KR0176748B1 - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium Download PDF

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KR0176748B1
KR0176748B1 KR1019910004463A KR910004463A KR0176748B1 KR 0176748 B1 KR0176748 B1 KR 0176748B1 KR 1019910004463 A KR1019910004463 A KR 1019910004463A KR 910004463 A KR910004463 A KR 910004463A KR 0176748 B1 KR0176748 B1 KR 0176748B1
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film
recording
rotation angle
magneto
kerr rotation
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KR1019910004463A
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Korean (ko)
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KR920018689A (en
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안동훈
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이헌조
엘지전자주식회사
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field

Abstract

본 발명은 광자기 디스크와 같은 광자기기록매체에 관한 것으로, 종래에는 투명기판위에 제1유전체막, 기록막, 제2유전체막, 반사막을 순차적으로 형성시켜 상기 기록막을 조사되는 빛에 의해 자화시켜 신호를 기록하고, 그 기록막의 자화된 상태에 따라 빛의 반사에 따라 신호를 재생하는데, 일반적으로 기록막은 천이금속의 비정질박막을 이용하고 있으나, 그의 Kerr회전각이 작기 때문에 정보의 기록, 재생에 충분한 신호품질을 얻을 수 있었고, 이를 위해 반사막을 형성시켜 회전각을 향상하도록 하였다. 본 발명은 종래 반사막이 금속반사막으로 형성되어 반사막에 의해 반사되어 기록막을 투과할 때 발생되는 패러데이 효과뿐만아니라 그 금속반사막위에 기록막과 동일재질의 비정질막을 입혀 반사되는 빛이 Kerr회전각을 갖게 함으로써, 원래 기록막의 Kerr회전각과, 반사막상의 기록막에 의한 Kerr회전각 및 패러데이효과등을 얻을 수 있게 하여 전체 kerr회전각을 향상시킴으로써, 기록 신호품질을 향상시켜 고성능의 광자기 디스크등의 제조가 가능하도록 하기 위한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium such as a magneto-optical disk. In the related art, a first dielectric film, a recording film, a second dielectric film, and a reflective film are sequentially formed on a transparent substrate to magnetize the recording film by irradiated light. It records the signal and reproduces the signal according to the reflection of light according to the magnetized state of the recording film. In general, the recording film uses an amorphous thin film of transition metal, but since its Kerr rotation angle is small, Sufficient signal quality could be obtained. For this purpose, a reflective film was formed to improve the rotation angle. According to the present invention, in addition to the Faraday effect generated when the reflective film is formed of a metal reflective film and is reflected by the reflective film and passes through the recording film, the light reflected by applying an amorphous film of the same material as the recording film on the metal reflective film has a Kerr rotation angle. By improving the Kerr rotation angle of the original recording film, Kerr rotation angle and Faraday effect by the recording film on the reflective film, and improving the overall kerr rotation angle, the recording signal quality can be improved to manufacture high-performance magneto-optical discs. This is to make it possible.

Description

광자기록매체Photon recording medium

제1도는 종래의 광자기록매체 구조도.1 is a structure diagram of a conventional photon recording medium.

제2도는 종래 또다른 실시예의 광자기록매체 구조도.2 is a structure diagram of a photonic recording medium according to still another embodiment of the prior art.

제3도는 본 발명에 따른 광자기기록매체의 구조도.3 is a structural diagram of a magneto-optical recording medium according to the present invention.

제4도는 본 발명에 따른 일실시예의 회전각 특성도.4 is a rotation angle characteristic of one embodiment according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

11 : 투명기판 12 : 제1유전체막11 transparent substrate 12 first dielectric film

13 : 기록막 14 : 제2유전체막13: recording film 14: second dielectric film

15 : 반사막 15-1 : TbFeCo막15: Reflective film 15-1: TbFeCo film

15-2 : Al막 16 : UV경화막15-2: Al film 16: UV cured film

본 발명은 광자기기록매체에 관한 것으로, 특히 Kerr회전각을 증대시켜 높은 C/N비를 실현시킬 수 있는 광자기록매체에 관한 것이다.The present invention relates to a magneto-optical recording medium, and more particularly, to a magneto-optical recording medium capable of realizing a high C / N ratio by increasing the Kerr rotation angle.

일반적으로, 종래의 광자기기록매체는 막면에 수직자화가 용이하도록 한 축을 갖는 기록층에 레이저빔을 조사하여 기록면에서 빔이 반사될 때 자화의 방향에 따라 빛의 편광면이 회전하는 Kerr효과를 정보기록에 이용하고 있다.In general, a conventional magneto-optical recording medium irradiates a laser beam to a recording layer having an axis to facilitate perpendicular magnetization to a film surface, and thus has a Kerr effect in which the polarization plane of light rotates in accordance with the direction of magnetization when the beam is reflected from the recording surface. It is used for information recording.

기록층으로 쓰이는 재료는 Tb, Gd등의 희토류원소와 Fe, Co등의 천이금속을 이용한 비정질박막을 이용하고 있으나, 이들 RE-TM비정질박막의 Kerr회전각은 0.5°미만으로 아주 작기 때문에 정보의 기록/재생에서 충분한 신호의 품질을 얻을 수가 없었다.The material used for the recording layer is an amorphous thin film made of rare earth elements such as Tb and Gd and transition metals such as Fe and Co. However, the Kerr rotation angle of these RE-TM amorphous thin films is very small, less than 0.5 °. Sufficient signal quality could not be obtained in recording / playback.

이러한 단점을 개선하기 위해 유전체막으로 간섭층을 만들거나 혹은 반사막을 이용하여 빛이 기록막을 투과할 때 발생되는 패러데이(Faraday)효과도 이용하고 있으나, 기록막 자체의 자기광학 효과가 워낙 작아 충분한 신호품질을 얻기에는 미흡하였다.In order to remedy this drawback, the Faraday effect that occurs when light penetrates the recording film by using an interference layer or a reflective film is used. However, the magneto-optical effect of the recording film itself is so small that a sufficient signal is obtained. It was insufficient to obtain quality.

제1도 및 제2도는 종래의 광자기 기록매체 구조도로서, 이에 도시된 바와같이 기판(1)과 기록층(3)사이에 유전체(antireflection)막(2)을 설치함으로서, 기록층(3)에서 일어나는 Kerr회전을 크게 할 수 있으며, 그 두께를 조절함으로써, 반사율이 최소가 되는 부근에서 Kerr회전을 극대로 할 수 있다. 여기서 미설명 부호(4)는 유전체막이고, 제2도는 기록층(3)을 얇게 하여 일부 빛을 투과하게 한 후 반사막(5)에서 반사되게 하고, 기록층(3)에 반사되는 빛의 Kerr효과와 그 기록층(3)을 투과하여 통과할 때 발생되는 패러데이 효과를 함께 이용하는 구조이다.1 and 2 show a conventional structure of a magneto-optical recording medium. As shown therein, an antireflection film 2 is provided between the substrate 1 and the recording layer 3, whereby the recording layer 3 is formed. It is possible to increase the Kerr rotation that occurs at, and by adjusting the thickness, it is possible to maximize the Kerr rotation near the minimum reflectance. Here, reference numeral 4 denotes a dielectric film, and FIG. 2 shows the Kerr of light reflected by the reflective film 5 after thinning the recording layer 3 to allow some light to pass therethrough. The structure combines the effect with the Faraday effect generated when passing through the recording layer 3.

그러나, 신호품질을 결정하는 C/N비는 일반적으로

Figure kpo00002
.Qk의 곱에 비례하므로 Qk를 크게하는 것이 고품질의 기록재료를 얻는 한 방법인데, 종래의 광자기기록매체의 재료 및 구조로서는 충분한 특성을 얻을 수 없는 문제점이 있다.However, the C / N ratio that determines the signal quality is generally
Figure kpo00002
Since it is proportional to the product of .Q k , increasing Q k is one method of obtaining a high quality recording material. However, there is a problem in that the material and structure of a conventional magneto-optical recording medium cannot obtain sufficient characteristics.

본 발명은 이와같은 문제점을 감안하여 작은 Kerr회전각(Qk)을 높이기 위해 기존에 사용하던 반사막을 기록막과 같은 재료를 사용함으로써, 반사막 자체의 kerr회전각을 기록막의 Kerr회전각에 부가시키도록 하는 광자기기록매체를 창안한 것으로, 이를 첨부한 도면을 참조해 상세히 설명하면 다음과 같다.In view of the above problems, the present invention uses the same reflective film as the recording film to increase the small Kerr rotation angle Q k , thereby adding the kerr rotation angle of the reflection film itself to the Kerr rotation angle of the recording film. The present invention has been made of a magneto-optical recording medium, which will be described in detail with reference to the accompanying drawings.

제3도는 본 발명에 따른 광자기 기록매체의 구조도로서, 이에 도시한 바와같이 투명기판(11)위에 SiNx등의 제1유전체막(12)을 형성하고, 그 제1유전체막(12)위에 TbFeCo등의 RE-TM비정질박막으로 기록막(13)을 형성하며, 그 기록막(13)위에 SiNx등의 제2유전체막(14)을 형성한 후 그 제2유전체막(14)위에 상기 기록막(13)과 동일재질의 TbFeCo박막층(15-1)을 Al층(15-2)에 입혀 반사막(15)을 형성하고, 그 반사막(15)위에 디스크를 보호하기 위한 UV경화막(16)을 형성한 구조로 구성된다.3 is a structural diagram of a magneto-optical recording medium according to the present invention. As shown therein, a first dielectric film 12, such as SiNx, is formed on a transparent substrate 11, and TbFeCo is formed on the first dielectric film 12. A recording film 13 is formed of an RE-TM amorphous thin film such as a second film, and a second dielectric film 14 such as SiNx is formed on the recording film 13, and then the recording film is formed on the second dielectric film 14. A TbFeCo thin film layer 15-1 having the same material as (13) was coated on the Al layer 15-2 to form a reflective film 15, and a UV cured film 16 for protecting the disk was formed on the reflective film 15. It consists of the formed structure.

이와같이 구성한 본 발명의 작용 및 효과를 상세히 설명하면 다음과 같다.Referring to the operation and effects of the present invention configured as described above in detail.

기존에 사용되던 반사막의 재료는 Ag, Al, Au, Cr등의 고반사율을 가진 금속박막을 사용했으나 본 발명은 기록막과 동일재료인 RE-TM 비정질박막을 금속반사막위에 형성시켜 Kerr회전각을 개선시킬 수 있게 하였는데, 투명기판(11)을 통해 조사되는 빛에 의해 기록막(13)은 외부자계와 같은 방향으로 자화가 되어 기록이 되면 반사막(15)상에 있는 RE-TM막(15-1)은 정자결합에너지 에 의해 기록막(13)과 같은 방향으로 자화가 된다.As the material of the conventional reflective film, a metal thin film having high reflectivity such as Ag, Al, Au, Cr, etc. was used, but the present invention forms a RE-TM amorphous thin film, which is the same material as that of the recording film, on the metal reflective film, thereby improving the Kerr rotation angle. When the recording film 13 is magnetized in the same direction as the external magnetic field by the light irradiated through the transparent substrate 11 and is recorded, the RE-TM film 15- on the reflective film 15 is recorded. 1) is magnetized in the same direction as the recording film 13 by the sperm coupling energy.

재생시에는 기록막(13)에서 일어나는 kerr로테이션(rotation)과 기록막(13)을 투과시 생기는 패러데이로테이션 그리고 다시 반사막(15)에서 반사될 때 반사막(15)표면의 RE-TM막(15-1)에 의해 일어나는 kerr로테이션이 부가되어 전체적인 Kerr회전각(angle)의 향상을 꾀할 수 있게된다.During reproduction, the kerr rotation occurs in the recording film 13, the para-rotation generated when passing through the recording film 13, and the RE-TM film 15-1 on the surface of the reflective film 15 when reflected by the reflective film 15 again. The kerr rotation caused by) is added to improve the overall Kerr angle.

예를 들어, 투명기판(11)은 1.2㎜의 PC를 사용하고, 제1유전체막(12)은 SiNx막으로 700Å, 기록막(13)은 250Å으로 Tb23Fe69Co8로 형성하며, 제2유전체막(14)은 SiNx막으로 400Å, 반사막(15)은 표면에 기록막(13)과 같은 Tb23Fe69Co8으로 약 100Å의 막(15-1)과 500Å의 Al(15-2)을 증착하였을 때, 파장을 780㎚, 외부자계 150KOe로 Kerr회전각을 측정하면, 제4도에 도시한 바와같이 Qk가 약 2.2°정도되는 수직자기이방성막이 얻어져서 광자기 기록, 재생에 특성이 우수한 막을 얻을 수 있게된다. 이때의 반사율은 약 13%로서, 서어보를 위한 신호검출에 충분한 반사율을 얻을 수 있게된다. 여기서, 종래의 금속박막만을 반사막으로 사용하였을 때는 kerr회전각이 약 1.5°정도가 최대였다.For example, the transparent substrate 11 uses a PC of 1.2 mm, the first dielectric film 12 is formed of SiNx film of 700 kV, the recording film 13 of 250 kV of Tb 23 Fe 69 Co 8 , and The dielectric film 14 is 400 ns of SiNx film and the reflective film 15 is Tb 23 Fe 69 Co 8, which is the same as the recording film 13, on the surface of about 100 ns of film 15-1 and 500 ns of Al (15-2). ), The Kerr rotation angle was measured with a wavelength of 780 nm and an external magnetic field of 150 KOe.As shown in Fig. 4, a perpendicular magnetic anisotropic film with Q k of about 2.2 ° was obtained. A film with excellent properties can be obtained. In this case, the reflectance is about 13%, and the reflectance sufficient for signal detection for the servo can be obtained. Here, when only the conventional metal thin film was used as the reflecting film, the kerr rotation angle was about 1.5 degrees maximum.

또한, 반사막(15)상의 RE-TM막(15-1)의 두께를 약 50Å사이로 조절함으로써, kerr 회전각과 반사율을 조절할 수 있어 기록.재생에 필요한 신호레벨과 반사레벨을 유지시킬 수 있다.In addition, by adjusting the thickness of the RE-TM film 15-1 on the reflective film 15 to about 50 mW, the kerr rotation angle and the reflectance can be adjusted to maintain the signal level and the reflection level necessary for recording and reproducing.

이상에서 설명한 바와같이 본 발명은 기록막을 투과하는 빛을 반사시키는 반사막에 기록막에 동일한 재질의 비정질막을 입혀 Kerr회전각을 보상하도록 함으로써, Kerr회전각을 크게하여 기록 신호품질을 좋게 할 수 있고, 이에따라 고성능의 광자기 디스크의 제조가 가능할 수 있는 효과가 있다.As described above, in the present invention, by applying an amorphous film of the same material to the recording film to a reflecting film that reflects light passing through the recording film, the Kerr rotation angle is increased, thereby improving the recording signal quality by increasing the Kerr rotation angle. Accordingly, there is an effect that the production of high-performance magneto-optical disks can be possible.

Claims (2)

투명기판(11)에 제1유전체막(12), 기록막(13), 제2유전체막(14) 및 금속반사막(15)을 각기 소정의 두께로 순차적 형성시켜 상기 기록막(13)의 빛에 의한 자화에 따라 신호기록 및 재생을 하도록 하는 광자기기록매체에 있어서, 상기 제2유전체막(14)과 금속반사막(15) 사이에 상기 기록막(13)과 동일재질의 막(15-1)을 소정두께로 형성시켜 구성하는 것을 특징으로 하는 광자기기록매체.The first dielectric film 12, the recording film 13, the second dielectric film 14, and the metal reflective film 15 are sequentially formed on the transparent substrate 11 to have a predetermined thickness, so that the light of the recording film 13 In a magneto-optical recording medium for signal recording and reproducing according to magnetization by a film, a film 15-1 of the same material as the recording film 13 between the second dielectric film 14 and the metal reflection film 15 ) Is formed by forming a predetermined thickness. 제2항에 있어서, 금속반사막(15)상에 형성하는 기록막(13)과 동일재질의 막(15-1)은 TbFeCo로서 50Å-150Å사이의 두께로 형성시켜 구성하는 것을 특징으로 하는 광자기기록매체.3. The magneto-optical magnet as claimed in claim 2, wherein the recording film 13 formed on the metal reflective film 15 and the film 15-1 of the same material are formed by forming a thickness of 50 kV to 150 KV as TbFeCo. Record carrier.
KR1019910004463A 1991-03-21 1991-03-21 Magneto-optical recording medium KR0176748B1 (en)

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