KR100284469B1 - 광선을 조향하는 방법 및 장치 - Google Patents
광선을 조향하는 방법 및 장치 Download PDFInfo
- Publication number
- KR100284469B1 KR100284469B1 KR1019920025282A KR920025282A KR100284469B1 KR 100284469 B1 KR100284469 B1 KR 100284469B1 KR 1019920025282 A KR1019920025282 A KR 1019920025282A KR 920025282 A KR920025282 A KR 920025282A KR 100284469 B1 KR100284469 B1 KR 100284469B1
- Authority
- KR
- South Korea
- Prior art keywords
- mirror
- light
- steering apparatus
- characteristic signal
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
- G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81266291A | 1991-12-23 | 1991-12-23 | |
| US812,662 | 1991-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR930013811A KR930013811A (ko) | 1993-07-22 |
| KR100284469B1 true KR100284469B1 (ko) | 2001-03-02 |
Family
ID=25210269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920025282A Expired - Fee Related KR100284469B1 (ko) | 1991-12-23 | 1992-12-23 | 광선을 조향하는 방법 및 장치 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5392151A (enExample) |
| EP (1) | EP0548965A1 (enExample) |
| JP (1) | JP3347783B2 (enExample) |
| KR (1) | KR100284469B1 (enExample) |
| CA (1) | CA2085961A1 (enExample) |
| TW (1) | TW223165B (enExample) |
Families Citing this family (93)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6219015B1 (en) | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| KR970003465B1 (ko) * | 1993-09-28 | 1997-03-18 | 대우전자 주식회사 | 광로조절장치의 제조방법 |
| US6426013B1 (en) | 1993-10-18 | 2002-07-30 | Xros, Inc. | Method for fabricating micromachined members coupled for relative rotation |
| US6467345B1 (en) | 1993-10-18 | 2002-10-22 | Xros, Inc. | Method of operating micromachined members coupled for relative rotation |
| US6044705A (en) * | 1993-10-18 | 2000-04-04 | Xros, Inc. | Micromachined members coupled for relative rotation by torsion bars |
| US5485304A (en) * | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
| US5737302A (en) * | 1994-11-10 | 1998-04-07 | Kabushiki Kaisha Toshiba | Galvanomirror and optical disk drive using the same |
| US5841579A (en) | 1995-06-07 | 1998-11-24 | Silicon Light Machines | Flat diffraction grating light valve |
| DE19547584A1 (de) * | 1995-12-20 | 1997-07-03 | Cms Mikrosysteme Gmbh Chemnitz | Mikromechanisches Array und Verfahren zu dessen Herstellung |
| CA2184529A1 (en) * | 1995-09-01 | 1997-03-02 | John H. Tregilgas | Elastic member for micromechanical device |
| US5907425A (en) * | 1995-12-19 | 1999-05-25 | The Board Of Trustees Of The Leland Stanford Junior University | Miniature scanning confocal microscope |
| US6304263B1 (en) | 1996-06-05 | 2001-10-16 | Hyper3D Corp. | Three-dimensional display system: apparatus and method |
| US6259450B1 (en) | 1996-06-05 | 2001-07-10 | Hyper3D Corp. | Three-dimensional display system apparatus and method |
| US6025951A (en) * | 1996-11-27 | 2000-02-15 | National Optics Institute | Light modulating microdevice and method |
| US5982553A (en) | 1997-03-20 | 1999-11-09 | Silicon Light Machines | Display device incorporating one-dimensional grating light-valve array |
| DE19712201A1 (de) * | 1997-03-24 | 1998-10-01 | Bodenseewerk Geraetetech | Mikromechanische Spiegel-Anordnung |
| US6088102A (en) | 1997-10-31 | 2000-07-11 | Silicon Light Machines | Display apparatus including grating light-valve array and interferometric optical system |
| US6271808B1 (en) | 1998-06-05 | 2001-08-07 | Silicon Light Machines | Stereo head mounted display using a single display device |
| US6101036A (en) | 1998-06-23 | 2000-08-08 | Silicon Light Machines | Embossed diffraction grating alone and in combination with changeable image display |
| US6130770A (en) | 1998-06-23 | 2000-10-10 | Silicon Light Machines | Electron gun activated grating light valve |
| US6215579B1 (en) | 1998-06-24 | 2001-04-10 | Silicon Light Machines | Method and apparatus for modulating an incident light beam for forming a two-dimensional image |
| US6872984B1 (en) | 1998-07-29 | 2005-03-29 | Silicon Light Machines Corporation | Method of sealing a hermetic lid to a semiconductor die at an angle |
| US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| US6724125B2 (en) * | 1999-03-30 | 2004-04-20 | Massachusetts Institute Of Technology | Methods and apparatus for diffractive optical processing using an actuatable structure |
| US6173895B1 (en) * | 1999-04-05 | 2001-01-16 | Geo Labs, Inc. | Articulated scan elements with elastomeric hinges, and methods for manufacture of same |
| RU2187830C2 (ru) * | 1999-07-27 | 2002-08-20 | Федосенко Олег Федорович | Однокоординатный сканирующий дефлектор |
| US6275326B1 (en) * | 1999-09-21 | 2001-08-14 | Lucent Technologies Inc. | Control arrangement for microelectromechanical devices and systems |
| US6741383B2 (en) | 2000-08-11 | 2004-05-25 | Reflectivity, Inc. | Deflectable micromirrors with stopping mechanisms |
| US6396619B1 (en) * | 2000-01-28 | 2002-05-28 | Reflectivity, Inc. | Deflectable spatial light modulator having stopping mechanisms |
| US6440252B1 (en) * | 1999-12-17 | 2002-08-27 | Xerox Corporation | Method for rotatable element assembly |
| US6956878B1 (en) | 2000-02-07 | 2005-10-18 | Silicon Light Machines Corporation | Method and apparatus for reducing laser speckle using polarization averaging |
| US6847347B1 (en) * | 2000-08-17 | 2005-01-25 | Xerox Corporation | Electromagnetophoretic display system and method |
| US7116862B1 (en) | 2000-12-22 | 2006-10-03 | Cheetah Omni, Llc | Apparatus and method for providing gain equalization |
| US6897848B2 (en) | 2001-01-11 | 2005-05-24 | Xerox Corporation | Rotating element sheet material and stylus with gradient field addressing |
| US6970154B2 (en) * | 2001-01-11 | 2005-11-29 | Jpmorgan Chase Bank | Fringe-field filter for addressable displays |
| US6445502B1 (en) * | 2001-02-02 | 2002-09-03 | Celeste Optics, Inc. | Variable blazed grating |
| US7339714B1 (en) | 2001-02-02 | 2008-03-04 | Cheetah Omni, Llc | Variable blazed grating based signal processing |
| US7145704B1 (en) * | 2003-11-25 | 2006-12-05 | Cheetah Omni, Llc | Optical logic gate based optical router |
| US20020167695A1 (en) * | 2001-03-02 | 2002-11-14 | Senturia Stephen D. | Methods and apparatus for diffractive optical processing using an actuatable structure |
| US7177081B2 (en) | 2001-03-08 | 2007-02-13 | Silicon Light Machines Corporation | High contrast grating light valve type device |
| US6912078B2 (en) | 2001-03-16 | 2005-06-28 | Corning Incorporated | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
| US6661561B2 (en) * | 2001-03-26 | 2003-12-09 | Creo Inc. | High frequency deformable mirror device |
| US6707591B2 (en) | 2001-04-10 | 2004-03-16 | Silicon Light Machines | Angled illumination for a single order light modulator based projection system |
| US6865346B1 (en) | 2001-06-05 | 2005-03-08 | Silicon Light Machines Corporation | Fiber optic transceiver |
| US6747781B2 (en) | 2001-06-25 | 2004-06-08 | Silicon Light Machines, Inc. | Method, apparatus, and diffuser for reducing laser speckle |
| US6782205B2 (en) | 2001-06-25 | 2004-08-24 | Silicon Light Machines | Method and apparatus for dynamic equalization in wavelength division multiplexing |
| US6625342B2 (en) * | 2001-07-03 | 2003-09-23 | Network Photonics, Inc. | Systems and methods for overcoming stiction using a lever |
| US6614581B2 (en) * | 2001-07-03 | 2003-09-02 | Network Photonics, Inc. | Methods and apparatus for providing a multi-stop micromirror |
| US6829092B2 (en) | 2001-08-15 | 2004-12-07 | Silicon Light Machines, Inc. | Blazed grating light valve |
| US6785001B2 (en) * | 2001-08-21 | 2004-08-31 | Silicon Light Machines, Inc. | Method and apparatus for measuring wavelength jitter of light signal |
| US6930364B2 (en) | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
| US7046410B2 (en) | 2001-10-11 | 2006-05-16 | Polychromix, Inc. | Actuatable diffractive optical processor |
| US6956995B1 (en) | 2001-11-09 | 2005-10-18 | Silicon Light Machines Corporation | Optical communication arrangement |
| US7110671B1 (en) * | 2001-12-03 | 2006-09-19 | Cheetah Omni, Llc | Method and apparatus for scheduling communication using a star switching fabric |
| US6800238B1 (en) | 2002-01-15 | 2004-10-05 | Silicon Light Machines, Inc. | Method for domain patterning in low coercive field ferroelectrics |
| US6728023B1 (en) | 2002-05-28 | 2004-04-27 | Silicon Light Machines | Optical device arrays with optimized image resolution |
| US6767751B2 (en) | 2002-05-28 | 2004-07-27 | Silicon Light Machines, Inc. | Integrated driver process flow |
| US7054515B1 (en) | 2002-05-30 | 2006-05-30 | Silicon Light Machines Corporation | Diffractive light modulator-based dynamic equalizer with integrated spectral monitor |
| US6822797B1 (en) | 2002-05-31 | 2004-11-23 | Silicon Light Machines, Inc. | Light modulator structure for producing high-contrast operation using zero-order light |
| US6829258B1 (en) | 2002-06-26 | 2004-12-07 | Silicon Light Machines, Inc. | Rapidly tunable external cavity laser |
| US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
| US6908201B2 (en) | 2002-06-28 | 2005-06-21 | Silicon Light Machines Corporation | Micro-support structures |
| US6714337B1 (en) | 2002-06-28 | 2004-03-30 | Silicon Light Machines | Method and device for modulating a light beam and having an improved gamma response |
| US7057795B2 (en) | 2002-08-20 | 2006-06-06 | Silicon Light Machines Corporation | Micro-structures with individually addressable ribbon pairs |
| US6801354B1 (en) | 2002-08-20 | 2004-10-05 | Silicon Light Machines, Inc. | 2-D diffraction grating for substantially eliminating polarization dependent losses |
| US6712480B1 (en) | 2002-09-27 | 2004-03-30 | Silicon Light Machines | Controlled curvature of stressed micro-structures |
| US6928207B1 (en) | 2002-12-12 | 2005-08-09 | Silicon Light Machines Corporation | Apparatus for selectively blocking WDM channels |
| US6987600B1 (en) | 2002-12-17 | 2006-01-17 | Silicon Light Machines Corporation | Arbitrary phase profile for better equalization in dynamic gain equalizer |
| US7057819B1 (en) | 2002-12-17 | 2006-06-06 | Silicon Light Machines Corporation | High contrast tilting ribbon blazed grating |
| US6934070B1 (en) | 2002-12-18 | 2005-08-23 | Silicon Light Machines Corporation | Chirped optical MEM device |
| US6927891B1 (en) | 2002-12-23 | 2005-08-09 | Silicon Light Machines Corporation | Tilt-able grating plane for improved crosstalk in 1×N blaze switches |
| US7068372B1 (en) | 2003-01-28 | 2006-06-27 | Silicon Light Machines Corporation | MEMS interferometer-based reconfigurable optical add-and-drop multiplexor |
| US7286764B1 (en) | 2003-02-03 | 2007-10-23 | Silicon Light Machines Corporation | Reconfigurable modulator-based optical add-and-drop multiplexer |
| US6947613B1 (en) | 2003-02-11 | 2005-09-20 | Silicon Light Machines Corporation | Wavelength selective switch and equalizer |
| US6922272B1 (en) | 2003-02-14 | 2005-07-26 | Silicon Light Machines Corporation | Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
| US6922273B1 (en) | 2003-02-28 | 2005-07-26 | Silicon Light Machines Corporation | PDL mitigation structure for diffractive MEMS and gratings |
| US6829077B1 (en) | 2003-02-28 | 2004-12-07 | Silicon Light Machines, Inc. | Diffractive light modulator with dynamically rotatable diffraction plane |
| US6806997B1 (en) | 2003-02-28 | 2004-10-19 | Silicon Light Machines, Inc. | Patterned diffractive light modulator ribbon for PDL reduction |
| US7027202B1 (en) | 2003-02-28 | 2006-04-11 | Silicon Light Machines Corp | Silicon substrate as a light modulator sacrificial layer |
| US7391973B1 (en) | 2003-02-28 | 2008-06-24 | Silicon Light Machines Corporation | Two-stage gain equalizer |
| US7042611B1 (en) | 2003-03-03 | 2006-05-09 | Silicon Light Machines Corporation | Pre-deflected bias ribbons |
| CA2464207C (en) * | 2004-04-14 | 2011-03-29 | Institut National D'optique | Light modulating microdevice |
| GB2414403B (en) * | 2004-05-28 | 2009-01-07 | Cilag Ag Int | Injection device |
| JP4653473B2 (ja) * | 2004-08-06 | 2011-03-16 | 株式会社リコー | 光走査装置・画像形成装置 |
| US7623142B2 (en) * | 2004-09-14 | 2009-11-24 | Hewlett-Packard Development Company, L.P. | Flexure |
| US7468572B2 (en) * | 2005-03-28 | 2008-12-23 | Maurice Thomas | Versatile digitally controlled micro-mechanical actuator |
| CA2507177C (en) * | 2005-05-13 | 2012-04-24 | Institut National D'optique | Image projector with flexible reflective analog modulator |
| US20070035798A1 (en) * | 2005-08-11 | 2007-02-15 | Oettinger Eric G | Apparatus and method to compensate for the non-linear movement of an oscillating mirror in a display or printer |
| US7429983B2 (en) | 2005-11-01 | 2008-09-30 | Cheetah Omni, Llc | Packet-based digital display system |
| WO2007089770A2 (en) * | 2006-01-31 | 2007-08-09 | Polychromix Corporation | Hand-held ir spectrometer with a fixed grating and a diffractive mems-array |
| US7505195B2 (en) * | 2006-05-04 | 2009-03-17 | Miradia Inc. | Reflective spatial light modulator with high stiffness torsion spring hinge |
| US7443568B2 (en) * | 2006-05-04 | 2008-10-28 | Miradia Inc. | Method and system for resonant operation of a reflective spatial light modulator |
| US7782521B2 (en) * | 2007-05-31 | 2010-08-24 | Texas Instruments Incorporated | System and method for displaying images |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4755013A (en) * | 1985-01-23 | 1988-07-05 | Canon Kabushiki Kaisha | Light scanning optical system of an image output scanner using an electro mechanical light modulator |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH633902A5 (fr) * | 1980-03-11 | 1982-12-31 | Centre Electron Horloger | Dispositif de modulation de lumiere. |
| US4317611A (en) * | 1980-05-19 | 1982-03-02 | International Business Machines Corporation | Optical ray deflection apparatus |
| JPS61503056A (ja) * | 1984-08-21 | 1986-12-25 | シンプソン,ジヨ−ジ ア−ル. | 静電作動2進シヤツタ装置のアレイ |
| US5061049A (en) * | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
| US5096279A (en) * | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4662746A (en) * | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
| DE3625642A1 (de) * | 1986-07-29 | 1988-02-11 | Messerschmitt Boelkow Blohm | Zweifach gelagerter drehspiegel fuer optische systeme |
| US5083857A (en) * | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
| US5142405A (en) * | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
-
1992
- 1992-12-21 CA CA002085961A patent/CA2085961A1/en not_active Abandoned
- 1992-12-23 EP EP92121929A patent/EP0548965A1/en not_active Withdrawn
- 1992-12-23 KR KR1019920025282A patent/KR100284469B1/ko not_active Expired - Fee Related
- 1992-12-24 JP JP34475492A patent/JP3347783B2/ja not_active Expired - Fee Related
-
1993
- 1993-05-11 TW TW082103643A patent/TW223165B/zh active
-
1994
- 1994-06-28 US US08/267,321 patent/US5392151A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4755013A (en) * | 1985-01-23 | 1988-07-05 | Canon Kabushiki Kaisha | Light scanning optical system of an image output scanner using an electro mechanical light modulator |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0548965A1 (en) | 1993-06-30 |
| TW223165B (enExample) | 1994-05-01 |
| JPH05333279A (ja) | 1993-12-17 |
| JP3347783B2 (ja) | 2002-11-20 |
| KR930013811A (ko) | 1993-07-22 |
| CA2085961A1 (en) | 1993-06-24 |
| US5392151A (en) | 1995-02-21 |
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