KR100320553B1 - Electrolytic polishing - Google Patents

Abstract

The present invention relates to an electropolishing method and a device for polishing an inner surface of a tank, and particularly, to store ultrapure gas for supplying ultra-pure gas and contents to an essential part of equipment for producing a semiconductor. Large tanks, food and beverage storage tanks, chemical storage tanks, pharmaceutical storage tanks, liquor storage tanks, various agitating tanks, various supply tanks, etc. Material with high viscosity by preventing the elution of impurities and harmful substances such as iron, nickel, chromium and tallow contained in the stainless steel tissue used in the tank production of the tank, increasing the purity and mirroring the surface roughness of the inner surface of the tank Sanitary products can be produced by preventing surface adhesion of the surface, and productivity can be improved by preventing corrosion. The present invention provides an internal electropolishing method and apparatus for tanks that can increase the utilization of resources by re-electrolytic polishing and reuse of the tank many times.

Description

Internal electropolishing method of tank and its apparatus {ELECTROLYTIC POLISHING}

The present invention relates to an electropolishing method and an apparatus for polishing an inner surface of a tank, and in particular, a large tank storing ultra-pure gas for supplying ultra-pure gas and contents to key components of equipment for producing a semiconductor. Most tanks can be obtained by electropolishing the inner surface of various milk storage tanks, chemical storage tanks, chemical storage tanks, pharmaceutical storage tanks, various stirring tanks, and various supply tanks. The surface of the material with high viscosity by improving the purity by preventing the elution of impurities and harmful substances such as iron, nickel, chromium and tallow contained in the stainless steel structure used in manufacturing Sanitary products can be produced by preventing attachment, and productivity can be improved by preventing corrosion. The present invention relates to an internal electropolishing method and a device of a tank, which is capable of reusing and re-polishing a number of times to increase the utilization of resources.

In general, large tanks that store ultra-pure gas made of stainless steel, food and beverage storage tanks, chemical storage tanks, pharmaceutical storage tanks, liquor storage tanks, various stirring tanks, various supply tanks, various dairy oil storage tanks, etc. The inner surface of large tanks should have a mirror-like surface finish.

That is, when the surface roughness of the inner surface of the tank falls, various impurities and harmful substances are attached to the inner surface of the tank, and microorganisms can breed.

As described above, when microorganisms are attached to the tank and start breeding, various gases or medicines stored in the tank, and liquor or dairy oil also contaminate food, drink, etc., and thus cannot produce hygienic products.

In addition, since the inner surface of the tank is easily corroded due to the propagation of microorganisms as described above, the surface roughness of the inner surface of the tank must be mirrored (mirrorized).

Conventionally, the operation of polishing the inner surface of the tank with high precision has been dependent on the manual labor of the operator.

That is, the worker was to grind the inner surface of the tank by a hand grinder to enter the tank and grind the inner surface of the tank.

As described above, as the polishing operation of the inner surface of the tank is performed by the operator's hand, it becomes very difficult to obtain surface roughness and smoothness such as a mirror.

Due to the lack of ideal surface roughness and smoothness as described above, impurities and foreign substances are adhered to the inner surface of the tank, and the growth of microorganisms is activated. It will contaminate beverages, and it will be impossible to produce hygienic products.

In addition, since the inner surface of the tank is easily corroded due to the growth of the microorganisms as described above, there was a problem in that the tanks had to be replaced with a new tank within a short time after the tanks were installed.

Particularly, when the gas supplied from the tank is supplied to the semiconductor line, the gas and impurities are often mixed and supplied as the core parts for manufacturing the semiconductor, and thus the defect rate of the semiconductor manufacturing is very high. there was.

The purpose of the present invention for solving and solving these conventional problems,

Large tanks or food and beverage storage tanks, chemical storage tanks, pharmaceutical storage tanks, liquor storage tanks that store ultra-pure gas for supplying ultra-pure gas and contents to key components of equipment for semiconductor production. Various types of stirring tanks, various supply tanks, etc. The inner surface of various dairy oil storage tanks can be obtained by electropolishing to obtain the ideal smooth surface of iron, nickel, chromium, wood, etc. It can improve the purity by preventing the dissolution of the same impurities and harmful substances and at the same time mirror the surface roughness of the inner surface of the tank to prevent the surface adhesion of materials with high viscosity to produce hygienic products and to prevent corrosion and improve productivity. Even when the tank is replaced, the used tank can be reused by re-electropolishing and re-polishing many times, thereby increasing the utilization of resources. It can provide the objective to help.

The method of the present invention for achieving the above object,

A tank mounting process for seating a tank for electropolishing the inner surface on a plurality of insulator rollers that are forward and reverse rotated by a reduction motor, and a plurality of tanks are installed inside the tank to install negative electrode pieces inside the tank. (-) Electrode piece feeding process for inputting two (-) electrode pieces, and connecting the connecting tube connected with the (-) electrode piece and the connecting rod to the supporting rod so that the (-) electrode pieces are fixed while keeping a constant distance from the inner surface of the tank. Fixing the (-) electrode piece to be fixed, and the (-) electrode piece is in contact with the tank to prevent sparks from occurring and at the same time to allow the current of the (-) electrode piece to be supplied to the inner surface of the tank to the (-) electrode piece A non-conductor fixing process for fixing a non-conductor formed with a number of pores, and to support between the joint pipe and the support rod of the tank with a non-conductive fixing tube and adjusting piece to support the support rod on both sides of the tank The process of supporting the support rod, the process of injecting the electrolyte solution to inject the electrolyte which causes the dissolution of the metal surface due to the electron movement into the tank, and supplying the (-) current to the (-) electrode piece coupled to the support rod In order to supply positive current to the tank, the rectifier is connected to the support rod and the rectifier is connected to the tank. The tank is connected to the rectifier and the positive pole. Forward and reverse rotation of the tank so that the dissolution phenomenon generated on the inner surface of the tank by the interaction with the negative current supplied from the (-) electrode piece uniformly acts on the entire surface of the tank. It is possible to achieve the object of the present invention by the rotation process.

In addition, the apparatus of the present invention for achieving the above object,

A plurality of insulator rollers are rotated forward and reverse by driving the reduction motor to seat the tank to electrolytically polish the inner surface, and are installed on the inner surface of the tank seated on the insulator roller. A plurality of (-) electrode pieces to be generated, a support rod for fixing a connecting tube connected by a (-) electrode piece and a connecting rod such that the (-) electrode pieces are fixed while keeping a constant distance from the inner surface of the tank, and the (- In order to prevent the electrode piece from coming into contact with the tank and to generate sparks, the non-conductor having a large number of pores fixed to the (-) electrode piece so as to allow the current of the (-) electrode piece to be supplied to the inner surface of the tank; Fixing tube and adjusting piece made of non-conductor supported between the joint pipe and the support rod of the tank to support the joint pipe of both sides, and the dissolution of the metal surface by the electrophoretic movement into the tank The negative electrode is connected to the supporting rod to supply the (-) current to the electrolyte electrode injected to generate the negative electrode and the (-) electrode piece coupled to the supporting rod, and to supply the positive current to the tank. It is possible to achieve the object of the present invention by providing a rectifier connecting the poles.

1 is a cross-sectional view showing the inner surface electropolishing method and apparatus of the present invention tank

Figure 2 is a side view showing the driving relationship of the inner surface electropolishing apparatus of the present invention tank

Figure 3 is a cross-sectional view showing the effect of the inner surface electropolishing of the invention tank

<Description of Signs for Important Areas in Drawings>

101-Reduction Motor 102-Drive Shaft

103-driven sprocket 104-single insulator roller

105-Chain 106-Interlocking Sprockets

107-Interlocking shaft 108-Other insulator roller

109-bracket 110-support roller

111-support 112-bearing

113-fixing tube 114-screw

115-adjustment 116-screws

117 connector 118 connector rod

120-Insulator with 119-(-) Electrode

121-tank 122-sealing pipe

123-Electrolyte 124-Rectifier

The method of the present invention will be described in detail with reference to FIG.

A tank mounting process for seating the tank 121 on which the inner surface is electropolished on a plurality of insulator rollers 104 and 108 which are rotated forward and reverse by driving the reduction motor 101;

(-) Electrode piece input process of injecting a plurality of (-) electrode piece 119 into the tank 121 to install the (-) electrode piece 119 in the tank 121,

The (-) electrode piece 119 is connected to the support rod 111 by a connecting pipe 117 connected with the (-) electrode piece 119 and the connecting rod 118 so as to be fixed while maintaining a constant distance from the inner surface of the tank 121. Fixing the negative electrode piece to be fixed,

In order to prevent the (-) electrode piece 119 from coming into contact with the tank 121 and to generate a spark, the current of the (-) electrode piece 119 can be supplied to the inner surface of the tank 121 (-). An insulator fixing process for fixing the insulator 120 having numerous pores formed on the electrode piece 119,

In order to support the support rods 111 on both side joint pipes 122 of the tank 121, between the joint pipe 122 and the support rods 111 of the tank 121 is a non-conductive fixing tube 113 and the adjusting piece 115 Supporting process of supporting rod

An injection process of an electrolyte solution for injecting an electrolyte solution 123 which generates an elution phenomenon of a metal surface due to electron movement into the tank 121;

In order to supply a (-) current to the (-) electrode piece 119 coupled to the support rod 111 and supply a (+) current to the tank 121, the (-) pole of the rectifier 124 may be supported by the support rod 111. And connecting the rectifier to connect the positive pole of the rectifier 124 to the tank 121;

The inner surface of the tank 121 is interacted with the (-) current supplied from the (-) electrode piece 119 by forward and reverse rotation of the tank 121 connecting the rectifier 124 and the (+) pole. Elution (溶出) occurring in the tank 121 is made of a forward, reverse rotation process of the tank to be uniformly applied to the entire surface of the inner surface.

Then, the structure of the present invention will be described in detail with reference to Figures 1 to 3.

A plurality of non-conductor rollers 104 and 108 rotated forward and reverse by driving the reduction motor 101 to seat the tank 121 for electropolishing the inner surface and forward and reverse rotation,

A plurality of negative electrode pieces 119 installed on the inner surface of the tank 121 seated on the non-conductive rollers 104 and 108 to generate a negative current;

A support rod for fixing the connecting pipe 117 connected to the (-) electrode piece 119 and the connecting rod 118 so that the (-) electrode pieces 119 are fixed while maintaining a constant distance from the inner surface of the tank 121 ( 111),

In order to prevent the (-) electrode piece 119 from coming into contact with the tank 121 and to generate a spark, the current of the (-) electrode piece 119 can be supplied to the inner surface of the tank 121 (-). A non-conductor 120 having a large number of pores fixed to the electrode piece 119,

Fixing tube 113 and adjusting piece made of a non-conductor supported between the joint pipe 122 and the support rod 111 of the tank 121 to support the support rod 111 on both side joint pipe 122 of the tank 121 115,

An electrolyte 123 injected to generate a dissolution phenomenon of a metal surface due to electron movement into the tank 121;

In order to supply (-) current to the (-) electrode piece 119 coupled to the support rod 111 and to supply (+) current to the tank 121, a (-) pole is connected to the support rod 111. The tank 121 is provided with the rectifier 124 which connects the positive electrode.

In addition, the driving of the non-conductor roller is a drive shaft 102 connecting the reduction motor 101 and one side of the non-conductor roller 104,

A drive sprocket 103 coupled to the drive shaft 102,

Interlocking sprocket 106 receives the rotational force of the drive sprocket 103 by the chain 105,

In order to transmit the rotational force of the interlocking sprocket 106 to the other non-conductive rollers 108, the interlocking sprocket 106 and the other non-conductive roller 108 are provided to be driven by the interlocking shaft 107 connecting the other non-conductive rollers 108. It was.

In addition, a plurality of brackets 109 are provided to support both sides of the tank 121 to prevent the tank 121 seated on the insulator rollers 104 and 108 from being moved while being pushed left and right during forward and reverse rotation. It was further provided with a support roller 110 coupled to.

When the inner surface electropolishing method of the tank according to an embodiment of the present invention as described above is described by process.

First, in the tank mounting process, the tank 121 to electropolize the inner surface of the plurality of insulator rollers 104 and 108 is seated.

Since the tank 121 is very large in weight and volume, the tank 121 is mounted using a crane.

Then, the plurality of joint pipes connected to the tank 121 are all sealed by using a gasket. However, the joint pipe 122 on both sides of the tank 121 should be provided with the support rod 111 in the process described later, and generated by the interaction of chemicals contained in the electrolytic solution and the electrolyte 123 during electrolytic polishing. Since the gas must be discharged, it is kept open.

When the mounting process of the tank is completed, the process of adding the negative electrode piece is continued.

In the process of inserting the (-) electrode pieces, a plurality of (-) electrode pieces 119 are introduced into the tank 121 through the fitting pipe 122, and the quantity appropriate for the area of the tank 121 is provided. The negative electrode pieces of the will be added.

As described above, when the input of the (-) electrode piece 119 is completed, the worker enters the tank and the (-) electrode piece fixing process of connecting the (-) electrode piece 119 to the connecting rod 118 is continued.

In the process of fixing the (-) electrode piece, the operator is connected to the (-) electrode piece 119 and the connecting rod 118 so that the (-) electrode pieces 119 are fixed while maintaining a constant distance from the inner surface of the tank 121. The connection pipe 117 is fixed to the support rod 111.

The (-) electrode piece 119 is fixed by tightening the bolts fastened to the respective connection pipes 117. When the position of the connection pipe 117 is changed on the supporting rod 111, the bolts are loosened. It is possible to change the position of the connecting pipe (117).

Meanwhile, the insulator 120 is fixed to the (-) electrode piece 119 by the insulator fixing process. The insulator 120 has the (-) electrode piece 119 in contact with the tank 121. Numerous pores are formed to prevent sparks from occurring and to allow the current of the negative electrode piece 119 to be supplied to the inner surface of the tank 121.

As described above, the supporting rods 111 holding the plurality of (−) electrode pieces 119 are supported on both side joint pipes 122 of the tank 121 by the supporting rod support process.

That is, the support rod 111 is fixed to the fixing tube 113 together with the bearing 112 and the rotating surface when the adjustment piece 115 for coupling the screw rod 116 to the screw hole 114 of the fixing tube 113 Since the length of the adjusting piece 115 is stretched and adjusted, it is possible to support the support rod 111 to appropriately correspond to the size of the joint pipe 112.

When the support process of the support rod is completed as described above, the electrolyte 123 is injected by the injection process of the electrolyte into the tank 121.

The electrolyte 123 serves to mirror the surface roughness of the inner surface of the tank 121 by generating a dissolution phenomenon of the metal surface due to electron movement.

In the connecting process of the rectifier, the (-) pole of the rectifier 124 is connected to the support rod 111 and the (+) pole of the rectifier 124 is connected to the tank 121 by being coupled to the support rod 111. The negative current is supplied to the negative electrode piece 119 and the positive current is supplied to the tank 121.

Therefore, the positive current of the tank 121 is caused to dissolve on the inner surface of the tank 121 by interacting with the negative current supplied from the (-) electrode piece 119, resulting in surface roughness. Will be mirrored.

As described above, the tank 121 is rotated 360 ° forward and then 360 ° again by the forward and reverse rotation of the tank so that the dissolution phenomenon proceeding in the inner surface of the tank 121 is uniformly acted on the entire surface of the tank 121. Repeat the reverse rotation with.

The reverse rotation of the tank 121 is made possible by the insulator rollers 104 and 108 which are rotated forward and reverse by the reduction motor 101.

The operation by the device of the present invention will be described.

First, Figure 1 is a cross-sectional view for explaining the inner surface electropolishing method and apparatus of the present invention tank, press the electrolytic polishing start button to operate the rectifier 124, the (-) current of the rectifier 124 is a support rod 111 And (-) current supplied to the connecting pipe 117 and the connecting rod 118 and the (-) electrode piece 119, and the (-) current supplied to the (-) electrode piece 119 fills numerous pores of the insulator 120. The state is supplied to the inner surface of the tank 121 through.

In addition, the positive current of the rectifier 124 is supplied to the tank 121 while the internal surface of the tank 121 is eluted by interaction with the negative current supplied from the (-) electrode piece 119.溶出) phenomenon will occur.

That is, the roughness of the inner surface of the tank 121 is composed of a peak (maximum) and a valley (minimum), and the valley and the valley are almost the same position due to the dissolution phenomenon in which the valley is more prominent than the peak. Lose.

Therefore, it is possible to obtain a high surface roughness on the inner surface of the tank.

On the other hand, while the electropolishing as described above proceeds at the same time as the reduction motor 101 rotates the drive shaft 102 while the forward rotation rotates the drive sprocket 103 and the one side non-conductor roller 104 forward.

In addition, the driving sprocket 103 is connected to the chain 105 by the interlocking sprocket 106 is rotated while rotating the interlocking shaft 107, as shown in Figure 2 and 3 the other insulator roller 108 ) Is also in the state of forward rotation.

As described above, the tank 121 seated on the insulator rollers 104 and 108 by the forward rotation of the plurality of insulator rollers 104 and 108 supporting the tank 121 also rotates slowly at a reduced speed. The inner surface of the tank 121 can be electropolished.

In addition, the deceleration motor 101 rotates a predetermined number of revolutions forward, that is, when the tank 121 rotates about 360 °, the direction is reversed.

This is to prevent the (+) wire of the rectifier 124 connected to the tank 121 is twisted or tangled.

As described above, the tank 121 may also be reversely rotated by the reverse rotation of the reduction motor 101 to uniformly polish all surfaces of the inner surface of the tank, thereby obtaining high smoothness.

On the other hand, the support rod 111 for fixing the (-) electrode piece 119 is coupled to the bearing tube 112 to the non-conductive fixing tube 113 to maintain the stop state during the rotation of the tank 121 Thus, the negative electrode of the rectifier 124 is not twisted or tangled.

In addition, the adjusting piece 115, which is coupled to the screw rod 1l6 to the screw hole 114 of the fixing tube 113 is a structure in which the length of the stretched and contracted by the rotation and reverse rotation, the tank 121 joint pipe In accordance with the diameter of 122, it is possible to use elastically.

In addition, the tank 121 attached to the insulator rollers 104 and 108 may be moved and dislodged while being pushed left and right by many forward and reverse rotations.

In order to prevent this, in the present invention, a plurality of support rollers 110 are supported on both sides of the tank 121 in a state in which a plurality of support rollers 110 are installed on the bracket 109 so as to prevent the left and right movement of the tank 121.

In addition, by supporting the connecting rod 118 and the (-) electrode piece 119, the connecting rod 118 is tightened by bolts to the configuration that can be disassembled and assembled by the support rod 111 to match the size of the tank 121 ) And (-) the electrode 111 can be widened or narrowed.

In this way, the present invention is a large tank that stores ultra-pure gas to supply ultra-pure gas and contents to the core parts of equipment for producing semiconductors, food, beverage storage tanks, chemical storage tanks, and pharmaceuticals. Storage tanks, liquor storage tanks, various agitating tanks, various supply tanks, and iron contained in the structure of stainless steel used in most tanks by making the inner surface of various dairy oil storage tanks an ideal smooth surface by electropolishing. Improves purity by preventing elution of impurities such as nickel, chromium and tallow, and at the same time, increases the surface roughness of the inner surface of the tank to prevent surface adhesion of substances with high viscosity to produce hygienic products and prevent corrosion Productivity can be improved, and even when the tank is replaced, the replaced tank can be re-polished and reused several times. Nopilsu have a useful effect in the utilization of resources.

Claims (4)

A tank seating process for seating a tank for electropolishing the inner surface on a plurality of insulator rollers which are rotated forward and reverse by driving a reduction motor; (-) Electrode piece feeding process of injecting a plurality of (-) electrode piece into the tank to install a (-) electrode piece in the tank, (-) Electrode piece fixing process of fixing the connecting pipe connected to the (-) electrode piece and the connecting rod to the support bar so that the (-) electrode pieces are fixed while maintaining a constant distance from the inner surface of the tank, Non-conductor fixing process for fixing the non-conductor formed with a number of pores in the (-) electrode piece to prevent the (-) electrode piece is in contact with the tank to prevent sparking and to supply the current of the (-) electrode piece to the tank inner surface and, A process of supporting the support rod for supporting the support rod between the joint pipe and the support rod of the tank with a non-conductive fixing tube and a control piece to support the support rod on both sides of the tank; An injection process of an electrolyte solution for injecting an electrolyte solution to generate a dissolution phenomenon of a metal surface due to electron movement into the tank; In order to supply (-) current to the (-) electrode piece coupled to the support rod and to supply (+) current to the tank, the (-) pole of the rectifier is connected to the support rod and the (+) pole of the rectifier is connected to the tank. Rectifier connection process, By discharging the tank connected between the rectifier and the positive electrode, the dissolution phenomenon generated in the inner surface of the tank by interacting with the negative current supplied from the (-) electrode piece Electrolytic polishing method of the inner surface of the tank, characterized in that consisting of the forward, reverse rotation process of the tank to be uniformly applied over the entire surface. A plurality of insulator rollers which are forward and reverse rotated by driving the reduction motor to seat the tank to electrolytically polish the inner surface, A plurality of (-) electrode pieces provided on the inner surface of the tank seated on the insulator roller to generate a (-) current; A support rod for fixing the connection pipe connected to the (-) electrode piece and the connecting rod such that the (-) electrode pieces are fixed while maintaining a constant distance from the inner surface of the tank; A non-conductor having a large number of pores fixed to the (-) electrode piece in order to prevent the (-) electrode piece from coming into contact with the tank and to prevent a spark from occurring, and to allow a current of the (-) electrode piece to be supplied to the inner surface of the tank; A non-conductive fixing tube and adjusting piece supported between the joint pipe and the support rod of the tank to support the support rod on both side joint pipes of the tank; An electrolyte injected into the tank to generate a dissolution phenomenon of the metal surface due to electron movement; In order to supply (-) current to the (-) electrode piece coupled to the support rod and to supply (+) current to the tank, a rectifier is connected to the (-) pole to the support rod and the (+) pole to the tank. Electrolytic polishing device for the inner surface of the tank, characterized in that provided. The method of claim 2, The drive of the non-conductor roller is a drive shaft for connecting the reduction motor and one side of the non-conductor roller, A drive sprocket coupled to the drive shaft; An interlocking sprocket which receives the rotational force of the drive sprocket by a chain; Inner electrolytic polishing device of the tank characterized in that it is provided to be driven by an interlocking shaft connecting the interlocking sprocket and the other non-conducting roller in order to transmit the rotational force of the interlocking sprocket. The method of claim 2, The inner surface of the tank further comprises a support roller coupled to a plurality of brackets to support both sides of the tank to prevent the tank seated on the non-conductive roller is pushed to the left and right during forward and reverse rotation. Electrolytic polishing device.