KR100403302B1 - A method for preparing Pb-based peizoelectric ceramic powder containing the carbonate - Google Patents

A method for preparing Pb-based peizoelectric ceramic powder containing the carbonate Download PDF

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KR100403302B1
KR100403302B1 KR10-2000-0077388A KR20000077388A KR100403302B1 KR 100403302 B1 KR100403302 B1 KR 100403302B1 KR 20000077388 A KR20000077388 A KR 20000077388A KR 100403302 B1 KR100403302 B1 KR 100403302B1
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powder
carbonate
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pbo
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KR20020048102A (en
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권상구
허강헌
서동환
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주식회사 에스세라
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    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates

Abstract

카보네이트를 포함하는 Pb계 압전세라믹 파우더 제조방법 이 제공된다.Provided is a method for preparing Pb-based piezoceramic powder including carbonate.

본 발명은, PbO, TiO2및 탄산염으로 이루어진 원료물질 파우더를 마련한후, 이를 혼합·건조하는 단계; 상기 건조된 파우더를 600~700℃의 온도에서 1차 하소시키는 단계; 상기 1차 하소된 파우더를 800~1200℃의 온도에서 2차 하소시키는 단계; 및 상기 2차 하소된 파우더를 분쇄·건조하는 단계;를 포함하는 PT계 압전세라믹 파우더 제조방법과,The present invention, after preparing a raw material powder consisting of PbO, TiO 2 and carbonate, mixing and drying it; Firstly calcining the dried powder at a temperature of 600 to 700 ° C .; Second calcination of the first calcined powder at a temperature of 800 to 1200 ° C .; And pulverizing and drying the secondary calcined powder.

PbO, TiO2, ZrO2및 탄산염으로 이루어진 원료물질 파우더를 마련한후, 이를 혼합·건조하는 단계; 상기 건조된 파우더를 750~850℃의 온도에서 1차 하소시키는 단계; 상기 1차 하소된 파우더를 850~1200℃의 온도에서 2차 하소시키는 단계; 및 상기 2차 하소된 파우더를 분쇄·건조하는 단계;를 포함하는 PZT계 압전세라믹 파우더 제조방법에 관한 것이다.Preparing a raw material powder consisting of PbO, TiO 2 , ZrO 2 and carbonate, and then mixing and drying the powder; Primary calcination of the dried powder at a temperature of 750-850 ° C .; Secondly calcining the first calcined powder at a temperature of 850˜1200 ° C .; It relates to a PZT-based piezoceramic powder manufacturing method comprising a; and pulverizing and drying the secondary calcined powder.

Description

카보네이트를 포함하는 Pb계 압전세라믹 파우더 제조방법{A method for preparing Pb-based peizoelectric ceramic powder containing the carbonate}A method for preparing Pb-based peizoelectric ceramic powder containing the carbonate}

본 발명은 카보네이트를 포함하는 Pb계 압전세라믹 파우더 제조방법에 관한 것으로서, 보다 상세히는, 2단 하소공정을 통하여 PbO의 휘발을 최소화하면서 상합성을 최대화할 수 있는 Pb계 압전세라믹 파우더 제조방법에 관한 것이다.The present invention relates to a Pb-based piezoceramic powder manufacturing method comprising a carbonate, and more particularly, to a Pb-based piezoceramic powder manufacturing method that can maximize the compatibility while minimizing the volatilization of PbO through a two-stage calcination process. will be.

일반적으로 세라믹스는 열역학적(thermodynamic) 변수와 반응속도적 (kinetic) 변수에 의해 그 물성이 결정되고, 이렇게 결정된 물성은 제품의 품질한계를 결정짓는다.In general, ceramics have their properties determined by thermodynamic and kinetic variables, which determine the quality limits of the product.

통상 세라믹 파우더는 칭량, 혼합, 건조 및 하소공정을 거쳐 제조되는데, 여기에서 하소공정은 상합성과 파우더의 특성을 좌우하는 중요한 공정이다. 특히, Pb계를 함유하는 압전세라믹스의 경우는 하소시 상합성과 함께 PbO의 휘발이 동시에일어나므로, PbO의 휘발을 최소화하면서 상합성을 최대화하는 것이 하소공정에서 가장 중요하며, 또한 이를 어떻게 제어하느냐에 따라 특성도 달라지게 된다. 즉, 하소공정에 의한 PbO의 휘발과 상합성을 제어하는 기술이 원하는 물성의 압전세라믹을 제조에 그 기술적 근간이 되는 것이다.Ceramic powder is usually manufactured through a weighing, mixing, drying, and calcination process, wherein the calcination process is an important process that determines the compatibility and properties of the powder. Particularly, in the case of piezoelectric ceramics containing Pb, volatilization of PbO simultaneously occurs with morphology at the time of calcination. The characteristics will also vary. In other words, the technique of controlling the volatilization and compatibility of PbO by the calcination process is the technical basis for producing piezoelectric ceramics of desired physical properties.

Pb계 압전세라믹은 PbTiO3와 PbZrO3를 기본조성으로 하며 그 제조시 특성을 제어하는 성분으로 B-site와 A-site에 다른 원소들이 치환된다. 즉, A-site의 경우 La, Sm, Nd, Ba, Sr, Ca등의 원소가 Pb대신에 치환되는데, 이러한 Ba, Sr, Ca는 BaCO3, SrCO3, CaCO3등의 탄산염(carbonate) 형태로 첨가되어 진다. 탄산염의 형태가 아닌 형태로 첨가하려면 BaO, CaO, SrO의 형태로 첨가되어지거나 탄산염을 첨가하기 전에 먼저 분해하여 사용해야 하나 이러한 원소들은 대기에서 불안정하고 정량적으로 다루기가 곤란하며, 탄산염을 분해하여 사용할 경우 공정상 다단계로 복잡해지고 까다로와지는 단점이 있다.Pb-based piezoceramic is composed of PbTiO 3 and PbZrO 3 as a basic composition, and controls the characteristics in the manufacturing process, and other elements are substituted for B-site and A-site. That is, in the case of A-site, elements such as La, Sm, Nd, Ba, Sr, and Ca are substituted for Pb, and Ba, Sr, and Ca are carbonate forms such as BaCO 3 , SrCO 3 , and CaCO 3 . Is added. To be added in the form of carbonate, not in the form of BaO, CaO, SrO or before adding carbonate, it must be decomposed first, but these elements are unstable and difficult to handle quantitatively in the air. There are drawbacks to the complexity and complexity of the process.

탄산염의 형태로 첨가되어지면 공정상 정량적인 제어가 쉬워지지만 하소온도는 탄산염이 분해되는 온도에 의해 결정된다. 일반적으로 탄산염이 분해되는 온도는 Pb계의 압전세라믹의 상합성온도에 비해 높으며, 이렇게 되면 하소시 상합성과 동시에 PbO의 휘발은 증가하게 된다. PbO의 휘발이 증가하게 되면 조성에서의 화학양론이 틀어지게 되고 압전특성에 좋지 않은 영향을 준다. 따라서, 탄산염을 함유하는 Pb계의 압전 세라믹의 제조시 하소조건의 설정이 매우 중요한 것이다.When added in the form of carbonate, quantitative control becomes easier in the process, but the calcination temperature is determined by the temperature at which the carbonate is decomposed. In general, the temperature at which the carbonate is decomposed is higher than that of the Pb-based piezoceramic, and the volatilization of PbO increases at the same time as the calcination. Increasing volatilization of PbO deviates the stoichiometry of the composition and adversely affects the piezoelectric properties. Therefore, setting of calcination conditions is very important in the production of Pb-based piezoelectric ceramics containing carbonates.

Pb계 압전 세라믹을 제조하는 종래의 공정이 도 1에 나타나 있다. 즉, 도 1과 같이, PbO, TiO2, ZrO2등과 같은 원료파우더를 몰비에 맞게 칭량한후 이를 혼합한다. 그리고 혼합된 원료파우더는 다시 건조처리되고, 연이어, 승온속도 1~5℃/min 로 850~1200℃사이의 온도에서 하소를 진행하여 PbTiO3와 PbZrO3를 기본으로 하는 Pb계 압전세라믹 파우더를 제조하였다.A conventional process for producing Pb-based piezoelectric ceramics is shown in FIG. That is, as shown in Figure 1, after weighing the raw material powder, such as PbO, TiO 2 , ZrO 2 to the molar ratio and mix it. Then, the mixed raw material powder is dried again, and subsequently, calcination is performed at a temperature rising rate of 1 to 5 ° C./min at a temperature of 850 to 1200 ° C. to prepare Pb-based piezoceramic powder based on PbTiO 3 and PbZrO 3 . It was.

상기 종래의 공정에 있어서는 원료물질에 탄산염을 포함한 경우에는 상합성과 함께 CO2의 분해를 동시에 고려해야 한다.In the above conventional process, when carbonate is included in the raw material, decomposition of CO 2 should be considered simultaneously with the compatibility.

왜냐하면, 탄산염이 포함된 원료분말을 그것이 포함되지 않은 경우와 동일한 하소온도에서 하소를 진행할 경우 CO2가 완전히 분해되지 않고 그대로 남게되므로 페롭스카이트상 합성이 어려워지고 소결시의 밀도저하와 전기적인 특성이 저하하는 문제가 있기 때문이다.Because calcination of raw powder containing carbonate at the same calcination temperature without carbonate does not completely decompose CO 2 , so it is difficult to synthesize perovskite phase and decrease density and electrical characteristics during sintering. This is because there is a problem of deterioration.

한편 상기 점을 고려하여 원료물질에 탄산염을 포함한 경우에는 그렇지 않은 경우에 비해 그 하소온도를 상승시켜 탄산염에서의 CO2가스 완전분해를 꾀할 수 있으나, 이때에는 그 하소온도가 너무 높아 PbO의 휘발이 심화되고 조성의 화학양론적인 불균일을 초래하여 특성저하를 유발할 수도 있다는 문제가 있다.In view of the above, when carbonate is included in the raw material, the calcination temperature can be increased to achieve complete decomposition of the CO 2 gas in the carbonate, but the calcination temperature is too high. There is a problem that it may intensify and result in stoichiometric non-uniformity of the composition, leading to deterioration of properties.

따라서, 본 발명은 상기 종래기술의 문제점을 해결하기 위한 것으로, 종전의 최종하소온도까지 승온하여 일정시간 유지하여 반응시키는 1단 하소공정과 달리,탄산염의 분해 및 PbO 휘발분 최소화등을 고려하여 2단으로 하소처리하는 유전특성및 압전특성이 우수한 Pb계 압전세라믹 파우더 제조방법을 제공함을 그 목적으로 한다.Accordingly, the present invention is to solve the problems of the prior art, unlike the one-stage calcination step of reacting by maintaining a constant time by raising the temperature to the previous final calcination temperature, two stages in consideration of decomposition of carbonate and minimizing PbO volatile content It is an object of the present invention to provide a Pb-based piezoceramic powder manufacturing method excellent in dielectric properties and piezoelectric properties to be calcined.

도 1은 종래의 Pb계 압전세라믹의 제조공정도1 is a manufacturing process diagram of a conventional Pb-based piezoceramic

도 2는 본 발명의 Pb계 압전세라믹의 제조공정도2 is a manufacturing process diagram of the Pb-based piezoceramic of the present invention

상기의 목적을 달성하기 위한 본 발명은,The present invention for achieving the above object,

PbO, TiO2및 탄산염으로 이루어진 원료물질 파우더를 마련한후, 이를 혼합·건조하는 단계; 상기 건조된 파우더를 600~700℃의 온도에서 1차 하소시키는 단계; 상기 1차 하소된 파우더를 800~1200℃의 온도에서 2차 하소시키는 단계; 및 상기 2차 하소된 파우더를 분쇄·건조하는 단계;를 포함하는 PT계 압전세라믹 파우더 제조방법에 관한 것이다.Preparing a raw material powder consisting of PbO, TiO 2 and carbonate, and then mixing and drying the powder; Firstly calcining the dried powder at a temperature of 600 to 700 ° C .; Second calcination of the first calcined powder at a temperature of 800 to 1200 ° C .; And pulverizing and drying the second calcined powder.

또한, 본 발명은, PbO, TiO2, ZrO2및 탄산염으로 이루어진 원료물질 파우더를 마련한후, 이를 혼합·건조하는 단계; 상기 건조된 파우더를 750~850℃의 온도에서 1차 하소시키는 단계; 상기 1차 하소된 파우더를 850~1200℃의 온도에서 2차 하소시키는 단계; 및 상기 2차 하소된 파우더를 분쇄·건조하는 단계;를 포함하는 PZT계 압전세라믹 파우더 제조방법에 관한 것이다.In addition, the present invention, after preparing a raw material powder consisting of PbO, TiO 2 , ZrO 2 and carbonate, mixing and drying them; Primary calcination of the dried powder at a temperature of 750-850 ° C .; Secondly calcining the first calcined powder at a temperature of 850˜1200 ° C .; It relates to a PZT-based piezoceramic powder manufacturing method comprising a; and pulverizing and drying the secondary calcined powder.

상술한 바와 같이, 우수한 유전특성 및 압전특성을 갖는 Pb계 압전 세라믹 파우더를 제조하기 위해서는 탄산염의 분해, 페롭스카이트상의 합성 및 PbO의 휘발을 고려하여 최적의 물성을 나타낼 수 있는 하소조건을 설정함이 매우 중요하다. 그러나, 종래에는 최종하소온도까지 곧바로 승온하여 일정시간 유지하여 상합성한 결과, PbO의 휘발이 심화되고 조성의 화학양론적인 불균일을 초래하여 특성저하를 유발하였다.As described above, in order to manufacture Pb-based piezoelectric ceramic powders having excellent dielectric and piezoelectric properties, calcination conditions that can exhibit optimum physical properties in consideration of decomposition of carbonate, synthesis of perovskite phase, and volatilization of PbO are set. This is very important. However, conventionally, as soon as the temperature is immediately raised to the final calcination temperature and maintained for a certain time, the synthesis results, and the volatilization of PbO is intensified, resulting in stoichiometric nonuniformity of the composition, leading to deterioration of characteristics.

따라서 본 발명은 원료물질분말을 그 최종하소온도에 도달하기 전에 PbO 휘발을 최소화할 수 있는 온도범위에서 1차 하소하여 먼저 페롭스카이트상을 합성하고, 이후 이를 최종하소온도로 유지하여 2단 하소처리함으로써 탄산염의 분해와 합성이 완료되지 않은 잔여 물질을 효과적으로 상합성 할 수 있는 2단 하소공정을 채택함을 그 특징으로 한다.Therefore, in the present invention, the raw material powder is first calcined in a temperature range capable of minimizing PbO volatilization before reaching the final calcining temperature, and then the perovskite phase is first synthesized, and then maintained at the final calcining temperature to thereby carry out two-stage calcining treatment. It is characterized by adopting a two-stage calcination process that can effectively synthesize the residual material is not completed decomposition and synthesis of carbonate.

이하, 본 발명을 설명한다.Hereinafter, the present invention will be described.

도 2는 본 발명에 따른 Pb계 압전 세라믹 파우더의 제조공정도이다.2 is a manufacturing process diagram of the Pb-based piezoelectric ceramic powder according to the present invention.

도 2에 나타난 바와 같이, 본 발명에서는 먼저 원료물질을 그 몰비에 맞게 칭량하여 혼합하여 원료물질분말을 마련하여 볼밀(ball mill)에서 24시간동안 균일하게 혼합한후 약 120℃의 통상의 조건으로 건조처리한다.As shown in FIG. 2, in the present invention, the raw materials are first weighed and mixed according to their molar ratios to prepare raw material powders, and then uniformly mixed in a ball mill for 24 hours, and then subjected to normal conditions of about 120 ° C. FIG. Dry.

일반적으로 Pb계 압전세라믹스는 크게 PZT[Pb(Zr1-xTix)O3]계와 PT[PbTiO3]계로 나누어지며, 이에 따라 그 출발원료물질이 달라진다. 즉, PT계 복합페롭스카이트 압전세라믹에서는 PbO, TiO2및 탄산염을 그 기본적인 출발원료물질으로 하고, PZT계의 경우 PbO, TiO2, ZrO2및 탄산염을 기본적인 출발원료물질로 한다.In general, Pb-based piezoceramics are largely divided into PZT [Pb (Zr 1-x Ti x ) O 3 ] and PT [PbTiO 3 ] based, and thus, the starting materials are different. That is, in the PT composite perovskite piezoceramic, PbO, TiO 2 and carbonate are the basic starting materials, and in the case of PZT, PbO, TiO 2 , ZrO 2 and carbonate are the basic starting materials.

상술한 원료물질중 탄산염은 압전특성을 향상시키기 위하여 첨가되는 것으로서 Pb계 복합페롭스카이트 구조의 압전세라믹에 있어서 A-site, 즉 Pb를 치환하는 원소를 가지고 있다. 바람직하게는 상기 탄산염은 LaCO3, SmCO3, NdCO3, BaCO3, SrCO3및 CaCO3중 1종 또는 2종이상을 포함하는 것임이 바람직하다.Carbonate in the above-described raw materials is added to improve piezoelectric properties and has an element for substituting A-site, that is, Pb, in a piezoelectric ceramic having a Pb-based composite perovskite structure. Preferably, the carbonate includes one or two or more of LaCO 3 , SmCO 3 , NdCO 3 , BaCO 3 , SrCO 3 and CaCO 3 .

또한, 본 발명에서는 기계적품질계수가 우수한 압전세라믹을 제조하기 위하여, 상기 출발물질에 Mg, Nb, Ni, Zn, W, Ta, Co, Fe, Sb, Sn, Cr, Su, In, Yb, Sc, Cd 및 Lu중 1종 또는 2종이상을 산화물의 형태로 추가함이 바람직하다.In addition, in the present invention, in order to produce a piezoelectric ceramic having excellent mechanical quality coefficients, Mg, Nb, Ni, Zn, W, Ta, Co, Fe, Sb, Sn, Cr, Su, In, Yb, Sc It is preferable to add one or two or more of Cd and Lu in the form of an oxide.

상기와 같이 건조처리된 원료물질분말은 상술한 바와 같이 2단 하소처리된다. 상세하게 설명하면, 본 발명에서는 먼저 건조처리된 원료물질분말을 1~5℃/min로 승온시켜 1차 하소처리함으로써 PbTiO3, PbZrO3및 Pb(Zr,Ti)O3와 같은 페롭스카이트상을 형성한다.The raw material powder dried as described above is calcined in two stages as described above. In detail, in the present invention, the raw material powder dried first is heated to 1 to 5 ° C./min and subjected to first calcination to produce a perovskite phase such as PbTiO 3 , PbZrO 3 and Pb (Zr, Ti) O 3 . Form.

이때 1차하소온도는 Pb계 압전세라믹스의 종류에 따라 달리지는데, PT[PbTiO3]계의 경우 600~700℃, PZT[Pb(Zr1-xTix)O3]계의 경우 750~850℃로 제한함이 바람직하다. 왜냐하면 이러한 온도범위에서 PbO 휘발이 억제되면서 페롭스카이트상 합성이 최대화될 수 있기 때문이다. 보다 바람직하게는, PT[PbTiO3]계의 경우 600~650℃, PZT[Pb(Zr1-xTix)O3]계의 경우 800~850℃로 제한하는 것이다.At this time, the primary calcination temperature varies depending on the type of Pb-based piezoceramic.For PT [PbTiO 3 ] system, 600 ~ 700 ℃, and PZT [Pb (Zr 1-x Ti x ) O 3 ] system, 750 ~ 850 Preferably limited to ° C. This is because the synthesis of perovskite phase can be maximized while PbO volatilization is suppressed in this temperature range. More preferably, the PT [PbTiO 3 ] system is limited to 600 to 650 ° C and the PZT [Pb (Zr 1-x Ti x ) O 3 ] system to 800 to 850 ° C.

또한, 상기 온도에서 1~3시간동안 하소처리함이 바람직하다.In addition, it is preferable to calcination for 1 to 3 hours at the temperature.

다음으로, 상기 1차 하소처리후 다시 승온시켜 2차 하소처리를 실시함으로써 탄산염의 분해와 완료되지 않은 잔여물질의 상합성을 완성할 수 있다. 이때 2차하소온도도 Pb계 압전세라믹스의 종류에 따라 달리지는데, PT[PbTiO3]계의 경우 800~1200℃, PZT[Pb(Zr1-xTix)O3]계의 경우 850~1200℃로 제한함이 바람직하다Next, after the first calcination treatment, the temperature is increased again to perform the second calcination treatment, thereby completing the decomposition of the carbonate and the compatibility of the incomplete residual material. At this time, the secondary calcination temperature also varies depending on the type of Pb-based piezoceramic. For PT [PbTiO 3 ] system, 800 ~ 1200 ℃, and PZT [Pb (Zr 1-x Ti x ) O 3 ] system, 850 ~ 1200 It is preferable to limit to ℃

바람직하게는, 상기 온도에서 1~3시간동안 하소처리하는 것이다.Preferably, it is calcined for 1 to 3 hours at the temperature.

그리고 본 발명에서는 상기 하소공정으로 상합성이 완료된 세라믹 파우더를 동일한 입도로 분쇄한 후 통상의 조건(약 120℃)에서 건조함으로써 압전특성이 우수한 Pb계 압전세라믹 파우더를 제조할 수 있는 것이다. 여기에서 세라믹 파우더는 습식법으로 분쇄함이 바람직하다.In the present invention, Pb-based piezoceramic powder having excellent piezoelectric properties can be manufactured by pulverizing the ceramic powder having a homogeneity completed by the calcination process to the same particle size and then drying it under normal conditions (about 120 ° C.). The ceramic powder is preferably pulverized by the wet method.

본 발명에서는 상기와 같이 제조된 세라믹파우더를 적절한 크기와 형상으로 성형한후 1000~1300℃의 통상의 온도에서 소결하고, 이어 연마, 전극형성 및 분극처리와 같은 후소결처리(Post-sintering process) 공정을 거침으로서 유전 특성 및 압전특성이 우수한 Pb계 압전세라믹을 제조할 수 있는 것이다.In the present invention, the ceramic powder prepared as described above is molded into an appropriate size and shape, and then sintered at a normal temperature of 1000 to 1300 ° C, followed by post-sintering processes such as polishing, electrode formation, and polarization treatment. Through the process, Pb-based piezoceramic excellent in dielectric and piezoelectric properties can be produced.

이하, 실시예를 통하여 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail through examples.

(실시예 1)(Example 1)

Pb0.90Ba0.10(Mn1/3Nb2/3)0.06(Sn1/3Nb2/3)0.09Ti0.436Zr0.414O3계와 Pb0.90Sr0.10(Mn1/3Nb2/3)0.06(Sn1/3Nb2/3)0.09Ti0.436Zr0.414O3계의 성분을 갖는 복합페롭스카이트상 합성을 위하여, PbO, TiO2, ZrO2, 탄산염 및 산화물로 이루어진 출발원료물질을 각각 마련하였다. 그리고 이들을 몰비에 맞게 칭량한후 24시간 볼밀링하여 혼합하여 120℃에서 각각 건조하였다.Pb 0.90 Ba 0.10 (Mn 1/3 Nb 2/3 ) 0.06 (Sn 1/3 Nb 2/3 ) 0.09 Ti 0.436 Zr 0.414 O 3 System and Pb 0.90 Sr 0.10 (Mn 1/3 Nb 2/3 ) 0.06 ( Sn 1/3 Nb 2/3) 0.09 Ti 0.436 Zr 0.414 O to a compound perop Sky-like composite having a composition of 3 family, was prepared from a raw material consisting of PbO, TiO 2, ZrO 2, carbonates and oxides, respectively. Then, these were weighed to a molar ratio, and then mixed by ball milling for 24 hours, and dried at 120 ° C., respectively.

먼저, 상기 건조된 각 파우더에 대하여 종래법과 같이 승온속도 1~5℃/min의 속도로 승온시켜 곧바로 최종하소온도인 1000℃에서 2시간동안 유지하여 각각 복합페롭스카이트상을 합성하였다.First, each dried powder was heated up at a rate of temperature increase rate of 1 to 5 ° C./min as in the conventional method and immediately maintained at 1000 ° C., which is the final calcination temperature, to synthesize composite perovskite phases, respectively.

다음으로, 본 발명법과 같이 상기 건조된 각 파우더를 승온시켜 850℃에서 2시간동안 1차하소시킨 연후, 다시 승온시켜 1000℃에서 2차하소시켜 PZT계 복합페롭스카이트상을 각각 합성하였다.Next, after heating each dried powder as described in the present invention, the first calcination at 850 ℃ for 2 hours, and then again heated to secondary calcination at 1000 ℃ to synthesize a PZT-based composite perovskite phase.

한편, 이러한 상합성후 상기 2공정에서 PbO의 휘발량을 측정한 결과, 종래법은 0.6wt%임에 반해 본 발명법은 0.25wt%로 휘발량이 감소됨을 알 수 있었다.On the other hand, as a result of measuring the volatilization amount of PbO in the second step after the synthesis, it can be seen that the conventional method is 0.6wt%, while the volatilization amount is 0.25wt%.

상기 2개의 방법으로 합성된 파우더를 동일한 입도로 분쇄한후 직경 20mm, 두께 1mm로 성형하였으며, 성형된 시편을 1~20℃/min 속도로 승온시켜 1050℃에서 소결하였다. 그리고 소결된 시편들은 두께 0.5mm로 연마한후 Ag전극을 바르고 열처리하였다.The powder synthesized by the two methods was pulverized to the same particle size and then molded into a diameter of 20 mm and a thickness of 1 mm, and the molded specimen was heated at a rate of 1 to 20 ° C./min and sintered at 1050 ° C. The sintered specimens were polished to a thickness of 0.5mm and then heat-treated with Ag electrodes.

이러한 전극처리가 완료된 시편을 25~200℃, 2~10kV/mm, 5~40분의 조건에 맞게 분극처리하였으며, 분극완료된 시편들을 180℃에서 1시간 열처리한후 유전손실, 유전율, 면적진동모드의 전기기계결합계수(kp)와 기계적품질계수(Qm)을 측정하였다. 하기 표 1은 Pb0.90Ba0.10(Mn1/3Nb2/3)0.06(Sn1/3Nb2/3)0.09Ti0.436Zr0.414O3계 시편들에 대한 측정결과치이며, 표 2는 Pb0.90Sr0.10(Mn1/3Nb2/3)0.06(Sn1/3Nb2/3)0.09Ti0.436Zr0.414O3계 시편의 측정결과치를 나타낸다.The electrode treatment was completed in the polarization treatment according to the conditions of 25 ~ 200 ℃, 2 ~ 10kV / mm, 5 ~ 40 minutes, and the dielectric loss, dielectric constant, area vibration mode after heat treatment of the polarized specimens at 180 ℃ 1 hour The electromechanical coefficient (kp) and the mechanical quality factor (Qm) of were measured. Table 1 shows the measurement results of Pb 0.90 Ba 0.10 (Mn 1/3 Nb 2/3 ) 0.06 (Sn 1/3 Nb 2/3 ) 0.09 Ti 0.436 Zr 0.414 O 3 -based specimens, and Table 2 shows Pb 0.90 Sr 0.10 (Mn 1/3 Nb 2/3 ) 0.06 (Sn 1/3 Nb 2/3 ) 0.09 Ti 0.436 Zr 0.414 O 3 Based on test results.

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) kpkp QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 17121712 0.480.48 0.530.53 16811681 종래법 (1단 하소)Conventional method (stage 1) 16301630 0.520.52 0.50.5 16001600

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) kpkp QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 17601760 0.520.52 0.500.50 16331633 종래법 (1단 하소)Conventional method (stage 1) 16751675 0.60.6 0.470.47 15211521

상기 표 1 및 표 2에 나타난 바와 같이, 종래법과 2 단하소공정을 채택한 본 발명법의 유전특성 및 압전특성을 비교하면, 본 발명법이 유전율이 증가하였으나 유전손실은 오히러 감소하고, 면적진동모드의 전기기계결합계수 및 기계적품질계수도 모두 증가하였다. 이는 상술한 바와 같이, 2단하소법을 채택한 본 발명에서 PbO의 휘발량을 저감할 수 있어, 그 휘발에 따른 조성의 화학양론적인 불균일을 방지하여 특성이 저하되는 것을 방지함에 기인한 것이다.As shown in Table 1 and Table 2, when comparing the dielectric properties and piezoelectric properties of the present invention method adopting the conventional method and the two-stage calcination process, the dielectric method of the present invention increases but the dielectric loss decreases, and the area vibration Both the modulus and mechanical quality coefficients of the modes were also increased. This is because, as described above, the volatilization amount of PbO can be reduced in the present invention adopting the two-stage calcination method, and the stoichiometric nonuniformity of the composition due to the volatilization is prevented to prevent the characteristic from being lowered.

(실시예 2)(Example 2)

Pb0.80Ca0.20(Co1/2,W1/2)0.04Ti0.96O3계와 Pb0.80Sr0.20(Co1/2,W1/2)0.04Ti0.96O3계 성분을 갖는 복합페롭스카이트상 합성을 위하여, PbO, TiO2탄산염 및 산화물로 이루어진 출발원료물질을 각각 마련하였다. 그리고 이들을 몰비에 맞게 칭량한후 24시간 볼밀링하여 혼합하여 120℃에서 각각 건조하였다.Composite Perovskite Phase with Pb 0.80 Ca 0.20 (Co 1/2 , W 1/2 ) 0.04 Ti 0.96 O 3 System and Pb 0.80 Sr 0.20 (Co 1/2 , W 1/2 ) 0.04 Ti 0.96 O 3 System For synthesis, starting materials consisting of PbO, TiO 2 carbonate and oxide were prepared, respectively. And these were weighed according to the molar ratio and then mixed by ball milling for 24 hours, and dried at 120 ° C., respectively.

먼저, 상기 건조된 각 파우더에 대하여 종래법과 같이 승온속도 1~5℃/min의 속도로 승온시켜 곧바로 최종하소온도인 1000℃에서 2시간동안 유지하여 각각 복합페롭스카이트상을 합성하였다.First, each dried powder was heated up at a rate of temperature increase rate of 1 to 5 ° C./min as in the conventional method and immediately maintained at 1000 ° C., which is the final calcination temperature, to synthesize composite perovskite phases, respectively.

다음으로, 본 발명법과 같이 상기 건조된 각 파우더를 승온시켜 700℃에서 2시간동안 1차하소시킨 연후, 다시 승온시켜 1000℃에서 2차하소시켜 PT계 복합페롭스카이트상을 각각 합성하였다.Next, after heating each dried powder as described in the present invention, the first calcined at 700 ℃ for 2 hours, and then heated again to the second calcined at 1000 ℃ to synthesize a PT composite perovskite phase.

한편, 이러한 상합성후 상기 2개의 방법에서 PbO의 휘발량을 측정한 결과, 종래법은 0.7wt%임에 반해 본 발명법은 0.3wt%로 휘발량이 감소됨을 알 수 있었다.On the other hand, as a result of measuring the volatilization amount of PbO in the two methods after this synthesis, it can be seen that the conventional method is 0.7wt%, while the volatilization amount is reduced to 0.3wt%.

상기 2개의 방법으로 합성된 파우더를 동일한 입도로 분쇄한후 직경 20mm, 두께 1mm로 성형하였으며, 성형된 시편을 1~20℃/min 속도로 승온시켜 1050℃에서 소결하였다. 그리고 소결된 시편들은 두께 0.5mm로 연마한후 Ag전극을 바르고 열처리하였다.The powder synthesized by the two methods was pulverized to the same particle size and then molded into a diameter of 20 mm and a thickness of 1 mm, and the molded specimen was heated at a rate of 1 to 20 ° C./min and sintered at 1050 ° C. The sintered specimens were polished to a thickness of 0.5mm and then heat-treated with Ag electrodes.

이러한 전극처리가 완료된 시편을 25~200℃, 2~10kV/mm, 5~40분의 조건에 맞게 분극처리하였으며, 분극완료된 시편들을 180℃에서 1시간 열처리한후 유전손실,유전율, 두께진동모드의 전기기계결합계수(kt)와 기계적품질계수(Qm)을 측정하였다. 하기 표 3은 Pb0.80Ca0.20(Co1/2,W1/2)0.04Ti0.96O3계 시편들에 대한 측정결과치이며, 하기 표 4는 Pb0.80Sr0.20(Co1/2,W1/2)0.04Ti0.96O3계 시편의 측정결과치를 나타낸다.The electrode treatment was completed in the polarization treatment according to the conditions of 25 ~ 200 ℃, 2 ~ 10kV / mm, 5 ~ 40 minutes, and the dielectric loss, dielectric constant, thickness vibration mode after heat treatment of the polarized specimens at 180 ℃ 1 hour The electromechanical coefficient (kt) and mechanical quality factor (Qm) of were measured. Table 3 below shows Pb 0.80 Ca 0.20 (Co 1/2 , W 1/2 ) 0.04 Ti 0.96 O 3 -based specimens, and Table 4 below shows Pb 0.80 Sr 0.20 (Co 1/2 , W 1 / 2 ) Show measured value of 0.04 Ti 0.96 O 3 type specimen.

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) ktkt QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 200200 0.430.43 0.520.52 500500 종래법 (1단 하소)Conventional method (stage 1) 188188 0.520.52 0.490.49 400400

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) ktkt QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 205205 0.420.42 0.520.52 420420 종래법 (1단 하소)Conventional method (stage 1) 190190 0.510.51 0.480.48 360360

상기 표 3 및 표 4에 나타난 바와 같이, 종래법과 2 단하소공정을 채택한 본 발명법의 유전특성 및 압전특성을 비교하면, 본 발명법이 유전율이 증가하였으나 유전손실은 오히러 감소하고, 면적진동모드의 전기기계결합계수 및 기계적품질계수도 모두 증가하였다. 이는 2단하소법을 채택한 본 발명의 하소공정에서 PbO의 휘발량을 효과적으로 저감됨에 기인한 것이다.As shown in Table 3 and Table 4, when comparing the dielectric properties and piezoelectric properties of the present invention method adopting the conventional method and the two-stage calcination process, the present invention increased the dielectric constant, but the dielectric loss was reduced and area vibration Both the modulus and mechanical quality coefficients of the modes were also increased. This is because the volatilization amount of PbO is effectively reduced in the calcination process of the present invention employing the two-stage calcination method.

(실시예 3)(Example 3)

Pb0.60Ba0.25(La1/2Nd1/2)0.10TiO3계, Pb0.60Sr0.25(La1/2Nd1/2)0.10TiO3계 및 Pb0.60Ca0.25(La1/2Nd1/2)0.10TiO3계 성분을 갖는 복합페롭스카이트상 합성을 위하여, PbO, TiO2탄산염 및 산화물로 이루어진 출발원료물질을 각각 마련하였다. 그리고 이들을 몰비에 맞게 칭량한후 24시간 볼밀링하여 혼합하여 120℃에서 각각 건조하였다.Pb 0.60 Ba 0.25 (La 1/2 Nd 1/2 ) 0.10 TiO 3 system, Pb 0.60 Sr 0.25 (La 1/2 Nd 1/2 ) 0.10 TiO 3 system and Pb 0.60 Ca 0.25 (La 1/2 Nd 1 / 2 ) For the synthesis of composite perovskite phase having 0.10 TiO 3 -based component, starting materials consisting of PbO, TiO 2 carbonate and oxide were prepared, respectively. And these were weighed according to the molar ratio and then mixed by ball milling for 24 hours, and dried at 120 ° C., respectively.

먼저, 상기 건조된 각 파우더에 대하여 종래법과 같이 승온속도 1~5℃/min의 속도로 승온시켜 곧바로 최종하소온도인 1000℃에서 2시간동안 유지하여 각각 복합페롭스카이트상을 합성하였다.First, each dried powder was heated up at a rate of temperature increase rate of 1 to 5 ° C./min as in the conventional method and immediately maintained at 1000 ° C., which is the final calcination temperature, to synthesize composite perovskite phases, respectively.

다음으로, 본 발명법과 같이 상기 건조된 각 파우더를 승온시켜 700℃에서 2시간동안 1차하소시킨 연후, 다시 승온시켜 1000℃에서 2차하소시켜 PT계 복합페롭스카이트상을 각각 합성하였다.Next, after heating each dried powder as described in the present invention, the first calcined at 700 ℃ for 2 hours, and then heated again to the second calcined at 1000 ℃ to synthesize a PT composite perovskite phase.

한편, 이러한 상합성후 상기 2개의 방법에서 PbO의 휘발량을 측정한 결과, 종래법은 0.7wt%임에 반해 본 발명법은 0.3wt%로 휘발량이 감소됨을 알 수 있었다.On the other hand, as a result of measuring the volatilization amount of PbO in the two methods after this synthesis, it can be seen that the conventional method is 0.7wt%, while the volatilization amount is reduced to 0.3wt%.

상기 2개의 방법으로 합성된 파우더를 동일한 입도로 분쇄한후 직경 20mm, 두께 1mm로 성형하였으며, 성형된 시편을 1~20℃/min 속도로 승온시켜 1050℃에서 소결하였다. 그리고 소결된 시편들은 두께 0.5mm로 연마한후 Ag전극을 바르고 열처리하였다.The powder synthesized by the two methods was pulverized to the same particle size and then molded into a diameter of 20 mm and a thickness of 1 mm, and the molded specimen was heated at a rate of 1 to 20 ° C./min and sintered at 1050 ° C. The sintered specimens were polished to a thickness of 0.5mm and then heat-treated with Ag electrodes.

이러한 전극처리가 완료된 시편을 25~200℃, 2~10kV/mm, 5~40분의 조건에 맞게 분극처리하였으며, 분극완료된 시편들을 180℃에서 1시간 열처리한후 유전손실, 유전율, 두께진동모드의 전기기계결합계수(kt), 면적진동모드의 전기기게결합계수 (kp) 및 기계적품질계수(Qm)을 측정하였다.The electrode treatment was completed in the polarization treatment according to the conditions of 25 ~ 200 ℃, 2 ~ 10kV / mm, 5 ~ 40 minutes, and the dielectric loss, dielectric constant, thickness vibration mode after heat treatment of the polarized specimens at 180 ℃ 1 hour The electromechanical coupling coefficient (kt), the electromechanical coupling coefficient (kp) of the area vibration mode, and the mechanical quality coefficient (Qm) were measured.

하기 표 5와 표 6는 Pb0.60Ba0.25(La1/2Nd1/2)0.10TiO3계와 Pb0.60Sr0.25(La1/2Nd1/2)0.10TiO3계의 시편들에 대한 각각의 측정결과치이며, 표 7은 Pb0.60Ca0.25(La1/2Nd1/2)0.10TiO3계 시편의 측정결과치를 나타낸다.Tables 5 and 6 show the specimens of the Pb 0.60 Ba 0.25 (La 1/2 Nd 1/2 ) 0.10 TiO 3 system and the Pb 0.60 Sr 0.25 (La 1/2 Nd 1/2 ) 0.10 TiO 3 system, respectively. Table 7 shows the measurement results of Pb 0.60 Ca 0.25 (La 1/2 Nd 1/2 ) 0.10 TiO 3 -based specimens.

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) ktkt kpkp QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 390390 0.470.47 0.550.55 10.510.5 19501950 종래법 (1단 하소)Conventional method (stage 1) 350350 0.550.55 0.520.52 10.210.2 18531853

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) ktkt kpkp QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 690690 2.002.00 0.550.55 15.015.0 680680 종래법 (1단 하소)Conventional method (stage 1) 650650 2.372.37 0.520.52 14.314.3 380380

유전율(ε)Permittivity (ε) 유전손실(tanδ:%)Dielectric loss (tan δ:%) ktkt kpkp QmQm 본 발명법(2단 하소)Invention method (two steps calcining) 490490 0.520.52 0.550.55 12.712.7 25102510 종래법 (1단 하소)Conventional method (stage 1) 450450 0.640.64 0.530.53 12.212.2 23412341

상기 표 5,6 및 7에 나타난 바와 같이, 종래법과 2 단하소공정을 채택한 본 발명법의 유전특성 및 압전특성을 비교하면, 본 발명법이 유전율이 증가하였으나 유전손실은 오히러 감소하고, 면적진동모드와 두께진동모드의 전기기계결합계수 및 기계적품질계수도 모두 증가하였다.As shown in Tables 5, 6 and 7, comparing the dielectric properties and piezoelectric properties of the present invention method employing the conventional method and the two-stage calcination process, the present invention increased the dielectric constant, but the dielectric loss decreased rather than the area Both the electromechanical coupling coefficient and the mechanical quality coefficient of the vibration mode and the thickness vibration mode were also increased.

상술한 바와 같이, 본 발명은 종전과는 달리 2단으로 하소하는 공정을 채택함으로써 PbO의 휘발을 최소화하면서 페롭스카이트상 합성을 최대화할 수 있으므로 우수한 압전특성을 갖는 Pb계 압전세라믹의 제조에 그 유용한 효과가 있다.As described above, the present invention adopts a two-stage calcination process, which is different from the past, so that it is possible to maximize the synthesis of perovskite phase while minimizing the volatilization of PbO. It works.

Claims (8)

PbO, TiO2및 탄산염으로 이루어진 원료물질 파우더를 마련한후, 이를 혼합·건조하는 단계;Preparing a raw material powder consisting of PbO, TiO 2 and carbonate, and then mixing and drying the powder; 상기 건조된 파우더를 600~700℃의 온도에서 1차 하소시키는 단계;Firstly calcining the dried powder at a temperature of 600 to 700 ° C .; 상기 1차 하소된 파우더를 800~1200℃의 온도에서 2차 하소시키는 단계; 및Second calcination of the first calcined powder at a temperature of 800 to 1200 ° C .; And 상기 2차 하소된 파우더를 분쇄·건조하는 단계;를 포함하여 구성되는 PT계 압전세라믹 파우더 제조방법.PT-based piezoceramic powder manufacturing method comprising a; pulverizing and drying the secondary calcined powder. 제 1항에 있어서, 상기 탄산염은 LaCO3, SmCO3, NdCO3, BaCO3, SrCO3및 CaCO3중 선택된 1종 또는 2종이상임을 특징으로 하는 제조방법.The method of claim 1, wherein the carbonate is one or two or more selected from LaCO 3 , SmCO 3 , NdCO 3 , BaCO 3 , SrCO 3 and CaCO 3 . 제 1항에 있어서, 상기 원료물질은 Mg, Nb, Ni, Zn, W, Ta, Co, Fe, Sb, Sn, Cr, Su, In, Yb, Sc, Cd 및 Lu중 선택된 1종 또는 2종이상을 산화물의 형태로 추가로 포함함을 특징으로 하는 제조방법.According to claim 1, wherein the raw material is one or two selected from Mg, Nb, Ni, Zn, W, Ta, Co, Fe, Sb, Sn, Cr, Su, In, Yb, Sc, Cd and Lu The above method further comprises in the form of an oxide. 제 1항에 있어서, 상기 건조된 파우더를 600~650℃에서 1차하소시킴을 특징으로 하는 제조방법.The method of claim 1, wherein the dried powder is first calcined at 600 ~ 650 ℃. PbO, TiO2, ZrO2및 탄산염으로 이루어진 원료물질 파우더를 마련한후, 이를 혼합·건조하는 단계;Preparing a raw material powder consisting of PbO, TiO 2 , ZrO 2 and carbonate, and then mixing and drying the powder; 상기 건조된 파우더를 750~850℃의 온도에서 1차 하소시키는 단계;Primary calcination of the dried powder at a temperature of 750-850 ° C .; 상기 1차 하소된 파우더를 850~1200℃의 온도에서 2차 하소시키는 단계; 및Secondly calcining the first calcined powder at a temperature of 850˜1200 ° C .; And 상기 2차 하소된 파우더를 분쇄·건조하는 단계;를 포함하는 PZT계 압전세라믹 파우더 제조방법.PZT-based piezoceramic powder manufacturing method comprising the step of grinding and drying the secondary calcined powder. 제 5항에 있어서, 상기 탄산염은 LaCO3, SmCO3, NdCO3, BaCO3, SrCO3및 CaCO3중 선택된 1종 또는 2종이상임을 특징으로 하는 제조방법.The method of claim 5, wherein the carbonate is one or two or more selected from LaCO 3 , SmCO 3 , NdCO 3 , BaCO 3 , SrCO 3 and CaCO 3 . 제 5항에 있어서, 상기 원료물질은 Mg, Nb, Ni, Zn, W, Ta, Co, Fe, Sb, Sn, Cr, Su, In, Yb, Sc, Cd 및 Lu중 선택된 1종 또는 2종이상을 산화물의 형태로 추가로 포함함을 특징으로 하는 제조방법.The method of claim 5, wherein the raw material is one or two selected from Mg, Nb, Ni, Zn, W, Ta, Co, Fe, Sb, Sn, Cr, Su, In, Yb, Sc, Cd and Lu The above method further comprises in the form of an oxide. 제 5항에 있어서, 상기 건조된 파우더를 800~850℃에서 1차하소시킴을 특징으로 하는 제조방법.The method of claim 5, wherein the dried powder is first calcined at 800 ~ 850 ℃.
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