KR100209284B1 - Magneto-optical direct recording medium - Google Patents

Magneto-optical direct recording medium Download PDF

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KR100209284B1
KR100209284B1 KR1019940021920A KR19940021920A KR100209284B1 KR 100209284 B1 KR100209284 B1 KR 100209284B1 KR 1019940021920 A KR1019940021920 A KR 1019940021920A KR 19940021920 A KR19940021920 A KR 19940021920A KR 100209284 B1 KR100209284 B1 KR 100209284B1
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magneto
film
recording
recording medium
magnetic layer
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KR1019940021920A
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KR960008731A (en
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김명준
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윤종용
삼성전자주식회사
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403Layers; Shape, structure or physical properties thereof
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids

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  • Inorganic Chemistry (AREA)

Abstract

본 발명은 직접기록(Direct Overwrite) 광자기 디스크 기록매체에 관한 것으로, 좀 더 상세하게는 기판상에 보호막, 기록막 및 보호막이 순차적으로 적층된 광자기 기록매체에 있어서, 상기 기록막이 제1자성층으로 커회전각이 0.4이상이고, 보자력이 8~12 KOe이며, 자화값이 80emu이하인 광자기막, 중간층으로 굴절율의 n값이 2.0~2.1이고, k값이 0.1이하인 투명유전체 및 제2자성층으로 커회전각이 0.1이하이고, 보자력이 0.5~1 KOe이며, 자화값이 250emu이상인 순수자성막이 순차적으로 적층된 직접기록 광자기 기록매체에 관한 것이다.The present invention relates to a direct overwrite magneto-optical disk recording medium, and more particularly, to a magneto-optical recording medium in which a protective film, a recording film and a protective film are sequentially stacked on a substrate, wherein the recording film is a first magnetic layer. Rotation angle is 0.4 Photoelectric film having a coercive force of 8 to 12 KOe, a magnetization value of 80 emu or less, an intermediate layer, and a transparent dielectric having a refractive index of n to 2.0 to 2.1 and a k value of 0.1 or less. The present invention relates to a direct recording magneto-optical recording medium in which pure magnetic films having a coercivity of 0.5 to 1 KOe and a magnetization value of 250 emu or more are sequentially stacked.

Description

직접기록 광자기 기록매체Magneto-optical recording media

제1(a)도 및 제1(b)도는 종래의 기술에 따른 광자기 기록매체의 기록막의 일례를 개략적으로 도시한 단면도.1 (a) and 1 (b) are cross-sectional views schematically showing an example of a recording film of a magneto-optical recording medium according to the prior art.

제2도는 종래의 기술에 따른 광자기 기록매체의 기록막의 다른 일례를 개략적으로 도시한 단면도.2 is a cross-sectional view schematically showing another example of a recording film of a magneto-optical recording medium according to the prior art.

제3도는 본 발명에 따른 광자기 기록매체의 기록막을 개략적으로 도시한 단면도.3 is a sectional view schematically showing a recording film of a magneto-optical recording medium according to the present invention.

제4(a)도, 제4(b)도 및 제4(c)도는 본 발명에 따른 광자기 기록매체의 층구조를 개략적으로 도시한 단면도.4 (a), 4 (b) and 4 (c) are cross-sectional views schematically showing the layer structure of the magneto-optical recording medium according to the present invention.

제5(a)도, 제5(b)도, 제5(c)도, 제5(d)도, 제5(e)도 및 제5(f)도는 본 발명에 따른 광자기 기록매체의 기록원리를 개략적으로 도시한 직접기록 원리도.5 (a), 5 (b), 5 (c), 5 (d), 5 (e), and 5 (f) show the magneto-optical recording medium according to the present invention. Direct recording principle diagram schematically showing the principle of recording.

제6도는 본 발명에 따른 광자기 기록매체의 기록재생계의 구조를 나타낸 개략도.6 is a schematic diagram showing the structure of a recording / reproducing system of a magneto-optical recording medium according to the present invention.

제7도는 본 발명의 실시예 1에 따른 광자기 기록매체의 단면도.7 is a sectional view of a magneto-optical recording medium according to Embodiment 1 of the present invention.

제8도는 본 발명의 광자기 기록매채의 중간층 두께에 따라 변화된 반사율을 나타낸 그래프.8 is a graph showing the reflectance changed according to the thickness of the intermediate layer of the magneto-optical recording medium of the present invention.

제9도는 본 발명의 광자기 기록매체의 중간층 두께에 따라 변화된 커회전각을 나타낸 그래프이다.9 is a graph showing the Kerr rotation angle changed according to the thickness of the intermediate layer of the magneto-optical recording medium of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1, 11. 21 : 제1자성층 2, 12, 22 : 제2자성층1, 11. 21: first magnetic layer 2, 12, 22: second magnetic layer

3, 13, 23 : 중간층 4, 4', 14 : 기록막3, 13, 23: intermediate layer 4, 4 ', 14: recording film

15, 16, 18 : 보호막 17 : 반사막15, 16, 18: protective film 17: reflective film

20 : 기판면 31 : 촉화 자계20: substrate surface 31: tactile magnetic field

32 : 기록 자계 33 : 디스크32: recording magnetic field 33: disk

34 : 광학헤드34: optical head

본 발명은 직접기록(Direct Overwrite) 광자기 디스크 기록매체에 관한 것으로, 좀 더 상세하게는 종래의 1세대 광자기 디스크가 소거/기록/검증의 세단계를 거쳐 기록하였으나, 이를 소거단계가 없는 직접기록방식을 도입하여 기록/검증의 두단계 기록이 가능한 직접기록 광자기 디스크 기록매체에 관한 것이다.The present invention relates to a direct overwrite magneto-optical disk recording medium. More specifically, the conventional first-generation magneto-optical disk has been recorded through three steps of erasing / writing / verification. The present invention relates to a direct recording magneto-optical disc recording medium capable of recording / validating two levels by introducing a recording method.

일반적으로 광자기 기록기술은 수직자성을 갖는 박막재질에 레이저광을 주사하여 자구(magnetic domain)에 수직자성의 방향을 바꾸므로서 정보를 기록하고, 기록한 정보를 편광방향의 회전효과(Kerr effect)를 이용하여 판독하는 기술로써, 기존의 자기기록매체에 비해 10~600배 이상의 높은 기록밀도와 헤드와 메디아(Media)의 비접촉에 따라 정보보존이 반영구적인 면에서 각광을 받고 있다. 따라서, 정보화 사회에서 요구하는 데이터 보관의 신뢰성 및 드라이브간의 마진(margin)을 고려하여 고기록 감도의 메디아에 대한 요구가 증가하고 있는 실정이다.In general, the magneto-optical recording technology records information by scanning a laser beam in a thin film material having perpendicular magnetism, changing the direction of the perpendicular magnetism in the magnetic domain, and rotating the recorded information in the polarization direction (Kerr effect). As a technology to read using the information, the preservation of information is semi-permanent due to the recording density of 10 to 600 times higher than the conventional magnetic recording medium and the non-contact between the head and the media. Therefore, in view of the reliability of data storage and margin between drives required by the information society, the demand for media with high recording sensitivity is increasing.

그라나, 종래의 1세대 광자기 디스크는 재기록은 가능하지만 기록하기 전에 먼저 소거를 해야 하는 단점이 있어, 이 점을 해결하기 위해 제1도와 같이 제1자성층(1)과 제2자성층(2)으로 이루어진 교환결합 2층막(제1(a)도 참조)과 여기에 교환결합된 두 자성층(1 및 2) 사이에서 자벽의 안정화를 위한 중간층(3, 제1(b)도 참조)을 적층시킨 3층막을 기록막(4)으로 하는 광자기 디스크가 제안되었다. 또한, 제2도와 같이 상기 기록막(4')에 재생신호를 향상시킬 수 있는 재생층(5)을 적층시킨 사층막 구조를 갖는 광자기 디스크가 있다.However, conventional first-generation magneto-optical disks have the disadvantage that they can be rewritten, but must be erased before recording. To solve this problem, as shown in FIG. 1, the first magnetic layer 1 and the second magnetic layer 2 A laminated intermediate layer (see also 3 and 1 (b)) for stabilization of the magnetic wall between the exchange-bonded two-layer film (see also first (a)) and the two magnetic layers (1 and 2) exchanged and bonded thereto. A magneto-optical disk having a layer film as the recording film 4 has been proposed. Further, as shown in FIG. 2, there is a magneto-optical disc having a four-layer film structure in which a reproduction layer 5 capable of improving a reproduction signal is laminated on the recording film 4 '.

그런데, 이러한 삼층막 및 사층막 구조의 기록막(4 및 4')은 중간층(3)이 금속막이거나 전체기록막의 두께(600~1000)가 두꺼워 감도가 떨어지는 경향이 있고, 삼층막의 경우에는 중간층(3)이 금속막이어서 다중간섭효과가 적은 단점이 있었다. 또한, 교환결합된 제1자성층(1)과 제2자성층(2)의 자화방향에 따른 자구의 안정성이 낮은 문제점이 있었다.By the way, in the recording films 4 and 4 'of the three-layer and four-layer film structures, the intermediate layer 3 is a metal film or the thickness of the entire recording film (600 to 1000). ), The sensitivity tends to be low, and in the case of a three-layer film, the intermediate layer 3 is a metal film, which has a disadvantage of less multi-interference effect. In addition, there is a problem that the stability of the magnetic domain according to the magnetization direction of the first magnetic layer (1) and the second magnetic layer (2) which are exchange-bonded.

따라서, 본 발명의 목적은 상술한 문제점을 해결할 수 있는 직접기록 광자기 기록매체를 제공하는데 있다.Accordingly, it is an object of the present invention to provide a direct recording magneto-optical recording medium which can solve the above problems.

상기 목적을 달성하기 위한 본 발명의 광자기 기록매체는 기판상에 보호막, 기록막 및 보호막이 순차적으로 적층된 광자기 기록매체에 있어서, 상기 기록막이 제1자성층으로 커회전각이 0.4이상이고, 보자력이 8~12 KOe이며, 자화값이 80emu이하인 광자기막, 중간층으로 굴절율의 n값이 2.0~2.1이고, k값이 0.1이하인 투명유전체 및 제2자성층으로 커회전각이 0.1이하이고, 보자력이 0.5~1 KOe이며, 자화값이 250emu 이상인 순수자성막이 순차적으로 적층된 것으로 구성된다.In the magneto-optical recording medium of the present invention for achieving the above object, in the magneto-optical recording medium in which a protective film, a recording film and a protective film are sequentially stacked on a substrate, the recording film is larger than the first magnetic layer and the rotation angle is 0.4. Photoelectric film having a coercive force of 8 to 12 KOe, a magnetization value of 80 emu or less, an intermediate layer, and a transparent dielectric having a refractive index of n to 2.0 to 2.1 and a k value of 0.1 or less. The pure magnetic film having a coercivity of 0.5 to 1 KOe and a magnetization value of 250 emu or more is laminated in this order.

이하 본 발명을 첨부된 도면을 참조하여 좀 더 구체적으로 살펴보면 다음과 같다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

본 발명에 따른 기록막은 제3도에서와 같이 두 개의 비교환결합 자성막(11 및 12)가 투명유전체 중간막(13)의 삼층막으로 구성되어 있는데, 그 상, 하에 유전체 보호막(15 및 17)으로 감싸서 디스크로 제조한다. 이를 제4도에 좀 더 구체적으로 도시하였는데, 기판위에 본 발명의 기록막을 포함한 상층(제4(a)도 참조), 사층(제4(b)도 참조) 및 오층(제4(c)도 참조)의 막을 성막시켜 광자기 디스크를 제조할 수 있다.In the recording film according to the present invention, as shown in FIG. 3, the two non-ring magnetic films 11 and 12 are composed of a three-layer film of the transparent dielectric interlayer 13, wherein the dielectric protective films 15 and 17 are disposed thereon. Wrapped in a disc to make a disc. This is illustrated in more detail in FIG. 4, wherein the upper layer containing the recording film of the present invention (see FIG. 4 (a)), the four layers (see FIG. 4 (b)), and the fifth layer (FIG. Film) to form a magneto-optical disk.

본 발명에 사용된 제1자성층(11)은 커회전각이 0.4이상이고, 보자력이 8~12 KOe이며, 자화값이 80emu이하인 것이 바람직하며, 예를 들어 광자기효과와 보자력이 큰 종래의 재질(TbFeCo)보다 보자력과 큐리온도(150~200℃)가 조금 낮은 TbFeCoCr 광자기막이 있다. 상기 층(11)의 두께는 150 내지 250이 바람직한데, 상기 범위를 벗어나면 기록재생에 필요한 CNR과 기록감도를 충족시키기 어렵다. 상기 중간층(13)은 투명유전체로 두께는 100~300이 바람직하며, 재질로는 고굴절율(n값이 2.0~2.1이고, k값이 0.1이하)을 가지면서 양산성이 있는 ZnS 또는 SiNx등이 있다. 본 발명에 따르면, 상기 투명유전체를 중간층(13)으로 사용함에 따라 열전도율이 낮아져 기록막(14)의 감도가 향상되었고, 상기 투명유전체 두께를 조절하므로써 강도의 재생신호를 최적화시킬 수 있다. 즉, 중간층(13)이 너무 얇으면 재생신호와 감도가 상대적으로 나쁘고 중간층(13)이 너무 두꺼우면 기록에 문제가 발생한다. 상기 제2자성층(12)은 수직자기이방성을 갖추고 있으며 자기광학 효과가 거의 없고 보자력이 작아서 낮은 외부자계로 쉽게 초기화될 수 있으며 이차 기록을 위해 자화값(Ms)이 크고 큐리온도가 상대적으로 높은 재질이 바람직하다. 따라서, 상기 제2자성층(12)은 커회전각이 0.1이하이고, 보자력이 0.5~1 KOe이며, 자화값이 250emu이상이고, 큐리온도가 150~200℃인 것, 예를 들어 코발트계 합금, 예를들면 CoCr 또는 CoPd등이 바람직하다. 한편, 상기 기록막(14)의 두께는 기록감도를 유지시키기 위하여 1000을 초과하지 않는 것이 바람직하다.The first magnetic layer 11 used in the present invention has a larger rotation angle of 0.4 It is preferable that the coercivity is 8 to 12 KOe and the magnetization value is 80 emu or less. For example, the coercivity and Curie temperature (150-200 ° C.) are slightly lower than the conventional material (TbFeCo) having a large magneto-optical effect and high coercivity. There is a TbFeCoCr magneto-optical film. The thickness of the layer 11 is 150 to 250 This is preferable, but it is difficult to meet the CNR and recording sensitivity necessary for recording and reproduction outside the above range. The intermediate layer 13 is a transparent dielectric having a thickness of 100 to 300 The preferred material is ZnS or SiNx, which has high refractive index (n value is 2.0 to 2.1 and k value is 0.1 or less) and has mass productivity. According to the present invention, as the transparent dielectric is used as the intermediate layer 13, the thermal conductivity is lowered, the sensitivity of the recording film 14 is improved, and the reproduction signal of the intensity can be optimized by adjusting the thickness of the transparent dielectric. That is, if the intermediate layer 13 is too thin, the playback signal and sensitivity are relatively bad, and if the intermediate layer 13 is too thick, a problem arises in recording. The second magnetic layer 12 has a perpendicular magnetic anisotropy, has little magneto-optic effect, has a small coercive force, and can be easily initialized to a low external magnetic field, and has a high magnetization value (Ms) and a relatively high Curie temperature for secondary recording. This is preferred. Therefore, the second magnetic layer 12 has a larger rotation angle of 0.1 Below, the coercive force is 0.5-1 KOe, the magnetization value is 250 emu or more, and the Curie temperature is 150-200 degreeC, for example, a cobalt type alloy, for example CoCr or CoPd, is preferable. On the other hand, the thickness of the recording film 14 is 1000 to maintain the recording sensitivity. It is preferable not to exceed.

이러한 조건을 만족하는 본 발명의 기록막(14)을 갖는 광자기 디스크는 초기화자계(31)와 기록자계(32) 및 두가지 레이저파워를 이용하여 직접기록을 실현한다.The magneto-optical disc having the recording film 14 of the present invention that satisfies these conditions realizes direct recording by using the initialization magnetic field 31, the recording magnetic field 32, and two laser powers.

본 발명의 광자기 디스크의 기록원리를 제5도와 제6도에 도시하였다. 상기 도면들로부터 알 수 있는 바와 같이, 상기 디스크의 기록원리는 제2자성층(22) 초기화 자계(31)와 두가지 파워에 의한 2치(値) 기록이다. 하기에서 그 기록원리를 상세히 설명하면, 먼저 초기화 전자석의 초기화자계(31) Bo는 제2자성층(22)의 보자력(Hc2)보다 크게 설정하여 제2자성층(22)만이 제5(b)도와 같이 제2자성층을 한 방향으로 초기화한다. 제1자성층(21)의 보자력(Hc1)은 충분히 커서 초기화 전자석의 영향을 받지 않는다. 즉, 하기의 조건을 만족해야 한다.The recording principle of the magneto-optical disk of the present invention is shown in FIG. 5 and FIG. As can be seen from the figures, the recording principle of the disc is binary recording by the second magnetic layer 22 initializing magnetic field 31 and two powers. Hereinafter, the recording principle will be described in detail. First, the initial magnetic field 31 Bo of the initializing electromagnet is set to be larger than the coercive force Hc 2 of the second magnetic layer 22 so that only the second magnetic layer 22 is separated from the fifth (b) degree. Similarly, the second magnetic layer is initialized in one direction. The coercive force Hc 1 of the first magnetic layer 21 is sufficiently large and is not affected by the initialization electromagnet. That is, the following conditions must be satisfied.

작동온도에서, Hc1 BoHc2 At operating temperature, Hc 1 Bo Hc 2

그후 기록자계(32) B1과 레이저파워 P1및 Ph에 의해 제5(c)도 및 제5(d)도와 제5(e)도 및 제5(f)도와 같은 2치 기록이 이루어지는데, 여기서, P1 및 Ph은 제1자성층(21)과 제2자성층(22) 각각이 큐리온도(150~200℃)에 도달하는데 필요한 레이저파워이다. 여기서 P1은 저파워(Low Power)를 Ph는 고파워(High Power)를 의미한다. 즉, 레이저파워 P1에 의해 제1자성층(21)과 제2자성층(22)의 기록비트가 도달하는 온도를 각각 T11및 T12, 및 Ph에 의해 제1자성층(21)과 제2자성층(22)의 기록비트가 도달하는 온도를 Th1및 Th2라 하면 기록을 위한 조건은 하기와 같다.Thereafter, binary recording such as the fifth (c), fifth (d) and fifth (e) and fifth (f) degrees is performed by the recording magnetic field 32 B 1 and the laser powers P 1 and P h . Here, P1 and Ph are laser powers required for each of the first magnetic layer 21 and the second magnetic layer 22 to reach a Curie temperature (150-200 ° C.). Here, P 1 means low power and P h means high power. That is, the temperatures at which the recording bits of the first magnetic layer 21 and the second magnetic layer 22 reach by the laser power P 1 are respectively T 11 and T 12 , and the first magnetic layer 21 and the second by P h . Assuming that the temperatures at which the recording bits of the magnetic layer 22 reach are Th 1 and Th 2 , the conditions for recording are as follows.

T11≒ Tc1, T12Tc2, Th1Tc1, Th2≒ Tc2 T 11 ≒ Tc 1 , T 12 Tc 2 , Th 1 Tc 1 , Th 2 ≒ Tc 2

여기서 Tc1가 Tc2는 각각 제1자성층과 제2자성층의 큐리온도이다.Where Tc 1 and Tc 2 are the Curie temperatures of the first magnetic layer and the second magnetic layer, respectively.

이때의 기록자계(32) B1은 레이저파워 P1에 의한 제2자성층(22) 기록비트의 온도인 T12에서 제2자성층(22)의 보자력보다 작고 제2자성층(22)이 제1자성층(21)에 주는 자기장인 H21(T12)보다 작은 값이어야 한다.At this time, the recording magnetic field 32 B 1 is smaller than the coercive force of the second magnetic layer 22 at T 12 , which is the temperature of the recording bit of the second magnetic layer 22 by the laser power P 1 , and the second magnetic layer 22 is the first magnetic layer. The value given to (21) must be less than H 21 (T 12 ), the magnetic field.

B1Hc2(T11), B1H21(T12)B 1 Hc 2 (T 11 ), B 1 H 21 (T 12 )

상기 조건을 만족하기 위해서 제2자성층(22)의 자화 Ms(T12)가 충분히 커야 한다. 그 후에 제2자성층(22)의 자화는 초기화 자계(31)를 거치게 되면 다시 한방향으로 정렬하게 된다.In order to satisfy the above condition, the magnetization Ms (T 12 ) of the second magnetic layer 22 should be sufficiently large. After that, when the magnetization of the second magnetic layer 22 passes through the initialization magnetic field 31, the magnetization of the second magnetic layer 22 is aligned in one direction again.

이하 실시예를 통하여 본 발명의 효과를 좀 더 구체적으로 살펴보지만, 하기 예에 본 발명의 범주가 한정되는 것은 아니다.Although the effects of the present invention are described in more detail with reference to the following examples, the scope of the present invention is not limited to the following examples.

[실시예 1]Example 1

인라인 스퍼터(Inline sputter)를 이용하여 제7도와 같이 제1자성층(광자기막)을 약 200의 TbFeCoCr(Tb 19원자%, Fe 70원자%, Co 7원자%, Cr 4원자%), 제2자성층(순수 자기막)을 약 400Å의 CoCr(Co 25원자%, Cr 75원자%) 및 중간층을 200의 SiNx로 하고, 이것의 상부에 SiNx를 약 400및 하부에 SiNx를 약 1000의 두께로 보호막을 형성시켜 본 발명의 광자기 디스크를 제조하였고, 박막제조조건은 통상적인 조건으로 하였다. 상기 광자기 디스크의 반사율 및 커회전각을 측정하여 제8도 및 제9도에 각각 도시하였다.Using an inline sputter, the first magnetic layer (photo magnetic film) is about 200 as shown in FIG. TbFeCoCr (Tb 19 atomic%, Fe 70 atomic%, Co 7 atomic%, Cr 4 atomic%), the second magnetic layer (pure magnetic film) of about 400 Co CoCr (Co 25 atomic%, Cr 75 atomic%) and the intermediate layer 200 SiNx, and about 400 SiNx on top And about 1000 SiNx at the bottom The magneto-optical disk of the present invention was prepared by forming a protective film with a thickness of, and the thin film manufacturing conditions were the usual conditions. The reflectance and Kerr rotation angle of the magneto-optical disk were measured and shown in FIGS. 8 and 9, respectively.

제8도에서 알 수 있는 바와 같이, 중간층의 두께에 따라 반사율값이 변화한다. 반사율은 통상적으로 TbFeCoCr막에 의해 결정되는데 투명중간층에 의해서는 반사율이 약간 감소한다. 제9도에서는 중간층의 두께에 따라 변화하는 θk값을 나타내었다. 중간층이 두꺼워 질수록 θk값이 증가하다가 너무 두꺼워지면 감소하는 경향을 보인다.As can be seen in FIG. 8, the reflectance value changes depending on the thickness of the intermediate layer. The reflectance is usually determined by the TbFeCoCr film, but the reflectance is slightly reduced by the transparent intermediate layer. In FIG. 9, θk values varying with the thickness of the intermediate layer. The thicker the intermediate layer is, the higher the θ k value is and the thicker the layer tends to decrease.

전술한 바와 같이, 본 발명에 다른 투명유전체를 중간층으로 한 직접기록 기록막은 신호가 크다. 또한, 투명유전체가 낮은 열전도도를 가지므로 상대적으로 낮은 파이어에서 기록이 가능할 뿐만 아니라 기록비트의 안정성이 우수하다. 마지막으로 제2자성층을 순수 자성막으로 형성시키므로써 기록과 상관없는 광자기 효과를 제거할 수 있었고, 이에 따라 양면으로 본딩해서 시용해도 문제없이 재생할 수 있는 효과가 있다.As described above, the direct recording recording film having the transparent dielectric as an intermediate layer according to the present invention has a large signal. In addition, since the transparent dielectric material has a low thermal conductivity, not only recording at a relatively low fire is possible, but also stability of the recording bit is excellent. Finally, by forming the second magnetic layer as a pure magnetic film, the magneto-optical effect irrelevant to the recording can be eliminated. Thus, even when bonded to both sides, it can be reproduced without any problem.

Claims (8)

기판상에 보호막, 기록막 및 보호막이 순차적으로 적층된 광자기 기록매체에 있어서, 상기 기록막이 제1자성층으로 커회전각이 0.4이상이고, 보자력이 8~12 KOe이며, 자화값이 80emu이하인 광자기막, 중간층으로 굴절율의 n값이 2.0~2.1이고, k값이 0.1이하인 투명유전체 및 제2자성층으로 커회전각이 0.1이하이고, 보자력이 0.5~1 KOe이며, 자화값이 250emu이상인 순수자성막이 순차적으로 적층된 것을 특징으로 하는 직접기록 광자기 기록매체.In a magneto-optical recording medium in which a protective film, a recording film and a protective film are sequentially stacked on a substrate, the recording film is larger than the first magnetic layer and the rotation angle is 0.4. Photoelectric film having a coercive force of 8 to 12 KOe, a magnetization value of 80 emu or less, an intermediate layer, and a transparent dielectric having a refractive index of n to 2.0 to 2.1 and a k value of 0.1 or less. A direct recording magneto-optical recording medium, characterized in that a pure magnetic film having a coercivity of 0.5 to 1 KOe and a magnetization value of 250 emu or more are sequentially stacked. 제1항에 있어서, 상기 제1자성층의 두께가 150~250이고, 중간층의 두께가 100~300이며, 제2자성층의 두께가 400~500임을 특징으로 하는 직접기록 광자기 기록매체.The method of claim 1, wherein the thickness of the first magnetic layer is 150 ~ 250 And the thickness of the intermediate layer is 100-300 And the thickness of the second magnetic layer is 400 to 500 Direct recording magneto-optical recording medium, characterized in that. 제1항에 있어서, 상기 기록막의 두께가 1000를 초가하지 않는 것을 특징으로 하는 직접기록 광자기 기록매체.A recording medium according to claim 1, wherein the recording film has a thickness of 1000. Direct recording magneto-optical recording medium, characterized in that not exceeding. 제1항에 있어서, 상기 제1자성층이 TbFeCoCr임을 특징으로 하는 직접기록 광자기 기록매체.The direct recording magneto-optical recording medium of claim 1, wherein the first magnetic layer is TbFeCoCr. 제1항에 있어서, 상기 제2자성층이 CoCr 또는 CoPd임을 특징으로 하는 직접기록 광자기 기록매체.2. The direct recording magneto-optical recording medium of claim 1, wherein the second magnetic layer is CoCr or CoPd. 제1항에 있어서, 상기 중간층이 ZnS 또는 SiNx임을 특징으로 하는 직접기록 광자기 기록매체.The direct recording magneto-optical recording medium of claim 1, wherein the intermediate layer is ZnS or SiNx. 제1항에 있어서, 상기 보호막에 반사막이 더욱 적층된 것을 특징으로 하는 직접기록 광자기 기록매체.The direct recording magneto-optical recording medium according to claim 1, wherein a reflective film is further laminated on the protective film. 제6항에 있어서, 상기 반사막에 보호막이 더욱 적층된 것을 특징으로 하는 직접기록 광자기 기록매체.7. The direct recording magneto-optical recording medium according to claim 6, wherein a protective film is further laminated on the reflective film.
KR1019940021920A 1994-08-31 1994-08-31 Magneto-optical direct recording medium KR100209284B1 (en)

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