KR100297910B1 - 패턴투영방법 - Google Patents

패턴투영방법 Download PDF

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Publication number
KR100297910B1
KR100297910B1 KR1019940026425A KR19940026425A KR100297910B1 KR 100297910 B1 KR100297910 B1 KR 100297910B1 KR 1019940026425 A KR1019940026425 A KR 1019940026425A KR 19940026425 A KR19940026425 A KR 19940026425A KR 100297910 B1 KR100297910 B1 KR 100297910B1
Authority
KR
South Korea
Prior art keywords
light intensity
pattern
light
illumination
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940026425A
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English (en)
Korean (ko)
Other versions
KR950012573A (ko
Inventor
오가와도루
Original Assignee
이데이 노부유끼
소니 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5268904A external-priority patent/JPH07122478A/ja
Application filed by 이데이 노부유끼, 소니 가부시끼 가이샤 filed Critical 이데이 노부유끼
Publication of KR950012573A publication Critical patent/KR950012573A/ko
Application granted granted Critical
Publication of KR100297910B1 publication Critical patent/KR100297910B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1019940026425A 1993-10-27 1994-10-15 패턴투영방법 Expired - Fee Related KR100297910B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5268904A JPH07122478A (ja) 1993-10-27 1993-10-27 パターン投影方法
JP93-268,904 1993-10-27

Publications (2)

Publication Number Publication Date
KR950012573A KR950012573A (ko) 1995-05-16
KR100297910B1 true KR100297910B1 (ko) 2001-10-24

Family

ID=51396956

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940026425A Expired - Fee Related KR100297910B1 (ko) 1993-10-27 1994-10-15 패턴투영방법

Country Status (2)

Country Link
KR (1) KR100297910B1 (enExample)
TW (1) TW269737B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4937058B2 (ja) * 2007-09-19 2012-05-23 本田技研工業株式会社 自動二輪車

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5363170A (en) * 1991-08-09 1994-11-08 Canon Kabushiki Kaisha Illumination device and projection exposure apparatus using the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5363170A (en) * 1991-08-09 1994-11-08 Canon Kabushiki Kaisha Illumination device and projection exposure apparatus using the same

Also Published As

Publication number Publication date
KR950012573A (ko) 1995-05-16
TW269737B (enExample) 1996-02-01

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