KR100209585B1 - Magneto-optical disk - Google Patents

Magneto-optical disk Download PDF

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Publication number
KR100209585B1
KR100209585B1 KR1019950001798A KR19950001798A KR100209585B1 KR 100209585 B1 KR100209585 B1 KR 100209585B1 KR 1019950001798 A KR1019950001798 A KR 1019950001798A KR 19950001798 A KR19950001798 A KR 19950001798A KR 100209585 B1 KR100209585 B1 KR 100209585B1
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South Korea
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film
magneto
recording
optical disk
dielectric film
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KR1019950001798A
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Korean (ko)
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KR960030144A (en
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김성수
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윤종용
삼성전자주식회사
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/24018—Laminated discs
    • G11B7/24027—Layers; Shape, structure or physical properties thereof
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24062—Reflective layers

Abstract

본 발명은 광자기 디스크에 관한 것으로서, 좀 더 상세하게는 기판상에 제1유전체막, 기록막, 제2유전체막이 순차적으로 적층된 광자기 디스크에 있어서, 상기 제2유전체막의 상단에 제1반사막, 제3유전체막 및 제2반사막을 적층시켜 기록에 필요한 레이저의 출력을 감소시키고 반사율과 기록재생특성을 향상시킨 광자기 디스크에 관한 것이다.The present invention relates to a magneto-optical disk, and more particularly, to a magneto-optical disk in which a first dielectric film, a recording film, and a second dielectric film are sequentially stacked on a substrate, the first reflecting film on an upper end of the second dielectric film. The present invention relates to a magneto-optical disk in which a third dielectric film and a second reflecting film are laminated to reduce the output of a laser required for recording, and to improve reflectance and recording and reproduction characteristics.

Description

광자기 디스크Magneto-optical disk

제1도는 종래의 기술에 따른 광자기 디스크를 개략적으로 도시한 단면도.1 is a schematic cross-sectional view of a magneto-optical disk according to the prior art.

제2도는 본 발명에 따른 광자기 디스크를 개략적으로 도시한 단면도.2 is a schematic cross-sectional view of a magneto-optical disk according to the present invention.

제3도는 종래의 반사막(AlTi)의 두께에 따른 반사율의 변화를 나타낸 그래프.3 is a graph showing a change in reflectance according to a thickness of a conventional reflecting film (AlTi).

제4도는 본 발명에 따라 제조된 반사막중 제3유전체막(17)의 두께에 따른 반사율을 나타낸 그래프.4 is a graph showing the reflectance according to the thickness of the third dielectric film 17 of the reflective film prepared according to the present invention.

제5도는 종래의 광자기 디스크와 본 발명에 따른 광자기 디스크의 기록 레이저 출력에 대한 기록재생특성(CNR)의 변화를 나타낸 그래프.5 is a graph showing a change in recording reproduction characteristics (CNR) with respect to the recording laser output of the conventional magneto-optical disk and the magneto-optical disk according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1, 11 : 기판 2, 12 : 제1유전체막1, 11 substrate 2, 12 first dielectric film

3, 13 : 기록막 4, 14 : 제2유전체막3, 13: recording film 4, 14: second dielectric film

5 : 반사막 17 : 제3유전체막5: reflective film 17: third dielectric film

16 : 제1반사막 18 : 제2반사막16: first reflective film 18: second reflective film

본 발명은 광자기 디스크에 관한 것으로서, 좀 더 상세하게는 기판상에 유전체막, 기록막, 유전체막 및 반사막이 순차적으로 적층된 광자기 디스크에 있어서, 상기 반사막을 제1반사막, 제3유전체막 및 제2반사막으로 형성시켜 기록에 필요한 레이저의 출력을 감소시키고 반사율과 기록재생특성을 향상시킨 광자기 디스크에 관한 것이다.The present invention relates to a magneto-optical disk, and more particularly, to a magneto-optical disk in which a dielectric film, a recording film, a dielectric film and a reflecting film are sequentially stacked on a substrate, wherein the reflecting film is a first reflecting film or a third dielectric film. And a magneto-optical disk formed of a second reflecting film to reduce the output of a laser required for recording and to improve reflectance and recording / reproducing characteristics.

일반적으로, 광자기 디스크는 집광된 레이저와 외부 자계에 의하여 자구를 만들고 다시 레이저로 반사시켜 커(Kerr) 효과로 인한 편광각의 회전에 의하여 데이타를 재생한다. 이때의 기록 및 재생 특성은 다층막의 간섭 효과와 열전달에 의하여 조절되는데 현재까지는 제1도와 같은 4층막 구조가 광 간섭과 열전달에 가장 효과적인 구조로 알려져 있으며 현재 상용화된 디스크들도 모두 4층막 구조이다. 한편, 광자기 디스크의 고밀도화에 따라 광원으로 사용되는 레이저의 파장이 짧아지고 그에 따라 출력도 감소되어 기록 감도의 향상이 주요 현안이 되고 있다.In general, a magneto-optical disk produces a magnetic domain by a focused laser and an external magnetic field and reflects back to the laser to reproduce data by rotation of a polarization angle due to the Kerr effect. At this time, recording and reproducing characteristics are controlled by the interference effect and heat transfer of the multilayer film. Until now, the four-layer film structure as shown in FIG. 1 is known to be the most effective structure for optical interference and heat transfer, and all commercially available disks are four-layer film structures. On the other hand, as the density of the magneto-optical disk increases, the wavelength of the laser used as the light source is shortened, and accordingly, the output is also reduced, thereby improving recording sensitivity.

종래의 광자기 디스크는 기록시 기록막에 흡수된 열이 상대적으로 두꺼운 반사막으로 확산되어 기록시 높은 출력이 요구된다. 광자기 기록 매체 분야의 최고 선발 업체인 일본의 SONY사의 디스크 구조 역시 제1도에 도시된 바와같은 4층막이다(S. Tamada, S. lgarashi, S. Sakamoto, H. Nakayame, M. Yoshida, Y. Nakane ; Jpn. J. Appl. Phys. Vol.23(1989), pp 67-70). 그러나, 열확산을 줄이기 위하여 반사막의 두께를 감소시킬 경우 제3도에 도시된 바와같이 반사율이 감소되므로 재생 특성이 저하되는 문제점이 있었으며, 한편 출력이 약한 가시광 레이저를 광자기 디스크의 기록 및 재생용 광원으로 사용할 경우에 종래의 4층막 구조로는 기록이 불가능하게 되는 문제점이 있었다.Conventional magneto-optical discs require high power during recording because heat absorbed in the recording film is diffused into a relatively thick reflective film during recording. Sony's disc structure, Japan's top picker for magneto-optical recording media, is also a four-layer film as shown in Fig. 1 (S. Tamada, S. lgarashi, S. Sakamoto, H. Nakayame, M. Yoshida, Y). Nakane; Jpn. J. Appl. Phys. Vol. 23 (1989), pp 67-70). However, if the thickness of the reflective film is reduced to reduce the thermal diffusion, the reflectance is reduced as shown in FIG. 3, which causes a problem in that the reproduction characteristics are deteriorated. On the other hand, a weak visible light laser is used as a light source for recording and reproducing a magnetic optical disk. In the case of use, the recording becomes impossible with the conventional four-layer film structure.

따라서, 본 발명의 목적은 상술한 문제점을 해결하기 위하여 광자기 디스크의 구조를 이루는 반사막을 개선하여 제2도에 도시한 바와같이 6층으로 형성시키므로써 기록에 필요한 레이저 출력을 감소시킴과 동시에 반사율 및 기록재생특성을 향상시킨 광자기 디스크를 제공하는데 있다.Accordingly, an object of the present invention is to improve the reflection film forming the structure of the magneto-optical disk to solve the above-mentioned problems, thereby forming six layers as shown in FIG. 2, thereby reducing the laser power required for recording and at the same time reflecting the reflectance. And a magneto-optical disk with improved recording and reproduction characteristics.

상기의 목적을 달성하기 위한 본 발명의 광자기 디스크는 기판상에 제1유전체막, 기록막, 제2유전체막이 순차적으로 적층된 광자기 디스크에 있어서, 상기 제2유전체막의 상단에 제1반사막, 제3유전체막 및 제2반사막이 적층된 구조로 이루어진다.The magneto-optical disk of the present invention for achieving the above object is a magneto-optical disk in which a first dielectric film, a recording film, and a second dielectric film are sequentially stacked on a substrate, the first reflecting film on the top of the second dielectric film, The third dielectric film and the second reflective film are laminated.

이하, 본 발명의 구성을 첨부한 도면을 참조하여 좀 더 구체적으로 살펴보면 다음과 같다.Hereinafter, the configuration of the present invention will be described in more detail with reference to the accompanying drawings.

제2도에 도시된 바와같이, 본 발명의 광자기 디스크는 기판(11)상에 제1유전체막(12), 기록막(13), 제2유전체막(14), 제1반사막(16), 제3유전체막(17) 및 제2반사막(18)으로 순차적으로 적층시킨 구조로 이루어진다.As shown in FIG. 2, the magneto-optical disk of the present invention has a first dielectric film 12, a recording film 13, a second dielectric film 14, and a first reflective film 16 on a substrate 11. As shown in FIG. And a third dielectric film 17 and a second reflective film 18 sequentially stacked.

상기 제1유전체막(12)은 SiN으로 두께가 550-650Å이고, 기록막(13)은 TbFeCo로 두께를 100-200로 형성시키고, 제2유전체막(14)은 SiN으로 두께 200-400이며, 제1반사막(16)은 AlTi로 두께가 50-200, 제3유전체막(17)은 SiN, 또는 AlSiN, 또는 종래 사용되던 SiO2등으로 두께 1000-1300, 최종적으로 두께 300이상으로 AlTi를 제2반사막(18)으로 형성시킨다. 이때, 상기 제1반사막(16), 제3유전체막(17), 및 제2반사막으로 이루어진 반사막(15)은 1350-1600의 두께가 바람직하다.The first dielectric film 12 is 550-650 mm thick with SiN, and the recording film 13 is 100-200 mm thick with TbFeCo. The second dielectric film 14 is formed of SiN and has a thickness of 200-400. The first reflecting film 16 is AlTi, 50-200 thick. The third dielectric film 17 is made of SiN, AlSiN, or conventionally used SiO 2 , with a thickness of 1000-1300. Finally thickness 300 AlTi is formed from the second reflective film 18 as described above. In this case, the reflective film 15 including the first reflective film 16, the third dielectric film 17, and the second reflective film is 1350-1600. The thickness of is preferred.

본 발명에 따른 광자기 디스크의 반사막을 종래의 단층막 대신 제2도에 도시된 바와같이 제1반사막(16)/ 제3유전체막(17)/ 제2반사막(18)으로 형성시킬 경우에 유전체막(17)의 두께에 따라 제4도에 도시된 바와 같은 반사율의 변화를 보인다. 이때, 제1반사막(16)은 레이저 출력을 고려하여 50에서 200사이의 두께로 하는데, 이때 이의 두께가 50이하인 경우에는 재생시 기록막으로부터의 열방출량이 적어 재생신호가 저하되므로 바람직하지 못하며 200을 초과하면 기록시 기록막 으로부터의 열방출량이 많아져서 기록감도가 떨어지므로 바람직하지 못하다.Dielectric when the reflective film of the magneto-optical disk according to the present invention is formed of the first reflecting film 16 / the third dielectric film 17 / the second reflecting film 18 as shown in FIG. 2 instead of the conventional single layer film. According to the thickness of the film 17, a change in reflectance is shown as shown in FIG. At this time, the first reflecting film 16 is 50 in consideration of the laser output From 200 The thickness between which is 50 In the case of less than 200, since the amount of heat emitted from the recording film during reproduction is low, the reproduction signal is lowered. It is not preferable to exceed the temperature because the amount of heat released from the recording film increases during recording and the recording sensitivity is lowered.

제3유전체막(17)의 두께는 만족되는 반사율이 되는 값으로 정하는 데, 이때 두께는 약 1000-1300가 바람직하며, 만약 1000보다 얇거나 1300보다 두꺼우면 반사율의 값이 낮아지며, 가장 바람직하기로는 제1반사막 두께가 100일때 반사율이 최대가 되는 약 1160이다.The thickness of the third dielectric film 17 is set to a value that is a satisfactory reflectivity, wherein the thickness is about 1000-1300 Is preferred, if 1000 Thinner or 1300 The thicker the film, the lower the reflectance value. When the reflectance becomes the maximum when approximately 1160 to be.

또한, 제2반사막(18)의 두께는 반사율이 최대값이 되도록 300이상의 두께로 제조하는데, 이의 두께가 300보다 얇을 경우에는 반사율이 저하되므로 바람직하지 못하며, 가장 바람직하기로는 300이다.In addition, the thickness of the second reflective film 18 is 300 so that the reflectance becomes the maximum value. It is manufactured with a thickness of more than 300 If it is thinner, the reflectance is lowered, which is undesirable, and most preferably 300 to be.

따라서, 본 발명의 광자기 디스크의 반사율이 최대가 되도록 유전체막(SiN)의 두께를 정하면 단일 반사막의 반사율인 81.2%보다 높은 반사율이 나오게 되어 반사막으로 부터 반사되는 광이 기록막을 통과하여 커 회전각의 증대에도 기여하며, 반사율과 커회전각이 모두 증대되므로 기록재생특성이 증가하게 된다. 또한, 종래의 광자기 디스크의 반사막 두께가 약 400인데 반하여 본 발명에서의 제1반사막의 두께를 약 100로 열전도를 1/80이하로 하여 제3유전체막이 제2반사막으로의 열확산을 가로막도록 하여 기록 레이저 파워가 감소하는 효과가 있는 것이다.Therefore, when the thickness of the dielectric film (SiN) is determined so that the reflectivity of the magneto-optical disk of the present invention is maximized, the reflectance is higher than 81.2% of the reflectivity of the single reflecting film, and the light reflected from the reflecting film passes through the recording film so that the rotation angle Also, since both the reflectance and the rotation angle are increased, the recording and reproduction characteristics are increased. In addition, the reflective film thickness of the conventional magneto-optical disk is about 400 In contrast, the thickness of the first reflective film of the present invention is about 100. The thermal conductivity is 1/80 or less so that the third dielectric film prevents heat diffusion to the second reflecting film, thereby reducing the recording laser power.

이하, 실시예 및 비교예를 통하여 본 발명의 효과를 좀 더 구체적으로 살펴보지만, 하기 예에 본 발명의 범주가 한정되는 것은 아니다.Hereinafter, the effects of the present invention will be described in more detail with reference to examples and comparative examples, but the scope of the present invention is not limited to the following examples.

[실시예 1]Example 1

DC 마그네트론방법으로 기판상에 제1유전체막을 SiN으로 두께 600로 하며, 기록막은 TbFeCo로 두께 100으로 통상의 방법으로 증착하고, 다시 제2유전체막을 SiN으로 두께 200, 제1반사막이 AlTi로 두께 100, 제3유전체막은 SiN으로 두께 1100, 최종적으로 두께 300의 AlTi로 제2반사막을 형성시켜 본 발명의 광자기 디스크를 제조하였다.600 nm thick of first dielectric film on a substrate by DC magnetron method The recording film was deposited by TbFeCo at a thickness of 100 in the usual manner, and the second dielectric film was then SiN at 200 thickness. , The first reflecting film is AlTi thickness 100 The third dielectric film is SiN, thickness 1100 Finally thickness 300 The second reflecting film was formed of AlTi to prepare the magneto-optical disk of the present invention.

[비교예 1]Comparative Example 1

실시예 1의 제1반사막, 제3유전체막 및 제2반사막을 AlTi로 단일 반사막으로 하고, 두께를 400으로 한 것을 제외하고는 실시예 1과 동일하게 광자기 디스크를 제조하였다.The first reflecting film, the third dielectric film and the second reflecting film of Example 1 were made of AlTi as a single reflecting film, and the thickness thereof was 400. A magneto-optical disk was produced in the same manner as in Example 1 except for the above.

상기 실시예 1 및 비교예 1에서 제조된 광자기 디스크를 사용하여 기록 출력에 따른 기록재생특성(CNR)의 변화를 측정하였고, 그 결과를 제5도에 도시하였다. 제5도에 도시된 바와같이, 그래프의 모양은 대체로 일치되나 전체적으로 좌측으로 이동되어 기록파워가 종래보다 약 1.0mW감소된 것을 알 수 있다.Using the magneto-optical disks prepared in Example 1 and Comparative Example 1, the change of the recording / playback characteristic (CNR) according to the recording output was measured, and the result is shown in FIG. As shown in FIG. 5, the shapes of the graphs are generally coincident, but are shifted to the left as a whole, indicating that the recording power is reduced by about 1.0 mW.

따라서, 본 발명의 6층막으로 된 광자기 디스크는 제1반사막, 제3유전체막, 제2반사막의 간섭 효과에 의하여 반사율 2%이상, 기록재생특성은 1dB이상 증가하였으며, 제1반사막은 100이하로 얇으며 열전도도가 반사막의 1/40인 유전체막에 의해 제1반사막과 제2반사막이 차단되어 있으므로 기록 파워는 1.0mW까지 감소하여 기록 재생 특성이 모두 향상되는 효과가 있으며, 또한 광자기 디스크 뿐만 아니라 입사광의 열에 의하여 기록하고 반사광에 의하여 재생하는 모든 종류의 매체에 적용이 가능하며 기록 파워가 불충분한 경우 특히 유용하다.Therefore, the magneto-optical disk made of the six-layer film of the present invention increased the reflectance by 2% or more and the recording / reproducing characteristic by 1 dB or more by the interference effect of the first reflecting film, the third dielectric film, and the second reflecting film, and the first reflecting film was 100%. Since the first reflecting film and the second reflecting film are blocked by a dielectric film having a thin and thermal conductivity of 1/40 of the reflecting film, the recording power is reduced to 1.0 mW, and the recording and reproduction characteristics are all improved. The present invention can be applied not only to a disk but also to all kinds of media recorded by the heat of incident light and reproduced by the reflected light, and is particularly useful when the recording power is insufficient.

Claims (3)

기판상에 제1유전체막, 기록막, 제2유전체막이 순차적으로 적층된 광자기 디스크에 있어서, 상기 제2유전체막의 상단에 제1반사막, 제3유전체막 및 제2반사막이 적층된 것을 특징으로 하는 광자기 디스크.A magneto-optical disk in which a first dielectric film, a recording film, and a second dielectric film are sequentially stacked on a substrate, wherein the first reflecting film, the third dielectric film, and the second reflecting film are stacked on top of the second dielectric film. Magneto-optical disk. 제1항에 있어서, 제1반사막의 두께가 50-100이고, 제3유전체막의 두께가 1000-1300인 것을 특징으로 하는 광자기 디스크.The method of claim 1, wherein the thickness of the first reflective film is 50-100 The thickness of the third dielectric film is 1000-1300 Magneto-optical disk characterized in that. 제1항에 있어서, 상기 제2반사막의 두께가 300이상인 것을 특징으로 하는 광자기 디스크.The thickness of the second reflective film is 300. The magneto-optical disk characterized by above.
KR1019950001798A 1995-01-28 1995-01-28 Magneto-optical disk KR100209585B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5640168B1 (en) * 2014-01-24 2014-12-10 コリア インスティチュート オブ ジオサイエンス アンド ミネラル リソースズ Method and apparatus for measuring residual carbon dioxide in pores for underground storage of carbon dioxide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5640168B1 (en) * 2014-01-24 2014-12-10 コリア インスティチュート オブ ジオサイエンス アンド ミネラル リソースズ Method and apparatus for measuring residual carbon dioxide in pores for underground storage of carbon dioxide

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