KR100407172B1 - Mask/ panel welding apparatus and method in flat panel production - Google Patents

Abstract

The present invention relates to a panel and mask integrating apparatus in a flat CRT manufacturing process, the configuration of the mask stretching, panel positioning and welding integration apparatus and method in a flat CRT manufacturing process, the mask is stretched and the panel positioning and welding integrated. A working area in which a work takes place, a mask cart and a mask cart conveying part for supplying a mask to a working area, a panel cart receiving the panel to chuck the panel, and positioning the panel ( Panel Cart), a mask / panel camera unit for positioning a mask and a panel, a panel input / discharge unit for putting a panel into a panel cart and dispensing a mask / panel assay on an existing worked panel cart, and a panel. Logistics conveyor unit for supplying / discharging and rail pass unit for calculating the path of the rail, and each of the above devices An apparatus and method constituted by a controller unit for controlling are characterized.

Description

Mask / panel welding apparatus and method for flat panel production

The present invention relates to a mask / panel welding device for manufacturing a flat CRT and a method thereof, and in detail, to improve the reliability of equipment through the construction of an in-line device in the conventional Index method, and to free installation calibration. A device and method for improving Tact Time and removing CLE (center landing error) and mask inflection upon mask stretching.

1 is a schematic diagram of a conventional system and an overall configuration of a mask / panel positioning and welding integrated apparatus as a technique for the prior art;

FIG. 3 is a diagram illustrating a mechanism and a control unit in a conventional system configuration, wherein the mechanism includes a working area in which main work is performed, a panel cart in which a panel is supplied and positioned, and a panel. Panel Camera for determining, Mask Cart, which plays a role of supplying a mask to a working area by supplying a mask, and Mask which alternately supplies a mask and a panel to a working area. Consists of panel transfer unit,

FIG. 5 is a diagram illustrating a device calibration method according to the related art, and illustrates an apparatus and method for adjusting two different axes by integrating a panel coordinate system and a mask coordinate system existing in two different axes, and in the groove of the mask carter 211. Eight mask cameras 202 located on the top of the mounted mast panel 250 are measuring mask coordinates, and four panel cameras 218 located on the top of the mast panel 250 mounted on the panel carter 224 on the other axis. Shows the measurement of panel coordinates.

FIG. 7 is a block diagram of a mask stretching unit according to the prior art, and illustrates a system for measuring and masking a camera using a four-port multiplex using one port among three ports of three vision boards. there is,

In the mask stretching flow, measure M2 and M7 after measuring M1 and M6, measure M4 and M9 after measuring M3 and M8, and repeat the measurement and repetition to move the motor for the first time.

In the panel positioning flow, P2 is measured after P1 measurement, P4 is measured after P3 measurement, and then the motor and the motor movement are repeated five times.

FIG. 9 shows a system having a large inertia and a lower positioning accuracy when the panel is aligned in a stacked X, Y, &thetas; stage configuration with the conventional XY stage 230b stacked on the panel cart 224 and its configuration. Shown is a panel 220 stacked above and showing θ stage 230a stacked thereon. In addition, a three-point ball / groove 222 is installed at both ends of the panel carter.

18 and 19 are landing inflection diagrams of a conventional mask clamper aligner and a mask / panel assay, illustrating the principle of landing inflection caused by the mask aligner and the clamper reference pin not coming in a straight line.

The mask aligner 208a, which is advanced back and forth to the aligner back and forth cylinder 208b, and the clamper reference pin 214b and the clamper forward reference pin 214a which refer to the position of the mask aligner 208a are shown. And the mask effective surface 208c landing deflection 208d when the mask clamper 214 aligned by this aligner bites the mask and panel assay.

The panel and mask integration and welding apparatus of the conventional flat brown tube manufacturing process is shown in the system configuration diagram of FIG. 1, which includes a stretchable part for stretching the mask and a panel cart for loading the panel and aligning the panel based on the mask. (Cart), a panel camera unit for aligning the panel with respect to the panel alignment holes for aligning the panel, a panel camera and a rail pass calculator for planning the rail pass for welding the mask on the rail, and the mask A mask cart unit for supplying the stretched portion to the stretching unit, supplying lighting to the mask camera, a mask camera unit serving to stretch the mask to a target point based on the recognition hole of the mask, and a mask based on a predetermined rail pass. Laser welding part integrated on rail, panel cart and mask cart alternately It consists of the mask and / panel conveyance that is supplied to the stretching unit, a controller unit (not shown) for controlling the respective devices.

Each of the general system configuration is the same as the conventional system configuration shown in FIG. 3, and the operation flow of the device configuration of the prior art is as shown in FIG. 5. (Reference: Republic of Korea Patent Application 1996-29597)

The configuration of the above-described conventional system configuration will be described in more detail with reference to FIGS. 1 and 3 as follows.

The working area includes a mask camera vertical drive cylinder 201, nine mask cameras 202 and nine front lights 216, and twelve stepping motors 206 for stretching on the stretching die 207. There are a total of 36 clamps including 10 mask long sides and 8 short sides, and there is a power tree 215 for connecting the clamp and the motor. The upper part is composed of four sets of laser welding X and Y tables 204 and four laser guns 213.

The mask cart portion includes nine mask plates 217 and nine LED light sources 209 loaded with the mask 208, three mask cart vertical drive cylinders 212, three mask cart ball grooves 210 for positioning the mask cart, and a mask. It consists of the cart 211.

Reference numeral 203 denotes a panel push height gauge, and 205 denotes a leg.

The panel camera unit is composed of five panel cameras 218, eight spring-type LVDT digital proofs 219, and a panel camera vertical drive cylinder.

The panel cart part includes a panel positioning X, Y, θ table 223, a panel cart and a panel cart ball groove 222 for positioning a panel camera, and includes a panel cart vertical drive cylinder 225 and a panel cart 224. It is.

Reference numeral 221 denotes a panel light source.

The mask / panel transfer part includes an index drive servomotor 227 and a swing arm / pulley 228 for transfer / lift of the mask and panel cart part, and a dustproof pad 226 for vibration absorption of the device. It is.

The controller unit includes one main CPU with built-in graphics of VME BUS, three vision boards for image processing of 14 CCD cameras, four motion boards for controlling the motion of 23-axis motors, and peripherals and actuators. It consists of three DIO boards and one AD board for measuring panel rail trajectories using LVDTs.

In the conventional operation as described above, when the mask is loaded in the mask cart 211 of FIG. 1, the transfer plate 229 is moved at the same time as the mask camera 202 descends. When the transfer plate is located in the "W" working area, the mask cart 211 and the mask plate 217 are raised to raise the mask 208 to the position of the mask clamp 214.

When the mask is in the clamping position, the clamp advances, clamps the mask after clamping, then lowers the mask plate 217 so that it can be stretched after clamping the mask. After the measurement, the stretching is performed by comparing the mask coordinates, and when the recognition hole is within ± 1 μm, the stretching is completed and the mask camera 202 is raised and the mask cart 211 is lowered.

After the mask is loaded, if the transfer plate is located in the working area, the panel 220 is loaded on the panel cart 224. When the panel is loaded, the X, Y, θ table 223 is driven to move to the initial position of the panel. 218) descends. When the panel camera is lowered, four target holes of the panel are measured, the X, Y, θ components are obtained by comparing the mask coordinates, and then the X, Y, θ table 223 is driven. At this time, if the X, Y shift is within ± 1㎛ and θ is within 0.001 degrees, the panel adjustment is completed and the LVDT digital probe 219 is lowered to calculate the laser welding trajectory.

After the LVDT measurement, the LVDT is raised and the panel camera is raised, and the trajectory is calculated. Therefore, the laser gun 213 moves forward and descends to prepare for welding. At this time, the transfer plate is positioned in the mask loading position, and then the panel cart 224 is raised for the panel welding, and the mask surface and the rail surface of the panel are closely contacted with each other. In order to prevent tearing of the mask when the clamp is released, the mask clamp 214 is slightly advanced, the clamp is released, and then the clamp is retracted.

When the panel cart is lowered and the laser gun is raised and retracted by the home position after welding, the operation is completed. At this time, the panel after welding is welded with the mask to be in the working area.

Referring to the disadvantages of the prior art having the configuration and operation as described above are as follows.

In the apparatus and configuration of mask stretching / panel adjustment and welding integration during flat brown tube manufacturing process,

1. In the index type, the complex mask is integrated in the integration of two different axes, and the calibration for integrating the coordinates of the panel is complicated. Is a system that has groove repeatability of mask cart and panel cart,

In addition, there is a problem in that the panel axis aligned by the impact of the panel when the panel cart is positioned on the lower portion of the stretching die after the panel cart is aligned, and the repeatability of the device is improved.

2. When the mask is pulled to the target point, there is a problem of landing inflection due to the fact that the inside of the effective surface is stretched in a parallelogram rather than a rectangular shape in accordance with the degree of freedom of the clamper holding the mask.

3. There is a problem of Center Landing Error on Tube when integrating mask / panel according to the geometrical position of Mask Camera and Panel Camera.

4. In the conventional camera and vision board configuration, it is difficult to cope with the line tact time when mass production is required, and there is a disadvantage that the dispersion between products increases as the number of facilities increases.

5. Disadvantages of accurate X, Y, θ positioning due to the lamination method, and difficulty in maintaining quality due to axial shift and degradation of rigidity There is this.

6. There is a disadvantage that landing inflection occurs due to inflection of mask in assembly state of mask panel.

An object of the present invention for solving the above problems is a method and apparatus for stretching the mask by applying a tension to the mask of the mask stretching / adjustment / panel welding apparatus during the planar CRT manufacturing process is the same as the prior art, but in the prior art Improved repeatability of the device of the index type mask stretching and panel integration device, and improved landing by twisting the effective surface slot during mask stretching to the target point by the clamper rotation holding the mask during mask stretching, Inline type configured to minimize product dispersion by eliminating center landing error caused by misalignment of center of screen of mask slot and panel, and shortening tack time and coordinate axis alignment by improving camera vision and structure rigidity Mask stretching and panel integration There in the ball.

The object of the present invention as described above in the mask stretching / adjustment / panel welding apparatus to implement the apparatus and method for mass production to compensate for the problems of product distribution between equipment, improvement of reliability, shortening the tack time in the mask stretching / adjustment / panel welding device ,

Mask and panel supply should supply / discharge working area by panel / mask input conveyor,

Four vision boards using VME BUS are used to stretch the mask and to minimize the Tact Time of the device by measuring the mask position and panel hole position in real time.

By minimizing the number of devices, minimizing the dispersion between devices, and by placing the panel / mask axis in the same position, eliminating the axis alignment of the mask / panel camera, the degree of accuracy is improved.

This is achieved by providing a device that minimizes the center landing error caused by changing the panel camera and mask camera positions.

1 is an overall configuration diagram of a conventional mask / panel positioning and welding integrated device,

2 is an overall configuration diagram of a mask / panel positioning and welding integrated device of the present invention;

3 is a system configuration diagram showing a conventional mechanism and control unit configuration.

4 is a system configuration diagram showing the configuration of the mechanism and the control unit of the present invention;

5 is a conventional device calibration method and apparatus diagram,

6 is a device calibration method and apparatus diagram of the present invention;

7 is a block diagram of a conventional mask stretching portion,

8 is a block diagram of the mask stretching portion of the present invention;

9 is a conventional laminated x, y, θ stage configuration diagram,

10 is a configuration diagram of the hibernating X, Y, θ stage of the present invention,

11 is a hierarchical X, Y, θ stage structure diagram of the present invention;

12 is a mask analysis result diagram,

13 is a stretch die configuration diagram,

14 is a thin film mask configuration diagram,

15 is a screen panel configuration diagram,

16 is a configuration diagram of a mask / panel assay;

17 is a principle diagram of the center of the mask panel error (Center Landing Error),

18 is a conventional mask clamper aligner,

19 is a landing inflection diagram of a conventional mask / panel assay;

20 is a mask clamper aligner of the present invention,

21 is a landing inflection diagram of a mask / panel assay of the present invention.

<Description of Symbols for Main Parts of Drawings>

(1): mask camera up and down drive cylinder (2): mask camera

(3): ball groove (4): X, Y table

5: leg 6: stretching motor

(7): Stretch Die 8: Mask

(9): mask illumination (10): stretching die ball groove

(11): mask loading pin 12: mask loading plate

(13): laser gun 14: mask clamp

15: Power Tree 16: Front Lights

17: mask cart 18: panel camera

19: linear motion guide

(20): Motor / Timing Pulley for Mask Cart Transfer

(21): Mask / Panel Assay Spend Lola Conveyor

(22): mask panel assay (23): displacement measuring instrument

24: screen panel 24a: rail

(25): Panel Feed Roller Conveyor (26): Panel Aligner

(27): Ball screw (28): Motor for panel loading

(29): Panel Chucking Device (30): Based on Panel Z Direction

(31): Lighting for panel cameras (32): Panel push up

(33): Z table (34): X, Y, θ table

34a: stage top plate 34b: stage bottom plate

35: Ball Screw 36: LM Guide

37: panel cart lift cylinder 38: panel cart

(38a): ball / groove (3 points) (39): timing belt / pulley

(40): Panel cart lift motor 41: Panel cart spot unit

(42) mainframe

(43): mask cart up / down cylinder

61: mast mask panel 80: mask aligner

(80b): improved landing inflection (80a): mask effective surface

90: Aligner forward and backward cylinder 140a: Clamper forward reference pin

(140b): Clamper reference pin

(140c): Clamper Aligner Side Reference Pin

(3401, 3409): Micro Stamping Motor

(3402, 3410): Ball screw (3403, 3408): Crossed roller block

(3405): cross roller swing arm

(3407, 3407 '): Backlash Removal Spring

The construction of the present invention, which is an embodiment of the present invention, which performs the object of accomplishing the above object and removes the drawbacks of the related art, and its operation will be described in detail with reference to the accompanying drawings.

2 is an overall configuration diagram of a mask / panel positioning and welding integrated apparatus for minimizing product distribution by considering mass production and securing reliability of an apparatus according to the present invention system configuration, and FIG. 4 is a schematic configuration diagram of a system of the present invention. ,

The configuration of the present invention comprises a working area portion in which the mask is stretched on the stretching die and the panel positioning and welding integration work takes place;

A mask cart and a mask cart transfer part for supplying a mask to the working area,

A panel cart unit for receiving the panel and chucking the panel and positioning the panel;

A mask / panel camera unit for positioning the mask and the panel,

A panel input / exit unit for putting a panel into a panel cart and spending a mask / panel assay on an existing panel cart;

A rail pass section for calculating a logistics conveyor section for supplying and distributing panels and a rail;

Consists of a controller unit for controlling the devices, transfer the panel and mask using a conveyor, raise and lower the mask cart and panel cart on the same line, regardless of the degree of groove positioning of the panel cart and mask cart It is characterized in that it is configured to minimize the spread between facilities.

The working area has a stretching die 7 composed of a total of 36 mask clampers 14 for clamping the mask 8 including 10 long sides and 8 short sides, and a force acting on each mask clamper. Stretching die ball grooves for alternating positioning of the three stretching motors 6 mask carter and panel carter on each side for applying tension to the power tree 15, mask clamper and mask connected to the power tree for distribution of 10).

When the mask cart and the mask cart transfer unit supply the mask to the mask loading pin 11 at the position where the mask cart is present, the mask cart and the mask cart transfer unit use the motor / timing pulley 20 and the LM guide 19 for transferring the mask cart. And transfer the mask carter into the stretching die ball groove 10 to position the mask loading plate 12 in the stretching die ball groove 10 using the mask carter up / down cylinder 43.

The panel cart portion rises in the Z direction for mask welding on the rail mounted on the panel 24, and overcomes defocus of the rail height Qr when calibrating between the mask surface and the panel surface with the mast mask panel. And a panel Carter 38 mounted with a Z stage 33 and a coplanar X, Y, &amp;thetas; stage 34 for matching the mask and the panel axis.

The mask / panel camera unit is composed of eight mask cameras 2 and four panel cameras 18 fixed to a mask plate on the same plane.

The panel input / discharge unit for feeding the panel into the panel cart and discharging the mask / panel assay on the existing panel cart has a panel input roller cone 25 and a mask / panel dispensing roller conveyor 21 and a ball screw 27 ) And a motor 28 for panel loading.

The rail pass part for calculating the path of the logistics conveyor part and the rail is fixed to the same position by the panel aligning device 26, the screen panel 24 coming in the panel input roller cone bear 25 and the displacement measuring instrument (LVDT) 23) to calculate the rail pass.

It is composed of a controller unit for controlling the respective devices.

By applying the air type (LVDT) to the LVDT measuring the panel rail in the above, it is configured to improve the degree of feedback control to the desired position of the panel alignment (Align) degree.

Figure 6 is a device calibration method diagram of the present invention, in matching the panel coordinate system and the mask coordinate system existing on one axis line, increase the ease and agreement between the two coordinate systems, a simple structure without affecting the positioning of the mask cart or panel cart The axial alignment device of FIG. 4 shows a mast mask panel 61 conveyed by a mask cart 17 including four panel cameras 18 positioned on the same axis after the panel cart 38 is located in the working area. And eight mask cameras (2) to measure the target position, the conventional calibration method is a mask coordinate system and a panel coordinate system on the two different axes as shown in Figure 5 to match the camera axis Although the mask panel was used for the construction, the device configuration is a tool arrangement including the repeatability of grooves of the mask / panel cart. The panel cart ball groove positioning and panel cart must be masked by defining the P1 ... P4 axes of the mast mask in the panel cameras on the other two axes panelgat and then the mask camera parts M1 ... M8 to define the axes on the stretching die. The positioning of the cart ball groove has a disadvantage in that the product dispersion is large due to a drop in the degree of impact.

In order to personalize this disadvantage, in the present invention, the eight mask cameras 2 and the four panel cameras 18 are fixed to the mask plate on the same axis and set on the same plane, so that the axial fixation and panel cart repeatability and the impact of the There was little distortion, and improved reliability. That is, in the present invention, the degree is improved by not being affected by the degree of mask and panel cart.

FIG. 8 is a block diagram of the mask stretching unit of the present invention, and shows a system for measuring and masking a camera using four vision boards, two ports, eight inputs, and four outputs multiplexed. In order to shorten the vision view measurement and the stretching time in the conventional system, in the mask stretcher block diagram of the present invention, each of the four vision boards, two ports, eight inputs, and four outputs are shown. By using the multiplex (Mux) to reduce the time to obtain the vision data of the mask and panel by camera measurement and mask stretching, it is configured to minimize the dispersion between devices by reducing the number of devices in mass production.

That is, in the mask stretching flow, M1, M2, M3, and M4 are measured at the same time, M6, M7, M8, and M9 are measured at the same time, and the measurement and repetition of moving the motor for the first time are repeated 10 times.

In the panel positioning flow, P1, P2, P3, and 4 are measured simultaneously, and the measurement and motor movement are repeated five times to move the motor for the first time.

The time after completion of one cycle time with this flow shows that the mask is shortened by 0.78 seconds from 1.68 seconds to 0.9 seconds, and the panel is shortened by 0.8 seconds from 1.6 seconds to 0.8 seconds. This was obtained.

FIG. 10 is a diagram illustrating a hierarchical X, Y and θ stage configuration of the present invention, showing a panel cart 38 composed of a hierarchical X, Y and θ stage 34 and a Z stage 33 stacked thereon. This is good and the positioning is excellent. In addition, the panel 24 is positioned above the Z stage 33, and three point balls / grooves 38a are provided on both ends of the panel cart.

In the prior art FIG. 9 stacked X, Y, θ stage configuration, the panel cart configuration is a panel positioning configuration in which the θ stage 230a1 is loaded on the X, Y stage 230b and the panel 220 is placed thereon. It is difficult to secure the independence of the phosphorus X, Y, θ, and because of the large inertia, it is difficult to implement a stable system.

The present invention overcomes this problem by raising the mask in the Z direction for welding under the panel 24 and at the same time overcoming the defocus of the rail height Qr during calibration with the mask panel between the mask surface and the panel surface. By adopting the Z stage 33 table and the hierarchical X, Y, θ stage 34 to coincide with the panel axis, the inertia is minimized, and the rigid guide of the cross roller structure is secured. This system implements a system that minimizes backlash.

Fig. 11 shows the present invention hibernating X, Y,? Θ stage structure diagram, top view and side view, which is composed of three ball screws 3402 and 3410 and micro stepping motors 3401 and 3409 and a cross roller. The rigidity adopting the guideway is good and shows a stage structure that can implement low backlash.

The detailed configuration is composed of a stage lower plate 34b and a stage upper plate 34a, and three ball screws 3402 and 3410 and micro stepping motors 3401 and 3409 located between both stages, and a top and bottom plate connected to each other. Rush removal springs 3407 and 3407 ', gross roller swingarm 3405 and crossblocks 3403 and 3408 surrounding them.

12 shows the results of mask analysis, wherein F1... … With the force of F9, the power tree 15 shown in the stretching die construction diagram of FIG. 13 is constructed using the hinge and the pin structure in accordance with the force distribution.

FIG. 13 is a schematic diagram of a stretching die, comprising 36 clampers 14 clamping a mask 8, a power tree 15 connected to the clamper, and 12 stretching motors 6 connected to a power tree in a tree structure. do.

Illumination 9 is located under the mask 8, and eight mask cameras 2 and four panel cameras 18 are located above.

14 is a thin film mask configuration diagram of positions M1, M2, M3, M4, M6, M7, M8, and M9 with eight mask stretching holes and four panel hole camera recognition holes of P1, P2, P3, and P4 with a diameter of 1 mm. It is shown.

The center portion also shows a mask effective surface 80a.

Fig. 15 is a screen panel configuration diagram showing four panel positioning holes P1, P2, P3, and P4 formed on the panel.

FIG. 16 is a mask / panel assay drawing of the mask 8 after stretching the mask 8 to position the screen panel 24 so that the mask 8 is placed on the rail 24a attached to the screen panel 24. The figure shows an integrated production.

FIG. 17 illustrates a principle of generating a centering error of a mask panel, in which a landing error occurs according to the positions of Panel 1 and Panel 2, which is illustrated in FIG. … The position of the panel positioning hole of P4 is an error which appears by screen enlargement / reduction eventually by enlargement or reduction exposure. This is an error that occurs during exposure by artwork in the mask / panel center landing error occurrence principle of FIG. 17. At this time

θfhc = ArcTan (Fd / L), ΔCLE = ΔQA × Tan (θfhc)

θfhc = ArcTan (Fd / L)

θfhv = ArcTan (√ (Fd ² + Fl ² ) / L)

θfhh = ArcTan (Fd / Fl)

ΔX = ΔQA × Tan (θfhv) × Sin (θfhh)

ΔY = ΔQA × Tan (θfhv) × Cos (θfhh)

L: DY Ref. From deflection center to Panel 1. Street

θfhc: deflection angle

ΔCLE: Center Landing Error

ΔQA: Rail height change

Fd: Distance from panel center to panel recognition hole: ΔCLE ∝ Fd generated by ΔQA according to this distance

ΔCLE ∝ Fd by the above formula,

Fd is a screen panel configuration of FIG. 15. As the panel positioning hole is closer to the center of the panel, the center landing error is minimized.

In the conventional system, the mask hole is changed in the panel hole camera recognition holes P1 and M2, P2 and M4, P3 and M6, P4 and M8 as shown in the thin film mask structure of FIG. It has been a factor of deterioration, but the present invention has overcome this.

FIG. 20 is a mask clamper aligner of the present invention, and FIG. 21 is a landing strain diagram of the mask / panel assay of the present invention, showing a portion of the landing strain problem that is solved by bringing the mask aligner and the clamper reference pin in a straight line.

In FIG. 18, which shows a conventional mask clamper aligner, each side has two mask aligners 208a and three triangular clamper reference pins 214b attached to one clamper to form a mask clamper, and the number of clampers is shown in FIG. 13. As shown in the die diagram, it consists of 36 clampers, 10 mask long sides and 8 short sides, with two pairs of clampers on the outside, which are tied to the mask aligner 208a of the mask clamper aligner, and the center of the mask short side. In the case of 4 type and long side, 6 type is tied to one mask aligner, and the mask aligner should be configured so that the clamper always bites at right angles to the mask, and the mask aligner 208a is in contact with the two clamper forward reference pins 214b. Once determined, the clamper posture of the mask is dropped and the landing deflection 208d occurs as in the mask / panel assay landing deflection. ,

In the mask clamper aligner of the present invention, the clamper reference pin aligner side reference pin 140c is placed in the mask clamper aligner of the present invention so that the mask aligner 80 always bites the mask clamper 14 and the mask clamper 14 at right angles to the mask. In this case, the tube quality can be improved by ensuring the landing stretch deflection 80b of the effective surface 80a of the effective surface 80a, as shown in FIG. 21.

The remaining clamper forward reference pin 140a, the clamper reference pin 140b, and the aligner back and forth cylinder 90 are in the same position as before.

The operation of the present invention with the above configuration will be described.

2, the mask 8 is supplied to the mask loading pin 11 on the mask loading plate 12 in the system configuration diagram of the present invention, and then the mask cart 17 is mounted on the linear motion guide 19. When the mask cart 17 is supplied to the stretching die 7 by the transfer motor / timing pulley 20 belt, the mask cart up / down cylinder 43 is raised to mask the stretching die ball groove 10. The cart 17 is positioned so that the mask 8 is loaded into the mask clamp 14 position.

The loaded mask 8 advances the mask clamper 14 by the stretching motor 6 and the power tree 15 to bite the mask, and the mask stretching holes M1, M2, M3, and M4 of FIG. Stretch target positions m1, m2, m3, m4 and m6, m7, m8 on the mask mast panel 61 of the apparatus calibration method diagram of FIG. 6 using M6, M7, M8, M9 using eight mask cameras 2 , m9).

At this time, the elongation of the mask is designed so that the elongation due to tension overcomes the thermal elongation due to the internal temperature of the tube so that no doming on the tube occurs.

In FIG. 2, the screen panel 24, which has entered the panel feeding roller cone bear 25, is firmly fixed in the same position by the panel alignment device 26, and the rail screw is calculated by the displacement measuring device LVDT 23. (27), the panel feeding portion composed of the panel loading motor 28 is supplied with the screen panel 24 to the panel cart portion by the bracket of the panel chucking device 29,

When the supplied panel is firmly aligned in the Z direction by the panel Z direction reference 30, the ball screw 35 and the timing belt / pulley 39 and the motor for raising the panel cart that are fixed to the panel cart spot unit 41 are fixed. (40) takes the L guide (36) attached to the mainframe (42) to the position where the mask (8) is stretched, and ascends the panel cart lift cylinder (37) to the stretching die ball groove (10). After positioning

Then, the panel with the X, Y, θ table 34, the four panel cameras 18 with the four panel cameras illumination 31 using the panel hole camera recognition hole of FIG. The panel positioning hole in the screen panel configuration diagram is recognized, and the mask and the screen panel are accurately positioned by moving to the mast mask panel 61 positions P1, P2, P3, and P4 in the apparatus calibration method diagram of FIG.

In the positioned panel, when the table is raised in the Z direction, when the panel is raised to the welding position using the Z table 33 having a positional displacement in the X direction of 2 μm or less, the rail attached to the panel pushes up the mask.

At this time, the pushing amount is 0.1 ~ 0.4mm range.

As for the mask and panel which are ready for welding, the camera plate located in the ball groove 3 is raised by the mask camera up-and-down drive cylinder 1, and the displacement measuring instruments LVDT 23 are carried out by the X and Y tables 4. The mask and the panel are integrated by welding using the laser gun 13 by the rail pass measured in the mask pass through the mask / panel assay spending roller conveyor.

The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.

The present invention as described above in the mask stretch / panel adjustment and welding integration device and configuration of the planar CRT manufacturing process,

1. Conventional technology In the index type, integrating two different axes, complex mask, calibration for integrating the coordinates of the panel are simplified, so that the ease of setting and the repeatability of the device and the mask / panel integration are improved. Has the effect of improving the degree,

2.When the mask is pulled to the target point, the landing inflection on the tube due to the inflection of the mask as the inside of the effective surface caused by not restraining the degree of freedom of the clamper holding the mask is stretched in parallelogram instead of a rectangular shape. Is generated. The landing inflection has been improved by replacing the array device that allows the clamper to be perpendicular to the mask to improve the landing inflection.

3.The tube quality is improved by minimizing the center landing error on the tube by changing the geometric position of the conventional mask camera and panel camera and integrating the panel with the mask.

4. By innovating the structure of conventional camera and vision board, Tact Time maximized the yield improvement from 70 seconds to 48 seconds while securing quality beyond the prior art.

5. The improvement of quality and device is secured by developing and applying hibernating high rigidity X, Y, θ table that it is difficult to integrate X, Y, θ by the stacking method. Improved stiffness and reliability,

6. The tube quality is improved by allowing the degree of freedom to ensure the mask and panel parallelism and to be stably seated in the panel Z direction to improve the degree of panel and mask integration.

Claims (4)

Working area means for stretching the mask in the stretching die and for panel positioning and welding integration, means for supplying the mask to the working area, means for feeding and chucking and positioning the panel, for positioning the mask and panel A flat CRT manufacturing apparatus comprising a camera means, a panel supply / discharge means, and a controller portion for controlling the devices, When the mask is supplied to the mask loading pin 11 at the position of the mask carter, the mask carter 17 is stretched using the motor / timing pulley 20 and the LM guide 19 for the transfer of the mask carter. 10) a mask cart and mask cart conveying portion configured to be transported inward so as to position the mask loading plate 12 in the stretching die ball groove 10 using the mask carter up / down cylinder 43; Ascending in the Z direction for mask welding on the rail mounted on the panel 24, overcoming the defocus of the rail height Qr when calibrating between the mask face and the panel face with the mast mask panel, the mask and panel A panel cart portion composed of a panel carter 38 mounted with a Z stage 33 and a hibernating X, Y, θ stage 34 for aligning axes, A mask / panel camera unit comprising a plurality of mask cameras 2 and a plurality of panel cameras 18 on the same axis fixed to a mask plate on the same plane, The panel feeding roller cone 25 and the mask / panel spending roller conveyor 21 and the ball screw 27 and the panel loading motor to feed the panel into the panel cart and spend the mask / panel assay on the existing panel cart. A panel input / output unit composed of 28), Logistics conveyor and rail configured by the panel input device 24, which is carried on the panel input roller cone bear 25 is fixed in the same posture by the panel alignment device 26 and calculate the rail path by the displacement measuring device (LVDT, 23) A mask / panel welding device for manufacturing a flat CRT tube, characterized in that each device is constituted by a rail pass portion for calculating a pass of the device. The method of claim 1, The mask clamper aligner of the stretching die has a clamper reference pin aligner side reference pin 140c so that the mask aligner 80 is configured to always bite the mask clamper 14 with the gap between the mask clampers and the mask clamper 14 at right angles to the mask. A mask / panel welding device for producing flat CRT tubes. The method of claim 1, The hierarchical X, Y, &amp;thetas; stages installed in the panel cart unit are composed of a stage lower plate 34b and a stage upper plate 34a, and three ball screws 3402 and 3410 located between both stages. Micro stepping motors 3401 and 3409, backlash removal springs 3407 and 3407 'connecting the upper and lower plates, a gross roller swing arm 3405 and cross blocks 3403 and 3408 surrounding the same Mask / panel welding device for flat CRT manufacturing. In the method of mask stretching, panel positioning and welding integration in the planar CRT manufacturing process, After supplying the mask 8 to the mask loading pin 11 on the mask loading plate 12, the mask cart 17 is mounted on a linear motion guide 19 to move the motor / timing pulley 20 for the mask cart. When the mask cart 17 is supplied to the stretching die 7 by the belt, the mask cart 17 is positioned on the stretching die ball groove 10 when the mask cart up / down cylinder 43 is raised. The mask 8 loading into the mask clamp 14 position, The loaded mask (8) advances the mask clamper (14) by the stretching motor (6) and the power tree (15) to bite the mask, and the mask stretching holes (M1, M2, M3, M4 and M6, M7, M8, M9). Calibrating and stretching the stretch target positions m1, m2, m3, m4 and m6, m7, m8, and m9 on the mask mast panel 61 using eight mask cameras 2; The screen panel 24, which has entered the panel feeding roller cone bear 25, is firmly fixed in the same position by the panel alignment device 26, and the rail pass is calculated by the displacement measuring device LVDT 23, and then the ball screw 27 The panel input unit comprising the panel loading motor 28 is supplied to the panel cart by the screen panel 24 by the bracket of the panel chucking device 29, When the supplied panel is firmly aligned in the Z direction by the panel Z direction reference 30, the ball screw 35 and the timing belt / pulley 39 and the motor for raising the panel cart that are fixed to the panel cart spot unit 41 are fixed. Ascending the L guide 36 attached to the main frame 42 to the position where the mask 8 is stretched by the 40, and ascending the panel cart lift cylinder 37 to the stretching die ball groove 10 Positioning, Then, the panel positioning hole is recognized through the panel hole camera recognition hole using the panel with the X, Y, θ table 34 and the panel panel camera 18 with the four panel camera lights 18. A calibration step of accurately positioning the mask and the screen panel by moving them to positions P1, P2, P3, P4 on the mast mask panel 61; When the panel is positioned in the Z direction, when the table is raised in the Z direction, when the panel is raised to the welding position by using the Z table 33 having a position shift in the X direction of 2 μm or less, the rail attached to the panel pushes up the mask, As for the mask and panel which are ready for welding, the camera plate located in the ball groove 3 is raised by the mask camera up-and-down drive cylinder 1, and the displacement measuring instruments LVDT 23 are carried out by the X and Y tables 4. The mask and panel are integrated by welding using the laser gun 13 with the rail pass measured at the step of discharging through the mask / panel assay spending roller conveyor. Each calibration measures mask stretching holes M1, M2, M3, and M4 simultaneously, then mask stretching holes M6, M7, M8, and M9 at the same time, and then repeats the measurement and repetition of moving the motor for 10 times. A method for mask / panel welding for flat tube manufacturing, characterized in that the flow comprises the steps of measuring the flow and P1, P2, P3, 4 simultaneously and then moving the motor for the first time and panel positioning flow which repeats the motor movement five times.