KR100451281B1 - A method of recovering solvent with low boiling point - Google Patents
A method of recovering solvent with low boiling point Download PDFInfo
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- KR100451281B1 KR100451281B1 KR10-2001-0029324A KR20010029324A KR100451281B1 KR 100451281 B1 KR100451281 B1 KR 100451281B1 KR 20010029324 A KR20010029324 A KR 20010029324A KR 100451281 B1 KR100451281 B1 KR 100451281B1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/06—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
- B01D17/02—Separation of non-miscible liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2055—Carbonaceous material
- B01D39/2065—Carbonaceous material the material being fibrous
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
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Abstract
본 발명은 저비점 용제의 회수방법에 관한 것으로서, 활성탄소섬유를 사용하여 공기중에 함유된 저비점 용제를 분리, 회수하는 방법에 있어서, 활성탄소섬유 (2)가 내장된 3개의 섹션으로 구분되며 회전운동하는 원통상의 로터형 필터(1)를 사용하여 (ⅰ) 용제 함유 공기로부터 용제를 회수하는 공정, (ⅱ) 증기로 활성탄소섬유에 부착된 용제를 탈착시키는 공정 및 (ⅲ) 용제 탈착 처리 후의 건조공정을 각각의 로터형 필터(1) 섹션에서 교호로 반복하는 것을 특징으로 한다. 본 발명은 로터형 필터의 3개 섹션에서 용제 회수 공정, 용제 탈착 공정 및 건조 공정을 교대로 반복실시하기 때문에 용제 회수율, 청정율 및 공정효율성이 매우 우수하다.The present invention relates to a method for recovering a low boiling point solvent, wherein a method for separating and recovering a low boiling point solvent contained in air using activated carbon fibers is divided into three sections in which an activated carbon fiber (2) is embedded and rotates. (I) recovering the solvent from the solvent-containing air using a cylindrical rotor filter (1), (ii) desorbing the solvent attached to the activated carbon fibers with steam, and (iii) after the solvent desorption treatment. The drying process is characterized in that it is repeated alternately in each rotor filter section 1. In the present invention, the solvent recovery process, the solvent desorption process, and the drying process are alternately repeated in three sections of the rotor filter, and thus the solvent recovery rate, the clean rate, and the process efficiency are very excellent.
Description
본 발명은 공기중에 함유된 휘발성의 저비점 용제를 효율적으로 분리, 회수하는 방법에 관한 것이다.The present invention relates to a method for efficiently separating and recovering a volatile low boiling point solvent contained in air.
최근 산업이 급속하게 발달됨에 따라 용제를 함유하는 공기(가스)가 전자산업, 자동차산업, 인쇄산업, 도장산업, 석유화학산업 등의 다양한 산업분야에서 불가피하게 대량 발생 되고 있다.Recently, as the industry is rapidly developed, a large amount of solvent-containing air (gas) is inevitably generated in various industries such as the electronics industry, the automobile industry, the printing industry, the painting industry, and the petrochemical industry.
이들을 그대로 대기중으로 방출시에는 대기가 오염되거나 인체에 심각한 악영향을 미치기 때문에 상기 가스로부터 휘발성 용제를 분리, 회수하는 공정이 국제환경협약에 따라 필수적으로 요구된다. 휘발성 저비점 용제들을 공기(가스)로부터 분리, 회수하는 공정에서는 활성탄소섬유 필터가 주로 사용되고 있다.When they are released into the atmosphere as they are, the air is contaminated or seriously adversely affects the human body, so a process for separating and recovering volatile solvents from the gas is required in accordance with international environmental conventions. In the process of separating and recovering volatile low boiling point solvents from air (gas), activated carbon fiber filters are mainly used.
한국 실용신안등록 제205816호에서는 바이오필터와 활성탄소섬유 필터를 동시에 사용하여 공기내 용제들을 회수하는 방법을 제안하고 있다. 그러나 상기 방법은 고가의 바이오필터 사용으로 비경제적이고, 활성탄소섬유 필터의 교체 또는 재생을 위해 회수설비 운전을 정지해야 하므로 공정효율이 저하되는 문제가 있었다.Korean Utility Model Registration No. 205816 proposes a method for recovering solvents in air using a biofilter and an activated carbon fiber filter simultaneously. However, the method is inexpensive due to the use of expensive biofilters, and the process efficiency is lowered because the recovery facility must be stopped for replacement or regeneration of activated carbon fiber filters.
한편, 한국 실용신안등록 제213651호에서는 활성탄소섬유 필터를 사용하여 폐수처리장 악취물질을 제거하는 방법을 제안하고 있다. 그러나 상기 방법 역시 활성탄소섬유 필터의 교체 또는 재생을 위해 회수설비 운전을 중지해야 하므로 공정효율이 저하되는 문제가 있었다.On the other hand, Korean Utility Model Registration No. 213651 proposes a method for removing odorous substances in a wastewater treatment plant using an activated carbon fiber filter. However, the method also has a problem that the process efficiency is lowered because the recovery facility must be stopped for replacement or regeneration of the activated carbon fiber filter.
한편, 한국 실용신안등록 제197549호에서는 유기용제를 화학적으로 흡수하는 악취물질흡수 용액과 활성탄소섬유 필터를 사용하여 습식세정 방식으로 공기내 휘발성 용제들을 분리, 회수하는 방법을 제안하고 있다. 그러나 상기 방법은 용제 등을 흡수하는 용액을 별도로 사용하기 때문에 공정이 번거롭고, 활성탄소섬유 필터의 교체 또는 재생을 위해 회수설비 운전을 정지해야 하는 문제가 있었다.On the other hand, Korean Utility Model Registration No. 197549 proposes a method of separating and recovering volatile solvents in the air by a wet cleaning method using an odor substance absorbing solution that chemically absorbs an organic solvent and an activated carbon fiber filter. However, the above method has a problem in that the process is cumbersome because the solution for absorbing the solvent and the like is separately used, and the operation of the recovery facility is stopped to replace or regenerate the activated carbon fiber filter.
본 발명의 목적은 이와 같은 종래기술의 문제점들을 해결하므로서 용제 회수율이 높고, 설비의 운전중지 없이도 필터를 교체 및 재생 할 수 있어서 공정효율이 매우 우수한 저비점 용제의 회수방법을 제공하기 위한 것이다.An object of the present invention is to provide a recovery method of a low boiling point solvent having a very high process efficiency by solving the problems of the prior art, high solvent recovery rate, the filter can be replaced and regenerated without stopping the equipment.
본 발명은 활성탄소섬유가 내장된 3개의 섹션을 갖는 로터형 필터(1)를 사용하여 용제를 회수하는 공정, 용제를 탈착하는 공정 및 활성탄소섬유를 건조하는 공정을 각각의 로터 섹션들에서 교대로 반복하므로서, 활성탄소섬유 필터의 교체나 재생을 위해 회수설비를 정지할 필요가 없는, 다시말해 공정효율이 양호한 저비점 용제의 회수방법을 제공하고자 한다. 또한 저농도의 용제 함유 공기인 경우에는 이를 먼저 벌집구조의 농축로터에서 농축시켜 고농도 가스로 변환시킨 후 이를 로터형 필터(1)로 공급하는 방법을 제공하고자 한다.The present invention alternates the process of recovering the solvent, the process of desorbing the solvent, and the process of drying the activated carbon fiber in the respective rotor sections using the rotor filter 1 having three sections in which the activated carbon fibers are embedded. In order to provide a method for recovering a low boiling point solvent having good process efficiency, it is not necessary to stop the recovery facility for replacing or regenerating an activated carbon fiber filter. In addition, in the case of low concentration solvent-containing air, it is first concentrated in a honeycomb enrichment rotor to convert to a high concentration gas, and then to provide a method for supplying it to the rotor filter (1).
도 1은 본 발명의 용제 회수 공정 개략도1 is a schematic view of the solvent recovery process of the present invention
※ 도면중 주요부분에 대한 부호설명※ Explanation of Codes of Major Parts
1 : 로터형 필터 2 : 활성탄소섬유1: rotor type filter 2: activated carbon fiber
3 : 콘덴서 4 : 유수분리조 6 : 송풍기3: condenser 4: oil / water separator 6: blower
이와 같은 과제들을 달성하기 위한 본 발명의 저비점 용제의 회수방법은 활성탄소섬유를 사용하여 공기중에 함유된 저비점 용제를 분리, 회수하는 방법에 있어서, 활성탄소섬유(2)가 내장된 3개의 섹션으로 구분되며 회전운동하는 원통상의 로터형 필터(1)를 사용하여 (ⅰ) 용제 함유 공기로부터 용제를 회수하는 공정, (ⅱ) 증기로 활성탄소섬유에 부착된 용제를 탈착시키는 공정 및 (ⅲ) 용제 탈착 처리 후의 건조공정을 각각의 로터형 필터(1) 섹션에서 교호로 반복하는 것을 특징으로 한다.The low boiling point solvent recovery method of the present invention for achieving the above problems in the method for separating and recovering the low boiling point solvent contained in the air using the activated carbon fibers, comprising three sections containing the activated carbon fiber (2) (I) recovering the solvent from the solvent-containing air using a cylindrical rotor filter (1), which is divided and rotating in motion, (ii) desorbing the solvent attached to the activated carbon fibers with steam, and (iii) The drying process after the solvent desorption treatment is alternately repeated in each rotor filter (1) section.
이하, 첨부된 도면 등을 통하여 본 발명을 상세하게 설명한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
본 발명은 공기내에 함유되어 있는 휘발성의 저비점 용제들을 분리, 회수 할 때 활성탄소섬유가 내장된 3개의 섹션으로 구분되며 회전운동을 하는 원통상의 로터형 필터(1)를 사용한다. 상기 로터형 필터 섹션들 중 한개가 용제 함유 공기로 부터 용제를 회수하는 동안 나머지 한개의 로터형 필터 섹션은 증기에 의해 활성탄소섬유에 부착된 용제들을 탈착처리 되며, 다른 나머지 한개의 로터형 필터 섹션은 탈착처리 후 건조된다. 이와 같은 용제 회수 공정과 용제 탈착 공정 및 건조 공정은 각각의 로터형 필터 섹션에서 서로 교호로 반복 실시 된다.The present invention uses a cylindrical rotor filter (1) which is divided into three sections containing activated carbon fibers and rotates when separating and recovering volatile low boiling point solvents contained in air. While one of the rotor filter sections recovers the solvent from the solvent containing air, the other rotor filter section desorbs the solvent attached to the activated carbon fibers by steam, and the other rotor filter section. Is dried after desorption treatment. This solvent recovery process, solvent desorption process and drying process are repeated alternately with each other in each rotor filter section.
도 1은 본 발명의 용제 회수 공정 개략도 이다. 저비점의 용제를 함유하는 공기는 송풍기 및 에어필터를 거쳐 용제 흡착중인, 다시말해 용제를 분리중인 로터형 필터(1) 섹션으로 공급된다. 이때 용제 함유 공기는 로터형 필터(1)의 표면에서 내부로 이동하면서 공기내 유기용제는 활성탄소섬유(2)에 흡착되고 청정공기는 송풍기(6)를 통해 밖으로 배출된다.1 is a schematic view of a solvent recovery process of the present invention. The air containing the low boiling point solvent is fed through the blower and the air filter to the rotor-type filter (1) section during solvent adsorption, that is, separating the solvent. At this time, the solvent-containing air moves from the surface of the rotor filter (1) to the inside while the organic solvent in the air is adsorbed to the activated carbon fibers (2) and the clean air is discharged out through the blower (6).
한편, 용제 탈착 중인 로터형 필터(1) 섹션의 내부 통로로는 증기가 공급되어 로터형 필터(1) 표면쪽으로 흐르면서 활성탄소섬유(2)에 부착되어 있는 용제들을 탈착 시킨다. 상기와 같이 탈착되어진 용제액(물+용제)은 냉각수가 공급되는 콘덴서(3)에서 응축처리되고, 계속해서 유수분리조(4)에서 물과 용제를 분리 시킨다. 분리된 용제는 회수하고 나머지 물을 회수설비 밖으로 배출 시킨다.Meanwhile, steam is supplied to the inner passage of the rotor filter 1 section during solvent desorption and flows toward the surface of the rotor filter 1 to desorb the solvents attached to the activated carbon fibers 2. The solvent solution (water + solvent) desorbed as described above is condensed in the condenser (3) to which the cooling water is supplied, and then the water and the solvent are separated in the oil / water separation tank (4). The separated solvent is recovered and the remaining water is discharged out of the recovery facility.
한편, 또다른 로터형 필터(1) 섹션 하나는 용제 탈착 후 건조처리 되면서 다음단계인 용제 흡착 공정을 준비하게 된다.On the other hand, another rotor-type filter (1) section is prepared after the solvent desorption and drying process to prepare the next step of the solvent adsorption process.
용제 흡착 중인 로터형 필터 섹션 내 활성탄소섬유(2)의 용제 분리 기능이 일정수준으로 저하되면, 로터형 필터(1)를 1/3 회전시켜 건조가 완료된 로터형 필터섹션으로 용제를 흡착함과 동시에 용제 흡착을 중단한 로터형 필터(1) 섹션에는 증기를 공급하여 용제 탈착 처리 한다. 다시말해, 3개의 로터형 필터 섹션들은 서로 용제 흡착, 용제 탈착 및 건조 공정을 교호로 반복한다. 그 결과 로터형 필터(1) 내 활성탄소섬유의 교체나 재생을 위해 용제 회수 공정을 중단해야 하는번거러움을 개선 할 수 있다.If the solvent separation function of the activated carbon fiber (2) in the rotor filter section under solvent adsorption is reduced to a certain level, the rotor filter (1) is rotated one third of the solvent to adsorb the solvent through the dried rotor filter section. At the same time, the solvent filter desorption process is performed by supplying steam to the section of the rotor filter (1) which stops solvent adsorption. In other words, the three rotor-type filter sections alternately repeat the solvent adsorption, solvent desorption and drying processes with each other. As a result, it is possible to improve the trouble of stopping the solvent recovery process for the replacement or regeneration of the activated carbon fibers in the rotor filter (1).
용제 흡착 공정과 용제 탈착 공정을 교체 하는 시기는 용제 흡착 중인 활성탄소섬유의 압력을 센서로 측정하여 판단하며, 상기 센서와 연결된 로터형 필터 회전장치로 로터형 필터(1)를 1/3 회전시켜 교체 한다.The time to replace the solvent adsorption process and the solvent desorption process is determined by measuring the pressure of the activated carbon fibers during solvent adsorption, and rotating the rotor filter (1) 1/3 by using a rotor filter rotating device connected to the sensor. Replace it.
본 발명의 저비점 용제는 비점이 낮고 휘발성을 갖는 용제를 의미한다. 구체적으로 트리클로로에틸렌, 염화메틸렌, 테트라클로로에틸렌, 사염화탄소, 클로로포움, 벤젠, 톨루엔, 크실렌, 메탄올, 에탄올, 이소프탈산, 아세톤 또는 메틸에틸케톤 등이다.The low boiling point solvent of this invention means the solvent which has a low boiling point and has volatility. Specifically, trichloroethylene, methylene chloride, tetrachloroethylene, carbon tetrachloride, chloroform, benzene, toluene, xylene, methanol, ethanol, isophthalic acid, acetone or methyl ethyl ketone.
본 발명의 로터형 필터(1)는 원통상으로서, 활성탄소섬유(2)를 펠트 가공한 시이트를 내장하고 있다.The rotor filter 1 of the present invention has a cylindrical shape and incorporates a sheet in which the activated carbon fibers 2 are felt.
본 발명은 로터형 필터(1) 내 활성탄소섬유(2)의 재생(탈착)을 회수설비 가동 중에도 연속적으로 실시 할 수 있어서 회수효율 및 공정효율이 매우 우수하게 된다. 구체적으로 본 발명은 용제 회수율이 95% 이상이고, 공기 청정효과가 98% 이상이고, 시스템 가동율도 크게 향상된다.The present invention can continuously perform the regeneration (desorption) of the activated carbon fibers (2) in the rotor filter (1) even during operation of the recovery facility, it is very excellent recovery efficiency and process efficiency. Specifically, in the present invention, the solvent recovery rate is 95% or more, the air cleaning effect is 98% or more, and the system operation rate is greatly improved.
이하 실시예를 통하여 본 발명을 상세하게 살펴본다. 그러나 본 발명이 하기 실시예에만 한정되는 것은 아니다.Hereinafter, the present invention will be described in detail with reference to the following examples. However, the present invention is not limited only to the following examples.
실시예 1Example 1
활성탄소섬유(2)가 내장된 3개의 섹션으로 구분되며 회전운동을 하는 원통상의 로터형 필터(1)가 설치된 도 1의 회수설비에 톨루엔 용제가 900ppm 함유된 공기를 10㎥/분의 풍량으로 공급하면서 공기내 상기 용제를 회수 하였다. 이때 로터형 필터(1)의 흡착시간은 15분, 탈착시간은 6분으로 설정하였다. 그 결과 용제 회수량은 56kg/시간(회수율 98.5%), 처리후 공기내 용제함량은 평균 15ppm 이였다.Air volume containing 10 ppm / min of air containing 900 ppm of toluene solvent in the recovery facility of FIG. 1, which is divided into three sections containing activated carbon fibers (2) and is provided with a cylindrical rotor filter (1) which rotates. The solvent in the air was recovered while supplying. At this time, the adsorption time of the rotor filter 1 was set to 15 minutes and the desorption time to 6 minutes. As a result, the solvent recovery was 56 kg / hour (recovery rate 98.5%), and the solvent content in the air after treatment was 15 ppm on average.
실시예 2Example 2
활성탄소섬유(2)가 내장된 3개의 섹션으로 구분되며 회전운동을 하는 원통상의 로터형 필터(1)가 설치된 도 1의 회수설비에 메탄올 용제가 950ppm 함유된 공기를 15㎥/분의 풍량으로 공급하면서 공기내 상기 용제를 회수 하였다. 이때 로터형 필터(1)의 흡착시간은 8분, 탈착시간은 6분으로 설정하였다. 그 결과 용제 회수량은 71kg/시간(회수율 97.5%), 처리후 공기내 용제함량은 평균 20ppm 이하 이였다.It is divided into three sections containing the activated carbon fibers (2), and the air volume containing 15m3 / min of air containing 950ppm of methanol in the recovery facility of FIG. The solvent in the air was recovered while supplying. At this time, the adsorption time of the rotor filter 1 was set to 8 minutes and the desorption time to 6 minutes. As a result, the solvent recovery was 71 kg / hour (recovery rate 97.5%), the solvent content in the air after treatment was an average of 20 ppm or less.
실시예 3Example 3
활성탄소섬유(2)가 내장된 3개의 섹션으로 구분되며 회전운동을 하는 원통상의 로터형 필터(1)가 설치된 도 1의 회수설비에 초산에틸 870ppm과 톨루엔 300ppm이 함유된 공기를 19㎥/분의 풍량으로 공급하면서 공기내 상기 용제를 회수 하였다. 이때 로터형 필터(1)의 흡착시간은 8분, 탈착시간은 6분으로 설정하였다. 그 결과, 초산에틸 회수량은 185kg/시간, 톨루엔 회수량은 21kg/시간(총 회수율 96.5%), 처리후 공기내 용제함량은 평균 23ppm 이하 이였다.It is divided into three sections in which activated carbon fiber (2) is embedded and air containing 870ppm of ethyl acetate and 300ppm of toluene is collected in a recovery facility of FIG. 1 equipped with a cylindrical rotor filter (1) which rotates. The solvent in the air was recovered while supplying the air volume in minutes. At this time, the adsorption time of the rotor filter 1 was set to 8 minutes and the desorption time to 6 minutes. As a result, the ethyl acetate recovery was 185 kg / hour, the toluene recovery was 21 kg / hour (total recovery 96.5%), and the solvent content in the air after treatment was 23 ppm or less on average.
본 발명의 용제 회수방법은 용제 회수율 및 청정효율이 높을 뿐만아니라 용제 회수 공정의 효율도 크게 향상 된다.The solvent recovery method of the present invention not only has high solvent recovery rate and clean efficiency, but also greatly improves the efficiency of the solvent recovery process.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167430A (en) * | 1985-11-25 | 1986-07-29 | Toyobo Co Ltd | Method for recovering solvent from gas containing low-concentration solvent |
| JPH01199621A (en) * | 1988-02-01 | 1989-08-11 | Seibu Giken:Kk | Adsorber for gas having very low concentration |
| JPH02203914A (en) * | 1989-02-01 | 1990-08-13 | Toho Kako Kensetsu Kk | Adsorbing and desorbing apparatus |
| JPH03188918A (en) * | 1989-12-19 | 1991-08-16 | Seibu Giken:Kk | Gas adsorption method |
| JPH0775714A (en) * | 1993-09-08 | 1995-03-20 | Nichias Corp | Organic solvent vapor adsorption apparatus |
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2001
- 2001-05-28 KR KR10-2001-0029324A patent/KR100451281B1/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167430A (en) * | 1985-11-25 | 1986-07-29 | Toyobo Co Ltd | Method for recovering solvent from gas containing low-concentration solvent |
| JPH01199621A (en) * | 1988-02-01 | 1989-08-11 | Seibu Giken:Kk | Adsorber for gas having very low concentration |
| JPH02203914A (en) * | 1989-02-01 | 1990-08-13 | Toho Kako Kensetsu Kk | Adsorbing and desorbing apparatus |
| JPH03188918A (en) * | 1989-12-19 | 1991-08-16 | Seibu Giken:Kk | Gas adsorption method |
| JPH0775714A (en) * | 1993-09-08 | 1995-03-20 | Nichias Corp | Organic solvent vapor adsorption apparatus |
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