online, the semiconductor manufacturing process having the same contents as the information data previously stored in the host 3 is quickly performed by the facility 10. Can be.

Hereinafter, each step of the present invention described above will be described in detail.

First, the facility 10 downloads backup information data having the same content as the information data from the host 3 and stores it in its backup information data storage buffer area 11 (S11). Thus, the facility 10 In the backup information data storage buffer area 11 of the host 11, all the information data of the host 3 including the basic information data, for example, the number of lots to proceed with the process, the communication rules with the facility 10 to proceed with the process, the lot ID, and the PPI ID All information data such as and so forth are backed up and stored.

Subsequently, the facility 10 continuously observes and determines whether there is an abnormal state between the host and the host 3 (S12).

As a result of this determination, if an abnormality occurs in the online state between the host and the host 3, and it is determined that the online state with the host 3 is disconnected, the facility 10 is connected to the backup module data storage buffer area 11. By turning on (12) and setting the keying lock in the backup information data storage buffer area 11, the backup information data which has been backed up and stored is stably resaved. (S21, S22) Accordingly, the host 3 Backup information data having the same contents as the information data is stably stored in the backup information data storage buffer area 11 without unexpected loss.

Subsequently, the facility 10 proceeds with the appropriate semiconductor manufacturing process by operating the component in accordance with the re-stored backup information data. (S23) At this time, as described above, the backup information data is stored before the host 3 has an online abnormality. Since the data has the same contents as the previously stored information data, the facility 10 is a semiconductor manufacturing process of the same content that the host 3 intends to implement, regardless of the online state with the host 3. Can be performed quickly.

In the conventional case, when an abnormality occurs in the online state between the facility 10 and the host 3, a difference occurs between the process information data stored by the host 3 and the actual process situation of the facility 10. There was a problem that caused a fair accident.

However, in the case of the present invention, as described above, the facility 10 pre-stores backup information data having the same contents as the process information data stored in the host 3, and thus the facility 10 and the host 3 are stored. Even if an abnormality occurs in the on-line state, the semiconductor manufacturing process having the same content as that of the information data of the host 3 can be carried out. As a result, the difference between the process information data of the host 3 and the actual process situation of the facility 10 can be performed. Process accidents can be prevented beforehand.

In addition, in the conventional case, when the actual process situation of the facility 10 and the pre-storage process state of the host 3 have to be matched after a certain time has elapsed and the online state with the host 3 is restored, the difference is explained. The task of identifying this has led to a serious problem that increases the overall process normalization time.

However, in the case of the present invention, as described above, the facility 10 previously stores backup information data having the same content as the information data stored in the host 3, and proceeds with an appropriate process accordingly. Thus, the host 3 can quickly normalize the process in a short time without having to match the actual process state of the facility 10 with its own storage process state.

On the other hand, if the facility 10 determines that the online state between itself and the host 3 is normal without abnormality as a result of the above-described determination, it again determines whether the facility call message has been downloaded from the host 3 (S30).

As a result of this determination, if it is determined that the equipment call message is not downloaded from the host 3, the equipment 10 returns the flow and repeats the above-described first step again (S10).

However, if it is determined that the facility call message is downloaded from the host 3 as a result of this determination, the facility 10 attempts to refer to or modify the backup information data stored in the backup information data storage buffer area 11 by the host 3. After determining that the device call message has been downloaded, it is again determined whether or not the downloaded facility call message is a message for modifying backup information data.

As a result of this determination, if the downloaded facility call message is not a message for modifying the backup information data, the facility 10 assumes that the host 3 intends to refer to the backup information data stored in the backup information data storage buffer area 11. After grasping, the backup information data described above is uploaded to the host 3 quickly (S50).

At this time, according to the feature of the present invention, the facility call message downloaded from the host 3 is a stream function message that communication transfer is desired. Accordingly, the facility 10 can quickly respond to the facility call message downloaded from the host 3.

Here, preferably, the stream function message is S1F5, and the variable ID carried on it is a VID (Variable ID) or an ECID (Equipment Constant ID).

For example, when the host 3 wants to refer to the backup information data of the facility 10, the host 3 loads the variable ID VID or ECID in the stream function message S1F5, and then assigns a key value to the variable ID to install the facility ( Download to 10). Then, the facility 10 immediately grasps that the meaning of the downloaded stream function message S1F5 is the message to which the backup information data is to be referred, and uploads the backup information data in accordance with the above-described key value, thereby giving the host 3 Properly act as a backup information data reference required. As a result, the backup information data stored in the backup information data storage buffer area 11 is quickly uploaded to the host 3.

On the other hand, as a result of this determination, if the downloaded facility call message is a message for modifying backup information data, the facility 10 downloads the modified backup information data from the host 3 and is stored in the backup information data storage buffer area 11. Correct the backup information data quickly (S60).

At this time, according to the feature of the present invention, the facility call message downloaded from the host 3 is the same stream function message as the above-described reference process. Accordingly, the facility 10 can quickly respond to the facility call message downloaded from the host 3.

Here, preferably, the stream function message is S1F3, and the variable ID carried thereon is a VID or an ECID.

For example, when the host 3 wants to modify the backup information data of the facility 10, the host 3 loads the variable ID VID or ECID in the stream function message S1F3, and then assigns a key value to the variable ID. Download to 10). Then, the facility 10 immediately grasps that the meaning of the downloaded stream function message S1F3 is a message for modifying the backup information data, and quickly modifies the backup information data according to the modifications included in the above-described key value. It performs a role of modifying backup information data required by the host 3. As a result, the backup information data stored in the backup information data storage buffer area 11 of the facility 10 is appropriately modified to the contents requested by the host 3.

As such, as a result of operating the backup information data of the facility 10 according to the present invention, when the host 3 can modify / reference the backup information data as necessary, the facility 10 changes its own information data. The backup information of the data can be changed flexibly by appropriately changing the data.

Thereafter, the facility properly accomplishes the present invention by continuously repeating each of the above-described steps.

As described above, in the present invention, by storing the backup information data having the same content as the information data stored in the host in the buffer area of the facility, the overall production efficiency of the product can be remarkably improved.

This invention exhibits useful effects throughout all semiconductor manufacturing facilities that are placed on a semiconductor manufacturing line and require constant management.

And while certain embodiments of the invention have been described and illustrated, it will be apparent that the invention may be embodied in various modifications by those skilled in the art.

Such modified embodiments should not be understood individually from the technical spirit or point of view of the present invention and such modified embodiments should fall within the scope of the appended claims of the present invention.

As described in detail above, in the information data control method of a semiconductor manufacturing facility according to the present invention, a backup information data storage buffer and a keeping module are provided in a predetermined area of the facility, and the same backup information data as the information data stored in the host is provided. If the communication between the host and the equipment is interrupted due to an abnormal condition in the online state between the host and the equipment, the equipment can proceed according to the same backup information data as the information data stored in the host. Process accidents can be prevented beforehand.

1 is a conceptual diagram schematically showing an arrangement of a conventional semiconductor manufacturing facility.

Figure 2 is a conceptual diagram schematically showing the arrangement of the arrangement for implementing the present invention.

3 is a flowchart sequentially showing a method of controlling information data of a semiconductor manufacturing facility according to the present invention.

Claims (6)

A first step of storing the backup information data in a backup information data buffer area after downloading the backup information data from a host, and continuously determining whether the host is online with the host; A second step of, if not in an online state with the host, turning on a keeping module and restoring the backup information data and then performing a predetermined semiconductor manufacturing process according to the backup information data; A third step of determining again whether or not a facility call message has been downloaded from the host if the determination result is online with the host; A fourth step of determining whether the facility call message is a message to modify the backup information data when the facility call message is downloaded from the host as a result of the determination; A fifth step of uploading the backup information data to the host if the facility call message is not a message for modifying the backup information; And if the facility call message is a message for modifying the backup information, downloading the modified backup information data from the host and modifying the backup information data. . The method of claim 1, wherein the facility call message is a stream function message. 3. The method of claim 2, wherein the variable ID carried in the stream function message is a VID. 3. The method of claim 2, wherein the variable ID carried in the stream function message is an ECID. The method according to claim 1, wherein the stream function message is S1F3. The method of claim 1, wherein the stream function message is S1F5.

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