KR100199389B1 - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium Download PDF

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Publication number
KR100199389B1
KR100199389B1 KR1019910024793A KR910024793A KR100199389B1 KR 100199389 B1 KR100199389 B1 KR 100199389B1 KR 1019910024793 A KR1019910024793 A KR 1019910024793A KR 910024793 A KR910024793 A KR 910024793A KR 100199389 B1 KR100199389 B1 KR 100199389B1
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South Korea
Prior art keywords
film
magneto
optical recording
dielectric
recording medium
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KR1019910024793A
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Korean (ko)
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KR930014306A (en
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문혁
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구자홍
엘지전자주식회사
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material

Abstract

본 발명은 투명수지 PC 기판위에 광학적인 특성에 영향을 주지 않는 범위의 두께로 금속막을 피복하는데 상기 금속막은 Cr, Ni, Ni-Cr, Cu를 사용하고 피복두께는 25-50Å 정도로 하여 기계적 내구성과 신뢰성을 향상시킬 수 있게 한것이다.The present invention coats a metal film with a thickness in a range that does not affect the optical properties on the transparent resin PC substrate, the metal film using Cr, Ni, Ni-Cr, Cu and the coating thickness is 25-50Å by about mechanical durability and It is to improve the reliability.

Description

광자기 기록매체Magneto-optical recording media

본 발명은 광자기 기록매체에 관한 것으로서, 특히 플라스틱 기판과 유전체막 사이의 밀착성 향상을 위해 금속막을 피복하여 기계적 내구성과 신뢰성을 향상시키도록 한것에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium, and more particularly, to improve the mechanical durability and reliability by coating a metal film to improve the adhesion between the plastic substrate and the dielectric film.

종래의 광자기 기록매체는 투명 수지기판(11)위에 무반사층으로 i/4n의 두께(약 800Å)로 제1유전체 SiNx 박막(12)을 고주파 마크네트론(RF-Magnetron) 스퍼터링(Sputtering) 방법을 사용하여 피복하고 기록막(13)으로서 희토류-천이금속예의 TbFeCo 박막을 DC 마그네트 스퍼터링 방법으로 약 250Å 정도 피복한다. 그리고 그위의 희토류 원소중의 Tb의 산화를 방지하기 위하여 제2유전체 SiNz 박막(14)을 약 500Å 정도 피복한후 반사막(15)으로서 약 500Å 정도의 Ai을 피복시킨다. 상기와 같이 피복이 완료된후 UV 수지(17)를 스핀코딩법을 사용하여 약 7㎛ 정도 피복하여서 제1도와 같이 광자기 기록 디스크를 얻도록 하였다.The conventional magneto-optical recording medium is a high frequency mark-netron sputtering method of a first dielectric SiNx thin film 12 having a thickness of i / 4n (about 800 microns) as an antireflection layer on a transparent resin substrate 11. Is coated on the surface of the film, and as a recording film 13, a TbFeCo thin film of rare earth-transition metal is coated by about 250 kW by a DC magnet sputtering method. In order to prevent oxidation of Tb in the rare earth element thereon, the second dielectric SiNz thin film 14 is coated with about 500 GPa, and then Ai is coated with about 500 GPa as the reflecting film 15. After the coating was completed as described above, the UV resin 17 was coated by about 7 mu m using the spin coding method to obtain the magneto-optical recording disk as shown in FIG.

상기와 같은 종래의 디스크는 기판(11)으로부터 편광된 레이져 비임이 들어 가면 제1유전체 SiNx막(12)을 투과한후 기록 TbFeCo막(13)의 표면에 도달하여 비임중의 일부는 반사하여 커(Kerr)효과를 일으키고 나머지 비임은 투과하여 파라데이(faraday)효과를 일으킨후 제2유전체막(14)을 투과하여 A1 반사막(15)에 도달한 다음 다시 반사하여 다중 반사에 의해 신호값의 향상을 일으키게 된다.The conventional disk as described above transmits the first dielectric SiNx film 12 when the laser beam polarized from the substrate 11 reaches the surface of the recording TbFeCo film 13, and reflects part of the beam to be larger. (Kerr) effect, and the remaining beam transmits to cause faraday effect, then passes through the second dielectric film 14, reaches the A1 reflecting film 15, and then reflects back to improve the signal value by multiple reflection. Will cause.

그러나 상기와 같은 종래의 디스크는 투명수지 PC(Poly Carbonatc)기판(11)위에 제1유전체 SiNx막(12)을 고주파 스퍼터링으로 피복할 때 발생하는 열에 의해 PC기판(11)과 제1유전체 SiNx막(12) 사이의 열팽창 계수 차이로 인해서 박리현상이 발생하고 유전체층이 파괴되어 기계적 내구성이 약한 문제점을 가지고 있었다.However, the conventional disk as described above has the PC substrate 11 and the first dielectric SiNx film due to the heat generated when the first dielectric SiNx film 12 is coated on the transparent resin PC (Poly Carbonatc) substrate 11 by high frequency sputtering. Due to the difference in thermal expansion coefficient between (12), peeling phenomenon occurred and the dielectric layer was destroyed, so that the mechanical durability was weak.

상기와 같은 종래의 문제점을 해결하고자 본 발명에서는 투명수지 PC 기판위에 광학적인 특성에 영향을 주지 않는 범위의 두께로 금속막을 피복하는데 상기금속막은 Cr, Ni, Ni-Cr, Cu를 사용하고 피복두께는 25-50Å 정도로 하여 기계적 내구성과 신뢰성을 향상시킬 수 있게 한것에 목적을 둔 것이다.In order to solve the above problems, the present invention coats a metal film with a thickness in a range that does not affect optical properties on the transparent resin PC substrate. The metal film uses Cr, Ni, Ni-Cr, Cu, and the coating thickness. The purpose is to improve mechanical durability and reliability by 25-50Å.

제1도는 종래의 광자기 디스크의 구조도.1 is a structural diagram of a conventional magneto-optical disk.

제2도는 본 발명의 광자기 기록 디스크의 구조도.2 is a structural diagram of a magneto-optical recording disc of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1,11 : 기판 2,12 : 제1유전체막1,11 substrate 2,12 first dielectric film

3,13 : 기록막 4,14 : 제2유전체막3, 13 recording film 4, 14 second dielectric film

5,15 : 반사막 6 : 금속막5,15: reflecting film 6: metal film

7,17 : UN 수지7,17: UN Resin

이하 첨부도면에 따라서 본 발명을 상세히 설명하기로 한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

제2도와 같이 투명수지 PC기판(1) 위에 Cr, Ni, Ni-Cr, Cu를 사용하여 25-50Å 정도 두께의 금속막(6)을 피복하고, 금속막(6)위에 무반사층으로 i/4n의 두께막(약 800Å)로 제1유전체 SiNx 박막(2)을 RF 마그네트론 스퍼터링법으로 피복한후 희토류-천이금속계의 TbFeCo박막 기록막(3)을 DC 마그네트론 스퍼터링법으로 약 250Å 정도 두께로 피복한다. 상기 기록막(3)위에 희토류 원소층의 Tb의 산화를 방지하기 위하여 제2유전체 SiNx 박막(14)을 약 500Å 정도 피복한후 반사막(15)으로 500Å 정도 A1을 피복시키고 상기 피복이 완료된 후 UV 수지(17)를 스핀코딩법을 사용하여 7㎛정도 피복하여서 된 것이다.As shown in FIG. 2, the metal film 6 having a thickness of about 25 to about 50 mW is coated on the transparent resin PC substrate 1 using Cr, Ni, Ni-Cr, and Cu, and the antireflective layer is formed on the metal film 6 as an antireflective layer. The first dielectric SiNx thin film 2 was coated with a 4n thick film (about 800 kW) by RF magnetron sputtering, and then the rare earth-transition metal-based TbFeCo thin film recording film 3 was coated with a DC magnetron sputtering method about 250 kW thick. do. In order to prevent oxidation of Tb of the rare earth element layer on the recording film 3, the second dielectric SiNx thin film 14 was coated with about 500 GPa, and then the A1 was coated with the reflective film 15 about 500 GPa. After the coating was completed, UV was applied. The resin 17 was coated by about 7 mu m using the spin coding method.

상기와 같이 이루어진 본 발명 투명수지기판(1)위에 광학적 특성에 영향을 주지 않는 범위의 두께로서 금속막(6)을 피복하였기 때문에 열팽창계수 차이로 인한 박리현상이 발생하지 않는다. 그리고 본 발명에 의한 광자기 기록매체(디스크)의 광자기 신호 검출원리는 기판(1)으로부터 편광된 레이저 비임이 들어오면 제1유전체 SiNx막(2)과 금속막(6)을 투과한후 기록 TbFeCo막(3)의 표면에 도달하여 비임중의 일부는 반사하여 커효과를 일으키고 나머지 비임은 투과하여 파라데이 효과를 일으킨후 제2유전체(4)를 투과하여 A1반사막(5)에 도달한 다음 다시 반사하여 다중 반사에 의한 신호값의 향상을 일으키게 된다.Since the metal film 6 is coated on the transparent resin substrate 1 of the present invention having a thickness in a range that does not affect the optical properties, the peeling phenomenon due to the difference in thermal expansion coefficient does not occur. The magneto-optical signal detection principle of the magneto-optical recording medium (disc) according to the present invention transmits the first dielectric SiNx film (2) and the metal film (6) when the laser beam polarized from the substrate (1) enters. After reaching the surface of the TbFeCo film 3, part of the beam is reflected to cause the Kerr effect, and the remaining beam is transmitted to cause the Faraday effect, and then passes through the second dielectric 4 to reach the A1 reflective film 5 Reflecting again, the signal value is improved by multiple reflection.

그리고 본 발명과 종래의 디스크를 Z/AD 테스트(일정한 환경속에서 반복해서 테스트하여 기계특성을 시험하는 환경 반복 테스트)를 한결과 표 1과 같다.And the present invention and the conventional disk Z / AD test (environmental repetitive test to test the mechanical properties by repeatedly testing in a constant environment) as a result shown in Table 1.

상기 표와 같이 본 발명에 의해 제작된 광자기 기록매체 디스크는 Z/AD 테스트를 한후에도 양호하기 때문에 환경테스트가 가능한 기계적 특성이 우수한 것이다.As shown in the above table, the magneto-optical recording medium disk produced according to the present invention is excellent even after the Z / AD test, which is excellent in mechanical properties capable of environmental testing.

이와 같이 본 발명은 광학적인 특성에 영향을 주지않는 금속막을 투명수지기판과 유전체막 사이에 피복시켜 밀착성을 향상시키고, 열팽창계수가 다르므로 발생하는 기계응력을 완화하는 작용을 하므로 기계적 특성이 향상된 것이다.As described above, the present invention improves the adhesion by coating a metal film that does not affect the optical properties between the transparent resin substrate and the dielectric film, and reduces the mechanical stress caused by different thermal expansion coefficients, thereby improving mechanical properties.

Claims (3)

투명 기판(1) 상에 금속막(6), 제1유전체막(2), 기록막(3), 제2유전체막(4), 반사막(5), 보호막(7)이 순차적으로 형성됨을 특징으로 하는 광자기 기록매체.The metal film 6, the first dielectric film 2, the recording film 3, the second dielectric film 4, the reflective film 5, and the protective film 7 are sequentially formed on the transparent substrate 1. Magneto-optical recording media. 제1항에 있어서, 상기 금속막(6)의 두께는 25Å-50Å의 두께로 한 것을 특징으로 하는 광자기 기록매체.The magneto-optical recording medium according to claim 1, wherein the metal film (6) has a thickness of 25 kV-50 kPa. 제1항에 있어서, 상기 금속막(6)은 Cr, Ni, Cr-Ni, Cu를 사용한 것을 특징으로 하는 광자기 기록매체.The magneto-optical recording medium according to claim 1, wherein the metal film (6) is made of Cr, Ni, Cr-Ni, and Cu.
KR1019910024793A 1991-12-28 1991-12-28 Magneto-optical recording medium KR100199389B1 (en)

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KR1019910024793A KR100199389B1 (en) 1991-12-28 1991-12-28 Magneto-optical recording medium

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KR930014306A KR930014306A (en) 1993-07-22
KR100199389B1 true KR100199389B1 (en) 1999-06-15

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