KR100323198B1 - A crash protecting apparatus of wafer cassette carrier - Google Patents

Abstract

In the collision avoidance device according to the present invention, a carriage for transporting a wafer cassette to an opening / closing door installed to secure airflow and cleanliness in the process chamber between the stationary stations collides due to a transport system error or an overrun. It is possible to forcibly stop the carriage so as not to, for this purpose is installed on the rail between the first station and the opening and closing door detecting means for detecting the drive of the vehicle to overrun the first station, and; Carrier stop means is installed in the rail portion between the first station and the opening and closing door to be rotatable in the first direction and the second direction to selectively pass or stop the vehicle in accordance with the first direction or the second direction drive And braking means installed in the carriage to operate the second direction of the vehicle stop means to forcibly stop the carriage; When the door is closed to determine whether the door is open or closed, the sensing means is operated to detect the vehicle overruning the first station, and the vehicle stop means is rotated from the first direction to the second to brake. It comprises a braking control for stopping the vehicle by means.

Description

A crash protecting apparatus of wafer cassette carrier

The present invention relates to collision avoidance of a carriage for carrying a wafer cassette, and more particularly, a carriage for carrying a wafer cassette to an opening / closing door installed to secure airflow and cleanliness between process stations. A vehicle collision avoidance device capable of forcibly stopping a vehicle so that it does not collide by a transportation system error or overrun.

In general, a wafer is manufactured into one completed wafer through a plurality of processes, and the wafer movement between these processes is carried out in such a manner that the wafer cassette is moved by stacking the wafers in a batch unit one by one.

Then, the wafer cassette is loaded on a carriage driven on the rail, and the carriage is driven on the rail and moved between the respective processes.

In the process-to-process movement by such a carriage, before the wafer cassette is moved into the process chamber, an opening / closing door is installed on the movement path of the vehicle to establish cleanliness and stable airflow inside the process chamber, and Therefore, the cleanliness and airflow inside the process chamber are maintained.

1 is a view for explaining such a conventional vehicle drive control device.

Referring to this, in the conventional carriage drive control apparatus, there is a carriage 1 which is moved in a predetermined path along the rail portion 2 installed to transfer the wafer. The transport vehicle 1 is driven by a separate drive means.

In addition, the rail unit 2 includes a first stationary station 3 at which the transporter 1 is stopped, and a transporter 1 stopped at the first stationary station 3 is a process chamber (not shown). It is a passage which is moved inside and enters, and has an opening / closing door 5 which opens and closes to maintain the cleanliness and airflow flow inside the process chamber, and the second stop which the carriage 1 which passed through the opening / closing door 5 stops. There is a location station 4.

Then, it is determined whether the transport vehicle 1 is stopped at the first and second exact position stations 3 and 4, thereby transmitting a driving signal to the driving means of the transport vehicle 1 or opening / closing the door 5 It consists of a control unit (6) for transmitting the open and close signal.

A carriage driving by a conventional carriage driving control device having such a configuration will be described.

First, when the transport vehicle 1 arrives at the first stationary station 3, the control unit 6 sends a stop signal to the transporter 1 to stop the transporter 1 at the first stationary station 3. Then, it is determined whether or not the vehicle 1 is present in the second stationary station 4.

At this time, the control unit 6 maintains the cleanliness and air flow in the process chamber by keeping the opening / closing door 5 in a closed state.

In the above, the control unit 6 sends a driving signal to the stationary vehicle 1 when the vehicle 1 is not present in the second stationary station 4 and sends the driving signal to the stationary vehicle 1. Simultaneously with driving, the opening / closing door 5 is opened so that the transport vehicle 1 reaches the second position station 4 through the opening / closing door 5 and stops.

Then, when the vehicle 1 stops at the first fixed position station 3 via the open / close door 5 to the second fixed position station 4, the control unit 6 closes the open / close door 5 again.

At this time, the control unit 6 causes the other vehicle to reach the first stationary station 3 to stop.

As described above, the conventional vehicle driving control device causes the vehicle 1 to be stopped by the control unit 6 at the first and second stationary stations 3 and 4, and the control unit 6 is opened and closed. The door 5 is operated in such a way as to sequentially drive the carriage 1 while being closed or opened.

However, the conventional vehicle drive control apparatus controls the drive so that the vehicle stops at the first or second fixed position station by the control unit. However, when an error occurs in the vehicle drive control process by the control unit, the vehicle opens and closes the door. Or there is a problem of colliding with another vehicle.

That is, when the control unit does not open the opening and closing door, when the vehicle is started by the first station in the station by error, the vehicle collides with the opening and closing door, the first vehicle in the state that the vehicle is not started in the second station When the vehicle is started in the station at the station there is a problem that the carriers collide with each other.

In addition, although the control unit controls the driving of the vehicle to stop at the first exact position station, when the vehicle does not exactly stop at the first exact position station overrun (run) the problem of collision with the closed opening and closing door have.

Therefore, such a collision of the truck causes the collapse of the wafer cassette loaded on the truck, resulting in a large amount of wafer loss, and this wafer loss greatly affects the semiconductor production yield, and deteriorates the stability of the carriage drive device. Let's go.

Accordingly, the present invention is to solve the above problems of the prior art, to prevent the collision of the carriage to prevent the collision of the carriage by the overrun by overrun by forcibly stopping the driving of the carriage even if the error of the carriage driving occurs. The purpose is to provide a device.

Therefore, in order to achieve the above object, the vehicle collision preventing device according to the present invention is installed in the rail portion between the first stationary station and the opening and closing door to detect the driving of the vehicle overrun the first stationary station. The sensing means and the rail portion between the first stationary station and the opening / closing door are rotatably installed in the first direction and the second direction to selectively pass or stop the vehicle according to the first direction or the second direction drive. The vehicle stopping means, the braking means installed in the vehicle and actuated during the second direction driving of the vehicle stopping means to forcibly stop the vehicle, and the detection means is determined when the opening / closing door is closed. Operating the vehicle to detect the vehicle overruning the first in-position station and simultaneously driving the vehicle stop means to rotate in the first direction to the second direction. And a braking control unit for stopping the vehicle by the moving means.

1 is a schematic diagram for explaining a conventional vehicle drive control device.

Figure 2 is a schematic diagram for explaining the installation state of the vehicle collision avoidance apparatus according to the present invention.

3 is a cross-sectional view for explaining a carriage collision preventing device according to the present invention.

Figure 4 is a <IV-IV '> direction of Figure 3 for explaining the braking means of the vehicle collision avoidance device according to the present invention.

5 is a cross-sectional view taken along the line <V-V '> of FIG.

6 is a view of the <VI-VI '> direction in FIG.

FIG. 7 is a view of the direction of FIG.

■ Brief description of the main parts of the drawing ■

1 carrier 2 rail part

3,4: position station 5: opening and closing door

6: control unit 10: cassette loading plate

12: driving body 20: rail cover

21: guide rail 30: braking control unit

40: detection means 50: vehicle stop means

60: braking means

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the vehicle collision preventing device according to the present invention in detail.

First, the vehicle collision preventing device according to the present invention is installed in the rail portion 2 between the first stationary station 3 and the opening and closing door 5 of the conventional vehicle drive control device to malfunction of the control unit 6 Alternatively, an overrun of the transport vehicle 1 prevents the transport vehicle 1 which is not stopped in the first stationary station 3 from colliding with the opening / closing door 5 in the closed state.

2 and 3, the vehicle collision avoidance device according to the present invention is installed on the rail portion 2 between the first stationary station 3 and the opening and closing door 5, the first stationary station The sensing means 40 for detecting the driving of the transport vehicle 1 overruning the 3 and the rail portion 2 between the first stationary station 3 and the opening / closing door 5 in the first direction and the first direction. Carrier stop means 50, which is installed to be rotatable in two directions and selectively passes or stops the transport vehicle 1 in accordance with the first direction or the second direction drive, and is provided in the transport vehicle 1, The braking means 60, which is operated when the stop means is driven in the second direction, forcibly stops the carriage 1, and determines whether the opening / closing door 5 is opened or closed, and the detecting means 40 is closed. The vehicle stop means 50 by detecting the carriage 1 overruning the first stationary station 3 by And a braking control unit 30 which drives the vehicle 1 to be stopped by the braking means 60 by rotationally driving from the first direction to the second direction.

In more detail, with reference to FIG. 3, the sensing means 40 includes horizontal supports 41-1 and 41-2 fixedly installed at both sides of the rail cover 20 in the transverse direction, respectively. And the vertical supports 42-1 and 42-2 installed perpendicular to the horizontal supports 41-1 and 41-2 and the predetermined positions of the vertical supports 42-1 and 42-2, respectively. It consists of a light emitting sensor 43 and a light receiving sensor 44 for detecting the overrun of the vehicle according to the transmission.

Here, the installation position of the light emitting sensor 43 and the light receiving sensor 44 is installed at the same height that the cassette loading plate 10 of the transporting vehicle 1 moving along the rail portion 2 passes. It is desirable to detect the passage of 1).

3, 4, 6, and 7, the vehicle stopping means 50 is installed in two rows inside the rail cover 20 of the rail unit 2 and is driven by a separate driving means. The fixed body 52 fixed to the upper end of any one of the guide rails (21-1, 21-2) of the driving wheel 13 of the driving wheel (1) by a fixing bolt 51 And an electromagnetic rod 55 installed on the solenoid portion 54 fixed to the fixing bolt 53 on one surface of the fixed body 52 to move forward or backward according to the change of the magnetic field. The locking lever 56 is rotatably installed on the fixed body 52 so as to be connected to the end by the fixing pin 57, and rotates in the first direction or the second direction according to the forward and backward movement of the electronic rod 55, and the fixed body. And stoppers 58-1 and 58-2 provided at 52 to limit the first or second rotation angle of the locking lever 56. As shown in FIG.

Here, the first direction of the locking lever 56 is a position inclined 35 ° (Θ) in the clockwise direction with respect to the vertical line (a), the second direction of the locking lever 56 is perpendicular to the vertical line (a) It is a erected position.

In addition, one end and the other end of the locking lever 56 is provided with a fixed body 52 and a return spring 59 supported on the locking lever 56 so that the locking lever 56 in the first direction rotates in the second direction. To be restored by the elastic restoring force of the return spring 59.

In addition, the installation positions of the stoppers 58-1 and 58-2 are installed on both left and right sides of the lower end of the locking lever 56 so that the locking lever 56 does not incline more than the first direction and does not stand more than the second direction. .

In addition, referring to FIGS. 4 and 5, the braking means 60 includes a support rod 11 supporting the cassette mounting plate 10 at the center of the upper surface, and guide rails 21-1 and 21-at the four corner lower surfaces. 2) one end is fixed to the upper surface of the vehicle driving body 12 having the driving wheel 13 sliding along the fixed pins 62-1 and 62-2 so as to be rotatable in the first or second direction. The first and second brakes 61-1 and 61-2 and the first and second brakes 61-1 and 61-2, respectively, which are provided to correspond to the left and right sides, respectively. Interruption of the braking linings 63-1, 63-2 and the first and second brakes 61-1, 61-2 in close contact with the rail wall surfaces 21-1a, 21-2a of the guide rail during rotation. One end is supported on the inner side and the other end is supported on the fixing protrusion 65 installed on the driving body 12 so that the first and second brakes 61-1 and 61-2 are moved in the first direction by the elastic restoring force. Applying force to rotate in 2 directions The first brakes prevent the first and second brakes 61-1 and 61-2 from rotating in the second direction by suppressing the elastic restoring force of the compression springs 64-1 and 64-2 and the pressure springs. It is composed of an intermittent lever (67) having a locking groove (68) on which the other end of the second brake (61-2) is fixed by a fixing pin (66) at the other end of the 61-1.

In addition, a locking protrusion 69 is formed on the intermittent lever 67 above the locking groove 68 on which the other end of the second brake is engaged, and the driving body 12 is slid in a position where the locking protrusion 69 is formed. While being formed at a position passing through the lower end of the locking lever 56.

In addition, the protruding height of the locking protrusion 69 prevents the locking lever 56 in the first direction from being caught by the locking protrusion 69, and is such that the locking lever 56 in the second direction is caught by the locking protrusion 69. To protrude.

The braking control unit 30 determines whether the opening / closing door 5 is opened or closed, controls the operation of the light emitting sensor 43 and the light receiving sensor 44, which are sensing means, and the light transmitted from the light emitting sensor 43. It is detected whether or not the light receiving sensor 44 reaches this.

In addition, the braking control unit 30 controls the change in the magnetic field of the solenoid part 54 so as to change the magnetic field of the solenoid part 54 when the light of the light emitting sensor 43 does not reach the light receiving sensor 44. do.

It will be described a process of preventing the vehicle from colliding with the opening and closing door by the vehicle collision prevention device according to the present invention having such a configuration.

First, the control unit 6 of the vehicle driving apparatus stops the vehicle 1 at the first stationary station 3 and the second stationary station 4, and sequentially opens and closes the opening and closing door 5. To transport the carriage 1.

While repeatedly performing such a process, the braking control unit 30 of the vehicle collision preventing device according to the present invention determines whether the opening / closing door 4 is opened and closed, and the light emitting sensor 43 and the open / closing door 4 are opened. Do not operate the light receiving sensor 44.

Then, when an abnormal operation occurs in the control unit 6 of the vehicle driving control device and the opening / closing door 5 is not opened, the braking control unit 30 recognizes that the opening / closing door 5 is closed, and then emits the light sensor 43. And the light receiving sensor 44 is operated.

Therefore, when the carriage 1 is oscillated by the abnormal operation of the control unit 6 in the first stationary station 3, or when the vehicle 1 is overrun without stopping in the first stationary station 3. The braking control unit 30 recognizes that the opening / closing door 4 is closed to irradiate light from the light emitting sensor 43 and to receive light from the light receiving sensor 44.

Then, as the carriage 1 is started, the cassette loading plate 10 of the carriage is emitted from the light emitting sensors 43 respectively installed in the transverse direction on the rail portion 2 and received by the light receiving sensor 44. Blocking the braking control unit 30 recognizes the light blocking to the light receiving sensor 44.

Accordingly, the braking control unit 30 recognizes that the opening / closing door 5 is closed and determines that the vehicle 1 is overrun by blocking the light transmitted from the light receiving sensor 44. 54) will change the magnetic field.

When the magnetic field of the solenoid portion 54 is changed, the electromagnetic rod 55, which has been kept in the advanced state by the magnetic field, no longer maintains the advanced state, and is 35 ° by the elastic restoring force of the return spring 59. The locking lever 56 of the first direction inclined to rotates in the second direction to stand vertically.

At this time, even if the locking lever 56 is returned by the elastic restoring force of the return spring 59, the stopper 58-2 does not rotate the second direction or more and maintains the vertically standing state.

The vertical locking lever 56 is driven by the first and second brakes 61-1 and 61-2 installed on the driving body 12 of the vehicle being driven and driven by compression springs 64-1 and 64. The locking projections 69 of the intermittent lever 67 are restrained from restoring by -2).

That is, the locking lever 56 vertically erected in the second direction pushes the locking projection 69 of the intermittent lever 67 in the fixed state to rotate the second brake 61-2 to insert the groove of the intermittent lever ( 68).

Accordingly, the first and second brakes 61-1 and 61-2 whose restoring force of the compression springs 64-1 and 64-2 are suppressed by the intermittent lever 67 are rotated by the elastic restoring force of the compression spring. Then, the braking linings 63-1 and 63-2 are brought into close contact with the rail wall surfaces 21-1a and 21-2a of the guide rail.

Therefore, the driving body 12 is forcibly stopped by the braking linings 63-1 and 63-2 in close contact with the rail wall surfaces 21-1a and 21-2a so that the transport vehicle 1 opens and closes the door 5. The drive is stopped before it hits.

As described above, the carriage collision preventing device according to the present invention compensates for the malfunction of the carriage drive control device so that the carriage is forcibly stopped to prevent collision between the carriage and the opening and closing door to prevent the collapse of the wafer cassette. Will be prevented.

Therefore, it is possible to prevent wafer damage due to wafer cassette collapse and to secure wafer transfer stability and to improve semiconductor device production yield.

Claims (8)

Sensing means mounted on a rail portion between the first stationary station and the opening / closing door to sense driving of the vehicle to overrun the first stationary station; It is installed to be rotatable in the first direction and the second direction in the rail portion between the first position station and the opening and closing door to selectively pass or stop the carriage according to the first direction or the second direction drive A carriage stop means; Braking means mounted to the vehicle to be operated when the vehicle stop means is driven in a second direction to forcibly stop the vehicle; If it is determined whether the opening / closing door is opened or closed, the detection means is operated to detect the vehicle to overrun the first fixed position station and simultaneously stop the vehicle stopping means in a second direction. And a braking control unit configured to rotate in the direction to stop the carriage by the braking means. The method according to claim 1, The sensing means includes a horizontal support fixed to each side of the rail cover in the transverse direction; A vertical support vertically installed on the horizontal support; And a light emitting sensor and a light receiving sensor which are installed to correspond to predetermined positions of the vertical support and detect an overrun of the transport vehicle according to whether light is transmitted therethrough. The method according to claim 2, And the light emitting sensor and the light receiving sensor are installed at a height through which the cassette loading plate of the transporting vehicle moving along the rail portion passes. The method according to claim 1, The vehicle stopping means includes a fixed body fixed to the upper end of the guide rail on one side of the guide rail installed in two rows inside the rail cover of the rail unit; An electronic rod installed on a solenoid portion fixed to one surface of the fixed body by a fixing bolt and moving forward or backward according to a magnetic field change; A locking lever rotatably installed on the fixed body so as to be connected to an end of the electronic rod by a fixing pin and rotating in a first direction in a second direction by the advancement of the electronic rod; And a return spring which is respectively supported by the locking lever and the fixed body to rotate the locking lever in a second direction to a first direction. The method according to claim 4, The second direction of the locking lever is a vertically erected position, the first direction is a carriage collision preventing device characterized in that the position inclined 35 ° clockwise with respect to the second direction. The method according to claim 1 or 4, The braking means includes: a driving body having a support rod supporting a cassette loading plate of the transport vehicle at a center of an upper surface thereof and a driving wheel sliding along guide rails at four corners of a lower surface thereof; First and second brakes having one end fixed to an upper surface of the driving body and rotatably installed in a first direction or a second direction; A braking lining disposed on an outer side of the middle of the first and second brakes, the brake lining being in close contact with the rail wall of the guide rail when the second direction rotates; Compression springs supported by a fixing protrusion provided on an inner side of the middle of the first and second brakes and an upper surface of the driving body to apply force to rotate the first and second brakes in a second direction; A locking pin fixed to the other end of the first brake to prevent the first and second brakes from rotating in the second direction, the locking lever having the locking groove to which the other end of the second brake is caught, and the locking lever rotated in the second direction; Carrying collision preventing device, characterized in that consisting of intermittent lever having a locking projection in contact with each other. The method according to claim 6, The protruding height of the locking protrusion is not in contact with the locking lever when the locking lever is in the first position, but the contact lever is in contact with the locking protrusion when the locking lever is in the second position. The method according to claim 2 or 4, And the braking control unit changes the magnetic field of the solenoid part when the light of the light receiving sensor does not reach the light emitting sensor.