JPH03274163A - Ink jet recording head - Google Patents
Ink jet recording headInfo
- Publication number
- JPH03274163A JPH03274163A JP7413190A JP7413190A JPH03274163A JP H03274163 A JPH03274163 A JP H03274163A JP 7413190 A JP7413190 A JP 7413190A JP 7413190 A JP7413190 A JP 7413190A JP H03274163 A JPH03274163 A JP H03274163A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- plating
- eutectoid
- electroless
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000005266 casting Methods 0.000 claims abstract description 12
- 238000007772 electroless plating Methods 0.000 claims abstract description 11
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 7
- 239000011737 fluorine Substances 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 18
- 229910052759 nickel Inorganic materials 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 6
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 abstract description 4
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001870 ammonium persulfate Inorganic materials 0.000 abstract description 2
- 239000010419 fine particle Substances 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 150000002815 nickel Chemical class 0.000 abstract description 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract 1
- 125000001153 fluoro group Chemical group F* 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005323 electroforming Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野１
本発明は、インク滴を飛煕させて記録媒体上に文字、画
像等を形成するインクジェットプリンタ記録用ヘッドに
関するちのである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a recording head for an inkjet printer that forms characters, images, etc. on a recording medium by flying ink droplets.
［発明の概要１
本発明は、インクシェツト記録用プリンタ特にフェース
イジェクトタイプの記録用ヘッドにおいて、そのインク
吐出用ノズルプレートを無電解メッキ鋳造法により形成
し、さらにその表面（紙側の面）にフッ素系高分子共析
メッキを行う事により、ノズルプレートの穴径精度を安
定させると供に、表面への吐出インクの残留をなくす事
により印字品質を向上させたちのである。[Summary of the Invention 1 The present invention provides an inkjet recording printer, particularly a face eject type recording head, in which an ink ejection nozzle plate is formed by an electroless plating casting method, and the surface (paper side surface) is coated with fluorine. By performing polymer eutectoid plating, the accuracy of the hole diameter of the nozzle plate is stabilized, and printing quality is improved by eliminating residual ejected ink on the surface.
［従来の技術］
コンピューター等の記録印字用として各種の方式がある
が最近、特にインクジェット記録方式が、高速印字、低
騒音という特徴により多く使われるようになってきてい
る。[Prior Art] There are various methods for recording and printing in computers and the like, but recently, inkjet recording methods have been increasingly used due to their characteristics of high-speed printing and low noise.
インクジェット記録方式の記録ヘッドとしては、エツジ
イジェクトタイプ（ＥＥタイプ）、フェースイジェクト
タイプＩＦＥタイプ）があるが、近年、高印字品質、ペ
ージプリンタ一対応、ヘッドの製造しやすさ等から、Ｆ
Ｅタイプのヘッドが多く採用されてきている。Recording heads for the inkjet recording system include edge eject type (EE type) and face eject type (IFE type), but in recent years, F
E-type heads are increasingly being adopted.
このＦＥクイブヘッドの場合、インクを精度良く印字す
るために、インクの飛翔位置、飛翔量をコントロールす
るノズルプレート（オリフィスプレート）が用いられる
。In the case of this FE quib head, in order to print ink with high precision, a nozzle plate (orifice plate) is used to control the position and amount of ink ejection.
このノズルプレートは、φ５０ＬＬｍ前後の微小な穴径
が要求されまた、穴形状がテーパーである事が望ましい
ために、ニッケルの電解メッキ鋳造法（電鋳法）により
５０〜１１００ｕ程度の厚みにコントロールして製造さ
れているしのが多い。This nozzle plate requires a small hole diameter of around φ50LLm, and since it is desirable that the hole shape be tapered, the thickness is controlled to about 50 to 1100 μ by nickel electrolytic plating casting method (electroforming method). There are many products that are manufactured in the same way.
［発明が解決しようとする課題］
しかし、前述の従来技術であるニッケル電鋳法による製
造においては、電解によるため面内、ロット内の析出速
度にバラツキが発生し、ノズルプレートとしての厚みが
不均一となり、結果として穴径が精度良くつくり込めず
、φ５０〜１１００ＬＬ±２〜３μｍの高精度な穴径要
求されるノズルプレートにおいては、歩留りが悪く、印
字品質の不安定という問題が生していた。[Problems to be Solved by the Invention] However, in manufacturing using the nickel electroforming method, which is the conventional technology mentioned above, variations occur in the deposition rate within the plane and within the lot due to electrolysis, and the thickness of the nozzle plate is insufficient. As a result, the hole diameter cannot be made with high precision, resulting in problems such as poor yield and unstable printing quality in nozzle plates that require highly accurate hole diameters of 50 to 1100 LL ± 2 to 3 μm. Ta.
さらに、吐出したインクが表面に残留する場合も多く、
ノズルプレート穴部周辺に残留したインクによって飛翔
するインク滴の方向性が影響され、印字品質が悪化する
と、＼う問題ちあった。Furthermore, the ejected ink often remains on the surface,
A problem occurred when the directionality of flying ink droplets was affected by the ink remaining around the nozzle plate holes, resulting in deterioration of printing quality.
本発明は、この様な問題を解決するもので、その目的は
、ＦＥタイプインクシェツトヘッドのノズルプレートの
穴径を、面内、ロフト内で均一に精度良くつくり込むと
供に、連続吐出におけるノズルプレート表面へのインク
の残留をなくす事によって、印字品質を大幅に向上安定
させるものである。The present invention is intended to solve such problems, and its purpose is to make the hole diameter of the nozzle plate of the FE type ink sheet head uniform and accurate within the plane and within the loft, and to achieve continuous ejection. By eliminating ink residue on the nozzle plate surface, printing quality is greatly improved and stabilized.
［課題を解決するための手段］
上記の問題を解決するために本発明は、フェースイジェ
クトタイプのインクジェット記録用ヘッドにおいて、ノ
ズルプレートを無電解メッキ鋳造法により形成し、さら
にその表面（紙側の面）にフッ素系高分子共析メッキを
行う事を特徴としている。[Means for Solving the Problems] In order to solve the above problems, the present invention provides a face eject type inkjet recording head in which a nozzle plate is formed by an electroless plating casting method, and the surface thereof (paper side It is characterized by fluorine-based polymer eutectoid plating on the surface).
［作 用］
本発明によれば、ノズルプレートを無電解メッキ鋳造法
（ｌ○μｍ程度以上の厚付はメッキ）で形成するために
、電解メッキで行う場合の電流密度分布の不均一が発生
せず、面内、ロット内のメンキ析出が均一となりメッキ
厚みがノズルブレト全面にわたって一定となり、穴径を
精度良くつくり込む事が出来る、また表面にフッ素系高
分子共析メッキを形成する事ｉこより、吐出されたイン
クのノズルプレート表面での接触角が高く、穴中に容易
にインクが戻るためインクの表面への残留をなくす事が
出来、インクの飛翔が安定する。[Function] According to the present invention, since the nozzle plate is formed by electroless plating casting method (thickness of about 10 μm or more is plated), uneven current density distribution occurs when electrolytic plating is performed. The coating thickness is uniform within the surface and within the lot, and the plating thickness is constant over the entire surface of the nozzle bullet, making it possible to create the hole diameter with high precision. The contact angle of the ejected ink on the nozzle plate surface is high, and the ink easily returns into the holes, eliminating the ink remaining on the surface and stabilizing the flight of the ink.
［実 施 例］
第１図は、本発明の詳細な説明するためのノズルプレー
ト製造工程の概略断面図である。[Example] FIG. 1 is a schematic sectional view of a nozzle plate manufacturing process for explaining the present invention in detail.
第１図（ａ）は、ノズルプレートを無電解メッキ鋳造性
で作製するための基板の断面である。基板の材質はガラ
ス、アルミナ等非導電性のものを使用し、無電解メッキ
を行う部分のみをＣｕスパッタメタライジング後エツチ
ングしてノズル部等をパターン化する。FIG. 1(a) is a cross section of a substrate for producing a nozzle plate by electroless plating casting. A non-conductive material such as glass or alumina is used for the substrate, and only the portions to be electroless plated are etched after Cu sputter metallization to pattern the nozzle portion and the like.
ノズル数は、仕様によってち異なるが数十穴が形成され
ており、通常は、２列に配列される。The number of nozzles varies depending on the specifications, but several tens of holes are formed, and they are usually arranged in two rows.
この金属パターンに第一、１として、四フッ化エチレン
の微粒子（φ１μｍ以下）の無電解ニッケル共析メッキ
を５ＬＬｍ行う。As a first step, electroless nickel eutectoid plating with fine particles (φ1 μm or less) of tetrafluoroethylene is performed on this metal pattern for 5LLm.
この時の四フッ化エチレンの共析量は、２０〜３０ｖ○
１％であった（ｂ
次に、無電解ニッケルの厚付はメッキ（鋳造）を５０ｕ
ｍ行う、以下の液組成、条件でノズルプレートとなるニ
ッケル皮膜を形成した（Ｃ）。The eutectoid amount of tetrafluoroethylene at this time is 20 to 30v○
1% (b) Next, the thickness of electroless nickel was plated (cast) to 50u.
A nickel film that will become a nozzle plate was formed using the following liquid composition and conditions (C).
（液組成）
硫酸ニッケル ： ４５ｇ／１
次亜燐酸ナトリウム、 ２０ｇ／ｌ
クエン酸ナトリウム、 １０ｇ／ｌ
（条件）
ＰＨ：６．０
液温 、 ９０°Ｃ
・メッキ時間： ３時間
このニッケルのノズルプレートを、基板より剥離し表面
のＣｕｆｆ！を過硫酸アンモン溶液で溶解し、ノズルプ
レート単体完成とした後、樹脂製のインクジェットヘッ
ド本体（ポンプ室）と、紫外線（ＵＶ）硬化タイプの接
着剤を用いて接合し、ＦＥタイプのインクジェット記録
用ヘッドとして完成させた６
［発明の効果］
以上述べた様に、本発明によればＦＥタイプのインクジ
ェット記録用ヘッドにおいて、ノズルプレートを無電解
メッキ鋳造法により形成し、さらにその表面にフッ素系
高分子共析メッキを行う事により、従来の電解メッキ鋳
造法に比べ面内、ロット内の穴径精度を±３％以下とす
る事が出来、印字の品質が安定し、歩留りら９５％以上
と大幅に向上出来た。(Liquid composition) Nickel sulfate: 45g/1 Sodium hypophosphite, 20g/l Sodium citrate, 10g/l (Conditions) PH: 6.0 Liquid temperature, 90°C ・Plating time: 3 hours This nickel nozzle plate is peeled off from the substrate and the surface Cuff! is dissolved in an ammonium persulfate solution to complete a single nozzle plate, which is then bonded to a resin inkjet head body (pump chamber) using an ultraviolet (UV) curing adhesive to create a nozzle plate for FE type inkjet recording. 6 [Effects of the Invention] As described above, according to the present invention, in an FE type inkjet recording head, the nozzle plate is formed by electroless plating casting method, and the surface thereof is coated with a fluorine-based polymer. By performing molecular eutectoid plating, the in-plane and in-lot hole diameter accuracy can be reduced to ±3% or less compared to conventional electrolytic plating casting methods, and the printing quality is stable and the yield is over 95%. I was able to improve significantly.
さらに、ノズルプレート表面にフッ素系高分子層が形成
されているため、吐出したインクが表面に残留する事が
なくなりインクの飛翔が安定するため印字品質を大きく
改善する事が出来た。Furthermore, since a fluorine-based polymer layer is formed on the surface of the nozzle plate, the ejected ink does not remain on the surface, and the flight of the ink is stabilized, making it possible to greatly improve printing quality.
実施例では、フッ素系高分子共析メッキとして無電解ニ
ッケルについて述べたが、共析メッキ層についてはメッ
キ厚が薄いために電解共析メッキを適用する事が可能で
ある。In the examples, electroless nickel was described as the fluorine-based polymer eutectoid plating, but since the plating thickness is thin, electrolytic eutectoid plating can be applied to the eutectoid plating layer.
無電解メッキ鋳造の厚みについては、特に規定するもの
ではないが、実圧上、経済性の観点がら、約１０〜２０
０μｍ程度が適当である。The thickness of electroless plating casting is not particularly specified, but from the viewpoint of actual pressure and economic efficiency, it is approximately 10 to 20 mm.
Approximately 0 μm is appropriate.
第１図（ａ）〜（ｄ）は、本発明によるインクシェツト
記録用ヘッドの製造工程を示す断面図。
・無電解メッキ鋳造用基板
・導電膜
・フッ素系高分子共析メッキ層
・無電解メッキ鋳造部（ノズルプレー
ト）
・接着層
・インクジェットヘッド本体
・ポンプ室
・ピエゾ圧電体
以上FIGS. 1(a) to 1(d) are cross-sectional views showing the manufacturing process of an inkjet recording head according to the present invention.・Electroless plating casting substrate ・Conductive film ・Fluorine polymer eutectoid plating layer ・Electroless plating casting part (nozzle plate) ・Adhesive layer ・Inkjet head body ・Pump chamber ・Piezo piezoelectric material and above
Claims (2)
用ヘッドにおいて、インク吐出用ノズルプレートを無電
解メッキ鋳造法により形成した事を特徴とするインクジ
ェット記録用ヘッド。(1) An inkjet recording head of a face eject type, characterized in that an inkjet nozzle plate is formed by an electroless plating casting method.
にフッ素系高分子共析メッキを行った事を特徴とする請
求項１記載のインクジェット記録用ヘッド。(2) Surface of ink ejection nozzle plate (paper side surface)
2. The inkjet recording head according to claim 1, wherein the inkjet recording head is coated with fluorine-based polymer eutectoid plating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7413190A JP3190658B2 (en) | 1990-03-24 | 1990-03-24 | Inkjet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7413190A JP3190658B2 (en) | 1990-03-24 | 1990-03-24 | Inkjet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03274163A true JPH03274163A (en) | 1991-12-05 |
| JP3190658B2 JP3190658B2 (en) | 2001-07-23 |
Family
ID=13538330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7413190A Expired - Lifetime JP3190658B2 (en) | 1990-03-24 | 1990-03-24 | Inkjet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3190658B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006218859A (en) * | 2005-01-14 | 2006-08-24 | Fuji Photo Film Co Ltd | Method of manufacturing nozzle plate, liquid droplet ejection head and image forming apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101889421B1 (en) * | 2016-08-08 | 2018-08-20 | 대한민국 | Prefabricated flower garden |
-
1990
- 1990-03-24 JP JP7413190A patent/JP3190658B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006218859A (en) * | 2005-01-14 | 2006-08-24 | Fuji Photo Film Co Ltd | Method of manufacturing nozzle plate, liquid droplet ejection head and image forming apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3190658B2 (en) | 2001-07-23 |
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