KR100359103B1 - Method for antimoisturizing treatment of nozzle for inkjet print head - Google Patents

Method for antimoisturizing treatment of nozzle for inkjet print head Download PDF

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KR100359103B1
KR100359103B1 KR1019990021342A KR19990021342A KR100359103B1 KR 100359103 B1 KR100359103 B1 KR 100359103B1 KR 1019990021342 A KR1019990021342 A KR 1019990021342A KR 19990021342 A KR19990021342 A KR 19990021342A KR 100359103 B1 KR100359103 B1 KR 100359103B1
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South Korea
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nozzle
water repellent
repellent layer
printer head
water
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KR1019990021342A
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Korean (ko)
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KR20010001858A (en
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정재우
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삼성전자 주식회사
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/162Manufacturing of the nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/1433Structure of nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Abstract

본 발명은 잉크젯프린터 헤드용 노즐의 발수처리방법에 있어서, 진공증착을 통해 상기 노즐의 표면에만 선택적으로 발수층을 형성하되, 상기 발수층으로 다이아몬드 유사탄소(Diamond-like carbon)막을 형성하여 전처리공정이 필요하지 않아 공정이 간단하고 균일성 및 내마모성이 우수한 것을 특징으로 하는 잉크젯프린터 헤드용 노즐의 발수처리방법에 관한 것으로, 노즐의 후면에 발수층이 형성되는 것을 방지하기 위한 전처리공정이 필요하지 않아 공정이 간단하여 생산성 및 양산성이 우수하고, 전처리공정에서 야기되는 노즐구멍 크기의 불균일성, 노즐구멍의 막힘 및 변형 등을 배제하여 수율이 향상되며, 우수한 직진성에 의하여 노즐 내부에 균일한 코팅층이 형성되므로 잉크의 분사성능이 향상되고, 발수층의 우수한 내마모성으로 인하여 잉크젯 프린터 헤드의 신뢰성이 향상된다.The present invention provides a water repellent treatment method for a nozzle for an inkjet printer head, wherein a water repellent layer is selectively formed only on the surface of the nozzle through vacuum deposition, and a diamond-like carbon film is formed as the water repellent layer to pretreatment. The present invention relates to a water-repellent treatment method for a nozzle for an inkjet printer head, which is characterized by a simple process and excellent uniformity and wear resistance, and does not require a pretreatment process to prevent the formation of a water repellent layer on the rear surface of the nozzle. The process is simple, so the productivity and mass productivity are excellent, and the yield is improved by eliminating the unevenness of the nozzle hole size, clogging and deformation of the nozzle hole caused in the pretreatment process, and a uniform coating layer is formed inside the nozzle by excellent straightness. Ink jetting performance is improved, and the inkjet due to the excellent wear resistance of the water repellent layer The reliability of the printer head is improved.

Description

잉크젯 프린터 헤드용 노즐의 발수처리방법{Method for antimoisturizing treatment of nozzle for inkjet print head}Water repellent treatment method of nozzle for inkjet printer head {Method for antimoisturizing treatment of nozzle for inkjet print head}

본 발명은 잉크젯 프린터 헤드용 노즐의 발수처리방법에 관한 것으로, 보다 상세하게는 별도의 전처리공정없이도 잉크젯 프린터 헤드용 노즐의 표면에만 발수처리를 할 수 있는 방법에 관한 것이다.The present invention relates to a water repellent treatment method for a nozzle for an ink jet printer head, and more particularly, to a method for repellent treatment on the surface of a nozzle for an ink jet printer head without a separate pretreatment step.

잉크젯 프린터 헤드에 있어서 잉크공급장치에 함유되어 있던 잉크는 잉크공급관을 통하여 기록장치에 공급되고, 기록장치는 잉크공급장치로부터 공급받은 잉크를 피기록재에 분사하여 인쇄를 행한다. 이때 잉크는 노즐 플레이트에 형성된 노즐을 통하여 피기록재에 분사된다.Ink contained in the ink supply apparatus in the inkjet printer head is supplied to the recording apparatus through an ink supply tube, and the recording apparatus injects ink supplied from the ink supply apparatus onto the recording material to perform printing. At this time, ink is injected onto the recording material through the nozzle formed on the nozzle plate.

잉크는 액적의 형태로 분사되며, 잉크젯 프린터의 인쇄능을 높이기 위해서는 잉크가 완전한 액적의 형태로 안정하게 분사되어야 한다.Ink is ejected in the form of droplets, and in order to increase the printability of the inkjet printer, ink must be stably ejected in the form of complete droplets.

노즐을 제조하기 위하여 종래에는 전주도금법에 의하여 노즐을 형성하는 방법과 마이크로펀칭과 연마공정에 의하여 노즐을 형성하는 방법을 사용하여 왔다.In order to manufacture the nozzle, conventionally, a method of forming a nozzle by electroplating and a method of forming a nozzle by micropunching and polishing processes have been used.

상기의 방법들에 의하여 제조되는 노즐의 출구부위는 잉크젯 프린터 헤드에서 분사되는 잉크액적의 크기, 잉크의 분사성능, 잉크분사의 안정성과 연속분사에 큰 영향을 미치는 중요한 인자이다.The outlet portion of the nozzle manufactured by the above methods is an important factor that greatly affects the size of the ink droplets ejected from the inkjet printer head, the ejection performance of the ink, the stability of the ink ejection, and the continuous ejection.

특히 노즐부의 표면성질은 잉크분사의 안정성과 연속분사에 큰 영향을 미친다.In particular, the surface properties of the nozzle portion have a great influence on the stability of ink spraying and continuous spraying.

노즐부의 표면이 발수성을 가지는 경우에는 잉크가 완전한 액적의 형태로 분사되며, 따라서 잉크방울이 피기록재에 착지하는 위치의 정도 또는 산포가 향상되어 인쇄상태가 향상된다. 또한 잉크가 분사된 후 노즐의 출구부위에 형성되는 매니스커스도 안정하다.When the surface of the nozzle portion has water repellency, ink is ejected in the form of complete droplets, so that the degree or spread of the position where the ink droplets land on the recording material is improved, and the printing state is improved. In addition, the meniscus formed at the outlet of the nozzle after the ink is ejected is also stable.

그러나 노즐부의 표면이 발수성을 가지지 못하는 경우에는 잉크의 분사가 반복됨으로써 노즐부의 표면이 젖게 된다. 노즐부의 표면이 젖으면 잉크가 노즐부의 표면에 젖어있는 잉크와 덩어리를 형성하게 되어 잉크가 완전한 액적의 형태를 가지지 못한 채 흘러내리는 방식으로 분사된다. 그 결과 인쇄의 상태가 나쁘고, 잉크의 분사후 형성되는 매니스커스도 불안정하다.However, when the surface of the nozzle portion does not have water repellency, the surface of the nozzle portion becomes wet by spraying ink repeatedly. When the surface of the nozzle part is wet, the ink forms agglomerates with the wet ink on the surface of the nozzle part, and the ink is ejected in such a manner that the ink flows down without having a complete droplet form. As a result, the printing state is bad, and the meniscus formed after the ejection of the ink is also unstable.

따라서 잉크젯 프린터 헤드의 신뢰성을 확보하기 위해서는 노즐부의 표면을 발수처리하는 것이 필수적이다.Therefore, in order to secure the reliability of the inkjet printer head, it is essential to water-repellent the nozzle surface.

특히 반영구형태의 잉크젯 헤드의 경우는 반복적인 인쇄가 이루어지므로 노즐부의 표면상태가 인쇄의 신뢰성에 큰 영향을 주게 되므로 발수처리가 매우 중요하다.In particular, since the semi-permanent inkjet head is repeatedly printed, the surface state of the nozzle portion has a great influence on the reliability of printing, and thus the water repellent treatment is very important.

일회용 잉크젯 프린터 헤드의 노즐부의 표면을 발수처리하기 위해서 종래에는 일반적으로 전해도금법에 의하여 금도금층 등을 형성하는 방법을 사용하여 왔다.In order to water-repellent the surface of the nozzle part of a disposable inkjet printer head, conventionally, the method of forming a gold-plated layer etc. by the electroplating method has been used.

또한 반영구적인 잉크젯 프린터 헤드의 노즐의 표면을 발수처리하기 위하여 종래에는 발수성 물질을 일정조건의 전장이 걸린 도금조에서 도금처리하는 방법을 사용하여 왔다.In addition, in order to water-repellent the surface of the nozzle of the semi-permanent inkjet printer head, conventionally, a method of plating a water-repellent material in a plating bath in which a predetermined length is applied is used.

발수성 물질로는 테플론계 물질이 주로 사용되며, 테플론계 물질중 대표적인 것은 PTFE(polytetra teflon ethylene glycol)이다. 이러한 PTFE를 사용하여 노즐의 표면에 발수처리하기 위해서는 일정조건의 전장이 걸린 도금조에서 PTFE 복합도금처리하는 방법을 사용하여 왔다.Teflon-based materials are mainly used as a water repellent material, and a typical teflon-based material is PTFE (polytetra teflon ethylene glycol). In order to use the PTFE on the surface of the nozzle for water repellent treatment, the PTFE composite plating treatment has been used in a plating bath in which electric field is applied under a certain condition.

이러한 복합도금에 의한 발수처리방법은 방향성이 없으므로, 발수층이 형성되어야 할 노즐의 표면만이 아니라 발수층이 형성되어서는 안될 노즐의 후면에까지 도금이 되어 발수층이 형성된다.Since the water repellent treatment method by the composite plating is not directional, not only the surface of the nozzle on which the water repellent layer should be formed, but also the back surface of the nozzle on which the water repellent layer should not be formed is formed to form a water repellent layer.

노즐의 후면에 발수층이 형성되면 접합성이 낮아져서 후공정인 잉크젯 프린터 헤드와의 접합공정이 매우 어려워진다.When the water repellent layer is formed on the back of the nozzle, the bonding property is lowered, making the bonding process with the inkjet printer head which is a post process very difficult.

따라서 복합도금법에 의하여 발수처리를 하는 경우에는 노즐의 후면에 발수층이 형성되는 것을 방지하기 위한 전처리가 추가로 필요하게 된다.Therefore, when the water repellent treatment is performed by the composite plating method, a pretreatment for preventing the water repellent layer from forming on the rear surface of the nozzle is additionally required.

노즐의 표면에만 발수처리를 하기 위해서 종래에는 노즐의 후면에 여러 가지 방법으로 절연막을 형성하여 노즐의 후면에는 발수층이 형성되지 않도록 하였다.In order to perform water repellent treatment only on the surface of the nozzle, conventionally, an insulating film is formed on the rear surface of the nozzle in various ways so that the water repellent layer is not formed on the rear surface of the nozzle.

그중 대표적인 방법은 포토레지스터 등의 절연성 물질로 노즐의 후면부분에 절연막을 형성한 후 도금을 하는 방법이다.A representative method is a method of plating after forming an insulating film on the rear portion of the nozzle with an insulating material such as a photoresist.

이와 같은 포토레지스터와 같은 절연막을 이용하여 노즐의 후면에 도금이 되는 것을 방지하는 방법을 도 1에 도시하고 있다.A method of preventing plating on the rear surface of the nozzle by using an insulating film such as a photoresist is illustrated in FIG. 1.

발수처리를 하기 전에 먼저 노즐(10)의 후면에 포토레지스터를 도포하여 절연막(12)을 형성한다.Before the water repellent treatment, a photoresist is first applied to the rear surface of the nozzle 10 to form an insulating film 12.

포토레지스터로 노즐(10)의 후면에 절연막(12)을 형성한 후 일반적인 방법인 복합도금처리공정에 의하여 PTFE의 발수층(14)을 노즐(10)의 표면에 형성한다.After forming the insulating film 12 on the rear surface of the nozzle 10 with a photoresist, a water repellent layer 14 of PTFE is formed on the surface of the nozzle 10 by a general plating process.

노즐(10)의 표면에 발수층(14)이 형성된 후 노즐(10)의 후면에 형성된 절연막(12)을 제거한다.After the water repellent layer 14 is formed on the surface of the nozzle 10, the insulating layer 12 formed on the rear surface of the nozzle 10 is removed.

상기와 같은 종래의 방법에 의하면 노즐의 후면에 발수층이 형성되는 것은 방지할 수 있다.According to the conventional method as described above, it is possible to prevent the water repellent layer formed on the rear surface of the nozzle.

그러나 상기와 같은 종래의 방법에서는 절연막이 형성된 부위에서만 발수층의 형성이 저해되는데 절연막을 형성하는 과정에서 포토레지스터 등의 절연막이 노즐마다 균일하게 형성되지 못하기 때문에 노즐의 출구부분에서 발수층이 형성되는깊이가 균일하지 못한 문제점이 있다.However, in the conventional method as described above, the formation of the water repellent layer is inhibited only at the site where the insulating film is formed. In the process of forming the insulating film, an insulating film such as a photoresist is not formed uniformly for each nozzle, so that the water repellent layer is formed at the exit of the nozzle. There is a problem that the depth is not uniform.

또한 도금법에 의해서 노즐의 표면에 형성되는 발수층의 두께가 균일하지 못하기 때문에 노즐구멍의 크기를 균일하게 조절하는 것이 어려운 문제점이 있다.In addition, since the thickness of the water repellent layer formed on the surface of the nozzle is not uniform by the plating method, it is difficult to uniformly adjust the size of the nozzle hole.

따라서 잉크젯 프린터 헤드의 인쇄시 잉크액적의 크기가 균일하지 못하여 잉크가 균일하게 분사되지 못하므로 인쇄상태가 나쁜 문제점이 있다.Therefore, the size of the ink droplets during printing of the inkjet printer head is not uniform because the ink is not evenly sprayed there is a problem that the printing state is bad.

상기의 문제점을 해결하기 위한 본 발명은 별도의 절연막을 노즐의 후면에 형성하지 않고도 노즐의 후면에 발수층이 형성되는 것을 방지할 수 있어 단일공정의 적은 비용으로 발수효과가 우수한 발수층을 잉크젯 프린터 헤드의 노즐의 표면에 형성하여 잉크젯 프린터 헤드를 이용한 인쇄시 잉크의 분사성능을 향상시키는 방법을 제공하는 것을 목적으로 한다.The present invention for solving the above problems can be prevented from forming a water repellent layer on the back of the nozzle without forming a separate insulating film on the back of the nozzle inkjet printer excellent water-repellent layer at a low cost of a single process An object of the present invention is to provide a method of forming on the surface of a nozzle of a head to improve the ejection performance of ink during printing using an inkjet printer head.

도 1은 종래의 절연막을 형성한 후 발수물질을 복합도금하여 잉크젯 프린터 헤드용 노즐을 발수처리하는 방법을 개략적으로 도시한 공정도,1 is a process diagram schematically illustrating a method of water repelling a nozzle for an inkjet printer head by complex plating of a water repellent material after forming a conventional insulating film;

도 2는 본 발명에 사용되는 진공증착법의 원리를 개략적으로 도시한 개략도,Figure 2 is a schematic diagram schematically showing the principle of the vacuum deposition method used in the present invention,

도 3은 본 발명의 방법에 의하여 잉크젯 프린터 헤드용 노즐을 발수처리하는 방법을 개략적으로 도시한 공정도.3 is a process diagram schematically showing a method of water repellent treating a nozzle for an inkjet printer head by the method of the present invention.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

10, 20, 30 : 노즐 12 : 포토레지스터10, 20, 30: nozzle 12: photoresist

14, 34 : 발수층14, 34: water repellent layer

상기의 목적을 달성하기 위한 본 발명은 잉크젯 프린터 헤드용 노즐의 표면에만 다이아몬드유사탄소(Diamond-like carbon), TiC 또는 TiCN을 진공증착시켜 발수층을 형성함으로써, 전처리공정이 필요하지 않아 공정이 간단하고 균일성 및 내마모성이 우수한 잉크젯 프린터 헤드용 노즐의 발수처리방법에 그 특징이 있다.In order to achieve the above object, the present invention forms a water-repellent layer by vacuum depositing diamond-like carbon, TiC, or TiCN only on the surface of a nozzle for an inkjet printer head, thereby eliminating the need for a pretreatment process. And a water repellent treatment method for a nozzle for an ink jet printer head excellent in uniformity and wear resistance.

이하 본 발명에 대하여 상세하게 설명한다.Hereinafter, the present invention will be described in detail.

본 발명에서는 발수층의 원료물질로는 다이아몬드유사탄소, TiC 또는 TiCN을 사용한다. 가장 바람직하기로는 다이아몬드를 사용하는 것이지만, 경제성을 고려할 때 다이아몬드와 유사한 성질을 가진 탄소를 사용하는 것이다.In the present invention, as a raw material of the water repellent layer, diamond-like carbon, TiC or TiCN is used. Most preferably, diamond is used, but considering economics, carbon having properties similar to diamond is used.

발수층을 형성하고자 하는 노즐의 표면에 발수층의 원료물질을 진공증착법으로 증착시킨다. 이때 진공증착법으로는 일반적인 진공증착법인 스퍼터링 (sputtering), 이베포레이션(evaporation), 화학증착법(Chemical Vapor Deposition, CVD) 등을 사용할 수 있다.The raw material of the water repellent layer is deposited on the surface of the nozzle to form the water repellent layer by vacuum deposition. In this case, as the vacuum deposition method, sputtering, evaporation, chemical vapor deposition (Chemical Vapor Deposition, CVD), etc., which are general vacuum deposition methods, may be used.

화학증착법 중에서 대표적으로 사용되는 방법은 RF 마그네트론 플라즈마 화학증착법(Radio Frequency Magnetron Plasma CVD)이며, 이 방법은 무선주파수 (Radio Frequency, RF)에 자장을 걸어서 플라즈마를 활성화시켜서 원료물질을 원하는 부위에 증착시키는 방법이다.The most commonly used method of chemical vapor deposition is RF Magnetron Plasma CVD, which uses a magnetic field at a radio frequency (RF) to activate plasma to deposit raw materials at desired sites. Way.

도 2에 본 발명에 사용되는 진공증착법의 원리를 개략적으로 도시하고 있다.2 schematically illustrates the principle of the vacuum deposition method used in the present invention.

도 2에 도시한 바와 같은 진공증착법에서는 원료물질이 우수한 직진성을 나타내게 되므로, 발수층의 원료물질들은 직진운동을 하여 노즐표면의 마주하는 부위에 정확하게 증착된다.In the vacuum deposition method as shown in FIG. 2, since the raw material exhibits excellent straightness, the raw material of the water repellent layer is deposited on the opposite portion of the nozzle surface by moving straight.

이러한 진공증착법에서는 발수층의 원료물질과 접하지 않는 노즐의 후면에는 발수층이 형성될 수 없다. 따라서 노즐의 후면에 발수층이 형성되는 것을 방지하기 위하여 절연막을 형성하는 과정이 필요하지 않다.In such a vacuum deposition method, the water repellent layer may not be formed on the rear surface of the nozzle which does not contact the raw material of the water repellent layer. Therefore, in order to prevent the water repellent layer from being formed on the back of the nozzle, a process of forming an insulating layer is not necessary.

상기와 같은 간단한 단일공정에 의해서 노즐의 후면에 발수층이 형성되는 것을 방지하면서 노즐의 전면에만 선택적으로 발수층을 형성할 수 있다.The water repellent layer may be selectively formed only on the front surface of the nozzle while preventing the water repellent layer from being formed on the rear surface of the nozzle by a simple single process as described above.

이러한 본 발명의 잉크젯 프린터 헤드용 노즐의 발수처리방법을 도 3에서 개략적으로 도시하고 있다.The method for water repellent treatment of the nozzle for an inkjet printer head of the present invention is schematically illustrated in FIG. 3.

도 3에서는 전주도금법에 의하여 형성된 노즐을 예를 들어 설명하고 있으나,어떤 방법으로 형성된 노즐이라도 본 발명의 방법을 적용할 수 있다.In FIG. 3, the nozzle formed by the electroplating method is described as an example, but the method of the present invention may be applied to the nozzle formed by any method.

노즐(30)의 표면과 발수층의 원료물질을 마주보도록 배치한 후 진공증착을 실시하면 화살표로 표시한 바와 같은 직진운동에 의하여 발수층의 원료물질이 이동하여 노즐(30)의 표면에만 발수층(34)이 형성된다.When the surface of the nozzle 30 and the raw material of the water repellent layer are disposed to face each other and vacuum deposition is carried out, the raw material of the water repellent layer is moved by the straight motion as indicated by the arrow, and the water repellent layer is formed only on the surface of the nozzle 30. 34 is formed.

상기와 같은 본 발명의 방법은 잉크의 분사성능에 크게 영향을 주는 발수처리시 노즐의 후면에 발수층이 형성되는 것을 방지하기 위한 전처리공정이 필요하지 않은 단일공정(batch process)이므로 공정이 간단하여 생산성 및 양산성이 우수하다.The method of the present invention as described above is a single process (batch process) does not require a pre-treatment step to prevent the water-repellent layer is formed on the back of the nozzle during the water repellent treatment that greatly affects the ejection performance of the ink, so the process is simple Productivity and mass productivity are excellent.

또한 전처리공정에서 야기되는 노즐구멍 크기의 불균일성, 노즐구멍의 막힘 및 변형 등을 배제하여 수율이 향상된다.In addition, the yield is improved by eliminating the unevenness of the nozzle hole size, clogging and deformation of the nozzle hole caused in the pretreatment process.

우수한 직진성에 의하여 노즐 내부에 균일한 코팅층이 형성되므로 잉크의 분사성능이 향상되고, 발수층의 우수한 내마모성으로 인하여 잉크젯 프린터 헤드의 신뢰성이 향상된다.Since a uniform coating layer is formed inside the nozzle by the excellent straightness, the ink ejection performance is improved, and the inkjet printer head reliability is improved due to the excellent wear resistance of the water repellent layer.

Claims (3)

잉크젯프린터 헤드용 노즐의 발수처리방법에 있어서,In the water repellent treatment method of a nozzle for an ink jet printer head, 진공증착을 통해 상기 노즐의 표면에만 선택적으로 발수층을 형성하되, 상기 발수층으로 다이아몬드 유사탄소(Diamond-like carbon)막을 형성하여 전처리공정이 필요하지 않아 공정이 간단하고 균일성 및 내마모성이 우수한 것을 특징으로 하는 잉크젯 프린터 헤드용 노즐의 발수처리방법.The water-repellent layer is selectively formed only on the surface of the nozzle through vacuum deposition, but a diamond-like carbon film is formed as the water-repellent layer, which does not require a pretreatment process, thereby simplifying the process and providing excellent uniformity and wear resistance. A water repellent treatment method for a nozzle for an ink jet printer head, characterized by the above. 제 1 항에 있어서, 상기 다이아몬드 유사탄소막은 화학증착법(Chemical Vapor Deposition)으로 형성하는 것을 특징으로 하는 잉크젯 프린터 헤드용 노즐의 발수처리방법.The method of claim 1, wherein the diamond-like carbon film is formed by chemical vapor deposition (Chemical Vapor Deposition). 제 2 항에 있어서, 상기 다이아몬드 유사탄소막은 RF 마그네트론 플라즈마 화학증착법 (Radio Frequency Magnetron Plasma Chemical Vapor Deposition)으로 형성하는 것을 특징으로 하는 잉크젯 프린터 헤드용 노즐의 발수처리방법.The method of claim 2, wherein the diamond-like carbon film is formed by RF Magnetron Plasma Chemical Vapor Deposition.
KR1019990021342A 1999-06-09 1999-06-09 Method for antimoisturizing treatment of nozzle for inkjet print head KR100359103B1 (en)

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