KR100249684B1 - Cathode ray tube - Google Patents

Abstract

The present invention provides a spacer coated with a diamond-like carbon film on the spacer in order to enhance the lubricity and wear resistance of the electrode mounting spacer of the cathode tube electron gun, and the spacer substrate is subjected to a bias voltage of -200 to 200 m in an argon atmosphere of 1 to 30 mTorr pressure. Sputter washing at −1000 V for 5-30 minutes; Raising the surface temperature of the substrate for 3 to 20 minutes at a bias voltage of -20 to -200 V in an argon atmosphere of 30 to 100 mTorr pressure; Transferring the gas composition while maintaining each step for 1 to 10 minutes from 100% argon atmosphere to 100% hydrocarbon atmosphere while maintaining the pressure in the chamber at 10 to 100 mTorr over 3 to 10 steps; Hydrocarbon gas was introduced from the gas supply system, the pressure was 10 to 1000 mTorr, the bias voltage was -100 to -1000 V, and the film synthesis rate was 0.5 to 10 m / h. Coated to thickness; It provides a diamond-like carbon film coating method of a spacer for mounting a cathode tube electrode.

Description

Spacer for electrode installation of cathode tube electron gun coated with diamond-like carbon film and manufacturing method thereof

The present invention relates to a spacer for mounting an electrode of a cathode electron gun (hereinafter referred to as a "spacer"), and more particularly, to improve work efficiency by coating a diamond-like carbon film to improve the lubricity and wear resistance of the spacer. The present invention relates to a spacer and a method of manufacturing the same, which can suppress electrode damage caused by the electrode, thereby reducing a defective rate of a product and improving productivity.

1 is a schematic diagram of a general cathode tube electron gun 3. The electron gun 3 is composed of a cathode for emitting an electron beam and an electron beam control device. The dual electron beam control device is composed of several electrodes 2, and it is very important to maintain the shape and spacing of these electrodes accurately for accurate control of the electron beam. When the electrode is damaged, electric field distortion occurs depending on the damaged part, which causes problems with angle control and focus control of the electron beam.

The spacer 1 for mounting the electrode 2 of the electron gun 3 is a tool for adjusting the distance between the electrodes 2 with a precision of several μm when assembling the electrode 2 of the electron gun, and the spacer 1 between the electrodes 2. ), The electrode 2 is assembled, and the spacer 1 is removed to accurately maintain the gap between the electrodes 2.

Such spacers are currently used in the form of a high-carbon steel, copper alloy, stainless steel, such as a steel sheet in a suitable form, and the polymer material is used in the area where the electrode damage caused by the spacer is fatal. However, in the former case, the friction coefficient between the electrode and the spacer is about 0.7, so that when the spacer is removed, the operator may apply excessive force of 6 kg or more, or the operator may have to remove the spacer by shaking the ground, causing the torsion of the electrode and It will cause surface damage. On the other hand, in the latter case, since the wear resistance of the polymer material is bad, there is a problem that the spacer has a short life and needs to be replaced frequently.

An object of the present invention is to solve the above-described problems of the electrode mounting spacer of the conventional cathode tube electron gun.

1 is a schematic diagram of a general cathode tube electron gun, and shows a state diagram of a spacer inserted and removed for installation of the cathode tube electron gun electrode.

2 is a schematic diagram of a radio wave plasma CVD apparatus used in the present invention.

3 shows an embodiment of a spacer according to the invention.

Figure 4 shows a schematic view of the cross-section of the diamond-like carbon film and the transition layer is coated on the spacer according to the present invention.

Figure 5 shows the life of the coating spacer of the present invention according to the coating layer thickness, measured by a ball on disk (wear on disk) wear tester.

Description of the main symbols in the drawings

1. Spacer 2. Electrode

3. Electron gun 4. Synthetic chamber

5. Gas supply system 6. Power supply system

7. Vacuum gauge 8. Diamond-like carbon film

9. Transition layer 10. Spacer substrate

The present invention provides a spacer for electrode mounting of a cathode tube electron gun in a spacer for electrode mounting of a cathode tube electron gun, wherein a diamond-like carbon film is coated on the spacer.

In addition, the present invention, the spacer substrate sputter cleaning for 5 to 30 minutes at a bias voltage -200 to -1000V in an argon atmosphere of 1 to 30mTorr pressure; Raising the surface temperature of the substrate for 3 to 20 minutes at a bias voltage of -20 to -200 V in an argon atmosphere of 30 to 100 mTorr pressure; Transferring the gas composition while maintaining each step for 1 to 10 minutes from 100% argon atmosphere to 100% hydrocarbon atmosphere while maintaining the pressure in the chamber at 10 to 100 mTorr over 3 to 10 steps; Hydrocarbon gas was introduced from the gas supply system, the pressure was 10 to 1000 mTorr, the bias voltage was -100 to -1000 V, and the film synthesis rate was 0.5 to 10 m / h. Coated to thickness; It provides a diamond-like carbon film coating method of a spacer for mounting a cathode tube electrode.

Diamond-like carbon film is one of the solid carbon films with physicochemical properties similar to diamond, and has the advantages of low synthesis temperature, smooth surface, and easy control of physical properties. In particular, the material has high wear resistance and lubrication properties and is highly applicable to wear resistant solid lubricants. Therefore, the material is utilized in many fields, such as high-lubrication protective coatings of computer hard disks, video heads, and head drums, as well as coatings for machining tools such as drills. For the synthesis of this film, carbon ions must be formed and these ions must have high energy to impinge on the film surface. For the synthesis of these films, many synthetic techniques such as plasma chemical vapor deposition (hereinafter referred to as "CVD") method, sputtering method, ion beam synthesis method, laser ablation method, and a combination of these methods are used. It has been reported and used (Lee Kwang-ryul, Silver Gwang-yong, Korea Metal Society Bulletin, 6 (4), 345 (1993)).

The material of the electrode used in the cathode tube electron gun is mostly iron-based metal, the friction coefficient between the spacer and the electrode has a high value of 0.7 or more. However, the friction coefficient between the diamond-like carbon film and the iron-based metal material according to the present invention varies depending on the atmosphere, but maintains a low value between 0.1 and 0.2 (Surface and Coating Technol., 86-87, 569 for silver light). (1196)). In addition, since diamond-like carbon films are excellent in abrasion resistance and also have a protective ability against a counterpart material, they are an optimal material for coating for improving the performance of these spacers.

However, the inventors have found that when spacers coated with the diamond-like carbon film are used as electrode spacers, when the film thickness is less than 0.1 μm, the coating layer of the coating spacers is easily damaged during use and thus cannot guarantee sufficient spacer life. Found. Therefore, the thickness of the diamond-like carbon film according to the present invention is required to be 0.1 to 2㎛, more preferably a diamond-like carbon film of 0.6㎛ or more.

In addition, the inventors of the present invention, when applying a diamond-like carbon film to a steel sheet made of metal such as high carbon steel, copper alloy, stainless steel, as in the case of the present invention, the film is poor adhesion of the film when the coating thickness of 0.2μm or more thick I found that there was a problem with this peeling off. That is, the inventors have found that in order to improve the thickness of the coating layer is necessary for the successful development of the spacer, and to improve the stability of the thick film, the adhesion strength between the iron-based interface and the diamond-like carbon film layer has to be improved. .

The inventors have used the method of Korean Patent No. 106412 (Inventor Lee, Kwang-Ryul, Silverlight) on the plasma assisted CVD process at 250 kHz for this purpose in the case of radio wave plasma CVD. That is, the iron substrate was sputter-washed using Ar ions, and then a hydrocarbon gas for depositing the diamond-like carbon film was gradually supplied to form a transition layer between the diamond-like carbon film and the substrate. The process for forming the transition layer consists of the following steps:

(1) sputter cleaning the spacer substrate for 5-30 minutes with a bias voltage -200--1000V in an argon atmosphere at 1-30 mTorr pressure;

(2) raising the surface temperature of the substrate for 3 to 20 minutes with a bias voltage -20 to -200 V in an argon atmosphere at a pressure of 30 to 100 mTorr;

(3) Transforming the gas composition while maintaining each step for 1 to 10 minutes from 100% argon atmosphere to 100% hydrocarbon atmosphere while maintaining the pressure in the chamber at 10 to 100 mTorr over 3 to 10 steps.

In this way it was possible to stably grow the diamond-like carbon film of the thickness required in the present invention, the optimum adhesion enhancement process found through the present invention is shown in the examples described below.

The diamond-like carbon film is coated on the spacer substrate on which the transition layer is formed by the above steps in the synthesis chamber by the following diamond-like carbon film coating process:

(4) A diamond-like carbon film was formed on the substrate by introducing a hydrocarbon gas from a gas supply system, a pressure of 10 to 1000 mTorr, a bias voltage of -100 to -1000 V, and a film synthesis rate of 0.5 to 10 m / h. Coating to a thickness of 2 μm.

The present inventors were able to successfully produce a diamond-like carbon film coated spacer by the above-described process. As a result of applying the spacer to the cathode tube manufacturing process, it was very easy to remove the spacer after fixing the electrode and completely eliminated the problem of electrode damage caused by the removal.

Description of the Preferred Embodiments

Preferred embodiments of the present invention will be described in more detail in the following examples. However, the scope of the present invention is not limited to the scope of the embodiments described later.

Example 1

The present inventors used a synthesis method by plasma CVD using a radio wave of 13.56 MHz among the synthesis methods of various diamond-like carbon films in this embodiment. However, as described above, the method of synthesizing the diamond-like carbon film is not limited to the plasma CVD alone. An important parameter controlling the properties of the synthesized film is the energy of the particles impinging on the composite plane (Lee Kwang-Ryul, for the use of silver, Korean Metal Society Bulletin, 6 (4), 345 (1993)). If it can be systematically adjusted, the same technical method as this embodiment can be easily applied.

2 is a schematic diagram of a synthesis apparatus used in the present invention. The apparatus consists of four parts, such as the synthesis chamber 4, the gas supply system 5, the power supply system 6, and the vacuum system 7. In the synthesis of diamond-like carbon film, it is very important to measure the bias voltage formed on the substrate. The equipment can read the bias through the impedance matching network of the radio power supply.

Figure 3 shows the shape of one embodiment of a spacer used in the coating according to the invention, Figure 4 shows a schematic diagram of a cross section coated on a substrate. The spacer is produced by cutting a steel sheet made of metal such as high carbon steel, copper alloy, stainless steel having a thickness of 0.1 to 1.0 into an appropriate shape, and has various shapes. The spacers were washed with soapy water, acetone and ethanol using an ultrasonic cleaner, and then dried and installed on the cathode of the coating machine. According to the present invention, after the transition layer 9 is formed on the spacer substrate 10 through the process of forming the transition layer 9, the diamond-like carbon film 8 is coated.

Before the synthesis of the diamond-like carbon film, the diamond-like carbon film was coated while supplying a hydrocarbon gas after the process of Table 1 to form a transition layer to improve the adhesion of the film.

fair Gas composition pressure Bias Voltage time Sputter cleaning Ar 100% 3mTorr -500V 30 minutes Surface temperature rise Ar 100% 30 mTorr -20V 5 minutes Five stage gas composition transfer Ar 100% → Hydrocarbon 100% Keep 10mTorr Change in each step 1 minute each in 5 steps

In the present invention, benzene, which has a high synthesis rate of film and easy control of film properties, is used as a synthesis gas. However, the scope of the present invention is not limited to benzene alone. Regardless of which hydrocarbon gas such as methane or acetylene is used, the effect of the synthetic gas only affects the experimental variables that determine the film's synthesis rate and properties, but does not affect the synthesis of the diamond-like carbon film itself. (Lee Kwang-Ryeol et al., Diamond and Related Materials, 3 (10), 1260 (1994)). When the film was synthesized, the synthesis pressure was 10 mTorr, and the bias voltage was -400 V. The synthesis rate of the film was 3 μm / h, and the thickness of the film was changed by adjusting the synthesis time.

The coefficient of friction between the spacer surface coated with the diamond-like carbon film and the AISI 52100 bearing ball with a thickness of 0.4 μm was measured by a ball on disk friction coefficient tester, and the temperature was 25 ° C. and the relative humidity was 50%. The friction coefficient was measured to be 0.17 in the atmosphere of. The measured coefficient of friction hardly changed until the vertical load was 200 gf to 1 kgf, and did not change until 10,000 contact cycles. However, the initial coefficient of friction was 0.8 for the uncoated spacers, and as the test progressed, the coefficient of friction exceeded 1 due to the temperature rise of the friction surface and the mass transfer phenomenon. These results show that the sliding capability of the spacer surface was greatly improved by the coating of the diamond-like carbon film.

On the other hand, it is possible to determine that the coating layer is damaged when the friction coefficient is sharply increased during the friction coefficient measurement test by using these characteristics, it was possible to compare and evaluate the life of the coating spacer. The results of examining the lifespan according to the thickness of the coated film are shown in FIG. 5. The thinner the film, the shorter the lifetime of the spacer. In the case of very large thickness, no damage was observed even after 60,000 contact cycles. From these results, it was found that the performance of the spacer coated with the diamond-like carbon film was very excellent.

Example 2

As a result of applying the coating spacer prepared in Example 1 to the electrode fixing process of the cathode tube electron gun, the force required to remove the coating spacer was significantly reduced from 6 kgf to 0.5 kgf, confirming that the operator was much easier to remove the electrode. Could. Therefore, the operator does not apply excessive force for removing the spacer or shake the spacer during loading, thereby significantly reducing the electrode surface damage caused by the spacer.

By coating the diamond-like carbon film coating according to the present invention on the surface of the spacer for mounting the cathode tube electron gun electrode, it is possible to improve the work efficiency and to suppress the electrode damage by the spacer to reduce the defective rate of the product and improve the productivity.

Claims (5)

An electrode mounting spacer of a cathode tube electron gun, wherein the spacer has a diamond-like carbon film coated thereon. The electrode mounting spacer of claim 1, wherein the diamond-like carbon film coating layer has a thickness of 0.1 to 2 µm. The cathode electrode mounting spacer according to claim 1, wherein the base material of the spacer is a metal alloy or polymer made of iron and copper. According to claim 1, wherein the coefficient of friction between the diamond-like carbon film of the spacer and the AISI52100 bearing ball is characterized in that the vertical load range is 0.1 to 0.5 between 0.1-10kgf when measured using a ball-on-disk tester The cathode tube electrode mounting spacer. Sputter cleaning the spacer substrate for 5-30 minutes with a bias voltage -200--1000V in an argon atmosphere at 1-30 mTorr pressure; Raising the surface temperature of the substrate for 3 to 20 minutes at a bias voltage of -20 to -200 V in an argon atmosphere of 30 to 100 mTorr pressure; Transferring the gas composition while maintaining each step for 1 to 10 minutes from 100% argon atmosphere to 100% hydrocarbon atmosphere while maintaining the pressure in the chamber at 10 to 100 mTorr over 3 to 10 steps; Hydrocarbon gas was introduced from the gas supply system, the pressure was 10 to 1000 mTorr, the bias voltage was -100 to -1000 V, and the film synthesis rate was 0.5 to 10 m / h. Coated to thickness; A diamond-like carbon film coating method of a spacer for mounting a cathode tube electrode, characterized in that consisting of.

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