KR100438101B1 - Bag-in-a-Can for High Pure Chemical Agents - Google Patents

Abstract

PURPOSE: A bag-in-can for high purity chemical agents is provided to reduce an environmental burden such that a metallic can thereof is reusable and only a plastic bag inserted into the bag is disposed. CONSTITUTION: The bag-in-can for high purity chemical agents includes a metallic can and a plastic bag adapted thereto. The plastic bag has an injection port and a cap attached thereto and heat-seals the surroundings of film. The film has cross-sectional three layer structure. The three layer structure is comprised of an inner layer made of high purity polyolefine based resin(B) including not more than 0.2 wt% of total amount of additive including neutralizer and antioxidant and not more than 1.0 wt% of an extracted amount by N-hexane in polyolefine based resin(A), a middle layer including 60-95 wt% of polyolefine based resin and 5-40 wt% of adhesive polyolefine base resin(C), and an outer layer including an air-tight resin(D).

Description

Bag-in Can for High Purity Chemicals {Bag-in-a-Can for High Pure Chemical Agents}

The present invention is suitable for containing high purity chemicals and reducing the environmental burden of the bag-in cans, more specifically molded into a super-clean and excellent barrier film suitable for holding high-purity chemicals used in the semiconductor / LCD applications such as photoresist Used plastic bags are inserted into a metal can and used to relate to an environmentally friendly high-purity medicine bag in can that is reused and disposed of one million plastics.

As the semiconductor industry and the liquid crystal display (LCD) industry have recently grown rapidly, the demand for high-purity chemical containers is rapidly increasing. Therefore, the size of containers is urgent to improve productivity. In addition, as semiconductors are rapidly increasing in memory capacity, the cleanliness requirements of related chemicals are being demanded, and the cleanliness requirements of containers are being strengthened.

The cleanliness of a plastic container is expressed as the degree of impurity of the fine particles leaching from the container into the chemical during the long-term storage of the high-purity chemical in the container. . That is, after storing the ultrapure water for a certain period of time, the number of particulates for calculating how many fine particles having a particle diameter of 0.2 μm or 0.3 μm or more exist in 1 ml of stored water, and the high purity medicine is stored after being stored in the container for a certain period of time. Obtained from residual metal content leached by chemicals present. In other words, the cleanliness of the container is determined by measuring the cleanliness of the high-purity drug itself, measuring the cleanliness after storing the drug in the container for a period of time, and evaluating the degree of contamination by the pure container itself by the difference. However, the number of fine particles suitable for high purity does not have a special international standard, and there are many differences between high-purity drugs and company management standards.

Meanwhile, among high-purity chemicals, such as photoresist, photoresist resins and additives are generally marketed as a kind of composition in which propylene glycol methyl ether acetate (PGMEA) is dissolved in a solvent. When the diffusion is discharged, the chemical composition is changed to cause a serious problem that the quality is impaired. Therefore, not only the cleanliness but also the barrier to the solvent is required in the container. In this sense, the brown glass bottle has been used as a good material since ancient times, but the bottle has a large drawback of being extremely fragile in drop impact resistance, and the maximum bottle capacity currently used mainly due to the processing technology of the glass is only 1 gal ( Only 3.785l) has become a major obstacle to the enlargement of containers, and the emergence of materials that can improve them has been urgently requested.

As a means to solve these drawbacks, a light-shielding clean container made of plastic is emerging. One example is a light-shielding clean plastic container from Nowa Technologies, USA, as described in US Pat. Nos. 5,102,010 and 5,031,801. This is a container in which a clean fluororesin (mainly polytetrafluoroethylene) film is embedded in a polyethylene container prescribed a light-shielding additive. However, this container has excellent impact resistance to dropping, but the manufacturing process is complicated and the use of extremely expensive fluorine resin film is expensive, compared to the existing light-shielding clean brown bottles, and is currently used only in a limited manner. . Thus, Japan's Aicer Chemical Co., Ltd. proposes a method of manufacturing a plastic container using a resin composition in which a light-shielding additive such as titanium oxide and carbon black is simply added to high-density polyethylene, as described in Japanese Patent Application Laid-Open No. 7-330074. Has a problem of poor light-shielding properties and cleanliness based on the poor dispersion state of the light-shielding additives to polyethylene, and in order to improve such a problem, according to the coextrusion blow processing method as in Japanese Patent Laid-Open No. 11-290420, So-called layer consisting of an inner layer made of polyolefin resin, an intermediate layer made of a resin such as polyamide having excellent solvent barrier property, a polyvinyl alcohol, an outer layer made of a resin containing a light-shielding additive, and two adhesive layers to prevent peeling between layers A novel method for manufacturing a five-layer light-shielding clean plastic container is presented. However, such a container has a burden of using a very expensive adhesive and coextruder, and due to the problem of high extrusion processing cost, there is a problem that price competitiveness is lower than that of a conventional light-shielding clean brown bottle, and an improvement thereof has been urgently requested. In addition, the glass bottles or plastic containers are excessively expensive to clean, and even when washed, there is a concern that deterioration in cleanliness is severe, and they are classified as a disposable product that is not reused and disposed of as it is.

A new method of reducing the environmental burden, promoting productivity through the enlargement of the container, and providing cleanness without breaking problems is the bag in can system. An example is the back in can system of Nowa Technologies, USA, as disclosed in US Pat. No. 6,206,240. That is, a bag-in-can system in which a plastic bag having a shape of heat-sealing around the film and having an injection hole and a stopper attached thereto is inserted into a metal can and infused with a high-purity chemical such as the photoresist into the plastic bag. It is a new concept system that injects gas into the space in between and pressurizes the inner bag and automatically moves to the storage tank through the inlet. In this case, the metal cans are reused and environmentally friendly container systems can reduce the environmental burden because only one million plastics are disposed of for single use. However, the plastic bags currently marketed under this system, such as the product of NOWPAK (trade name NOWPAK), are urgently required for improvement due to the complicated manufacturing process, low cleanliness and high price.

MEANS TO SOLVE THE PROBLEM In order to solve the said problem, the present inventors earnestly studied and came to this invention. The main object of the present invention is to provide a large-sized container for solving the conventional problems, and is made of a disposable plastic bag and a reusable metal can, and has excellent cleanliness and barrier properties based on a bag in can system that can reduce environmental burden. It is to provide a new low cost plastic bag film and a bag in can using the same.

Figure 1 is a photograph showing an example of a plastic bag attached to the injection hole and the stopper actually manufactured by the invention.

2 is a photograph showing an example of a can that can be used in the present invention.

The present invention is an environment-friendly high-purity chemicals in which a plastic bag formed of a film having excellent ultra-cleanability and barrier property suitable for containing high-purity chemicals such as photoresist is inserted into and mounted in a metal can. It is related to a dragon bag in can. That is, the present invention is a bag-in can system in which a disposable plastic bag having a shape of heat-sealing around a film and having an injection hole and a stopper attached thereto is inserted into a reusable metal can, wherein the film is a polyolefin resin (A). An inner layer composed of a high-purity polyolefin-based resin (B) having an extraction amount of 0.005 to 1.0% by weight based on medium boiling n-hexane and a total amount of additives including a neutralizing agent and an antioxidant of 0.2% by weight or less; Adhesive polyolefin selected from any one or more of 60-95% by weight of polyolefin resin (A), an ethylene-unsaturated ester copolymer, a monomer copolymer having an ethylene-unsaturated ester-carbonyl group, or a polymer having a monomer having a carbonyl group grafted to polyolefin An intermediate layer composed of 5-40% by weight of a composition (C); It is a film of a three-layer cross-sectional structure of an outer layer made of a gas barrier resin (D) selected from at least one selected from polyamide, polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyester, polyacrylonitrile, and polyvinylidene chloride. It is to provide a bag-in can for a high purity medicine characterized by.

The polyolefin resin (A) used in the present invention is low density polyethylene, linear low density polyethylene, medium density polyethylene, high density polyethylene and propylene, ethylene, 1-butene, 1-pentene, 1-hexene, 4-methyl-1-pentene, Refers to a resin at least one selected from copolymers made from alpha olefins such as 1-heptene, 1-octene, 1-nonene, 1-decene, 1-undecene, 1-dodecene and the like, wherein the copolymer is a random copolymer or It may be in the form of a block copolymer, the molecular structure may be any of atactic, isotactic, or syndiotactic, the polymerization method may be any of conventional low pressure, medium pressure or high pressure method, Ziegler catalyst, Although it may be produced by any catalyst such as a chromium catalyst or a metalocene catalyst, a low density polyethylene or a linear low density polyethylene resin is preferable, and a metalocene series linear low density polyethylene resin is most preferred. The.

The polyolefin-based resin used in the inner layer of the film in the present invention in direct contact with high purity chemicals has an extraction amount of 1.0% by weight or less, preferably extracted by boiling n-hexane, which is a guideline for the oligomer content of thousands of molecular weights. It is good to set it as 0.1 weight% or less, More preferably, you may be 0.005 weight% or less. The low molecular weight extracted by boiling n-hexane is a paraffinic wax, which is the main ingredient, and elutes into the drug very quickly when the drug is stored, which causes fine particles to contaminate the drug and accelerate the dissolution of residual metals and additives. have. In the case of using a polyolefin-based resin having an amount of extraction exceeding 1.0% by weight, the generation of fine particles becomes remarkable, and it is not suitable to use such a resin as a resin constituting the inner layer of the film in contact with the high-purity chemicals. For example, in the case of semiconductors, the purity of the required chemicals is very different depending on the storage capacity, and the higher the storage capacity, the higher the purity is required. Therefore, the amount of extraction extracted by boiling n-hexane needs to be adjusted accordingly. For example, in the case of a 256MD RAM high purity reagent, it is necessary to use a polyolefin resin managed at 0.1% by weight or less. In particular, in the case of a chemical applied directly to a semiconductor silicon wafer such as a photoresist, a high purity polyolefin resin having a smaller extraction amount extracted by boiling n-hexane is more preferable.

Moreover, the polyolefin resin used for the inner layer of the film in this invention is neutralizing agents, such as calcium stearate, zinc stearate, and hydrotalcite, dibutylhydroxytoluene, pentaerythyl- tetrakis [3- (3,5-di-) An antioxidant such as t-butyl-4-hydroxyphenyl) propionate may be appropriately added or subtracted as necessary, but the total amount of the additive to be added is preferably 0.2% by weight or less in the polyolefin resin. When the total amount of the additives exceeds 0.2% by weight, some of these additives may contain a metal component, and therefore, they may have a fatal effect on the leaching residual metal content of the high-purity chemicals, and the molecular weight is extremely low, so that the high-purity chemicals are easily Leaching and eventually acting as particulates is a major cause of poor cleanliness.

As a result, the high-purity polyolefin resin (B) used in the inner layer of the film of the present invention should be in direct contact with an ultra-clean chemical such as a photoresist and should have a property of suppressing contamination by the resin during long-term storage. Among the polyolefin-based resins (A) according to the present invention, a resin having a boiling amount of 1.0% by weight or less and a total amount of additives including a neutralizing agent and an antioxidant of 0.2% by weight or less are suitable for this requirement.

On the other hand, as a container for high-purity chemicals for semiconductors / LCDs, the maintenance of the inviting properties of the drug is naturally required, but some chemicals also require excellent barrier properties. For example, semiconductor / LCD chemicals such as photoresist are composed of solvent such as high-purity propylene glycol methyl ether acetate (PGMEA), photoresist resin and other additives. There is a problem in that physical properties are changed when coating a substrate such as a wafer. Therefore, good long-term storage requires good barrier properties to the solvent. In order to satisfy these requirements, the present invention considers a multilayer film structure in consideration of a resin having excellent gas barrier properties such as oxygen and carbon dioxide, and considers the film outer layer to be composed of such a resin. That is, the said high purity polyolefin resin (B) was used for the inner layer of the film which directly contacts a high purity chemical | medical agent, and the resin which was excellent in gas barrier property was used for the outer layer which does not contact with chemicals. Examples of the gas barrier resin (D) in the present invention include polyamide, polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyester, polyacrylonitrile, polyvinylidene chloride, and the like. The selection of the resin varies depending on the polyamide. In consideration of barrier properties and economical efficiency, polyamide is appropriate, and polyvinyl alcohol and ethylene-vinyl alcohol copolymer are suitable when better barrier properties are required.

However, the present inventors faced another problem. The high purity polyolefin resin (B) used for the inner layer of the multilayer film is a representative lipophilic material having no hydrophilicity, while the gas barrier resin (D) such as polyamide used for the outer layer is a hydrophilic material and does not have mutual bonding properties. In the case of a film obtained by film forming by coextrusion, a serious problem of separation between film layers is just that. As a result of intensive studies of these problems, 60-95% by weight of a polyolefin resin (A), an ethylene-unsaturated ester copolymer, a monomer copolymer having an ethylene-unsaturated ester-carbonyl group, and a monomer having a carbonyl group were grafted to a polyolefin. Using the composition of the adhesive polyolefin resin (C) 5-40% by weight of any one or more of the polymers as the intermediate layer of the film solved the problem without any film interlayer separation. This is because the polyolefin resin (A), which is the main component of the intermediate layer, differs only in purity from the high-purity polyolefin resin (A) of the inner layer, and thus the compatibility thereof is excellent, and the adhesive polyolefin resin is mainly a lipophilic polyolefin resin. It has a molecular structure containing a hydrophilic component such as an ester group as a skeleton, and maintains compatibility with the polyolefin resin (A) or (B) and is excellent in gas barrier resin (D) such as hydrophilic polyamide constituting the outer layer. It seems to be due to the compatibility.

Adhesive polyolefin resin (C) in this invention is ethylene, such as an ethylene-vinylacetate copolymer, ethylene-acrylic acid copolymer, ethylene-methacrylic acid copolymer, ethylene-alkyl acrylate copolymer, ethylene-alkyl methacrylate, etc. Unsaturated unsaturated copolymers; Ethylene which is a copolymer of a monomer having a carbonyl group such as maleic anhydride, maleic acid, fumaric acid, acrylic acid, methacrylic acid, vinyl acetate, acrylamide, methacrylamide, alkyl acrylate, alkyl methacrylate, the unsaturated ester and ethylene Monomer copolymer having an unsaturated ester-carbonyl group; A polymer in which a monomer having a carbonyl group is grafted to a polyolefin may be exemplified. Among these, polyethylene grafted with maleic anhydride (e.g., Mitsui Chemicals, Inc.), ethylene-ethylacrylate-maleic anhydride copolymer (e.g., Sumitomo Chemical, trade name Bondine) is the best.

The film of the three-layer short-lived structure according to the present invention may vary slightly in thickness depending on the capacity of the high-purity chemicals, preferably about 100 μm to 300 μm. The film inner layer thickness composition ratio is suitably 20% to 70% of the total thickness. If the inner layer thickness ratio is less than 20%, the amount of high-purity polyolefin-based resin decreases, which may lower the cleanliness, and if it exceeds 70%, the high-purity polyolefin-based resin may be expensive, resulting in poor economic efficiency. The film outer layer thickness composition ratio is suitably 10% to 40% of the total thickness. If the outer layer thickness ratio is less than 10%, it is difficult to secure desired barrier properties, and if it exceeds 40%, the mechanical strength of the constituent resin is high and there is a possibility that the flexibility is insufficient when forming the bag. The thickness of the film intermediate layer is determined by the difference depending on the ratio of the film inner layer and the outer layer, but if it is 10% or more of the total thickness, there is no problem in the adhesion between the inner layer and the outer layer.

In the high-purity medicine bag in can according to the present invention, the film forming the bag can be any one of an in-flation film molding method and a casting film molding method, but in the case of the inflation film molding method, the film is finally formed in a double layer form by a cylindrical bubble. The film's inner layer, which should be kept the most clean, depends on the cleanliness of the blowing air rather than being exposed to the outside air, so it is very easy to maintain the cleanliness, and the film outer layer is exposed to cooling water or outside air but does not require very high cleanliness. Therefore, the cost of maintaining cleanliness such as a clean room is low, but according to the casting film method, the film is wound in the form of one layer, and since both the inner and outer layers of the film are exposed to the outside air, the entire clean room must maintain high cleanliness, resulting in very high cleanliness maintenance costs. There is inflation film molding quality It is also easy to maintain and more economical.

The film forming by the inflation method and the bag in can manufacturing method using the same will be described in more detail as follows. High purity polyolefin resin (B) for film interlayer, wherein the extraction amount according to boiling n-hexane is 1.0 wt% or less in the polyolefin resin (A) for film inner layer, and the total amount of additives including neutralizing agent and antioxidant is 0.2 wt% or less Adhesive polyolefin at least one selected from 60-95% by weight of polyolefin-based resin (A), an ethylene-unsaturated ester copolymer, a monomer copolymer having an ethylene-unsaturated ester-carbonyl group, or a polymer having a monomer having a carbonyl group grafted to polyolefin At least one selected from the group consisting of 5-40% by weight of resin (C), polyamide for film outer layer, polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyester, polyacrylonitrile and polyvinylidene chloride Metering the resin (D); Three layers of cross-sectional structure (inner layer), in which resins for each layer were put into an inpressor film extrusion machine installed in a clean room of 10,000 or less in a class (number of particles of 0.5 µm or more per ft3) through a hopper, and folded twice using clean air of class 10 or less (inner layer) : Intermediate layer: outer layer thickness constitution ratio = 20-50%: 10-70%: 10-40%) The step of winding the film of a roll state, and obtaining it; In a clean room of less than 1,000 classes, the film is unpacked and put into bag manufacturing machine, cut into appropriate size, heat-sealed around except the part where the inlet and stopper are inserted, and the double layered film is opened to make a hole in one of the holes. Inserting a plug-mounted inlet into the cap and then heat-sealing and attaching the cap to form a bag (see FIG. 1) in which the cap and the cap are mounted by heat-sealing around the remaining film; A high-purity medicine bag in can is manufactured by inserting the obtained plastic bag into the inside of the metal can (see FIG. 2).

Through the following examples will be described in more detail the present invention. The following examples are merely examples and are not limited to the examples. Boiling n-hexane extraction amount of the polyolefin resin used in the following Examples and Comparative Examples was measured as follows. In addition, the barrier properties (gas permeability, solvent loss rate) and cleanliness (particle count, residual metal content) of the prepared film and the plastic bag using the same were measured as follows.

(Boiling n-hexane extraction amount)

The boiling n-hexane extraction amount was obtained by taking 2.5 g of a sample according to ASTM D5227, putting it in hexane, and extracting at 50 ° C. for 2 hours.

(Gas permeability)

Gas (oxygen) permeability (cc / m 2 · day · atm) at 23 ° C. and 65% RH for film samples was measured according to ASTM D3985 as a measure of barrier properties to high purity chemicals.

(Drug loss rate)

Using the obtained film having a thickness of 160 μm, a bag (for 20 L) having a width of 55 cm and a length of 65 cm with an injection hole and a stopper was prepared. As a measure of barrier properties for high-purity chemicals, the percentage of chemical loss was determined by filling high-density propylene glycol methyl ether acetate (PGMEA), the main solvent of photoresist, into the bag and storing it for 23 months at 6 ° C. Evaluated as.

(Particle count)

As a measure of cleanliness for high-purity chemicals, the particulate water (pieces / ml) was stored in the obtained bag for 30 days with ultrapure water (resistance of 18 kΩ or more), and then the fine particles having a particle size of 0.2 µm or more present in 1 ml of stored water were collected. It was calculated using the Counter (Model KS-40A manufactured by RION).

(Residual metal content)

Residual metal content (ppb) was measured as a measure of cleanliness for high-purity chemicals by storing photoresist (DPR-i5500, manufactured by Dongjin Semichem Co., Ltd.) in the bag and storing the residual metal content contained in the chemicals stored in ICP-MS (VG Elemental, Inc.). , model PlasmaQuadII).

Examples 1-7

Ziegler catalyst-based linear low density polyethylene-based resin A having a density of 0.870 g / cm3 and a boiling index of 1.0 g / 10mim at a concentration of 0.2% by weight of neutralizing agent, 0.3% by weight of antioxidant, and 1.5% by weight of boiling n-hexane extraction, 230 ° C 1), linear low density polyethylene resin B (1), a metalocene catalyst-based ethylene-octene-based copolymer having a density of 0.916 g / cm3 containing a neutralizing agent of 0.04% by weight and an antioxidant of 0.002% by weight, and a melt index of 1.0g / 10mim at 190 ° C. , A linear low density polyethylene resin B (2), which is a metalocene catalyst-based ethylene-octene-based copolymer having a density of 0.910 g / cm3 and an antioxidant, containing a content of 0.005% by weight and no antioxidant; Linear low density polyethylene resin (C (1), Mitsui Chemicals, ADMER, Grade NF308) grafted with maleic anhydride with a melt index of 1.7 g / 10mim at 190 ° C., polyamide-6 resin (D (1)) having a relative viscosity of 3.55, Kolon Grade KN-190-1) and ethylene (47 mol%)-vinyl alcohol (53 mol%) A copolymer (D (2), Kuraray trade name EVAL, Grade EP-G) was prepared.

The prepared resin for each layer was introduced into an infrasion multilayer film extruder installed in a clean room of 8,000 classes (number of particles of 0.5 µm or more per ft3) through a hopper according to the appropriate composition shown in Table 1, and double-layered using clean air of class 3 It was obtained by winding the film of the three-layered cross-sectional structure folded in the roll state. The obtained film is introduced into a bag making machine while unwinding the film in a clean room of class 700. The film is cut into 55 cm and 65 cm lengths, heat-sealed except for the portion where the injection hole and the plug are to be inserted, and then spread the double layered film. A hole was inserted into the hole, and a stopper-mounted inlet was inserted into the hole, and then heat-sealed and attached, followed by heat-sealing around the remaining film to obtain a bag (for 20 L) with the final inlet and stopper. The barrier properties and cleanliness of the obtained films and bags were measured.

Compositions of the film layers obtained according to Examples 1 to 7, Properties of the film and the bag division Material and thickness composition by layer Blockability cleanliness Inner layer Mezzanine Outer layer Gas permeability (cc / ㎡day and atm Drug loss rate (%) Particle number (piece / ml) Residual Metal Content (ppb) Example 1 Resin B (1) (thickness 30%) Resin A (1) 85% by weight Resin C (1) 15% by weight (thickness 50%) Resin D (1) (thickness 20%) 120 0.03 4 2 Example 2 Resin B (1) (thickness 30%) Resin A (1) 85% by weight Resin C (1) 15% by weight (thickness 45%) Resin D (1) (thickness 25%) 115 0.02 5 2 Example 3 Resin B (1) (thickness 30%) Resin A (1) 85% by weight Resin C (1) 15% by weight (thickness 40%) Resin D (1) (thickness 30%) 100 0.02 4 2 Example 4 Resin B (1) (thickness 30%) Resin A (1) 70% by weight Resin C (1) 30% by weight (thickness 40%) Resin D (1) (thickness 30%) 100 0.02 4 2 Example 5 Resin B (2) (thickness 25%) Resin A (1) 85% by weight Resin C (1) 15% by weight (thickness 50%) Resin D (1) (thickness 25%) 110 0.02 5 3 Example 6 Resin B (2) (thickness 35%) Resin A (1) 80% by weight Resin C (1) 20% by weight (thickness 55%) Resin D (2) (thickness 10%) 5.0 0.001 2 One Example 7 Resin B (2) (thickness 45%) Resin A (1) 75% by weight Resin C (1) 25% by weight (thickness 40%) Resin D (2) (thickness 15%) 3.5 0.001 One <1

Compared with Examples 1 to 5 and Examples 6 and 7, it can be seen that Examples 6 and 7 have excellent barrier properties, and as the thickness of the inner layer made of high-purity polyolefin resin becomes thicker, the cleanliness becomes more excellent. It can be seen. Usually, the drug loss rate is preferably 0.05% or less, but it can be seen that the overall blockability is excellent and the cleanliness is also excellent.

Comparative Example 1

Except for using the resin A (1) instead of the resin B (1) in the inner layer was carried out in the same manner as in Example 1, the barrier properties and cleanliness of the obtained film and bag were evaluated and shown in Table 1. Compared with Example 1, the barrier properties are equally excellent but the cleanliness is very poor.

Comparative Example 2

The inner layer had the same resin and thickness configuration as in Example 1, but resin A (1) was used for both the intermediate layer and the outer layer. The barrier properties and cleanliness of the obtained films and bags were evaluated and shown in Table 1. The cleanliness is excellent but the barrier properties are very poor. .

Compositions of film layers obtained according to Comparative Examples 1 and 2, physical properties of the film and the bag division Material and thickness composition by layer Blockability cleanliness Inner layer Mezzanine Outer layer Gas permeability (cc / ㎡day and atm Drug loss rate (%) Particle number (piece / ml) Residual Metal Content (ppb) Comparative Example 1 Resin A (1) (thickness 30%) Resin A (1) 85% by weight Resin C (1) 15% by weight (thickness 50%) Resin D (1) (thickness 20%) 120 0.04 47 9 Comparative Example 2 Resin B (1) (thickness 30%) Resin A (1) (thickness 45%) Resin A (1) (thickness 25%) 3,100 1.25 5 2

The present invention is an inner layer composed of a high purity polyolefin resin (B) having an extraction amount of 1.0% by weight or less according to boiling n-hexane in the polyolefin resin (A), and a total amount of an additive including a neutralizing agent and an antioxidant of 0.2% by weight or less; Adhesive polyolefin at least one selected from 60-95% by weight of polyolefin-based resin (A), an ethylene-unsaturated ester copolymer, a monomer copolymer having an ethylene-unsaturated ester-carbonyl group, or a polymer having a monomer having a carbonyl group grafted to polyolefin An intermediate layer composed of 5-40% by weight of a composition (C); Features a three-layered cross-sectional film of an outer layer composed of a gas barrier resin (D) at least one selected from polyamide, polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyester, polyacrylonitrile, and polyvinylidene chloride. It is expected to be used in the semiconductor and LCD industry as a bag-in can that is heat-sealed around the film and manufactured with a plastic bag having an injection hole and a stopper attached to the metal can. Is a breakthrough in reducing environmental burden by reusing and discarding the millions that are inserted.

Claims (7)

In a bag-in can system in which a disposable plastic bag having a shape of heat-sealing around a film and having an inlet and a stopper attached thereto is inserted into a reusable metal can, the film is a boiling n-hexane in polyolefin resin (A). The inner layer is composed of a high-purity polyolefin resin (B) having an extraction amount of 0.005 to 1.0% by weight, and the total amount of additives including a neutralizing agent and an antioxidant is 0.2% by weight or less; Any one selected from the group consisting of 60-95% by weight of polyolefin-based resin (A), an ethylene-unsaturated ester copolymer, a monomer copolymer having an ethylene-unsaturated ester-carbonyl group, and a monomer having a carbonyl group are polymers grafted to polyolefins An intermediate layer composed of the composition of the above adhesive polyolefin resin (C) 5-40% by weight; 3-layer cross section of an outer layer composed of any one or more gas barrier resins (D) selected from the group consisting of polyamide, polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyester, polyacrylonitrile and polyvinylidene chloride It is bag of can for high purity medicine characterized by that it is film of structure The method of claim 1, wherein the polyolefin resin (A) is a low density polyethylene, linear low density polyethylene, medium density polyethylene, high density polyethylene and propylene, ethylene, 1-butene, 1-pentene, 1-hexene, 4-methyl-1- High purity pharmaceutical bags characterized in that at least one selected from copolymers made from alphaolefins including pentene, 1-heptene, 1-octene, 1-nonene, 1-decene, 1-undecene, 1-dodecene In cans The method of claim 1, wherein the adhesive polyolefin resin (C) is any one or more of unsaturated ester-ethylene copolymers, monomer copolymers with ethylene-unsaturated polyester-carbonyl groups, polymers with monomers having carbonyl groups grafted to polyolefins. High purity medicine bag in cans, characterized in that selected According to claim 1, wherein the film is an inner layer formed of a thickness of 20% to 70% of the total thickness; An outer layer having a thickness of 10% to 40% of the total thickness; High purity pharmaceutical bag-in can, characterized in that the film is a three-layer cross-sectional film of the intermediate layer is formed from 10% to 70% of the total thickness The bag-in can of claim 1, wherein the gas barrier resin (D) constituting the outer layer is polyamide. High purity polyolefin resin (B) and film intermediate layer having an extraction amount of 0.005 to 1.0% by weight based on boiling n-hexane in the polyolefin resin (A) for film inner layer, and a total amount of additives including a neutralizing agent and an antioxidant of 0.2% by weight or less. Polyolefin-based resin (A) 60-95% by weight, an ethylene-unsaturated ester copolymer, a monomer copolymer having an ethylene-unsaturated ester-carbonyl group and a monomer having a carbonyl group are selected from the group consisting of polymers grafted to polyolefins Group consisting of 5-40% by weight of at least one adhesive polyolefinic resin (C) composition, polyamide for film outer layer, polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyester, polyacrylonitrile and polyvinylidene chloride Measuring any one gas barrier resin (D) selected from among; Three layers of cross-sectional structure (inner layer), in which resin for each layer is introduced into an infrasion film extrusion machine installed in a clean room with a class of less than 0.5 µm / ft3 through a hopper and using clean air of class 10 or less (inner layer) : Intermediate layer: outer layer thickness constitution ratio = 20-50%: 10-70%: 10-40%) The step of winding the film of a roll state, and obtaining it; In a clean room of less than 1,000 classes, the film is unpacked and put into bag manufacturing machine, cut into appropriate size, heat-sealed around except the part where the inlet and stopper are inserted, and the double layered film is opened to make a hole in one of the holes. Inserting a stopper-mounted inlet into the inlet and then heat-sealing and attaching the inlet, followed by heat-sealing around the remaining film to form a bag with the inlet and stopper; A method for producing a bag in can, characterized in that a high purity medicine bag in can is manufactured by inserting the obtained plastic bag into a metal can. delete